PL251831A1 - Method of electron lithography - Google Patents

Method of electron lithography

Info

Publication number
PL251831A1
PL251831A1 PL25183185A PL25183185A PL251831A1 PL 251831 A1 PL251831 A1 PL 251831A1 PL 25183185 A PL25183185 A PL 25183185A PL 25183185 A PL25183185 A PL 25183185A PL 251831 A1 PL251831 A1 PL 251831A1
Authority
PL
Poland
Prior art keywords
electron lithography
lithography
electron
Prior art date
Application number
PL25183185A
Other versions
PL145407B1 (en
Inventor
Wladimir I Margolin
Gieorgij J Turienko
Alfred G Gabsaliamov
Jaroslaw Kazberuk
Original Assignee
Wladimir I Margolin
Gieorgij J Turienko
Alfred G Gabsaliamov
Jaroslaw Kazberuk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wladimir I Margolin, Gieorgij J Turienko, Alfred G Gabsaliamov, Jaroslaw Kazberuk filed Critical Wladimir I Margolin
Priority to PL25183185A priority Critical patent/PL145407B1/en
Publication of PL251831A1 publication Critical patent/PL251831A1/en
Publication of PL145407B1 publication Critical patent/PL145407B1/en

Links

PL25183185A 1985-02-04 1985-02-04 Method of electron lithography PL145407B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PL25183185A PL145407B1 (en) 1985-02-04 1985-02-04 Method of electron lithography

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PL25183185A PL145407B1 (en) 1985-02-04 1985-02-04 Method of electron lithography

Publications (2)

Publication Number Publication Date
PL251831A1 true PL251831A1 (en) 1985-08-13
PL145407B1 PL145407B1 (en) 1988-09-30

Family

ID=20025302

Family Applications (1)

Application Number Title Priority Date Filing Date
PL25183185A PL145407B1 (en) 1985-02-04 1985-02-04 Method of electron lithography

Country Status (1)

Country Link
PL (1) PL145407B1 (en)

Also Published As

Publication number Publication date
PL145407B1 (en) 1988-09-30

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