EP3489620B1 - Vorrichtung und verfahren zur inspektion eines substrats - Google Patents

Vorrichtung und verfahren zur inspektion eines substrats Download PDF

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Publication number
EP3489620B1
EP3489620B1 EP18208784.1A EP18208784A EP3489620B1 EP 3489620 B1 EP3489620 B1 EP 3489620B1 EP 18208784 A EP18208784 A EP 18208784A EP 3489620 B1 EP3489620 B1 EP 3489620B1
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EP
European Patent Office
Prior art keywords
coated film
region
light
reflectivity
substrate
Prior art date
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EP18208784.1A
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English (en)
French (fr)
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EP3489620A1 (de
EP3489620C0 (de
Inventor
HONG Young Joo
Deok Hwa Hong
Min Kyu Kim
Jeong Hun Choi
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Koh Young Technology Inc
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Koh Young Technology Inc
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Priority claimed from KR1020180136170A external-priority patent/KR102195240B1/ko
Application filed by Koh Young Technology Inc filed Critical Koh Young Technology Inc
Publication of EP3489620A1 publication Critical patent/EP3489620A1/de
Application granted granted Critical
Publication of EP3489620C0 publication Critical patent/EP3489620C0/de
Publication of EP3489620B1 publication Critical patent/EP3489620B1/de
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0675—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G01B9/02091—Tomographic interferometers, e.g. based on optical coherence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/56—Measuring geometric parameters of semiconductor structures, e.g. profile, critical dimensions or trench depth

Definitions

  • the present disclosure relates to a substrate inspection apparatus and a substrate inspection method.
  • a substrate may be coated in order to protect elements on the substrate.
  • the coating process is referred to as conformal coating.
  • the thickness of a conformal coated film may be inspected in order to check whether the coated film formed on the substrate by coating is evenly coated to have a certain thickness.
  • a two-dimensional (2D) fluorescent photographic inspection may be performed.
  • the 2D photographic inspection performs only qualitative inspection on the thickness of the coated film, and may not accurately measure the thickness of the coated film.
  • OCT optical coherence tomography
  • Some embodiments of the present disclosure provide a technology for measuring a thickness of a coated film of a substrate.
  • the substrate inspection apparatus includes: a light source configured to radiate laser light onto a coated film that is spread on a region of a substrate; a light detector configured to obtain optical interference data on an interference between reference light, that is generated by the laser light being reflected from a surface of the coated film, and measurement light, that is generated by the laser light penetrating the coated film and being scattered; and a processor configured to derive a thickness of the coated film corresponding to the region, based on the optical interference data, along with the other features as defined in claim 1.
  • the processor is configured to: obtain a sectional image that shows a section cut in a depth direction of the coated film based on the optical interference data; and determine the thickness of the coated film based on boundary lines in the sectional image.
  • the substrate inspection apparatus further includes a movement part configured to move the light source.
  • the processor is further configured to: derive a reflectivity of the surface of the coated film based on an intensity of the reference light; and control the movement part to move the light source in case the reflectivity is less than a predetermined reflectivity.
  • the light source is further configured to radiate the laser light onto the coated film along a first direction
  • the light detector is further configured to capture the reference light and the measurement light that proceed along a direction opposite to the first direction, and obtain the optical interference data.
  • the light source is disposed such that the laser light is directly radiated onto the surface of the coated film without penetrating a medium other than air.
  • the reflectivity of the surface of the coated film with respect to the laser light is determined based on a fluorescent pigment mixing ratio of fluorescent pigments that are mixed in the coated film, and the fluorescent pigment mixing ratio is set to a value that enables the reflectivity to exceed a predetermined reference value.
  • the coated film is formed of at least one material selected from acrylic, urethane, polyurethane, silicone, epoxy, an ultraviolet (UV) curable material, and an infrared (IR) curable material.
  • the surface of the coated film is formed to be a curved surface.
  • the substrate inspection method includes the steps of radiating laser light onto a coated film that is spread on a region of a substrate; obtaining optical interference data on an interference between reference light, that is generated by the laser light being reflected from a surface of the coated film, and measurement light, that is generated by the laser light penetrating the coated film and being scattered; and deriving a thickness of the coated film corresponding to the region, based on the optical interference data, along with the other steps as defined in claim 8.
  • the step of deriving the thickness of the coated film includes: obtaining a sectional image that shows a section cut in a depth direction of the coated film, based on the optical interference data; and determining the thickness of the coated film based on boundary lines in the sectional image.
  • the substrate inspection method further includes: deriving a reflectivity of the surface of the coated film based on an intensity of the reference light; and moving the light source in case the reflectivity is less than a predetermined reflectivity.
  • the laser light is radiated onto the region along a first direction, and the reference light and the measurement light proceed along a direction opposite to the first direction.
  • the laser light is directly radiated onto the surface of the coated film without penetrating a medium other than air.
  • the reflectivity of the surface of the coated film with respect to the laser light is determined based on a fluorescent pigment mixing ratio of fluorescent pigments that are mixed in the coated film, and the fluorescent pigment mixing ratio is set to a value that enables the reflectivity to exceed a predetermined reference value.
  • the coated film is formed of at least one material selected from acrylic, urethane, polyurethane, silicone, epoxy, an UV curable material, and an IR curable material.
  • the surface of the coated film is formed to be a curved surface.
  • part used in the present document may indicate software or a hardware element, such as a field-programmable gate array (FPGA), an application specific integrated circuit (ASIC), or the like. However, “part” is not limited to hardware and software. An element corresponding to “part” may be configured to be stored on a storage medium capable of performing addressing, or may be configured to execute one or more processors. According to an embodiment, “part” may include elements, such as software elements, object-oriented software elements, class element, and task elements, or the like, and may include processors, functions, attributes, procedures, sub-routines, segments of program code, drivers, firmware, microcode, circuits, data, databases, data structures, tables, arrays, and variables.
  • FPGA field-programmable gate array
  • ASIC application specific integrated circuit
  • the expression "based on” used in the present document is used to describe one or more factors that affect determination, an operation of making a decision, or an operation described in a phrase or a sentence including the corresponding expression, and the expression does not exclude additional factors that affect the corresponding determination, the operation of making a decision, or the other operation.
  • an element e.g., a first element
  • another element e.g., a second element
  • the expression "an element (e.g., a first element) is connected or linked to another element" may indicate that the element is directly connected or linked to the other element, or may indicate that the element is connected or linked to the other element using a new element (e.g., a third element) as a medium.
  • a processor configured to perform a predetermined operation may be a general-purpose processor that is capable of performing the predetermined operation by executing software.
  • an orthogonal coordinate system may be defined, the system including the x-axis, the y-axis, and the z-axis, which are orthogonal to each other.
  • the expressions used in the present document such as “x-axis direction”, “y-axis direction”, “z-axis direction”, and the like in association with the orthogonal coordinate system, may indicate both directions in which each axis in the orthogonal coordinate system extends, unless otherwise specified.
  • the "+" sign put in front of the direction of each axis indicates the positive direction, which is one of the directions in which the corresponding axis extends.
  • the "-" signal put in front of the direction of each axis indicates the negative direction, which is the other of the directions in which the corresponding axis extends.
  • a substrate is a board or a container in which elements such as a semiconductor chip and the like are installed, and the substrate may act as a passageway of electric signals among elements.
  • the substrate may be used to manufacture an integrated circuit or the like, and may be formed of a material such as silicone or the like.
  • the substrate may be a printed circuit board (PCB), and may be referred to as a wafer or the like depending on the embodiment.
  • a coated film may be a thin film, which is generated on the substrate by coating in order to protect the elements installed on the substrate.
