ES2060539B1 - Proceso para la obtencion de recubrimientos de carbono y carbono-metal mediante deposicion fisica en fase vapor por arco metalico con catodo de grafito. - Google Patents

Proceso para la obtencion de recubrimientos de carbono y carbono-metal mediante deposicion fisica en fase vapor por arco metalico con catodo de grafito.

Info

Publication number
ES2060539B1
ES2060539B1 ES9300114A ES9300114A ES2060539B1 ES 2060539 B1 ES2060539 B1 ES 2060539B1 ES 9300114 A ES9300114 A ES 9300114A ES 9300114 A ES9300114 A ES 9300114A ES 2060539 B1 ES2060539 B1 ES 2060539B1
Authority
ES
Spain
Prior art keywords
carbon
metal
coatings
electric arc
graphite
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
ES9300114A
Other languages
English (en)
Other versions
ES2060539A1 (es
Inventor
Javier Laucirica
Alberto Alberdi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fundacion Tekniker
Original Assignee
Fundacion Tekniker
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fundacion Tekniker filed Critical Fundacion Tekniker
Priority to ES9300114A priority Critical patent/ES2060539B1/es
Priority to EP93500032A priority patent/EP0607736A1/en
Publication of ES2060539A1 publication Critical patent/ES2060539A1/es
Application granted granted Critical
Publication of ES2060539B1 publication Critical patent/ES2060539B1/es
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0605—Carbon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Physical Vapour Deposition (AREA)
  • Coating By Spraying Or Casting (AREA)

Abstract

PROCESO PARA LA OBTENCION DE RECUBRIMIENTOS DE CARBONO Y CARBONO METAL MEDIANTE DEPOSICION FISICA EN FASE VAPOR POR ARCO ELECTRICO CON CATODO DE GRAFITO EN EL QUE LA DISPOSICION DEL ELECTRODO ES LA DE UNA BARRA ENMARCADA EN ANILLOS AISLANTES DE NITRURO DE BARO HEXAGONAL DE MODO QUE LA EVAPORACION POR ARCO ELECTRICO DEL ELECTRODO DE GRAFITO GENERA UN PLASMA DE CARBONO DENTRO DE UNA CAMARA DE VACIO PRODUCIENDO POR ESTA VIA RECUBRIMIENTOS DE CARBONO. EL PROCESO SE DIVIDE EN DOS ETAPAS EN CUANTO A LA POLARIZACION ELECTRICA NEGATIVA, UNA DE ALTA POLARIZACION DURANTE LA NUCLEACION DE LA CAPA, PARA MEJORAR LA ADHERENCIA Y OTRA DE BAJA POLARIZACION DURANTE SU CRECIMIENTO, PARA REDUCIR LAS TENSIONES INTERNAS. EN EL PROCESO SE UTILIZA SIMULTANEAMENTE CARBONO EVAPORADO POR ARCO ELECTRICO A PARTIR DE GRAFITO DE CARBONO Y UN METAL EVAPORADO POR PULVERIZACION CATODICA PARA SINTETIZAR RECUBRIMIENTOS DE CARBONO-METAL.
ES9300114A 1993-01-22 1993-01-22 Proceso para la obtencion de recubrimientos de carbono y carbono-metal mediante deposicion fisica en fase vapor por arco metalico con catodo de grafito. Expired - Fee Related ES2060539B1 (es)

Priority Applications (2)

Application Number Priority Date Filing Date Title
ES9300114A ES2060539B1 (es) 1993-01-22 1993-01-22 Proceso para la obtencion de recubrimientos de carbono y carbono-metal mediante deposicion fisica en fase vapor por arco metalico con catodo de grafito.
EP93500032A EP0607736A1 (en) 1993-01-22 1993-03-17 Process for obtaining carbon and metal-carbon coatings

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ES9300114A ES2060539B1 (es) 1993-01-22 1993-01-22 Proceso para la obtencion de recubrimientos de carbono y carbono-metal mediante deposicion fisica en fase vapor por arco metalico con catodo de grafito.

Publications (2)

Publication Number Publication Date
ES2060539A1 ES2060539A1 (es) 1994-11-16
ES2060539B1 true ES2060539B1 (es) 1995-06-16

Family

ID=8280535

Family Applications (1)

Application Number Title Priority Date Filing Date
ES9300114A Expired - Fee Related ES2060539B1 (es) 1993-01-22 1993-01-22 Proceso para la obtencion de recubrimientos de carbono y carbono-metal mediante deposicion fisica en fase vapor por arco metalico con catodo de grafito.

Country Status (2)

Country Link
EP (1) EP0607736A1 (es)
ES (1) ES2060539B1 (es)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2348158A (en) * 1999-03-16 2000-09-27 Teer Coatings Ltd Lubricated cutting

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4430184A (en) * 1983-05-09 1984-02-07 Vac-Tec Systems, Inc. Evaporation arc stabilization
DD227987A1 (de) * 1984-10-24 1985-10-02 Hochvakuum Dresden Veb Katode fuer hohlkatodenbogenverdampfer
CH664768A5 (de) * 1985-06-20 1988-03-31 Balzers Hochvakuum Verfahren zur beschichtung von substraten in einer vakuumkammer.
DD244149A1 (de) * 1985-12-07 1987-03-25 Hochvakuum Dresden Veb Verfahren zur abscheidung von ic-schichten
JPS62180054A (ja) * 1986-01-31 1987-08-07 Meidensha Electric Mfg Co Ltd 炭素薄膜の製造方法
DD286374A5 (de) * 1989-08-03 1991-01-24 Technische Universitaet Karl-Marx-Stadt,De Katodenanordnung fuer die vakuumbogenverdampfung von graphitkatoden
DE3941202A1 (de) * 1989-12-14 1990-06-07 Krupp Gmbh Verfahren zur erzeugung von schichten aus harten kohlenstoffmodifikationen und vorrichtung zur durchfuehrung des verfahrens
EP0484699B1 (de) * 1990-11-05 1993-08-18 Detlev Dr. Repenning Reibpaarung und Verfahren zu ihrer Herstellung

Also Published As

Publication number Publication date
EP0607736A1 (en) 1994-07-27
ES2060539A1 (es) 1994-11-16

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Effective date: 20141120