GB8514390D0 - Electron lithography - Google Patents

Electron lithography

Info

Publication number
GB8514390D0
GB8514390D0 GB858514390A GB8514390A GB8514390D0 GB 8514390 D0 GB8514390 D0 GB 8514390D0 GB 858514390 A GB858514390 A GB 858514390A GB 8514390 A GB8514390 A GB 8514390A GB 8514390 D0 GB8514390 D0 GB 8514390D0
Authority
GB
United Kingdom
Prior art keywords
electron lithography
lithography
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GB858514390A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Turner D W
Original Assignee
Turner D W
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Turner D W filed Critical Turner D W
Priority to GB858514390A priority Critical patent/GB8514390D0/en
Publication of GB8514390D0 publication Critical patent/GB8514390D0/en
Priority to GB08613820A priority patent/GB2177847A/en
Pending legal-status Critical Current

Links

GB858514390A 1985-06-07 1985-06-07 Electron lithography Pending GB8514390D0 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB858514390A GB8514390D0 (en) 1985-06-07 1985-06-07 Electron lithography
GB08613820A GB2177847A (en) 1985-06-07 1986-06-06 Electron lithography

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB858514390A GB8514390D0 (en) 1985-06-07 1985-06-07 Electron lithography

Publications (1)

Publication Number Publication Date
GB8514390D0 true GB8514390D0 (en) 1985-07-10

Family

ID=10580332

Family Applications (2)

Application Number Title Priority Date Filing Date
GB858514390A Pending GB8514390D0 (en) 1985-06-07 1985-06-07 Electron lithography
GB08613820A Withdrawn GB2177847A (en) 1985-06-07 1986-06-06 Electron lithography

Family Applications After (1)

Application Number Title Priority Date Filing Date
GB08613820A Withdrawn GB2177847A (en) 1985-06-07 1986-06-06 Electron lithography

Country Status (1)

Country Link
GB (2) GB8514390D0 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63269445A (en) * 1987-04-28 1988-11-07 Canon Inc Electron beam head
DE3851083T2 (en) * 1987-04-28 1995-01-12 Canon Kk Multi-electron beam pattern recorder.
US4897552A (en) * 1987-04-28 1990-01-30 Canon Kabushiki Kaisha Multi-electron-beam pattern drawing apparatus
EP0334334B1 (en) * 1988-03-23 1995-06-07 Fujitsu Limited Photo-cathode image projection apparatus for patterning a semiconductor device
GB2260666B (en) * 1991-09-20 1995-12-20 Sharp Kk Time division multiplexed diode lasers
US5395738A (en) * 1992-12-29 1995-03-07 Brandes; George R. Electron lithography using a photocathode

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3679497A (en) * 1969-10-24 1972-07-25 Westinghouse Electric Corp Electron beam fabrication system and process for use thereof
US4039810A (en) * 1976-06-30 1977-08-02 International Business Machines Corporation Electron projection microfabrication system
CA1100237A (en) * 1977-03-23 1981-04-28 Roger F.W. Pease Multiple electron beam exposure system
GB8422895D0 (en) * 1984-09-11 1984-10-17 Texas Instruments Ltd Electron beam apparatus

Also Published As

Publication number Publication date
GB2177847A (en) 1987-01-28
GB8613820D0 (en) 1986-07-09

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