  • the coated film When the coated film is thick, the film may be broken and may affect the operation of the substrate. Accordingly, the coated film needs to be coated relatively thinly and evenly in order to prevent the coated film from breaking.
  • the coated film may be formed of at least one material selected from acrylic, urethane, polyurethane, silicone, epoxy, an ultraviolet (UV) curable material, and an infrared (IR) curable material.
  • UV ultraviolet
  • IR infrared
  • an optical coherence tomography is an imaging technology that captures an image of the inside of an object using optical interference.
  • OCT optical coherence tomography
  • an image that shows the inside of an object in the depth direction from the surface of the object may be obtained.
  • the OCT is based on an interferometer.
  • the depth resolution with respect to the object may be different based on the wavelength of the light that is used.
  • the OCT may obtain an image by more deeply penetrating the object than a confocal microscope, which is another optical technology.
  • FIG. 1 is a diagram illustrating an embodiment of a process not part of the present invention in which a substrate inspection apparatus according to the present disclosure operates.
  • the substrate inspection apparatus according to an embodiment is a substrate inspection apparatus of a type that uses a reference mirror.
  • the substrate inspection apparatus further includes a light source 150, a light detector 160, a reference mirror 172, and/or a beam splitter 171.
  • the beam splitter 171 adjusts an optical path of laser light radiated from the light source 150, and the reference mirror 172 reflects the laser light transferred from the beam splitter 171 so as to generate reference light.
  • the laser light is reflected from a coated film of a substrate 2, whereby measurement light is generated.
  • Optical interference data are obtained from the interference light between reference light and measurement light.
  • the substrate inspection apparatus generates a sectional image from the optical interference data, and measures the thickness of the coated film.
  • the light source 150 radiates the laser light.
  • the light source 150 directly radiates the laser light onto the beam splitter 171.
  • the light source 150 transfers the laser light to a convex lens 173 via an optical fiber 174, and the laser light passing through the convex lens 173 is transferred to the beam splitter 171.
  • the beam splitter 171 adjusts an optical path such that part of the laser light received from the light source 150 passes through the beam splitter 171 and proceeds to the coated film of the substrate 2, and adjusts an optical path such that another part of the laser light is reflected and proceeds to the reference mirror 172.
  • the reflected light is referred to as the measurement light.
  • the measurement light proceeds to the beam splitter 171, and is transferred to the light detector 160 by the beam splitter 171.
  • the other part of the laser light of which the optical path is adjusted such that the other part of the laser light proceeds to the reference mirror 172 (not part of the present invention) is reflected by the reference mirror 172.
  • the reflected light is referred to as the reference light.
  • the reference light passes through the beam splitter 171, and is transferred to the light detector 160.
  • the light detector 160 captures the interference light generated by interference between the measurement light and the reference light, and obtains the optical interference data.
  • the optical interference data indicate data obtained from the interference light that is generated by the interference between the measurement light and the reference light when object measurement is performed using the OCT.
  • the measurement light is a radiated light reflected from an object
  • the reference light is a radiated light reflected from a reference mirror or the like, not part of the present invention.
  • An interference phenomenon occurs by a difference in the features (optical path, wavelength, or the like) of the measurement light and the reference light, and the light detector captures the interference phenomenon and obtains the optical interference data.
  • a sectional image indicating a section cut in the depth direction of the coated film is generated.
  • the optical interference data also are referred to as an interference signal.
  • the substrate inspection apparatus that uses the reference mirror derives the thickness of the coated film spread on the substrate 2 using the optical interference data associated with the reference light and the measurement light.
  • FIG. 2 is a diagram illustrating an embodiment of a process in which the substrate inspection apparatus according to the present disclosure operates.
  • the substrate inspection apparatus according to the present disclosure is implemented as an inspection apparatus 10 according to various embodiments.
  • the substrate inspection apparatus according to the present disclosure is a substrate inspection apparatus of a type that does not use the above-described reference mirror.
  • the inspection apparatus 10 measures the thickness of the coated film of the substrate 2 using the OCT. According to an embodiment, the inspection apparatus 10 measures the thickness of the coated film using reflected light that is reflected from the surface of the coated film, without using the above-described reference mirror, a predetermined window glass, or the like.
  • the inspection apparatus 10 includes the light source 150 and/or the light detector 160, excluding the reference mirror 172 or the beam splitter 171.
  • the light source 150 of the inspection apparatus 10 radiates the laser light onto the coated film of the substrate 2.
  • the laser light is radiated in a first direction.
  • the first direction is a direction corresponding to a straight line inclined at a predetermined angle from the direction of a normal line of the substrate.
  • the first direction is the same as the direction of the normal line of the substrate.
  • the axis corresponding to the direction of the normal line of the substrate is referred to as the z-axis.
  • the z-axis is a direction corresponding to the depth direction of the coated film.
  • the light source 150 directly radiates the laser light, but may alternatively radiate the laser light via the optical fiber 174 and/or the convex lens 173.
  • the x-axis and the y-axis are axes included in a plane corresponding to the surface of the substrate 2.
  • the x-axis and the y-axis are orthogonal to each other on the corresponding plane. Also, the x-axis and the y-axis are orthogonal to the above-described z-axis.
  • the laser light is reflected from the surface of the coated film. Particularly, the laser light is reflected from a first side shown in FIG. 2 . Also, the laser light penetrates the coated film and is backscattered.
  • the reflected light that is reflected from the surface of the coated film acts as the above-described reference light
  • the scattered light acts as the measurement light. That is, the reference light is generated by the laser light being reflected from the surface of the coated film, and the measurement light is generated by the laser light penetrating the coated film and being scattered.
  • the reflected light (i.e., reference light) and the scattered light (i.e., measurement light) proceed along the direction opposite to the above-described first direction, and generate the interference light.
  • the radiated laser light and the above-described interference light proceed along the same axis, but in different respective directions.
  • the light detector 160 captures the interference light (i.e., the reflected light and the scattered light) that proceeds along the direction opposite to the first direction.
  • the light detector 160 obtains the optical interference data from the captured interference light.
  • the processor 110 obtains the optical interference data from the light detector 160, generates a sectional image based on the optical interference data, and derives the thickness of the coated film spread on a corresponding region of the substrate 2.
  • the inspection apparatus 10 when the inspection apparatus 10 according to the present disclosure measures the thickness of the coated film, the above-described reflected light and scattered light respectively act as the reference light and the measurement light of the substrate inspection apparatus that uses the above-described reference mirror.
  • the coated film itself of the substrate 2 acts as the above-described reference mirror 172, depending on the reflectivity thereof.
  • the inspection apparatus 10 may not dispose an additional element, such as a window glass or the like, on the coated film of the substrate 2.
  • the inspection apparatus 10 according to the present disclosure generates the interference light using the reflected light that is reflected from the surface of the coated film as the reference light. Therefore, the inspection apparatus 10 may not additionally need an element such as the window glass or the like.
  • FIG. 3 is a block diagram illustrating the inspection apparatus 10 according to various embodiments of the present disclosure.
  • the inspection apparatus 10 includes the light source 150 and the light detector 160, and further includes a processor 110 and a memory 120. At least some of the elements disposed in the interior or the exterior of the inspection apparatus 10 may be connected via a bus, a general purpose input/output (GPIO), a serial peripheral interface (SPI), or a mobile industry processor interface (MIPI), or the like, and may exchange data and/or signals therebetween.
  • GPIO general purpose input/output
  • SPI serial peripheral interface
  • MIPI mobile industry processor interface
  • the light source 150 radiates the laser light to the coated film of the substrate 2, as described above.
  • the arrangement, the relative position, or the like of the light source 150 on the substrate may be variously configured.
  • the light source 150 is disposed in the above-described z-axis.
  • the light source 150 uses laser of which the wavelength is variable within a short time, whereby the optical interference data corresponding to different wavelengths are obtained using the same.
  • the inspection apparatus 10 may include a plurality of light sources 150.
  • the light detector 160 captures the interference light generated from the coated film by laser light. Particularly, the light detector 160 captures the interference light generated by the reflected light (i.e., the reference light), that is generated by laser light being reflected from the surface of the coated film, and the scattered light (i.e., the measurement light), which is generated by laser light penetrating to a predetermined depth from the coated film and being backscattered. A sectional image based on the surface of the coated film is generated using the optical interference data obtained by capturing the interference light. According to an embodiment, the light detector 160 is disposed on the above-described z-axis. According to an embodiment, the light detector 160 may not be disposed on the z-axis.
  • the inspection apparatus 10 may include a plurality of light detectors 160.
  • the light detector 160 is implemented as a charge-coupled device (CCD) or a complementary metal-oxide-semiconductor (CMOS).
  • CCD charge-coupled device
  • CMOS complementary metal-oxide-semiconductor
  • the light source 150 and the light detector 160 together is referred to as the OCT part 170 of the inspection apparatus 10.
  • the processor 110 controls at least one element of the inspection apparatus 10 connected to the processor 110 by running software (e.g., a program). Also, the processor 110 performs various operations, processing, data generation, and other processes in association with the present disclosure. Also, the processor 110 loads data or the like from the memory 120, or stores data or the like in the memory 120.
  • running software e.g., a program
  • the processor 110 performs various operations, processing, data generation, and other processes in association with the present disclosure. Also, the processor 110 loads data or the like from the memory 120, or stores data or the like in the memory 120.
  • the processor 110 obtains the optical interference data associated with the above-described interference light, from the light detector 160.
  • the processor 110 derives the thickness of the coated film that is spread on a region of the substrate 2 to which laser light is radiated, based on one or more pieces of optical interference data. The process of deriving the thickness of the coated film from the optical interference data will be described later.
  • the memory 120 stores various data.
  • the data stored in the memory 120 are data obtained, processed, or used by at least one element of the inspection apparatus 10, and includes software (e.g., a program).
  • the memory 120 includes a transitory memory and/or a non-transitory memory.
  • the memory 120 stores one or more pieces of optical interference data obtained from the light detector 160. Also, the memory 120 stores element arrangement information, element density information, and electrode position information which will be described later.
  • a program is software stored in the memory 120, and includes an operating system for controlling resources of the inspection apparatus 10, applications, and/or middleware that provides various functions to the application such that the applications utilize the resources of the inspection apparatus 10.
  • the inspection apparatus 10 further includes a communication interface (not illustrated).
  • the communication interface enables wired or wireless communication between the inspection apparatus 10 and a server or between the inspection apparatus 10 and an external electronic device.
  • the communication interface performs wireless communication based on long-term evolution (LTE), LTE Advanced (LTE-A), code division multiple access (CDMA), wideband CDMA (WCDMA), wireless broadband (WiBro), Wi-Fi, Bluetooth, near field communication (NFC), global positioning system (GPS) or global navigation satellite system (GNSS), or the like.
  • the communication interface performs wired communication based on a universal serial bus (USB), a high definition multimedia interface (HDMI), recommended standard 232 (RS-232), a plain old telephone service (POTS), or the like.
  • USB universal serial bus
  • HDMI high definition multimedia interface
  • RS-232 recommended standard 232
  • POTS plain old telephone service
  • the processor 110 obtains information from a server by controlling the communication interface.
  • the information obtained from the server is stored in the memory 120.
  • information obtained from the server includes the element arrangement information, the element density information, the electrode position information, or the like which will be described later.
  • the inspection apparatus 10 further includes an additional light source 130 and an additional light detector 140.
  • the additional light source 130 and the additional light detector 140 are used to obtain a two-dimensional (2D) image of the coated film of the substrate 2, and to measure the thickness of the coated film.
  • the inspection apparatus 10 further includes a movement part to be described later.
  • the movement part moves the light source 150 or the OCT part 170 along the above-described x-axis, y-axis, or z-axis.
  • the inspection apparatus 10 further includes an input device (not illustrated).
  • the input device is a device that receives, from the outside, data which is to be transferred to at least one element of the inspection apparatus 10.
  • the input device includes a mouse, a keyboard, a touch pad, or the like.
  • the inspection apparatus 10 further includes an output device (not illustrated).
  • the output device is a device to provide various data, such as an inspection result, an operation state, and the like associated with the inspection apparatus 10, to a user in a visual form.
  • the output device includes a display, a projector, a hologram device, or the like.
  • the inspection apparatus 10 is provided in one of the various types of devices.
  • the inspection apparatus 10 is a portable communication device, a computer device, a portable multimedia device, or a wearable device, or is a combination of one or more of the above-described devices.
  • the inspection apparatus 10 of the present disclosure is not limited to the above-described devices.
  • the elements disposed in the interior or the exterior of the inspection apparatus 10 may be implemented as hardware components.
  • FIG. 4 is a diagram illustrating a sectional image and a boundary line in the sectional image according to an embodiment of the present disclosure.
  • the processor 110 derives the thickness of the coated film spread on a predetermined region of the substrate 2, from the obtained optical interference data.
  • the processor 110 generates a sectional image from the optical interference data, and derives the thickness of the coated film using the information obtained from the sectional image.
  • the sectional image is a 2D image of a section cut in the depth direction of an object (i.e., the coated film).
  • the sectional image is generated based on the measured optical interference data.
  • the sectional image includes boundary lines (boundary patterns) corresponding to the boundary between air and the coated film, and the boundary between the coated film and the substrate.
  • the processor 110 obtains the sectional image as shown in FIG. 4 , using the optical interference data obtained by the light detector 160.
  • the sectional image is an image of a section cut in the -z-axial direction, that is, the depth direction, of the substrate 2 and the coated film. That is, the sectional image shows the inside of the coated film and the substrate, via penetration in the depth direction from the surface of the coated film.
  • a sectional image 4010 shown in FIG. 4 is a sectional image that is obtained by the substrate inspection apparatus that uses the above-described reference mirror not part of the present invention.
  • the sectional image 4010 includes one or more boundary lines 4050.
  • Each of the boundary lines 4050 is the boundary between the air and the coated film, in other words, a boundary line correspond ing to the surface of the coated film, or is a boundary line corresponding to the boundary between the coated film and the substrate 2 or an electrode on which the coated film is spread.
  • the substrate inspection apparatus using the reference mirror derives the thickness of the coated film using the distance between the boundary lines corresponding to the respective boundaries.
  • the sectional image 4010 which is based on a reference mirror surface is obtained.
  • the substrate inspection apparatus using the reference mirror determines a boundary line indicating the boundary between air and the coated film, from the sectional image 4010. Also, the substrate inspection apparatus determines a boundary line indicating the boundary between the coated film and the substrate 2 on which the coated film is spread, from the sectional image 4010.
  • the substrate inspection apparatus derives a vertical distance between the two determined boundary lines from the sectional image 4010, and determines the vertical distance as the thickness of the coated film.
  • a sectional image 4020 that is based on the surface of the coated film is obtained.
  • the sectional image 4020 includes one or more boundary lines 4040.
  • One of the boundary lines 4040 is a boundary line corresponding to the boundary between the coated film and the substrate 2 or the electrode on which the coated film is spread.
  • the processor 110 of the inspection apparatus 10 derives the thickness of the coated film using an interval between the corresponding boundary line 4040 and the upper edge 4030 of the sectional image 4020.
