ES2028262T3 - Procedimiento y aparato para limpiar sustratos metalicos largos, tales como alambres, bandas, cordones, etc., asi como los sustratos limpiados con dicho procedimiento y los objetos de material polimerico reforzados con tales sustratos. - Google Patents
Procedimiento y aparato para limpiar sustratos metalicos largos, tales como alambres, bandas, cordones, etc., asi como los sustratos limpiados con dicho procedimiento y los objetos de material polimerico reforzados con tales sustratos.Info
- Publication number
- ES2028262T3 ES2028262T3 ES198888202290T ES88202290T ES2028262T3 ES 2028262 T3 ES2028262 T3 ES 2028262T3 ES 198888202290 T ES198888202290 T ES 198888202290T ES 88202290 T ES88202290 T ES 88202290T ES 2028262 T3 ES2028262 T3 ES 2028262T3
- Authority
- ES
- Spain
- Prior art keywords
- substrates
- procedure
- cleaned
- substrate
- long
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Optics & Photonics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Analytical Chemistry (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Cleaning In General (AREA)
- Laminated Bodies (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- Preliminary Treatment Of Fibers (AREA)
- ing And Chemical Polishing (AREA)
Abstract
LA INVENCION SE REFIERE A UN METODO Y UN APARATO PARA LA LIMPIEZA EN CONTINUO DE SUSTRATOS METALICOS LARGOS, TALES COMO ALAMBRE, BANDA, CORDON, ETC QUE SE CONDUCEN A TRAVES DE UNA CAMARA DE VACIO, EN LA QUE SE INTRODUCE UN GAS INERTE, TAL COMO EL ARGON, Y SE MANTIENE UN VOLTAJE SUFICIENTEMENTE ELEVADO ENTRE EL SUSTRATO COMO CATODO Y UN ANODO PRESENTE EN LA CAMARA DE MANERA QUE SE PRODUCE UNA DESCARGA ELECTRICA ENTRE LOS DOS ELECTRODOS, COMO RESULTADO DE LA CUAL SE LIMPIA EL SUSTRATO POR LOS IONES DEL GAS INERTE QUE SE PRECIPITAN SOBRE EL DURANTE SU PASO POR LA CAMARA DE VACIO. EL ANODO ESTA FORMADO POR, AL MENOS, UN ELECTRODO ANULAR COLOCADO EN UN ALOJAMIENTO ALARGADO DE UN MATERIAL TRANSMISOR DE VALORACION TERMICA. LA INVENCION SE REFIERE ADEMAS AL SUSTRATO LIMPIADO, ASI COMO A LOS OBJETOS DE MATERIAL POLIMERICO REFORZADOS CON EL.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
BE8701197A BE1001027A3 (nl) | 1987-10-21 | 1987-10-21 | Werkwijze en inrichting voor het reinigen van een langwerpig metalen substraat, zoals een draad, een band, een koord, enz., alsmede volgens die werkwijze gereinigde substraten en met dergelijke substraten versterkte voorwerpen uit polymeermateriaal. |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2028262T3 true ES2028262T3 (es) | 1992-07-01 |
Family
ID=3882934
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES198888202290T Expired - Fee Related ES2028262T3 (es) | 1987-10-21 | 1988-10-13 | Procedimiento y aparato para limpiar sustratos metalicos largos, tales como alambres, bandas, cordones, etc., asi como los sustratos limpiados con dicho procedimiento y los objetos de material polimerico reforzados con tales sustratos. |
Country Status (10)
Country | Link |
---|---|
US (1) | US4935115A (es) |
EP (1) | EP0313154B1 (es) |
JP (1) | JPH01288386A (es) |
AT (1) | ATE71989T1 (es) |
AU (1) | AU608487B2 (es) |
BE (1) | BE1001027A3 (es) |
CA (1) | CA1315920C (es) |
DE (1) | DE3867998D1 (es) |
ES (1) | ES2028262T3 (es) |
TR (1) | TR24083A (es) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5163458A (en) * | 1989-08-03 | 1992-11-17 | Optek, Inc. | Method for removing contaminants by maintaining the plasma in abnormal glow state |
FR2661544B1 (fr) * | 1990-04-27 | 1994-05-27 | Commissariat Energie Atomique | Procede et dispositif de decontamination par decapage ionique. |
JPH04297560A (ja) * | 1991-03-26 | 1992-10-21 | Nisshin Steel Co Ltd | 鋼帯の連続溶融めっき方法及び装置 |
DE4136990C2 (de) * | 1991-11-11 | 2002-12-05 | Ald Vacuum Techn Ag | Verfahren zur Entfettung und Reinigung von mit fett- und/oder ölhaltigen Stoffen behaftetem Gut |
US5393575A (en) * | 1992-03-03 | 1995-02-28 | Esterlis; Moisei | Method for carrying out surface processes |
US5948294A (en) * | 1996-08-30 | 1999-09-07 | Mcdermott Technology, Inc. | Device for cathodic cleaning of wire |
