ES2108387T3 - Recubrimiento en vacio de una banda continua. - Google Patents
Recubrimiento en vacio de una banda continua.Info
- Publication number
- ES2108387T3 ES2108387T3 ES94308157T ES94308157T ES2108387T3 ES 2108387 T3 ES2108387 T3 ES 2108387T3 ES 94308157 T ES94308157 T ES 94308157T ES 94308157 T ES94308157 T ES 94308157T ES 2108387 T3 ES2108387 T3 ES 2108387T3
- Authority
- ES
- Spain
- Prior art keywords
- substrate
- coil
- holes
- outlets
- vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/20—Metallic material, boron or silicon on organic substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
EN UN APARATO PARA UN REVESTIMIENTO DE BOBINA EN VACIO, UNOS ELEMENTOS DE EVAPORACION TIENEN VARIOS ORIFICIOS DE SALIDA SEPARADOS (29) A TRAVES DE LOS CUALES, SE TRANSPORTA EL VAPOR A UNA ZONA DE DEPOSICION (30) EN LA SUPERFICIE DE UN TAMBOR GIRATORIO ENDURECIDO (20,31) EN UNA CAMARA DE VACIO (12) Y SOBRE EL CUAL, SE AVANZA LA BOBINA DE SUSTRATO MEDIANTE UN SISTEMA DE TRANSPORTE DE BOBINAS. EL DISPOSITIVO DE ORIFICIOS DE SALIDA COMPRENDE DE FORMA VENTAJOSA, VARIAS RANURAS LINEALES DISPUESTAS TRANSVERSALMENTE A LA TRAYECTORIA DEL SUSTRATO DE BOBINA PARA DISTRIBUIR EL VAPOR EN POSICIONES COLOCADAS SECUENCIALMENTE EN LA DIRECCION DE AVANCE DEL SUSTRATO DE BOBINA; LAS SALIDAS DE LOS ORIFICIOS ESTAN COLOCADAS ALREDEDOR DE UNA SUPERFICIE ARQUEADA PERO SEPARADA DE LA SUPERFICIE CURVA DEL TAMBOR GIRATORIO. VARIANDO EL PERFIL DEL ORIFICIO, POR EJEMPLO LA ANCHURA Y/O SEPARACION DE LAS SALIDAS DE LOS ORIFICIOS LA APLICACION DEL REVESTIMIENTO PUEDE SER CONTROLADA FUERTEMENTE PARA OBTENER UNA UNIFORMIDAD MEJORADA DEL MISMO, UNA MAYOR EFICIENCIA EN LA RECOGIDA DE MATERIAL Y CONTROL DE LA CARGA CALORIFICA DEL SUSTRATO. EL APARATO ES PARTICULARMENTE UTIL PARA LA APLICACION DE REVESTIMIENTOS GRUESOS DE MATERIAL TAL COMO METAL SOBRE PAPEL O CAPAS PLASTICAS.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB939323034A GB9323034D0 (en) | 1993-11-09 | 1993-11-09 | Vacuum web coating |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2108387T3 true ES2108387T3 (es) | 1997-12-16 |
Family
ID=10744843
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES94308157T Expired - Lifetime ES2108387T3 (es) | 1993-11-09 | 1994-11-04 | Recubrimiento en vacio de una banda continua. |
Country Status (7)
Country | Link |
---|---|
EP (1) | EP0652302B1 (es) |
JP (1) | JPH07286272A (es) |
KR (1) | KR950014355A (es) |
CA (1) | CA2135424A1 (es) |
DE (1) | DE69406084T2 (es) |
ES (1) | ES2108387T3 (es) |
GB (2) | GB9323034D0 (es) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5803976A (en) * | 1993-11-09 | 1998-09-08 | Imperial Chemical Industries Plc | Vacuum web coating |
DE19527604A1 (de) * | 1995-07-28 | 1997-01-30 | Leybold Ag | Verfahren und Vorrichtung zur Herstellung von metallfreien Streifen bei der Metallbedampfung |
DE19537779A1 (de) * | 1995-10-11 | 1997-04-17 | Leybold Ag | Beschichtungsanlage für Folien |
DE19537781A1 (de) * | 1995-10-11 | 1997-04-17 | Leybold Ag | Beschichtungsanlage für Folien |
US6202591B1 (en) | 1998-11-12 | 2001-03-20 | Flex Products, Inc. | Linear aperture deposition apparatus and coating process |
PT1004369E (pt) * | 1998-11-26 | 2004-10-29 | Cockerill Rech & Dev | Eclusa de estanquecidade para camara de vacuo |