  • the processor 110 detects the boundary line 4040 indicating the boundary between the coated film and the substrate 2 on which the coated film is spread. According to an embodiment, the processor 110 determines, as the boundary line 4040, a boundary line that appears first in the depth direction from the upper edge of the sectional image 4020. Also, in the case of the inspection apparatus 10, the optical interference data is generated using the reflected light which is reflected from the surface of the coated film. Accordingly, the sectional image shows a section cut in the -z-axial direction, that is, in the depth direction, from the surface of the coated film by taking the surface of the coated film as an origin point.
  • the upper edge 4030 of the sectional image 4020 obtained by the inspection apparatus 10 corresponds to the surface of the coated film.
  • the processor 110 derives the vertical distance between the detected boundary line 4040 and the upper edge 4030 of the sectional image 4020, and determines the vertical distance as the thickness of the coated film. According to an embodiment, the processor 110 determines, as the thickness of the coated film, a value derived by applying a predetermined scaling factor to the derived vertical distance.
  • the laser light, the reflected light, the scattered light, and/or the interference light move in the vacuum or in some other mediums, instead of air. That is, the light source 150 is disposed so as to directly radiate the laser light onto the surface of the coated film, without penetrating a medium other than air.
  • FIG. 5 is a diagram illustrating a measurement range of the inspection apparatus 10 in the depth direction according to an embodiment of the present disclosure.
  • a sectional image 5010 shown in FIG. 5 is a sectional image that is obtained by the substrate inspection apparatus that uses the above-described reference mirror.
  • the corresponding sectional image 5010 includes a boundary line indicating the boundary between air and the coated film, and a boundary line indicating the boundary between the coated film and the substrate (PCB).
  • a sectional image 5020 shown in FIG. 5 is a sectional image obtained by the substrate inspection apparatus (e.g., the inspection apparatus 10) according to the present disclosure.
  • the sectional image 5020 includes a boundary line indicating the boundary between the coated film and the substrate (PCB).
  • the sectional image 5010 is bigger than the sectional image 5020. That is, the amount of data of the sectional image 5010 is bigger than that of the sectional image 5020.
  • the reflected light which is reflected from the surface of the coated film is used as the reference light and thus, the start of the measurement range in the depth direction (the -z-axial direction) is limited to the surface of the coated film.
  • a measurement range 5040 which takes into consideration all differences in height among the elements installed on the substrate 2, is needed in order to obtain a meaningful measurement result.
  • a meaningful thickness measurement result is obtained using only a measurement range 5050 corresponding to the maximum predicted thickness of the coated film.
  • the inspection apparatus 10 reduces a measurement range in the depth direction, which is needed in order to measure the thickness of the coated film, whereby the computational capacity required for processing measurement results and memory for storage is reduced.
  • the reference mirror is not used, and thus, the possibility of a measurement error attributable to saturation of the reflected light is reduced.
  • the intensity of output of the radiated light exceeds a predetermined intensity of light, the intensity of reflected light also increases, whereby saturation of the interference light occurs.
  • an interference signal appears, irrespective of an interference signal generated by a measurement object, thereby impeding accurate measurement.
  • Such saturation more frequently occurs in the case of a high reflective reference mirror.
  • the inspection apparatus 10 excludes the use of the reference mirror, whereby a measurement error by the saturation is reduced.
  • FIG. 6 is a diagram illustrating a process in which the processor 110 derives the thickness of the coated film based on a plurality of boundary lines according to an embodiment of the present disclosure.
  • the inspection apparatus 10 uses a plurality of sectional images of a predetermined region, which are obtained in advance and stored in a memory, so as to derive the thickness of the coated film of the corresponding region.
  • the plurality of sectional images is obtained in advance via multiple measurements, and is stored in the memory. Accordingly, the inspection apparatus 10 derives the thickness of the coated film by minimizing effect of noise.
  • the processor 110 obtains a sectional image based on one or more pieces of the optical interference data.
  • the substrate inspection apparatus obtains a plurality of sectional images 6010 of a predetermined region of the substrate by repeating measurement a number of times, and the plurality of sectional images is stored in the memory.
  • Each of the plurality of sectional images 6010 shows a section cut in the z-axis, that is, the depth direction of the coated film of the substrate 2.
  • Each of the plurality of sectional images 6010 includes boundary lines 6020 indicating the boundary between the coated film and the substrate 2.
  • the processor 110 obtains a plurality of boundary lines 6020 from the sectional images 6010, respectively.
  • the processor 110 determines one boundary line among the plurality of boundary lines 6020 as a boundary line 6030 indicating the boundary between the coated film and one region of the substrate 2 on which the coated film is spread.
  • the processor 110 derives the thickness of the coated film based on the determined boundary line, according to above-described method.
  • the processor 110 derives a mean value, a median value or a mode value of the plurality of boundary lines 6020, and determines a boundary line corresponding to the mean value, the median value or the mode value as the boundary line 6030 indicating the boundary between the coated film and the substrate 2.
  • the processor derives the thickness of the coated film corresponding to the one region of the corresponding boundary, based on the determined boundary line 6030.
  • the mean value is a value obtained by adding the values of all samples and dividing the sum by the number of the samples.
  • the median value is a value in the middle of all sample values. When the values of the samples are arranged in ascending order, and the number of the samples is an odd number, the middle one is determined as the median value. When the number of the samples is an even number, the mean value of the two values in the middle is determined as the median value.
  • the mode value is a value that most frequently appears from among the values of samples. Particularly, the mean value, the median value, or the mode value of the boundary lines indicates the mean value, the median value, or the mode value of location coordinates of the corresponding boundary lines in the sectional image.
  • each point of the boundary line in the corresponding sectional image has x and y coordinate values.
  • the mean value, the median value, or the mode value of x and y coordinate values in each of the plurality of boundary lines 6020 of the plurality of sectional images 6010 are derived, and a boundary line corresponding to the derived coordinate values is the boundary line 6030 corresponding to the mean value, the median value, or the mode value.
  • FIG. 7 is a diagram illustrating a process in which the processor 110 excludes some boundary lines based on a predetermined reference, according to an embodiment of the present disclosure.
  • the processor 110 derives the mean value of the plurality of boundary lines 6020, excludes a boundary line that is different by at least a predetermined ratio from the derived mean value, and uses the remaining boundary lines to determine a boundary line, which is to be used as a basis for deriving the thickness of the coated film.
  • a boundary line that falls outside a predetermined range from the plurality of boundary lines 6020 a value including an apparent measurement error is excluded when coated film thickness measurement is performed. Through the above, more accurate thickness measurement is allowed.
  • the processor 110 derives a first mean value of the plurality of boundary lines 6020.
  • the process of deriving the mean value of the boundary lines is performed as described above.
  • the processor 110 excludes boundary lines 7030 that are different by at least a predetermined ratio from the derived first mean value from the plurality of boundary lines 6020. That is, when the range of the derived first mean value which is determined based on a predetermined ratio is a region existing between broken lines 7020, the processor 110 maintains boundary lines 7010 included in the corresponding region, and excludes the boundary lines 7030 existing outside the region via a subsequent processing.
  • the processor 110 derives a second mean value of the boundary lines 7010 remaining after excluding the boundary lines 7030 that are different by at least the predetermined ratio.
  • the process of deriving the mean value of the boundary lines is performed as described above.
  • the processor 110 determines a boundary line corresponding to the derived second mean value as the boundary line indicating the boundary between the coated film and the substrate 2.
  • the processor derives the thickness of the coated film corresponding to the one region of the corresponding boundary, based on the determined boundary line.
  • the processor 110 excludes a predetermined boundary line as described above, using the median value or the mode value, instead of the mean value.
  • the processor 110 derives a first median value of the plurality of boundary lines 6020, excludes a boundary line that is different by at least a predetermined ratio from the first median value, and determines a boundary line corresponding to a second median value of the remaining boundary lines as the boundary line which is to be used as a basis for deriving the thickness of the coated film.