JPH10185953A (ja) * | 1996-12-27 | 1998-07-14 | Mitsubishi Electric Corp | プローブカード探針の洗浄方法およびこの洗浄方法を実施するための装置 |
FR2774400B1 (fr) * | 1998-02-04 | 2000-04-28 | Physiques Et Chimiques | Dispositif electrique pour degraissage, decapage ou passivation plasmachimique de metaux |
DE19907911C2 (de) * | 1999-02-24 | 2003-02-27 | Mag Maschinen Und Appbau Ag Gr | Vorrichtung und Verfahren zur Behandlung von elektrisch leitfähigem Endlosmaterial |
RU2234457C2 (ru) * | 2001-06-01 | 2004-08-20 | Общество с ограниченной ответственностью "Научно-производственная компания "НеоТекПродакт" | Способ получения фуллеренсодержащей сажи и устройство для его осуществления |
US20040234703A1 (en) * | 2002-06-04 | 2004-11-25 | Frautschi Jack R. | Method of forming a polymer layer on a metal surface |
AT414215B (de) | 2003-02-12 | 2006-10-15 | Peter Ziger | Anlage zur plasmaprozessierung |
EP1729943B1 (en) * | 2004-03-31 | 2007-09-19 | PIRELLI TYRE S.p.A. | Process for producing a metal wire coated by means of a plasma deposition technique |
AT503377B1 (de) * | 2006-02-02 | 2008-09-15 | Eiselt Primoz | Verfahren und vorrichtung zur plasmabehandlung von materialien |
JP5259125B2 (ja) * | 2006-08-24 | 2013-08-07 | 富士通セミコンダクター株式会社 | 基板処理方法、半導体装置の製造方法、基板処理装置および記録媒体 |
CN106164776B (zh) | 2014-04-09 | 2019-04-23 | Asml荷兰有限公司 | 用于清洁对象的装置 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH342980A (de) * | 1950-11-09 | 1959-12-15 | Berghaus Elektrophysik Anst | Verfahren zur Diffusionsbehandlung von Rohren aus Eisen und Stahl oder deren Legierungen |
GB948554A (en) * | 1961-03-22 | 1964-02-05 | Joseph Edmund Harling And Dona | Method and apparatus for cleaning metal by plasma arcs |
GB961117A (en) * | 1962-05-24 | 1964-06-17 | Union Carbide Corp | Method and apparatus for refining surface contaminated metals |
US3326177A (en) * | 1963-09-12 | 1967-06-20 | Pennsalt Chemicals Corp | Metal vapor coating apparatus |
FR1492429A (fr) * | 1966-08-31 | 1967-08-18 | Libbey Owens Ford Glass Co | Procédé et appareil pour éliminer les éléments contaminants de la surface d'un substrat |
US3654108A (en) * | 1969-09-23 | 1972-04-04 | Air Reduction | Method for glow cleaning |
US3728246A (en) * | 1970-01-22 | 1973-04-17 | E Barkhudarov | Device for applying thin films to articles |
US3884793A (en) * | 1971-09-07 | 1975-05-20 | Telic Corp | Electrode type glow discharge apparatus |
JPS541242A (en) * | 1977-06-04 | 1979-01-08 | Agency Of Ind Science & Technol | Method of removing metal scale |
JPS55110782A (en) * | 1979-02-19 | 1980-08-26 | Hitachi Ltd | Method for surface treatment of material to be worked by cold plastic working |
-
1987
- 1987-10-21 BE BE8701197A patent/BE1001027A3/nl not_active IP Right Cessation
-
1988
- 1988-10-11 AU AU23628/88A patent/AU608487B2/en not_active Ceased
- 1988-10-13 AT AT88202290T patent/ATE71989T1/de not_active IP Right Cessation
- 1988-10-13 TR TR88/0738A patent/TR24083A/xx unknown
- 1988-10-13 DE DE8888202290T patent/DE3867998D1/de not_active Expired - Fee Related
- 1988-10-13 ES ES198888202290T patent/ES2028262T3/es not_active Expired - Fee Related
- 1988-10-13 EP EP88202290A patent/EP0313154B1/en not_active Expired - Lifetime
- 1988-10-19 CA CA000580654A patent/CA1315920C/en not_active Expired - Fee Related
- 1988-10-21 US US07/261,043 patent/US4935115A/en not_active Expired - Lifetime
- 1988-10-21 JP JP63265961A patent/JPH01288386A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
EP0313154A1 (en) | 1989-04-26 |
US4935115A (en) | 1990-06-19 |
AU2362888A (en) | 1989-04-27 |
DE3867998D1 (de) | 1992-03-05 |
TR24083A (tr) | 1991-03-04 |
BE1001027A3 (nl) | 1989-06-13 |
AU608487B2 (en) | 1991-03-28 |
EP0313154B1 (en) | 1992-01-22 |
ATE71989T1 (de) | 1992-02-15 |
CA1315920C (en) | 1993-04-13 |
JPH01288386A (ja) | 1989-11-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FG2A | Definitive protection |
Ref document number: 313154 Country of ref document: ES |
|
FD1A | Patent lapsed |
Effective date: 19980401 |