ES2050338T3 - Procedimiento para la produccion de capas de variedades duras de carbono y dispositivo para llevar a cabo el procedimiento. - Google Patents
Procedimiento para la produccion de capas de variedades duras de carbono y dispositivo para llevar a cabo el procedimiento.Info
- Publication number
- ES2050338T3 ES2050338T3 ES90122260T ES90122260T ES2050338T3 ES 2050338 T3 ES2050338 T3 ES 2050338T3 ES 90122260 T ES90122260 T ES 90122260T ES 90122260 T ES90122260 T ES 90122260T ES 2050338 T3 ES2050338 T3 ES 2050338T3
- Authority
- ES
- Spain
- Prior art keywords
- procedure
- production
- layers
- carry out
- hard carbon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0605—Carbon
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Carbon And Carbon Compounds (AREA)
- Physical Vapour Deposition (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PROCEDIMIENTO PARA LA GENERACION DE CAPAS DE MODIFICACIONES DE CARBONO DURO Y DISPOSITIVO PARA LA REALIZACION DEL PROCEDIMIENTO. LA INVENCION SE REFIERE A UN PROCEDIMIENTO Y A UN DISPOSITIVO PARA LA GENERACION ESPECIALMENTE TAMBIEN DE CAPAS DE DIAMANTE EMPLEANDO UN MEDIO QUE CONTIENE CARBONO POR MEDIO DE UN ARCO DE LUZ DE CORRIENTE CONTINUA, ENCENDIDO BAJO VACIO ENTRE DOS ELECTRODOS, AL QUE SE CONDUCE HIDROGENO. PARA LA MEJORA DE LA RENTABILIDAD DE UN PROCEDIMIENTO DE ESTE TIPO O BIEN DE UN DISPOSITIVO DE ESTE TIPO SE PRESENTA LA PROPUESTA DE INTRODUCIR EL HIDROGENO DIRECTAMENTE A TRAVES DE AL MENOS UNO DE LOS DOS ELECTRODOS (7 U 8) Y HACER ALIMENTAR EL ARCO DE LUZ, A DISTANCIA ENTRE ELECTRODOS REGULABLE POSTERIORMENTE, POR EL ANODO (7) QUE ACTUA COMO FUENTE DE CARBONO.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE3941202A DE3941202A1 (de) | 1989-12-14 | 1989-12-14 | Verfahren zur erzeugung von schichten aus harten kohlenstoffmodifikationen und vorrichtung zur durchfuehrung des verfahrens |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2050338T3 true ES2050338T3 (es) | 1994-05-16 |
Family
ID=6395403
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES90122260T Expired - Lifetime ES2050338T3 (es) | 1989-12-14 | 1990-11-22 | Procedimiento para la produccion de capas de variedades duras de carbono y dispositivo para llevar a cabo el procedimiento. |
Country Status (7)
Country | Link |
---|---|
US (1) | US5104509A (es) |
EP (1) | EP0432528B1 (es) |
JP (1) | JPH03191052A (es) |
AT (1) | ATE103344T1 (es) |
CA (1) | CA2030847A1 (es) |
DE (2) | DE3941202A1 (es) |
ES (1) | ES2050338T3 (es) |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA2065581C (en) | 1991-04-22 | 2002-03-12 | Andal Corp. | Plasma enhancement apparatus and method for physical vapor deposition |
US5580429A (en) * | 1992-08-25 | 1996-12-03 | Northeastern University | Method for the deposition and modification of thin films using a combination of vacuum arcs and plasma immersion ion implantation |
DE4300491A1 (de) * | 1993-01-13 | 1994-07-14 | Carl Hofmann Ringlaeufer Und R | Ring für Spinnmaschinen und Verfahren zur Herstel- lung einer Oberflächenschicht |
ES2060539B1 (es) * | 1993-01-22 | 1995-06-16 | Tekniker | Proceso para la obtencion de recubrimientos de carbono y carbono-metal mediante deposicion fisica en fase vapor por arco metalico con catodo de grafito. |
AU2239995A (en) * | 1994-04-06 | 1995-10-30 | Regents Of The University Of California, The | Process to produce diamond films |
US5464667A (en) * | 1994-08-16 | 1995-11-07 | Minnesota Mining And Manufacturing Company | Jet plasma process and apparatus |
US5551959A (en) * | 1994-08-24 | 1996-09-03 | Minnesota Mining And Manufacturing Company | Abrasive article having a diamond-like coating layer and method for making same |
US5830540A (en) * | 1994-09-15 | 1998-11-03 | Eltron Research, Inc. | Method and apparatus for reactive plasma surfacing |
FR2726579A1 (fr) * | 1994-11-07 | 1996-05-10 | Neuville Stephane | Procede de depot d'un revetement protecteur de type pseudo carbonne diamant amorphe |
FR2726834B1 (fr) * | 1994-11-07 | 1997-07-18 | Neuville Stephane | Procede de depot sur au moins une piece d'un revetement protecteur de grande durete |