  • the mode value is utilized.
  • a combination of the mean value, the median value, or the mode value also is used.
  • FIG. 8 is a diagram illustrating a process of adjusting a thickness measurement region based on the reflectivity of the coated film according to an embodiment of the present disclosure.
  • the inspection apparatus 10 that does not use the reference mirror is used.
  • the predetermined reference value is the minimum reflectivity that is needed when the surface of the coated film performs the role of the reference mirror 172.
  • the reflectivity of the surface of the coated film indicates a ratio of the reflected light (i.e., the reference light) reflected from the surface of the coated film to the laser light radiated onto the coated film.
  • the inspection apparatus 10 derives the reflectivity of the coated film based on the intensity of the reflected light (e.g., the reference light) reflected from the surface of the coated film, and moves the light source 150 or the OCT part 170 based on the reflectivity, so as to measure the thickness.
  • the inspection apparatus 10 that does not use the reference mirror obtains the optical interference data based on the reflectivity of the coated film. Accordingly, the inspection apparatus 10 finely adjusts a measurement object point based on the reflectivity of the coated film, and obtains a more meaningful measurement result.
  • the light detector 160 measures the intensity of the reference light when capturing the interference light by the above-described reflected light (i.e., the reference light) and scattered light (i.e., the measurement light).
  • the processor 110 derives the reflectivity of the surface of the coated film in the z-axial direction at a corresponding region based on the measured intensity of the reference light of the coated film.
  • the reflectivity in the z-axial direction indicates a ratio of the laser light reflected in the +z-axial direction to the radiated laser light.
  • the processor 110 determines that one or more pieces of the optical interference data generated based on the corresponding reference light are valid optical interference data, and derives the thickness of the coated film using the corresponding optical interference data.
  • the predetermined reflectivity is the minimum reflectivity that is needed when the coated film acts as the reference mirror, and corresponds to the above-described predetermined reference value.
  • the processor 110 moves the light source 150 or the OCT part 170 so as to radiate the laser light onto another region 8020 adjacent to an original measurement region 8010.
  • the inspection apparatus 10 further includes a movement part.
  • the movement part moves the light source 150 or the OCT part 170 along the above-described x-axis, y-axis, or z-axis.
  • the x-axis and the y-axis are axes included in a plane corresponding to the surface of the substrate 2, and are orthogonal to each other.
  • the z-axis is an axis corresponding to the direction of a normal line of the substrate.
  • the x-axis and the y-axis are orthogonal to the z-axis.
  • the processor 110 controls the movement part to move the light source 150 or the OCT part 170 in the x-axial direction and/or y-axial direction, such that the laser light is radiated onto the other region 8020 adjacent to the original measurement region 8010.
  • the processor 110 controls the movement part based on the resolution of one or more pieces of the captured interference light, so as to adjust the position of the light source 150 or the OCT part 170 in the z-axis. That is, the movement part moves the light source 150 or the OCT part 170 in the z-axial direction, based on the resolution of the captured interference light.
  • the interference light is obtained by capturing the interference phenomenon by the above-described reflected light (i.e., the reference light) and scattered light (i.e., the measurement light), and thus, the frequency of interference phenomenon is determined based on a phase difference according to the travel paths of the laser light, the reflected light and the scattered light.
  • the processor 110 controls the movement part so as to adjust the position of the light source 150 or the OCT part 170 in the z-axis, by which the processor 110 performs adjustment to obtain an accurate interference signal of the interference light.
  • the OCT part 170 is moved by the movement part.
  • the original region 8010 which is to be measured by the OCT part 170 or to which the laser light is radiated is moved in the x-axial direction or the y-axial direction. This is because the reflectivity of the coated film on the original region 8010 does not satisfy a predetermined reference value.
  • An adjacent region of which the thickness of the coated film is considered equal to or similar to the thickness of the coated film of the original region 8010, is determined to be the new radiation region 8020 to which laser light is to be radiated. A region adj acent to one region will be described later.
  • a region of which the reflectivity for reference light in the +z-axial direction is greater than or equal to a predetermined reference value is determined to be the new radiation region 8020.
  • a region of which the reflectivity for reference light in the +z-axial direction is at least a predetermined ratio higher than or equal to that of the original region 8010 is determined to be the new radiation region 8020.
  • the light source 150 is moved by the movement part and radiates the laser light to the new radiation region 8020, as opposed to the original region 8010.
  • the reflectivity of the original region 8010 in the +z-axial direction is less than a predetermined reference value.
  • the surface of the coated film of the original region 8010 is not parallel to the normal line of the substrate, and is inclined at a predetermined angle or more.
  • the movement part moves the light source 150 or the OCT part 170 in the z-axial direction, based on the resolution of the captured interference light.
  • the radiation angle at which the laser light is to be radiated is adjusted such that the reflectivity of the surface of the coated film is greater than or equal to a reference value.
  • the laser light is radiated onto a region where the surface of the coated film is parallel to the substrate, such that the reflectivity of the surface of the coated film is greater than or equal to the reference value.
  • the reflectivity of the surface of the coated film is determined based on a fluorescent pigment mixing ratio of the corresponding coated film.
  • the surface of the coated film mixed with fluorescent pigments has a higher reflectivity than that of the coated film that is not mixed with the fluorescent pigments.
  • the fluorescent pigment mixing ratio of the coated film increases, the reflectivity of the surface of the coated film increases. That is, when the coated film mixed with the fluorescence pigments is used, the reflectivity of the surface of the coated film increases, whereby the thickness measurement using the inspection apparatus 10 that does not use the reference mirror is easily performed.
  • the fluorescent pigment mixing ratio of the coated film is set to a value that enables the reflectivity of the surface of the coated film to exceed a predetermined reference value.
  • the reference value is the minimum reflectivity that is needed when the surface of the coated film performs the role of the reference mirror 172, or is a value arbitrarily set according to the intention of a user.
  • the backscattering ratio of the coated film also is determined based on the fluorescent pigment mixing ratio of the corresponding coated film.
  • the coated film mixed with the fluorescent pigments has a higher backscattering ratio than that of the coated film that is not mixed with the fluorescent pigments.
  • the backscattering ratio of the coated film indicates a ratio of the above-described scattered light (i.e., the measurement light) that is backscattered to the laser light radiated to the coated film. As the fluorescent pigment mixing ratio of the coated film increases, the backscattering ratio of the coated film increases.
  • the fluorescent pigment mixing ratio of the coated film is set to a value that enables the backscattering ratio of the coated film to exceed a predetermined reference value.
  • the surface of the coated film is formed to be a curved surface.
  • the surface of the coated film is formed to be a convexly curved surface of a substrate, a concavely curved surface, or a curved surface provided in an arbitrary shape.
  • the thickness measurement using the inspection apparatus 10 that does not use the reference mirror is more easily performed than the case in which the surface of the coated film is a flat surface.
  • FIG. 9 is a diagram illustrating a process in which the inspection apparatus 10 samples a region for performing the thickness measurement using the OCT part 170, by photographic inspection using the fluorescent pigments, according to an embodiment of the present disclosure.
  • the inspection apparatus 10 performs the photographic inspection of the entirety of the substrate, using the fluorescent pigments, derives a predetermined region corresponding to a predetermined reference, and additionally measures the thickness of the coated film of the derived region using the OCT.
  • the inspection apparatus 10 performs the photographic inspection of the substrate 2 using the fluorescent pigments.
  • the photographic inspection is a fluorescent photographic inspection.
  • the coated film to be spread on the substrate 2 is mixed with the fluorescent pigments in advance.
