JPS64698A - Plasma x-ray source - Google Patents
Plasma x-ray sourceInfo
- Publication number
- JPS64698A JPS64698A JP62154377A JP15437787A JPS64698A JP S64698 A JPS64698 A JP S64698A JP 62154377 A JP62154377 A JP 62154377A JP 15437787 A JP15437787 A JP 15437787A JP S64698 A JPS64698 A JP S64698A
- Authority
- JP
- Japan
- Prior art keywords
- gap
- dismounting
- vacuum
- mounting
- free
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- X-Ray Techniques (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
PURPOSE: To seek to promote low inductance and maintenance control facilitation by making a vacuum trigger gap free in mounting/dismounting and arranging an external conductor provided with an external terminal in the coaxial form with the vacuum gap.
CONSTITUTION: A vacuum trigger gap device 3, which forms plasma X-ray source along with a condenser 1, a discharge tube 2 for X-ray generation, etc., is constituted of a vacuum trigger gap 5 free in mounting/dismounting and an external conductor 4 equipped with external terminals 9, 9a coaxial with it. When a trigger electrode 8 for the terminal 9a and the gap 5 is applied with a pulse from a pulse power source 27, plasma occurs by the creeping discharge of an insulator 28 and electricity is discharged between opposed electrodes 6, 7 and applied to between high and low electrodes 24, 25 of the discharge tube 2 through a coaxial cable 19a and X-ray is generated. By having constituted this device 3 in the coaxial form, the inductance is reduced and since the gap 5 is free in mounting/dismounting, the maintenance control inclusive of the exchange operation becomes easy.
COPYRIGHT: (C)1989,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62154377A JPH0719668B2 (en) | 1987-06-23 | 1987-06-23 | Plasma x-ray source |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62154377A JPH0719668B2 (en) | 1987-06-23 | 1987-06-23 | Plasma x-ray source |
Publications (3)
Publication Number | Publication Date |
---|---|
JPS64698A true JPS64698A (en) | 1989-01-05 |
JPH01698A JPH01698A (en) | 1989-01-05 |
JPH0719668B2 JPH0719668B2 (en) | 1995-03-06 |
Family
ID=15582820
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62154377A Expired - Lifetime JPH0719668B2 (en) | 1987-06-23 | 1987-06-23 | Plasma x-ray source |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0719668B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1999029145A1 (en) * | 1997-12-03 | 1999-06-10 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Method and device for producing extreme ultraviolet and soft x-rays from a gaseous discharge |
US6240163B1 (en) | 1998-06-19 | 2001-05-29 | Advanced Laser & Fusion Technology | Radiation E.G. X-ray pulse generator mechanisms |
US7526242B2 (en) | 2005-09-16 | 2009-04-28 | Ricoh Company, Limited | Transferring apparatus and image forming apparatus |
-
1987
- 1987-06-23 JP JP62154377A patent/JPH0719668B2/en not_active Expired - Lifetime
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1999029145A1 (en) * | 1997-12-03 | 1999-06-10 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Method and device for producing extreme ultraviolet and soft x-rays from a gaseous discharge |
US6240163B1 (en) | 1998-06-19 | 2001-05-29 | Advanced Laser & Fusion Technology | Radiation E.G. X-ray pulse generator mechanisms |
US7526242B2 (en) | 2005-09-16 | 2009-04-28 | Ricoh Company, Limited | Transferring apparatus and image forming apparatus |
Also Published As
Publication number | Publication date |
---|---|
JPH0719668B2 (en) | 1995-03-06 |
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