JPS5388676A - Film forming apparatus - Google Patents

Film forming apparatus

Info

Publication number
JPS5388676A
JPS5388676A JP375777A JP375777A JPS5388676A JP S5388676 A JPS5388676 A JP S5388676A JP 375777 A JP375777 A JP 375777A JP 375777 A JP375777 A JP 375777A JP S5388676 A JPS5388676 A JP S5388676A
Authority
JP
Japan
Prior art keywords
forming apparatus
film forming
film
spactter
arranging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP375777A
Other languages
Japanese (ja)
Inventor
Juichi Abe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anelva Corp filed Critical Anelva Corp
Priority to JP375777A priority Critical patent/JPS5388676A/en
Publication of JPS5388676A publication Critical patent/JPS5388676A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/046—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering

Abstract

PURPOSE:To obtain an uniform spactter film or glow discharge polymer film, by arranging one or more than one gas blowing openings at the tip or the side of a bar type electrode which applies direct current or high frequency current.
JP375777A 1977-01-14 1977-01-14 Film forming apparatus Pending JPS5388676A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP375777A JPS5388676A (en) 1977-01-14 1977-01-14 Film forming apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP375777A JPS5388676A (en) 1977-01-14 1977-01-14 Film forming apparatus

Publications (1)

Publication Number Publication Date
JPS5388676A true JPS5388676A (en) 1978-08-04

Family

ID=11566044

Family Applications (1)

Application Number Title Priority Date Filing Date
JP375777A Pending JPS5388676A (en) 1977-01-14 1977-01-14 Film forming apparatus

Country Status (1)

Country Link
JP (1) JPS5388676A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009057583A (en) * 2007-08-30 2009-03-19 Toshiba Corp Film-forming apparatus and film-forming method
JP2014051744A (en) * 2008-09-22 2014-03-20 Becton Dickinson & Co System for coating inner part of container using photodecomposition chemical vapor deposition process and/or thermal chemical vapor deposition process

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009057583A (en) * 2007-08-30 2009-03-19 Toshiba Corp Film-forming apparatus and film-forming method
JP2014051744A (en) * 2008-09-22 2014-03-20 Becton Dickinson & Co System for coating inner part of container using photodecomposition chemical vapor deposition process and/or thermal chemical vapor deposition process

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