  • the inspection apparatus 10 further includes the additional light source 130 and the additional light detector 140.
  • the additional light source 130 of the inspection apparatus 10 radiates the ultraviolet light onto the coated film of the substrate.
  • the radiated ultraviolet light excites the fluorescent pigments that are mixed in the coated film and generates the fluorescence.
  • the additional light detector 140 of the inspection apparatus 10 captures the fluorescence and obtains a 2D image of the coated film of the substrate.
  • the 2D image is a 2D fluorescent image according to the embodiment.
  • the inspection apparatus 10 derives one or more regions 3 on the substrate 2 according to a predetermined reference, based on the result of the photographic inspection.
  • the inspection apparatus 10 derives the amount of spread of the coated film which is spread on the substrate 2, from the 2D image.
  • the inspection apparatus 10 obtains luminance information for each of the plurality of regions of the substrate 2 from the obtained 2D image. When the ultraviolet light is radiated, the luminance of each region of the coated film is different based on the amount of fluorescent pigments.
  • the inspection apparatus 10 derives the amount of spread of the coated film for each region, using the luminance of each region.
  • the inspection apparatus 10 derives the predetermined region 3 based on the amount of spread. For example, a region of which the amount of spread is less than or equal to a predetermined reference is derived as the predetermined region 3.
  • the inspection apparatus 10 additionally measures the thickness of the derived region 3 using the OCT part 170, as described above.
  • the OCT part 170 of the inspection apparatus 10 obtains the optical interference data associated with the derived region 3, and measures the thickness of the coated film spread on the region 3 of the substrate based on the obtained optical interference data.
  • the additional light source 130 is disposed so as to radiate the ultraviolet light onto the substrate, and the relative position of the additional light source 130 on the substrate, a radiation angle of the ultraviolet light, the brightness of the ultraviolet light, and the like may be variously configured.
  • the inspection apparatus 10 includes a plurality of additional light sources 130.
  • the additional light detector 140 captures the fluorescence generated from the coated film by the ultraviolet light.
  • the inspection apparatus 10 includes a plurality of additional light detectors 140.
  • the additional light detector 140 is embodied as the CCD or the CMOS.
  • FIG. 10 is a diagram illustrating a process in which the inspection apparatus 10 additionally samples a region for performing the thickness measurement using the OCT part 170, based on element arrangement, according to an embodiment of the present disclosure.
  • the processor 110 derives a region 4 of which the element arrangement is the same or similar to that of the region 3 of which the amount of spread, obtained from the 2D image, is less than or equal to a predetermined amount of spread, and controls the OCT part 170 so as to derive the thickness of the region 4.
  • the processor 110 derives a region having the same or similar element arrangement based on the element arrangement information, and measures the thickness of the region using the OCT.
  • the region having the same or similar element arrangement has a similar thickness of the spread coated film.
  • the element arrangement information is information indicating the arrangement of elements disposed on the substrate 2.
  • the element arrangement information indicates information associated with the positions, orientations or the elements installed on the substrate 2, and the areas occupied thereby.
  • the processor 110 derives the region 3 of which the amount of spread obtained via the 2D image is less than or equal to a predetermined amount of spread, as described above.
  • the processor 110 measures the thickness of the region 3 using the OCT part 170.
  • the processor 110 derives the region 4 which has the same element arrangement as that of the derived region 3 on the substrate 2.
  • the region 4 is selected from regions (regions excluding the first region) of which the amount of spread derived from the 2D image exceeds the predetermined amount of spread.
  • the processor 110 derives the corresponding region 4 based on the above-described element arrangement information.
  • the processor 110 derives the thickness of the additionally derived region 4 using the OCT part 170.
  • the processor 110 controls the light source 150 and the light detector 160, so as to obtain the optical interference data generated by laser light being reflected from the corresponding region 4.
  • the processor 110 derives the thickness of the coated film spread on the region 4, based on the obtained optical interference data.
  • the fact that the processor 110 obtains the optical interference data of the one region by controlling the light source 150 and the light detector 160 indicates that the light source 150 radiates the laser light onto the corresponding one region, and that the light detector 160 obtains the optical interference data associated with the interference light generated from the one region.
  • the processor 110 derives the region 4, of which the element arrangement is similar to that of the region 3, which has been derived from the 2D image, and measures the thickness of the region 4 using the OCT.
  • whether the element arrangements of the two regions 3 and 4 are similar to each other is determined based on the element arrangement information associated with the two regions 3 and 4.
  • the processor 110 calculates the similarity of the element arrangements of the two regions 3 and 4 based on the areas that elements occupy in the regions 3 and 4, the arrangements, the type, and the form of the elements, the positions of electrodes of the elements, or the like, and determines whether the element arrangements of the two regions 3 and 4 are similar to each other based on the calculated similarity.
  • the processor 110 adjusts the above-described luminance information based on the density of elements and an element arrangement on the substrate 2, and derives the amount of spread of the coated film of a corresponding region based on the adjusted luminance information.
  • the processor 110 obtains the element arrangement information indicating the arrangement of elements on the substrate 2 from the memory 120.
  • the processor 110 derives the element density information for each region on the substrate 2, based on the above-described element arrangement information.
  • the processor 110 adjusts the luminance information derived from the 2D image, based on the element density information.
  • the fluorescent pigments may not be evenly spread on a region having a high element density on the substrate 2.
  • the fluorescent pigments are accumulated and thus, the luminance is measured to be high.
  • the processor 110 adjusts the obtained luminance information by taking into consideration luminance distortion by element density. To adjust the luminance information, accumulated information indicating the relationship between the element density and the luminance is used. The information is collected in a database and is stored in the memory 120. The processor 110 derives the amount of spread on each region of the substrate 2 based on the adjusted luminance information.
  • FIG. 11 is a diagram illustrating a process in which the inspection apparatus 10 additionally samples a region for performing the thickness measurement using the OCT part 170, based on a defective region, according to an embodiment of the present disclosure.
  • the processor 110 derives a region 5 which is identified as a region having a defect on the substrate 2 based on the element arrangement information and/or the 2D image, and derives the thickness of the region 5 by controlling the OCT part 170.
  • the amount of spread on a part including a predetermined defect on the substrate 2 or the coated film for example, a part including a crack, an exfoliation, an unevenness, a curve, or the like is measured via 2D photographic inspection, the result includes an error.
  • the thickness of the coated film of the region 5 which is identified as a region including a predetermined defect based on the element arrangement information and/or the 2D image, is additionally measured using the OCT part 170.
  • the processor 110 determines the region 5, which is identified as a region including a predetermined defect on the substrate 2, based on the element arrangement information and/or the 2D image obtained from the memory 120.
  • the 2D image is a picture obtained by actually photographing the form of the substrate 2 and the coated film.
  • the element arrangement information shows the form of the substrate 2 and the expected form in which the coated film is spread according to a predetermined specification.
  • the processor 110 determines a region in which the current substrate 2 and the coated film have features different from the predetermined standard, based on the element arrangement information and the 2D image. That is, the processor 110 determines that the corresponding feature is a defect.
  • the processor 110 derives the region 5 where the defect exists.
  • the processor 110 derives the thickness of the derived region 5 using the OCT part 170.
  • the processor 110 controls the light source 150 and the light detector 160, so as to obtain the optical interference data generated by the laser light being reflected from the corresponding region 5.
  • the processor 110 derives the thickness of the coated film spread on the region 5, based on the obtained optical interference data.
  • the operation of deriving the additional measurement region based on a defective region is performed independently from the operation of deriving the additional measurement region based on the above-described 2D image.
  • the processor 110 derives a region including an electrode part based on the electrode position information indicating the positions of electrodes of elements on the substrate 2, and additionally measures the thickness of the region by controlling the OCT part 170.