DE19906676A1 (de) * | 1999-02-18 | 2000-08-24 | Leybold Systems Gmbh | Bedampfungsvorrichtung |
KR100389377B1 (ko) * | 2000-07-20 | 2003-06-25 | 한국전력공사 | 고전압 분압 및 전류 공급용 전왜 세라믹스 조성물 및 제조방법 |
TWI264473B (en) * | 2001-10-26 | 2006-10-21 | Matsushita Electric Works Ltd | Vacuum deposition device and vacuum deposition method |
KR100729097B1 (ko) * | 2005-12-28 | 2007-06-14 | 삼성에스디아이 주식회사 | 증발원 및 이를 이용한 박막 증착방법 |
JP5807216B2 (ja) | 2010-06-16 | 2015-11-10 | パナソニックIpマネジメント株式会社 | 薄膜の製造方法 |
WO2011158453A1 (ja) | 2010-06-16 | 2011-12-22 | パナソニック株式会社 | 薄膜の製造方法 |
KR101730498B1 (ko) * | 2010-10-22 | 2017-04-27 | 삼성디스플레이 주식회사 | 유기층 증착 장치 및 이를 이용한 유기 발광 디스플레이 장치의 제조 방법 |
JP5883230B2 (ja) * | 2011-03-14 | 2016-03-09 | キヤノントッキ株式会社 | 蒸着装置並びに蒸着方法 |
JP2012201895A (ja) * | 2011-03-23 | 2012-10-22 | Canon Tokki Corp | 蒸着装置並びに蒸着方法 |
CN103649364A (zh) * | 2011-07-07 | 2014-03-19 | 松下电器产业株式会社 | 真空蒸镀装置 |
CN103898450B (zh) * | 2012-12-25 | 2017-06-13 | 北京创昱科技有限公司 | 一种铜铟镓硒共蒸发线性源装置及其使用方法 |
JP6110664B2 (ja) * | 2013-01-07 | 2017-04-05 | 三菱重工業株式会社 | 蒸着用基板保持トレイを備える真空蒸着装置 |
CN112553579B (zh) * | 2019-09-26 | 2023-05-09 | 宝山钢铁股份有限公司 | 一种具有过滤及均匀化喷嘴的真空镀膜装置 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB304192A (en) * | 1928-01-16 | 1930-06-10 | Siemens Ag | Process for producing thin insulating layers on wires |
US3081201A (en) * | 1957-05-15 | 1963-03-12 | Gen Electric | Method of forming an electric capacitor |
GB962868A (en) * | 1961-09-29 | 1964-07-08 | Philips Electrical Ind Ltd | Improvements in or relating to coating objects with light-absorbing transparent or translucent colour layers |
US3748090A (en) * | 1971-12-20 | 1973-07-24 | Xerox Corp | Evaporation crucible |
DE2436431B2 (de) * | 1974-07-29 | 1978-07-27 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Verdampfer und Verfahren zum Herstellen von Aufdampfschichten, insbesondere aus Selen |
JPS5210869A (en) * | 1975-07-15 | 1977-01-27 | Toshinori Takagi | Thin film forming method |
JPS63297549A (ja) * | 1987-05-29 | 1988-12-05 | Komatsu Ltd | 真空蒸着装置 |
JPH02118072A (ja) * | 1988-10-28 | 1990-05-02 | Mitsubishi Heavy Ind Ltd | 真空蒸着装置 |
DE4104415C1 (es) * | 1991-02-14 | 1992-06-04 | 4P Verpackungen Ronsberg Gmbh, 8951 Ronsberg, De |
-
1993
- 1993-11-09 GB GB939323034A patent/GB9323034D0/en active Pending
-
1994
- 1994-11-02 GB GB9422076A patent/GB2283760A/en not_active Withdrawn
- 1994-11-04 DE DE69406084T patent/DE69406084T2/de not_active Expired - Fee Related
- 1994-11-04 ES ES94308157T patent/ES2108387T3/es not_active Expired - Lifetime
- 1994-11-04 EP EP94308157A patent/EP0652302B1/en not_active Expired - Lifetime
- 1994-11-09 JP JP6274804A patent/JPH07286272A/ja active Pending
- 1994-11-09 CA CA002135424A patent/CA2135424A1/en not_active Abandoned
- 1994-11-09 KR KR1019940029248A patent/KR950014355A/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JPH07286272A (ja) | 1995-10-31 |
EP0652302A1 (en) | 1995-05-10 |
GB9323034D0 (en) | 1994-01-05 |
DE69406084T2 (de) | 1998-03-12 |
CA2135424A1 (en) | 1995-05-10 |
KR950014355A (ko) | 1995-06-16 |
EP0652302B1 (en) | 1997-10-08 |
GB9422076D0 (en) | 1994-12-21 |
DE69406084D1 (de) | 1997-11-13 |
GB2283760A (en) | 1995-05-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FG2A | Definitive protection |
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