DE4440521C1 (de) | 1994-11-12 | 1995-11-02 | Rowo Coating Ges Fuer Beschich | Vorrichtung zum Beschichten von Substraten mit einem Materialdampf im Unterdruck oder Vakuum |
DE19513614C1 (de) * | 1995-04-10 | 1996-10-02 | Fraunhofer Ges Forschung | Verfahren zur Abscheidung von Kohlenstoffschichten, Kohlenstoffschichten auf Substraten und deren Verwendung |
DE19651615C1 (de) * | 1996-12-12 | 1997-07-10 | Fraunhofer Ges Forschung | Verfahren zum Aufbringen von Kohlenstoffschichten durch reaktives Magnetron-Sputtern |
ATE350510T1 (de) * | 1997-06-13 | 2007-01-15 | Oerlikon Trading Ag | Verfahren und anlage zur herstellung beschichteter werkstücke |
US6203898B1 (en) | 1997-08-29 | 2001-03-20 | 3M Innovatave Properties Company | Article comprising a substrate having a silicone coating |
DE19905571C1 (de) * | 1999-02-11 | 2000-11-16 | Bosch Gmbh Robert | Verfahren zur Erzeugung definiert konischer Löcher mittels eines Laserstrahls |
WO2002006554A1 (en) * | 2000-07-17 | 2002-01-24 | Commonwealth Scientific And Industrial Research Organisation | Deposition of carbon and carbon-based materials |
US20050034668A1 (en) * | 2001-03-22 | 2005-02-17 | Garvey James F. | Multi-component substances and apparatus for preparation thereof |
JP4756145B2 (ja) * | 2006-03-17 | 2011-08-24 | 国立大学法人九州大学 | ダイヤモンド膜製造方法 |
KR100924287B1 (ko) * | 2007-05-10 | 2009-10-30 | 한국과학기술연구원 | 양광주가 존재하지 않는 직류 전원 플라스마 증착 장치와,양광주를 배제한 상태에서의 물질 증착 방법 및 이에 의해제조된 다이아몬드 박막 |
KR101499272B1 (ko) * | 2007-05-25 | 2015-03-05 | 오를리콘 트레이딩 아크티엔게젤샤프트, 트뤼프바흐 | 진공 처리 장치 및 진공 처리 방법 |
US9970098B2 (en) * | 2013-12-16 | 2018-05-15 | United Technologies Corporation | Movable evaporation source |
DE102019135749B4 (de) * | 2019-12-23 | 2024-02-08 | Ri Research Instruments Gmbh | Lichtbogen-Beschichtungsanordnung und Verfahren |
CN113818004A (zh) * | 2021-09-22 | 2021-12-21 | 吉林大学 | 一种用于金刚石的生长装置及方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE906807C (de) * | 1949-10-01 | 1954-03-18 | Guenther Dobke Dipl Ing | Verfahren zur Herstellung von Kohlekoerpern und Kohleschichten |
US3931542A (en) * | 1973-06-28 | 1976-01-06 | Sheer-Korman Associates, Inc. | Method and apparatus for energizing materials in an electric arc |
IL71530A (en) * | 1984-04-12 | 1987-09-16 | Univ Ramot | Method and apparatus for surface-treating workpieces |
DE3413891A1 (de) * | 1984-04-12 | 1985-10-17 | Horst Dipl.-Phys. Dr. 4270 Dorsten Ehrich | Verfahren und vorrichtung zum verdampfen von material in vakuum |
JPH062944B2 (ja) * | 1985-06-14 | 1994-01-12 | ティーディーケイ株式会社 | ダイヤモンド様カ−ボン成膜装置 |
US4851254A (en) * | 1987-01-13 | 1989-07-25 | Nippon Soken, Inc. | Method and device for forming diamond film |
JPS63210099A (ja) * | 1987-02-26 | 1988-08-31 | Nissin Electric Co Ltd | ダイヤモンド膜の作製方法 |
DE3884653T2 (de) * | 1987-04-03 | 1994-02-03 | Fujitsu Ltd | Verfahren und Vorrichtung zur Gasphasenabscheidung von Diamant. |
DE3712205A1 (de) * | 1987-04-10 | 1988-10-20 | Detlev Dipl Chem Dr Repenning | Verfahren zur herstellung von schichten mit hochharten diamantaehnlichen und/oder reibungsarmen eigenschaften |
JPS63282199A (ja) * | 1987-05-11 | 1988-11-18 | Matsushita Electric Ind Co Ltd | ダイヤモンド薄膜の形成方法 |
-
1989
- 1989-12-14 DE DE3941202A patent/DE3941202A1/de active Granted
-
1990
- 1990-11-22 EP EP90122260A patent/EP0432528B1/de not_active Expired - Lifetime
- 1990-11-22 JP JP2315674A patent/JPH03191052A/ja active Pending
- 1990-11-22 DE DE90122260T patent/DE59005099D1/de not_active Expired - Fee Related
- 1990-11-22 ES ES90122260T patent/ES2050338T3/es not_active Expired - Lifetime
- 1990-11-22 AT AT90122260T patent/ATE103344T1/de not_active IP Right Cessation
- 1990-11-26 CA CA002030847A patent/CA2030847A1/en not_active Abandoned
- 1990-11-29 US US07/619,408 patent/US5104509A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CA2030847A1 (en) | 1991-06-15 |
DE3941202C2 (es) | 1991-08-14 |
DE3941202A1 (de) | 1990-06-07 |
ATE103344T1 (de) | 1994-04-15 |
EP0432528B1 (de) | 1994-03-23 |
EP0432528A3 (en) | 1991-07-24 |
US5104509A (en) | 1992-04-14 |
JPH03191052A (ja) | 1991-08-21 |
DE59005099D1 (de) | 1994-04-28 |
EP0432528A2 (de) | 1991-06-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FG2A | Definitive protection |
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