DE3867998D1 - Verfahren und vorrichtung zur reinigung von langgestreckten metallischen substraten, substrate gereinigt mit diesem verfahren, und gegenstaende aus polymerem material, verstaerkt mit diesen substraten. - Google Patents

Verfahren und vorrichtung zur reinigung von langgestreckten metallischen substraten, substrate gereinigt mit diesem verfahren, und gegenstaende aus polymerem material, verstaerkt mit diesen substraten.

Info

Publication number
DE3867998D1
DE3867998D1 DE8888202290T DE3867998T DE3867998D1 DE 3867998 D1 DE3867998 D1 DE 3867998D1 DE 8888202290 T DE8888202290 T DE 8888202290T DE 3867998 T DE3867998 T DE 3867998T DE 3867998 D1 DE3867998 D1 DE 3867998D1
Authority
DE
Germany
Prior art keywords
substrates
cleaned
substrate
long
objects
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8888202290T
Other languages
English (en)
Inventor
Daniel Chambaere
Wilfried Coppens
Hugo Lievens
Gryse Roger De
Alex Colpaert
Joost Vennik
Robert Hoogewijs
Wassenhove Norbert Van
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bekaert NV SA
Original Assignee
Bekaert NV SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bekaert NV SA filed Critical Bekaert NV SA
Application granted granted Critical
Publication of DE3867998D1 publication Critical patent/DE3867998D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/32431Constructional details of the reactor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23GCLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G5/00Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Optics & Photonics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Cleaning In General (AREA)
  • Laminated Bodies (AREA)
  • ing And Chemical Polishing (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
  • Preliminary Treatment Of Fibers (AREA)
DE8888202290T 1987-10-21 1988-10-13 Verfahren und vorrichtung zur reinigung von langgestreckten metallischen substraten, substrate gereinigt mit diesem verfahren, und gegenstaende aus polymerem material, verstaerkt mit diesen substraten. Expired - Fee Related DE3867998D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
BE8701197A BE1001027A3 (nl) 1987-10-21 1987-10-21 Werkwijze en inrichting voor het reinigen van een langwerpig metalen substraat, zoals een draad, een band, een koord, enz., alsmede volgens die werkwijze gereinigde substraten en met dergelijke substraten versterkte voorwerpen uit polymeermateriaal.

Publications (1)

Publication Number Publication Date
DE3867998D1 true DE3867998D1 (de) 1992-03-05

Family

ID=3882934

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8888202290T Expired - Fee Related DE3867998D1 (de) 1987-10-21 1988-10-13 Verfahren und vorrichtung zur reinigung von langgestreckten metallischen substraten, substrate gereinigt mit diesem verfahren, und gegenstaende aus polymerem material, verstaerkt mit diesen substraten.

Country Status (10)

Country Link
US (1) US4935115A (de)
EP (1) EP0313154B1 (de)
JP (1) JPH01288386A (de)
AT (1) ATE71989T1 (de)
AU (1) AU608487B2 (de)
BE (1) BE1001027A3 (de)
CA (1) CA1315920C (de)
DE (1) DE3867998D1 (de)
ES (1) ES2028262T3 (de)
TR (1) TR24083A (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5163458A (en) * 1989-08-03 1992-11-17 Optek, Inc. Method for removing contaminants by maintaining the plasma in abnormal glow state
FR2661544B1 (fr) * 1990-04-27 1994-05-27 Commissariat Energie Atomique Procede et dispositif de decontamination par decapage ionique.
JPH04297560A (ja) * 1991-03-26 1992-10-21 Nisshin Steel Co Ltd 鋼帯の連続溶融めっき方法及び装置
DE4136990C2 (de) * 1991-11-11 2002-12-05 Ald Vacuum Techn Ag Verfahren zur Entfettung und Reinigung von mit fett- und/oder ölhaltigen Stoffen behaftetem Gut
US5393575A (en) * 1992-03-03 1995-02-28 Esterlis; Moisei Method for carrying out surface processes
US5948294A (en) * 1996-08-30 1999-09-07 Mcdermott Technology, Inc. Device for cathodic cleaning of wire
JPH10185953A (ja) * 1996-12-27 1998-07-14 Mitsubishi Electric Corp プローブカード探針の洗浄方法およびこの洗浄方法を実施するための装置
FR2774400B1 (fr) * 1998-02-04 2000-04-28 Physiques Et Chimiques Dispositif electrique pour degraissage, decapage ou passivation plasmachimique de metaux
DE19907911C2 (de) 1999-02-24 2003-02-27 Mag Maschinen Und Appbau Ag Gr Vorrichtung und Verfahren zur Behandlung von elektrisch leitfähigem Endlosmaterial
RU2234457C2 (ru) * 2001-06-01 2004-08-20 Общество с ограниченной ответственностью "Научно-производственная компания "НеоТекПродакт" Способ получения фуллеренсодержащей сажи и устройство для его осуществления
US20040234703A1 (en) * 2002-06-04 2004-11-25 Frautschi Jack R. Method of forming a polymer layer on a metal surface
AT414215B (de) 2003-02-12 2006-10-15 Peter Ziger Anlage zur plasmaprozessierung
BRPI0418685B1 (pt) * 2004-03-31 2014-04-08 Pirelli Processo para produzir um fio de metal
AT503377B1 (de) * 2006-02-02 2008-09-15 Eiselt Primoz Verfahren und vorrichtung zur plasmabehandlung von materialien
JP5259125B2 (ja) * 2006-08-24 2013-08-07 富士通セミコンダクター株式会社 基板処理方法、半導体装置の製造方法、基板処理装置および記録媒体
WO2015154917A1 (en) 2014-04-09 2015-10-15 Asml Netherlands B.V. Apparatus for cleaning an object

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH342980A (de) * 1950-11-09 1959-12-15 Berghaus Elektrophysik Anst Verfahren zur Diffusionsbehandlung von Rohren aus Eisen und Stahl oder deren Legierungen
GB948554A (en) * 1961-03-22 1964-02-05 Joseph Edmund Harling And Dona Method and apparatus for cleaning metal by plasma arcs
GB961117A (en) * 1962-05-24 1964-06-17 Union Carbide Corp Method and apparatus for refining surface contaminated metals
US3326177A (en) * 1963-09-12 1967-06-20 Pennsalt Chemicals Corp Metal vapor coating apparatus
FR1492429A (fr) * 1966-08-31 1967-08-18 Libbey Owens Ford Glass Co Procédé et appareil pour éliminer les éléments contaminants de la surface d'un substrat
US3654108A (en) * 1969-09-23 1972-04-04 Air Reduction Method for glow cleaning
US3728246A (en) * 1970-01-22 1973-04-17 E Barkhudarov Device for applying thin films to articles
US3884793A (en) * 1971-09-07 1975-05-20 Telic Corp Electrode type glow discharge apparatus
JPS541242A (en) * 1977-06-04 1979-01-08 Agency Of Ind Science & Technol Method of removing metal scale
JPS55110782A (en) * 1979-02-19 1980-08-26 Hitachi Ltd Method for surface treatment of material to be worked by cold plastic working

Also Published As

Publication number Publication date
US4935115A (en) 1990-06-19
EP0313154B1 (de) 1992-01-22
ES2028262T3 (es) 1992-07-01
JPH01288386A (ja) 1989-11-20
EP0313154A1 (de) 1989-04-26
AU608487B2 (en) 1991-03-28
CA1315920C (en) 1993-04-13
BE1001027A3 (nl) 1989-06-13
TR24083A (tr) 1991-03-04
AU2362888A (en) 1989-04-27
ATE71989T1 (de) 1992-02-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee