EP3203328A1 - Procédé de fabrication d'éléments fonctionnels pour des mouvements d'horlogerie et élément fonctionnel fabriqué selon ce procédé - Google Patents

Procédé de fabrication d'éléments fonctionnels pour des mouvements d'horlogerie et élément fonctionnel fabriqué selon ce procédé Download PDF

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Publication number
EP3203328A1
EP3203328A1 EP17155135.1A EP17155135A EP3203328A1 EP 3203328 A1 EP3203328 A1 EP 3203328A1 EP 17155135 A EP17155135 A EP 17155135A EP 3203328 A1 EP3203328 A1 EP 3203328A1
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EP
European Patent Office
Prior art keywords
functional element
silicon
coating
wheel
coil spring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP17155135.1A
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German (de)
English (en)
Inventor
Konrad Damasko
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Damasko GmbH
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Damasko GmbH
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Filing date
Publication date
Application filed by Damasko GmbH filed Critical Damasko GmbH
Publication of EP3203328A1 publication Critical patent/EP3203328A1/fr
Withdrawn legal-status Critical Current

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    • G—PHYSICS
    • G04—HOROLOGY
    • G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B17/00—Mechanisms for stabilising frequency
    • G04B17/04—Oscillators acting by spring tension
    • G04B17/06—Oscillators with hairsprings, e.g. balance
    • G04B17/066—Manufacture of the spiral spring

