GB2260666B - Time division multiplexed diode lasers - Google Patents

Time division multiplexed diode lasers

Info

Publication number
GB2260666B
GB2260666B GB9120119A GB9120119A GB2260666B GB 2260666 B GB2260666 B GB 2260666B GB 9120119 A GB9120119 A GB 9120119A GB 9120119 A GB9120119 A GB 9120119A GB 2260666 B GB2260666 B GB 2260666B
Authority
GB
United Kingdom
Prior art keywords
time division
division multiplexed
diode lasers
multiplexed diode
lasers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB9120119A
Other versions
GB2260666A (en
GB9120119D0 (en
Inventor
Paul May
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to GB9120119A priority Critical patent/GB2260666B/en
Publication of GB9120119D0 publication Critical patent/GB9120119D0/en
Priority to JP4250279A priority patent/JP2918010B2/en
Publication of GB2260666A publication Critical patent/GB2260666A/en
Application granted granted Critical
Publication of GB2260666B publication Critical patent/GB2260666B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
    • G03F7/70391—Addressable array sources specially adapted to produce patterns, e.g. addressable LED arrays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/34—Photo-emissive cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04J—MULTIPLEX COMMUNICATION
    • H04J14/00—Optical multiplex systems
    • H04J14/08—Time-division multiplex systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/34—Photoemissive electrodes
    • H01J2201/342—Cathodes
    • H01J2201/3421—Composition of the emitting surface
    • H01J2201/3426—Alkaline metal compounds, e.g. Na-K-Sb
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/04—Means for controlling the discharge
    • H01J2237/047—Changing particle velocity
    • H01J2237/0473—Changing particle velocity accelerating
    • H01J2237/04735—Changing particle velocity accelerating with electrostatic means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/3175—Lithography
    • H01J2237/31777—Lithography by projection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
    • H01S5/065—Mode locking; Mode suppression; Mode selection ; Self pulsating

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Signal Processing (AREA)
  • Semiconductor Lasers (AREA)
  • Electron Beam Exposure (AREA)
GB9120119A 1991-09-20 1991-09-20 Time division multiplexed diode lasers Expired - Fee Related GB2260666B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB9120119A GB2260666B (en) 1991-09-20 1991-09-20 Time division multiplexed diode lasers
JP4250279A JP2918010B2 (en) 1991-09-20 1992-09-18 Laser array and diode laser application equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB9120119A GB2260666B (en) 1991-09-20 1991-09-20 Time division multiplexed diode lasers

Publications (3)

Publication Number Publication Date
GB9120119D0 GB9120119D0 (en) 1991-11-06
GB2260666A GB2260666A (en) 1993-04-21
GB2260666B true GB2260666B (en) 1995-12-20

Family

ID=10701742

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9120119A Expired - Fee Related GB2260666B (en) 1991-09-20 1991-09-20 Time division multiplexed diode lasers

Country Status (2)

Country Link
JP (1) JP2918010B2 (en)
GB (1) GB2260666B (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0881542A1 (en) * 1997-05-26 1998-12-02 Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno Lithography system
WO1999048129A1 (en) * 1998-03-20 1999-09-23 Etec Systems, Inc. Tandem optical scanner/stepper and photoemission converter for electron beam lithography
US6215128B1 (en) 1999-03-18 2001-04-10 Etec Systems, Inc. Compact photoemission source, field and objective lens arrangement for high throughput electron beam lithography
US6476401B1 (en) 1999-09-16 2002-11-05 Applied Materials, Inc. Moving photocathode with continuous regeneration for image conversion in electron beam lithography
EP1617290A1 (en) * 2004-07-13 2006-01-18 International Business Machines Corporation Apparatus and method for maskless lithography
US10854424B2 (en) * 2019-02-28 2020-12-01 Kabushiki Kaisha Toshiba Multi-electron beam device

Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB517483A (en) * 1938-07-29 1940-01-31 Baird Television Ltd Improvements in or relating to television and like receivers
GB738570A (en) * 1950-09-27 1955-10-19 Gustav Fries Improvements in or relating to apparatus for rendering visible magnetic and electric field patterns
GB760950A (en) * 1953-11-26 1956-11-07 Emi Ltd Improvements relating to the generation of electrical signals employing a pick-up tube having a target of the charge storage type
GB1163679A (en) * 1967-06-15 1969-09-10 Ibm Multiplex Communication System.
GB1180878A (en) * 1967-10-04 1970-02-11 United Aircraft Corp Laser-Acoustic Signal Processor.
GB1199196A (en) * 1967-08-17 1970-07-15 Mini Of Technology London Improvements in or relating to Electron Sources for Cathode-Ray-Tubes and the like
GB2013969A (en) * 1977-12-27 1979-08-15 Hausfeld A D Display device
GB2025608A (en) * 1978-06-02 1980-01-23 Asea Ab Fibre opticalmeasuring devie
GB2075668A (en) * 1977-06-28 1981-11-18 Univ Duke Non-invasive metabolism measurement
GB2111299A (en) * 1981-11-30 1983-06-29 Thermo Electron Corp High current density photoelectron generators
EP0157457A2 (en) * 1984-04-02 1985-10-09 Philips Electronics Uk Limited Electron image projector
GB2177847A (en) * 1985-06-07 1987-01-28 David Warren Turner Electron lithography
US4718063A (en) * 1985-06-20 1988-01-05 The United States Of America As Represented By The Secretary Of The Navy Optoelectronic integrated circuit multiplex
EP0317653A1 (en) * 1987-11-23 1989-05-31 Quantum Logic Corporation Apparatus for remote measurement of temperatures
US4868809A (en) * 1986-06-02 1989-09-19 Northern Telecom Limited Optical communication system

Patent Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB517483A (en) * 1938-07-29 1940-01-31 Baird Television Ltd Improvements in or relating to television and like receivers
GB738570A (en) * 1950-09-27 1955-10-19 Gustav Fries Improvements in or relating to apparatus for rendering visible magnetic and electric field patterns
GB760950A (en) * 1953-11-26 1956-11-07 Emi Ltd Improvements relating to the generation of electrical signals employing a pick-up tube having a target of the charge storage type
GB1163679A (en) * 1967-06-15 1969-09-10 Ibm Multiplex Communication System.
GB1199196A (en) * 1967-08-17 1970-07-15 Mini Of Technology London Improvements in or relating to Electron Sources for Cathode-Ray-Tubes and the like
GB1180878A (en) * 1967-10-04 1970-02-11 United Aircraft Corp Laser-Acoustic Signal Processor.
GB2075668A (en) * 1977-06-28 1981-11-18 Univ Duke Non-invasive metabolism measurement
GB2013969A (en) * 1977-12-27 1979-08-15 Hausfeld A D Display device
GB2025608A (en) * 1978-06-02 1980-01-23 Asea Ab Fibre opticalmeasuring devie
GB2111299A (en) * 1981-11-30 1983-06-29 Thermo Electron Corp High current density photoelectron generators
EP0157457A2 (en) * 1984-04-02 1985-10-09 Philips Electronics Uk Limited Electron image projector
GB2177847A (en) * 1985-06-07 1987-01-28 David Warren Turner Electron lithography
US4718063A (en) * 1985-06-20 1988-01-05 The United States Of America As Represented By The Secretary Of The Navy Optoelectronic integrated circuit multiplex
US4868809A (en) * 1986-06-02 1989-09-19 Northern Telecom Limited Optical communication system
EP0317653A1 (en) * 1987-11-23 1989-05-31 Quantum Logic Corporation Apparatus for remote measurement of temperatures

Also Published As

Publication number Publication date
JPH05206584A (en) 1993-08-13
JP2918010B2 (en) 1999-07-12
GB2260666A (en) 1993-04-21
GB9120119D0 (en) 1991-11-06

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20080920