  • the electrode position information is information indicating the positions of the electrodes of the elements disposed on the substrate 2.
  • each element has an electrode part in order to connect fine wiring between an element and the substrate.
  • the electrode is referred to as an element leg or a chip leg.
  • the electrode position information indicates the positions where the electrodes of elements exist on the substrate 2.
  • the fluorescent pigments agglomerate due to the density of element legs, whereby the thickness measurement based on the 2D image may be inaccurate. Accordingly, the thickness of the part where the electrode of an element exists is additionally measured using the OCT, whereby the accuracy of the process of measuring the overall thickness is increased.
  • the processor 110 is aware of the positions where the electrodes of the elements exist on the substrate 2, based on the electrode position information obtained from the memory 120.
  • the processor 110 derives a region on the substrate 2 where an electrode exits.
  • the region is selected from regions (regions excluding the first region) of which the amount of spread derived from the 2D image exceeds a predetermined amount of spread.
  • the processor 110 derives the thickness of the derived region using the OCT part 170.
  • the processor 110 controls the light source 150 and the light detector 160, so as to obtain the optical interference data generated by the laser light being reflected from the corresponding region.
  • the processor 110 derives the thickness of the coated film spread on the region, based on the obtained optical interference data.
  • FIG. 12 is a diagram illustrating a process in which the inspection apparatus 10 additionally samples a region adjacent to a region for performing the thickness measurement using the OCT part 170, according to an embodiment of the present disclosure.
  • the inspection apparatus 10 additionally measures the thickness of regions 8 adjacent to the region 7 using the OCT.
  • the derived region 7 is a region where thickness measurement using the OCT is performed in addition to the 2D photographing inspection for accurately measuring the thickness of the coated film.
  • the regions adjacent to the region 7 have features similar to those of the region 7 with regard to the substrate 2 or the coated film. Accordingly, in order to secure the accuracy of the overall thickness measurement, the additional thickness measurement using the OCT is performed with respect to adj acent regions.
  • the adjacent regions indicate regions located close to the corresponding region 7 when the substrate 2 is divided into a plurality of regions.
  • the adjacent region indicates a region that shares a boundary line with the corresponding region 7 from among the plurality of regions.
  • the adjacent region indicates a region located within a predetermined radius from the center of the corresponding region 7, from among the plurality of regions.
  • the adjacent region is a region that is located in the +x-axial direction, the -x-axial direction, the +y-axial direction, or the -y-axial direction of the region 7, and shares a boundary line with the corresponding region 7.
  • the adjacent region includes a region that shares a vertex with the corresponding region 7, and is located in the diagonal direction, from among the plurality of regions.
  • the processor 110 remeasures a thickness using the OCT, based on the amount of spread derived from the 2D image and the thickness value measured by the OCT part 170.
  • a difference between the thickness value of the coated film of a corresponding region, which is derived from the amount of spread based on the qualitative inspection and the thickness value measured using the OCT is greater than or equal to a predetermined value, the thickness of the corresponding region is remeasured using the OCT.
  • a thickness is remeasured.
  • the predetermined reference is a reference to determine whether at least one of the amount of spread or the thickness, which are derived, is wrongly measured, in consideration of the relationship between the amount of spread and the thickness which were previously measured. That is, when it is determined that the measurement has an error in consideration of the amount of spread and the thickness value, the measurement is performed again.
  • the processor 110 controls the OCT part 170 and remeasures the thickness of a region adjacent to a corresponding region, based on the amount of spread of the corresponding region derived from the 2D image and the thickness value of the corresponding region measured by the OCT part 170.
  • FIG. 13 is a diagram illustrating an embodiment of a substrate inspection method, which is performed by the inspection apparatus 10 according to the present disclosure.
  • the flowchart has described that the operations of a method and an algorithm according to the present disclosure are performed sequentially, the operations may be performed in a different order that is arbitrarily combined based on the present disclosure, in addition to being performed in the sequential order.
  • the descriptions associated with the flowchart do not exclude modification or correction of the method or the algorithm, and do not indicate that a predetermined operation is essential or preferable.
  • at least some operations may be performed in parallel, repetitively, or heuristically.
  • at least some operations may be omitted or other operations may be added.
  • the inspection apparatus 10 performs a substrate inspection method according to various embodiments of the present disclosure in order to perform a substrate inspection.
  • the substrate inspection method according to an embodiment of the present disclosure includes: step S100 of radiating the laser light onto the coated film that is spread on the region of the substrate; step S200 of obtaining the optical interference data on the interference between the reference light, that is generated by the laser light being reflected from the surface of the coated film, and the measurement light, that is generated by the laser light penetrating the coated film and being scattered; and/or step S300 of deriving the thickness of the coated film corresponding to the one region based on the optical interference data.
  • step S100 the light source 150 of the inspection apparatus 10 radiates the laser light onto the coated film that is spread on the region of the substrate.
  • step S200 the light detector 160 obtains the optical interference data on the interference between the reference light, that is generated by the laser light being reflected from the surface of the coated film, and the measurement light, that is generated by the laser light penetrating the coated film and being scattered.
  • step S300 the processor 110 derives the thickness of the coated film corresponding to the region, based on the optical interference data.
  • step S300 of deriving the thickness of the coated film includes a step in which the processor 110 obtains a sectional image that shows a section cut in the depth direction of the coated film based on the optical interference data; and/or a step in which the processor 110 determines the thickness of the coated film based on a boundary line in the sectional image.
  • step S300 of deriving the thickness of the coated film includes: a step in which the processor 110 obtains a plurality of sectional images of the one region, which are obtained in advance from the memory; and/or a step in which the processor 110 determines a reference boundary line from among a plurality of boundary lines in the plurality of sectional images, and derives the thickness of the coated film of the one region, based on the reference boundary line.
  • the reference boundary line is a boundary line corresponding to one of the mean value, the median value, and the mode value of the plurality of boundary lines.
  • the reference boundary line is a boundary line corresponding to the mean value of boundary lines that satisfy a predetermined criterion from among the plurality of boundary lines.
  • the substrate inspection method further includes: a step in which the light detector 160 derives the reflectivity of the surface of the coated film based on the intensity of the reference light; and/or a step of moving the light source in case the reflectivity is less than a predetermined reflectivity.
  • the movement is performed by the above-described movement part.
  • the laser light is radiated onto the above-described one region in a first direction, and the reference light and the measurement light proceed along the direction opposite to the first direction and are captured by the light detector.
  • the laser light is directly radiated onto the surface of the coated film without penetrating a medium other than air.
  • the software may be software for implementing various embodiments of the present disclosure.
  • the software may be inferred from various embodiments of the present disclosure by programmers in the field of the art to which the present disclosure belongs.
  • the software may be a program including instructions (e.g., code or code segment) which are readable by a device.
  • the device may be a device such as a computer, which is operable according to instructions retrieved from a storage medium.
  • the device may be the inspection apparatus 10 according to embodiments of the present disclosure.
  • a processor of the device may execute retrieved instructions, such that the elements of the device perform functions corresponding to the instructions.
  • the processor may be the processor 110 according to embodiments of the present disclosure.
  • the storage medium may indicate all types of recording media storing data which are readable by a device.
  • the storage medium may include, for example, ROM, RAM, a CD-ROM, magnetic tape, a floppy disk, an optical data storage device, or the like.
  • the storage medium may be the memory 120.
  • the storage medium may be implemented to be distributed in computer systems or the like connected via a network.
  • the software may be stored distributedly in a computer system or the like, and may be executed.
  • the storage medium may be a non-transitory storage medium.
  • the non-transitory storage medium indicates a tangible medium that exists irrespectively of semi-permanent or temporary storage of data, and does not include a signal that is propagated in a transient manner.
