ES2057113T3 - Procedimiento para fabricar una capa sobre un substrato. - Google Patents
Procedimiento para fabricar una capa sobre un substrato.Info
- Publication number
- ES2057113T3 ES2057113T3 ES89303822T ES89303822T ES2057113T3 ES 2057113 T3 ES2057113 T3 ES 2057113T3 ES 89303822 T ES89303822 T ES 89303822T ES 89303822 T ES89303822 T ES 89303822T ES 2057113 T3 ES2057113 T3 ES 2057113T3
- Authority
- ES
- Spain
- Prior art keywords
- oxidation
- stage
- temperature
- carried out
- oxide layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 title abstract 4
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 239000000758 substrate Substances 0.000 title abstract 2
- 230000003647 oxidation Effects 0.000 abstract 7
- 238000007254 oxidation reaction Methods 0.000 abstract 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 1
- 239000003795 chemical substances by application Substances 0.000 abstract 1
- 230000007547 defect Effects 0.000 abstract 1
- 229910052757 nitrogen Inorganic materials 0.000 abstract 1
- 230000001590 oxidative effect Effects 0.000 abstract 1
- 239000001301 oxygen Substances 0.000 abstract 1
- 229910052760 oxygen Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28158—Making the insulator
- H01L21/28167—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation
- H01L21/28185—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation with a treatment, e.g. annealing, after the formation of the gate insulator and before the formation of the definitive gate conductor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/02227—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process
- H01L21/0223—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate
- H01L21/02233—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of the semiconductor substrate or a semiconductor layer
- H01L21/02236—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of the semiconductor substrate or a semiconductor layer group IV semiconductor
- H01L21/02238—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of the semiconductor substrate or a semiconductor layer group IV semiconductor silicon in uncombined form, i.e. pure silicon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/02227—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process
- H01L21/02255—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by thermal treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28158—Making the insulator
- H01L21/28167—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation
- H01L21/28211—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation in a gaseous ambient using an oxygen or a water vapour, e.g. RTO, possibly through a layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/314—Inorganic layers
- H01L21/316—Inorganic layers composed of oxides or glassy oxides or oxide based glass
- H01L21/3165—Inorganic layers composed of oxides or glassy oxides or oxide based glass formed by oxidation
- H01L21/31654—Inorganic layers composed of oxides or glassy oxides or oxide based glass formed by oxidation of semiconductor materials, e.g. the body itself
- H01L21/31658—Inorganic layers composed of oxides or glassy oxides or oxide based glass formed by oxidation of semiconductor materials, e.g. the body itself by thermal oxidation, e.g. of SiGe
- H01L21/31662—Inorganic layers composed of oxides or glassy oxides or oxide based glass formed by oxidation of semiconductor materials, e.g. the body itself by thermal oxidation, e.g. of SiGe of silicon in uncombined form
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/401—Multistep manufacturing processes
- H01L29/4011—Multistep manufacturing processes for data storage electrodes
- H01L29/40114—Multistep manufacturing processes for data storage electrodes the electrodes comprising a conductor-insulator-conductor-insulator-semiconductor structure
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Formation Of Insulating Films (AREA)
- Non-Volatile Memory (AREA)
- Semiconductor Memories (AREA)
- Electrodes Of Semiconductors (AREA)
- Read Only Memory (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
Abstract
UN METODO PARA FABRICAR UNA CAPA DE OXIDO TUNEL DE GRAN CALIDAD INCLUYE UN PROCESO DE OXIDACION EN DOS ETAPAS. LA PRIMERA ETAPA DE OXIDACION CONSISTE EN OXIDAR UN SUBSTRATO EN UNA ATMOSFERA QUE CONTIENE OXIGENO Y NITROGENO A UNA TEMPERATURA DE 900 (GRADOS) C APROXIMADAMENTE, Y ASI ES UNA OXIDACION SIN HCL. LA SEGUNDA ETAPA DE OXIDACION SE LLEVA A CABO EN UNA ATMOSFERA QUE CONTIENE HCL Y ARGON A UNA TEMPERATURA DE 1050 (GRADOS) C APROXIMADAMENTE. LA PRIMERA ETAPA DE OXIDACION SE LLEVA A CABO A UNA TEMPERATURA EN EL INTERVALO DE TEMPERATURAS DEL FLUJO VISCOSO DEL OXIDO PARA EVITAR CUALQUIER DEFECTO FISICO DE LA FORMA DE LA CAPA DE OXIDO. LA SEGUNDA ETAPA DE OXIDACION SE LLEVA A CABO A UNA TEMPERATURA SUFICIENTE PARA PASIVAR CUALQUIER ION MOVIL EN LA CAPA DE OXIDO EN UNA ATMOSFERA QUE CONTIENE UN AGENTE ENGENDRADOR, POR EJEMPLO HCL. MEDIANTE ESTE PROCESO DE OXIDACION EN DOS ETAPAS SE FABRICA UNA CAPA DE OXIDO TUNEL QUE ES DE GRAN CALIDAD Y NO SE DETERIORA DURANTE LAS ETAPAS DE PROCESADO SUBSIGUIENTES LLEVADAS A CABO A TEMPERATURAS DE HASTA 1100 (GRADOS) C Y SUPERIORES.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/187,738 US4894353A (en) | 1988-04-29 | 1988-04-29 | Method of fabricating passivated tunnel oxide |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2057113T3 true ES2057113T3 (es) | 1994-10-16 |