  • the substrate inspection apparatus can accurately measure the thickness of a coated film even when the coated film is as thin as a predetermined thickness (e.g., 30 ⁇ m) or less.
  • a predetermined thickness e.g. 30 ⁇ m
  • the substrate inspection apparatus can measure the thickness of a coated film without using an element such as a reference mirror or the like, whereby errors in measurement caused by saturation of light may be reduced.
  • the substrate inspection apparatus can shorten the amount of time spent measuring the thickness of the coated film of the entire substrate by sampling a specific region.

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Claims (12)

  1. Substratprüfungsvorrichtung ohne einen Referenzspiegel, Folgendes umfassend:
    eine Lichtquelle (150), die dazu konfiguriert ist, Laserlicht auf einen Bereich einer beschichteten Folie, die auf einem Substrat ausgebreitet ist, einzustrahlen;
    einen Lichtdetektor (160), der dazu konfiguriert ist, Daten zur optischen Interferenz zu einer Interferenz zwischen Referenzlicht, das erzeugt wird, indem das Laserlicht von einer Oberfläche des Bereichs der beschichteten Folie reflektiert wird, und Messlicht, das erzeugt wird, indem das Laserlicht den Bereich der beschichteten Folie durchdringt und gestreut wird, zu erhalten;
    ein Bewegungsteil, das dazu konfiguriert ist, die Lichtquelle (150) zu bewegen; und
    einen Prozessor (110), der zu Folgendem konfiguriert ist:
    Ableiten eines Reflexionsvermögens der Oberfläche aus einer Stärke des Referenzlichts;
    Bestimmen, ob das Reflexionsvermögen kleiner als ein vorbestimmtes Reflexionsvermögen ist;
    bei der Bestimmung, dass das Reflexionsvermögen nicht kleiner als das vorbestimmte Reflexionsvermögen ist, Ableiten einer Dicke der beschichteten Folie, die dem Bereich entspricht, basierend auf den Daten zur optischen Interferenz; und
    bei der Bestimmung, dass das Reflexionsvermögen kleiner als das vorbestimmte Reflexionsvermögen ist, Steuern des Bewegungsteils, um die Lichtquelle (150) so zu bewegen, dass sie Laserlicht auf einen anderen Bereich, der an den Bereich der beschichteten Folie auf dem Substrat angrenzt, einstrahlt.
  2. Substratprüfungsvorrichtung nach Anspruch 1, wobei der Prozessor (110) ferner zu Folgendem konfiguriert ist:
    Erhalten eines Schnittbildes basierend auf den Daten zur optischen Interferenz, das einen Schnitt in einer Tiefenrichtung des Bereichs der beschichteten Folie zeigt; und
    Bestimmen der Dicke der beschichteten Folie basierend auf Grenzlinien in dem Schnittbild.
  3. Substratprüfungsvorrichtung nach Anspruch 1, wobei die Lichtquelle (150) ferner dazu konfiguriert ist, das Laserlicht auf die beschichtete Folie entlang einer ersten Richtung einzustrahlen, und der Lichtdetektor (160) ferner dazu konfiguriert ist, das Referenzlicht und das Messlicht, die entlang einer Richtung entgegengesetzt zu der ersten Richtung verlaufen, zu erfassen und die Daten zur optischen Interferenz zu erhalten.
  4. Substratprüfungsvorrichtung nach Anspruch 1, wobei die Lichtquelle (150) derart angeordnet ist, dass das Laserlicht unmittelbar auf die Oberfläche der beschichteten Folie eingestrahlt wird, ohne ein von Luft verschiedenes Medium zu durchdringen.
  5. Substratprüfungsvorrichtung nach Anspruch 1, wobei das Reflexionsvermögen der Oberfläche der beschichteten Folie bezogen auf das Laserlicht basierend auf einem Fluoreszenzpigment-Mischungsverhältnis von fluoreszierenden Pigmenten, die in die beschichtete Folie gemischt sind, bestimmt wird, und
    wobei das Fluoreszenzpigment-Mischungsverhältnis auf einen Wert eingestellt wird, der ermöglicht, dass das Reflexionsvermögen einen vorbestimmten Referenzwert überschreitet.
  6. Substratprüfungsvorrichtung nach Anspruch 1, wobei die beschichtete Folie aus wenigstens einem Material, ausgewählt aus Acryl, Urethan, Polyurethan, Silicium, Epoxidharz, einem mit ultraviolettem(UV) Licht härtbaren Material und einem mit Infrarot(IR)-Licht härtbaren Material, gebildet ist.
  7. Substratprüfungsvorrichtung nach Anspruch 1, wobei die Oberfläche der beschichteten Folie als eine gekrümmte Oberfläche gebildet ist.
  8. Substratprüfungsverfahren, durchgeführt durch eine Substratprüfungsvorrichtung ohne einen Referenzspiegel, Folgendes umfassend:
    Einstrahlen von Laserlicht auf einen Bereich einer beschichteten Folie, die auf einem Substrat ausgebreitet ist;
    Erhalten von Daten zur optischen Interferenz zu einer Interferenz zwischen Referenzlicht, das erzeugt wird, indem das Laserlicht von einer Oberfläche des Bereichs der beschichteten Folie reflektiert wird, und Messlicht, das erzeugt wird, indem das Laserlicht den Bereich der beschichteten Folie durchdringt und gestreut wird;
    Ableiten eines Reflexionsvermögens der Oberfläche aus einer Stärke des Referenzlichts;
    Bestimmen, ob das Reflexionsvermögen kleiner als ein vorbestimmtes Reflexionsvermögen ist;
    bei der Bestimmung, dass das Reflexionsvermögen nicht kleiner als das vorbestimmte Reflexionsvermögen ist, Ableiten einer Dicke der beschichteten Folie, die dem Bereich entspricht, basierend auf den Daten zur optischen Interferenz; und
    bei der Bestimmung, dass das Reflexionsvermögen kleiner als das vorbestimmte Reflexionsvermögen ist, Bewegen einer Lichtquelle (150), sodass sie Laserlicht auf einen anderen Bereich, der an den Bereich der beschichteten Folie auf dem Substrat angrenzt, einstrahlt.
  9. Substratprüfungsverfahren nach Anspruch 8, wobei das Ableiten der Dicke der beschichteten Folie Folgendes beinhaltet:
    Erhalten eines Schnittbildes, das einen Schnitt in einer Tiefenrichtung des Bereichs der beschichteten Folie zeigt, basierend auf den Daten zur optischen Interferenz; und
    Bestimmen der Dicke der beschichteten Folie basierend auf Grenzlinien in dem Schnittbild.
  10. Substratprüfungsverfahren nach Anspruch 8, wobei das Laserlicht auf den Bereich entlang einer ersten Richtung eingestrahlt wird und das Referenzlicht und das Messlicht entlang einer Richtung entgegengesetzt zu der ersten Richtung verlaufen.
  11. Substratprüfungsverfahren nach Anspruch 8, wobei das Laserlicht unmittelbar auf die Oberfläche der beschichteten Folie eingestrahlt wird, ohne ein von Luft verschiedenes Medium zu durchdringen.
  12. Substratprüfungsverfahren nach Anspruch 8, wobei das Reflexionsvermögen der Oberfläche der beschichteten Folie bezogen auf das Laserlicht basierend auf einem Fluoreszenzpigment-Mischungsverhältnis von fluoreszierenden Pigmenten, die in die beschichtete Folie gemischt sind, bestimmt wird, und
    wobei das Mischungsverhältnis fluoreszierender Pigmente auf einen Wert eingestellt wird, der ermöglicht, dass das Reflexionsvermögen einen vorbestimmten Referenzwert überschreitet.
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