Family
ID=22690255
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES89303822T Expired - Lifetime ES2057113T3 (es) | 1988-04-29 | 1989-04-18 | Procedimiento para fabricar una capa sobre un substrato. |
Country Status (6)
Country | Link |
---|---|
US (1) | US4894353A (es) |
EP (1) | EP0339852B1 (es) |
JP (1) | JP2911476B2 (es) |
AT (1) | ATE109307T1 (es) |
DE (1) | DE68917006T2 (es) |
ES (1) | ES2057113T3 (es) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0375232B1 (en) * | 1988-12-21 | 1996-03-06 | AT&T Corp. | Growth-modified thermal oxidation process for thin oxides |
JP2504558B2 (ja) * | 1989-03-31 | 1996-06-05 | 日産自動車株式会社 | 熱酸化膜の形成方法 |
US6373093B2 (en) | 1989-04-28 | 2002-04-16 | Nippondenso Corporation | Semiconductor memory device and method of manufacturing the same |
US5017979A (en) * | 1989-04-28 | 1991-05-21 | Nippondenso Co., Ltd. | EEPROM semiconductor memory device |
US5057463A (en) * | 1990-02-28 | 1991-10-15 | Sgs-Thomson Microelectronics, Inc. | Thin oxide structure and method |
US6146135A (en) * | 1991-08-19 | 2000-11-14 | Tadahiro Ohmi | Oxide film forming method |
US5316981A (en) * | 1992-10-09 | 1994-05-31 | Advanced Micro Devices, Inc. | Method for achieving a high quality thin oxide using a sacrificial oxide anneal |
US5296411A (en) * | 1993-04-28 | 1994-03-22 | Advanced Micro Devices, Inc. | Method for achieving an ultra-reliable thin oxide using a nitrogen anneal |
US5498577A (en) * | 1994-07-26 | 1996-03-12 | Advanced Micro Devices, Inc. | Method for fabricating thin oxides for a semiconductor technology |
JP4001960B2 (ja) * | 1995-11-03 | 2007-10-31 | フリースケール セミコンダクター インコーポレイテッド | 窒化酸化物誘電体層を有する半導体素子の製造方法 |
US5753311A (en) * | 1996-10-01 | 1998-05-19 | National Science Council | Method for forming oxide layer |
US6204124B1 (en) * | 1998-03-23 | 2001-03-20 | Texas Instruments - Acer Incorporated | Method for forming high density nonvolatile memories with high capacitive-coupling ratio |
US6235651B1 (en) | 1999-09-14 | 2001-05-22 | Infineon Technologies North America | Process for improving the thickness uniformity of a thin layer in semiconductor wafer fabrication |
US7595967B1 (en) | 2004-09-07 | 2009-09-29 | Western Digital (Fremont), Llp | Method for fabricating a spacer layer for a magnetoresistive element |
US20080299780A1 (en) * | 2007-06-01 | 2008-12-04 | Uv Tech Systems, Inc. | Method and apparatus for laser oxidation and reduction |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4911069A (es) * | 1972-05-26 | 1974-01-31 | ||
US4139658A (en) * | 1976-06-23 | 1979-02-13 | Rca Corp. | Process for manufacturing a radiation hardened oxide |
JPS54125966A (en) * | 1978-03-24 | 1979-09-29 | Hitachi Ltd | Defect elimination method for semiconductor wafer |
JPS5662328A (en) * | 1979-10-26 | 1981-05-28 | Agency Of Ind Science & Technol | Manufacturing of insulation membrane and insulation membrane-semiconductor interface |
JPS56131935A (en) * | 1980-03-19 | 1981-10-15 | Sony Corp | Heat treatment of semiconductor substrate |
JPS56161646A (en) * | 1980-05-19 | 1981-12-12 | Fujitsu Ltd | Manufacture of semiconductor device |
DE3206376A1 (de) * | 1982-02-22 | 1983-09-01 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zur herstellung von siliziumoxidschichten |
US4551910A (en) * | 1984-11-27 | 1985-11-12 | Intel Corporation | MOS Isolation processing |
US4784975A (en) * | 1986-10-23 | 1988-11-15 | International Business Machines Corporation | Post-oxidation anneal of silicon dioxide |
US4775642A (en) * | 1987-02-02 | 1988-10-04 | Motorola, Inc. | Modified source/drain implants in a double-poly non-volatile memory process |
-
1988
- 1988-04-29 US US07/187,738 patent/US4894353A/en not_active Expired - Lifetime
-
1989
- 1989-04-18 DE DE68917006T patent/DE68917006T2/de not_active Expired - Fee Related
- 1989-04-18 ES ES89303822T patent/ES2057113T3/es not_active Expired - Lifetime
- 1989-04-18 AT AT89303822T patent/ATE109307T1/de not_active IP Right Cessation
- 1989-04-18 EP EP89303822A patent/EP0339852B1/en not_active Expired - Lifetime
- 1989-04-20 JP JP10148289A patent/JP2911476B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE68917006D1 (de) | 1994-09-01 |
EP0339852A2 (en) | 1989-11-02 |
JPH0212971A (ja) | 1990-01-17 |
EP0339852B1 (en) | 1994-07-27 |
JP2911476B2 (ja) | 1999-06-23 |
EP0339852A3 (en) | 1991-01-09 |
DE68917006T2 (de) | 1995-01-19 |
US4894353A (en) | 1990-01-16 |
ATE109307T1 (de) | 1994-08-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FG2A | Definitive protection |
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