Definitions

  • the invention relates to functional elements for a mechanical oscillating system of clockworks or for movements themselves.
  • the object of the invention is to provide functional elements, in particular for the vibration system of mechanical watches, which have improved lubricity and surface hardness.
  • vibration system in the context of the invention in particular the balance spring or spiral spring, the oscillating or balance wheel, the escape wheel and the armature.
  • the CVD deposition or the epitaxial deposition of the polycrystalline silicon takes place, for example, in such a way that the starting material obtained thereby forms a thin layer or wafer whose thickness is then equal to or substantially equal to the thickness of the functional elements to be produced, for example is equal to the width that have individual turns of the coil springs to be produced in the direction of its spring axis, or from the polycrystalline silicon starting material produced by CVD deposition first wafers or thin layers are obtained, from which then the functional elements are generated.
  • polycrystalline silicon is obtained by sublimation using the PVT method (Physical Vapor Transport (PVT)).
  • PVT Physical Vapor Transport
  • the polycrystalline silicon is formed by sublimation of silicon or silicon carbide on the barrier layer with the thickness which is then equal to or substantially equal to the thickness that is to have to be produced coil spring.
  • the production of the functional elements for oscillatory systems for movements done by cutting out of the non-metallic material, for example by means of a laser.
  • the abovementioned materials in particular those from the group of ceramic material, diamond, semiconductor material, for example silicon or germanium, silicon carbide and / or silicon nitride for coil spring of vibrating systems, but also for others Functional elements are suitable and in particular also allow production of the springs with the required very small turns cross-section or other functional elements with fine structures, even by lasers despite the high thermal load during laser cutting.
  • etching or masking and etching processes are also suitable in which e.g. the masks required for the etching are preferably produced in a photo-masking process using photoresist.
  • the non-metallic material is used for example as a flat material (plates of the non-metallic material) or as a wafer, which is then processed, for example, in thickness already on the finished size of the height of the functional elements to be produced.
  • the functional element of the above-mentioned Werstoffen in particular also made of glass material or silicon material, in particular when using etching or laser cutting process, the possibility to form the functional element so that the physical properties of the functional element (eg swing wheel and / or balance spring) containing or are optimized by the functional element formed oscillating system.
  • the functional element eg swing wheel and / or balance spring
  • the inventive method further provides to coat the respective functional element on its outer surfaces, for example with silicon dioxide (SiO 2 ) and / or with a DLC coating (Diamond like carbon coating).
  • silicon dioxide SiO 2
  • DLC coating Diamond like carbon coating
  • the functional element which is made of the aforementioned materials, for example silicon material or glass material or a ceramic material, coated after laser cutting with diamond or nanocrystal material, for example using the CVD method known in the art.
  • the thickness of this coating is then for example 5 microns.
  • the functional element is a spiral spring, it is preferably produced in one piece with internal and / or external fastening elements, ie, for example, with the spiral roll inside and the outer fastening section.
  • the functional element is a vibrating wheel whose body consists at least in a partial region, but preferably entirely of a silicon material or of a glass material.
  • a flat material e.g. used in the form of wafers, as they are also used in the manufacture of microelectronic components.
  • the shaping of the respective oscillating wheel body then takes place, for example, by laser cutting from the starting material or by suitable etching techniques.
  • the starting material is a silicon material, it can in particular also be produced in polycrystalline form by sublimation, thus by depositing a sublimate.
  • the method can also be embodied in a further development of the invention such that the cutting takes place by means of a laser.
  • the cutting by means of a laser with simultaneous treatment with a fluid jet, such as water jet, is also conceivable.
  • the material used is a flat or plate-shaped material.
  • a flat or plate-shaped rolled material can be used as the material.
  • the material is, for example, a polycrystalline diamond or the functional element is coated with diamond, for example in a CVD process, and / or with a DLC coating (diamond-like carbon coating).
  • the functional element can be produced in one piece with further functional elements, for example when designed as a spiral spring with a fastening element for fastening to a shaft of the oscillating system and / or with a fastening section for fastening to a circuit board or to an adjustment element of the circuit board.
  • the material used is ceramic material or monocrystalline or polycrystalline silicon.
  • As the ceramic material monocrystalline or polycrystalline silicon carbide can be used.
  • the material used is the material zirconium oxide (ZrO 2 ).
  • the coil spring is manufactured with a maximum diameter of about 4 to 10 mm.
  • the functional element or the spiral spring is produced with a height in the range of 0.05-0.2 mm, preferably with a height of approximately 0.07-0.16 mm.
  • the functional element is made using diamond with a height of about 0.07 mm.
  • the functional element is manufactured using the ceramic material with a height of about 0.12 mm.
  • the functional element or the spiral spring is produced with a winding spacing of at least 0.05 to 0.3 mm.
  • the spiral spring thus produced has a rectangular winding cross-section.
  • the coil spring has a winding cross-section of about 0.025 mm x 0.07 mm.
  • the functional element may for example also be designed so that it integrally with other functional elements, for example when trained as a spiral spring with a fastener for attachment to a shaft of the oscillating system and / or with a mounting portion for attachment to a board or on a Setting element of the board is made.
  • the diamond material is a polycrystalline diamond material.
  • the material silicon is a crystalline or monocrystalline silicon, for example a plate-shaped wafer made of silicon.
  • the material may also be germanium.
  • the functional element is coated with silicon oxide or silicon dioxide. It is also conceivable that it is coated with diamond, preferably with nanocrystaline material.
  • the ceramic material is silicon carbide.
  • the material can also be zirconium oxide (ZrO 2 ). If the functional element is a spiral spring, this has a maximum diameter of about 4 to 10 mm. In particular, when the functional element is designed as a spiral spring, it has a height in the range of 0.05 to 0.2 mm, preferably a height of approximately 0.07 to 0.16 mm. When trained as a spiral spring this is made using diamond with a height of about 0.07 mm. In particular, when the functional element is designed as a helical spring, this is produced when the ceramic material is used with a height of approximately 0.12 mm
  • the functional element when forming the functional element as a spiral spring, this has a winding spacing of at least 0.05 to 0.3 mm.
  • the coil spring has a rectangular winding cross section and the winding cross section is about 0.025 mm x 0.07 mm.
  • the winding cross-section When using silicon, the winding cross-section is about 0.04 mm x 0.12 mm.
  • a coil spring 1 of the so-called balance of a vibration system of a movement such as a clockwork for a wristwatch shown.
  • the coil spring 1, which has a plurality of turns 2, in the illustrated embodiment is made in one piece with a central roller 3, with which it can be fastened on a shaft, not shown, of the oscillating system (balance).
  • the outer end of the coil spring 1 is still formed integrally with a reinforced attachment portion 4.
  • the coil spring 1 has a maximum diameter of about 6.4 units, a pitch of at least 0.12 units and a height of about 0.16 units, wherein the cross section of the coil spring 1 at their turns 2 between the roller 3 and the connector 4 has a width radially to the axis of the coil spring of about 0.03 and a height of about 0.16 units.
  • a unit is for example 1 mm.
  • the peculiarity of the coil spring 1 is that it is made by cutting out of a starting material 5 in the form of a non-metallic sheet 5, for example by laser cutting with a laser beam 6.1 of the laser 6 or using a laser-assisted high-precision cutting device.
  • the starting material 5 is a material which is manufactured with high precision with low tolerances, in particular also with regard to the material thickness and with regard to the planar formation of the material.
  • the FIG. 4 shows in a simplified partial representation again the flat or starting material 5, together with a combined laser and fluid jet 7 for cutting out the coil spring 1.
  • the laser fluid jet 7 in this embodiment consists of the fluid jet 7.1, for example is formed by a highly concentrated water jet, as well as from the laser beam 7.2, which is arranged in the fluid jet 7.1 and also optically guided in particular by total reflection and additionally bundled. Due to the combined laser and fluid jet 7, a very smooth cut 8 is produced in the flat material 5 without structural change, the fluid jet 7.1 mainly also serving for the cooling.
  • FIGS. 5 and 6 show a starting material 9 which, in contrast to the starting material 5, is not a flat starting material, but a rolled material, ie a material which is produced by rolling an originally flat material.
  • the number of turns of the starting material 9 corresponds to the number of turns 2 of the spiral springs 1 to be produced. From this starting material 9, the spiral springs 1 are separated by cutting perpendicular to the longitudinal axis of the starting material 9 with the required height, as in the FIG. 6 is indicated by the broken line 10, which in turn, for example, the laser beam 6.1 or the combined laser and fluid jet 7 is a laser array used for separating.
  • the treatment solution is then suitable e.g. a hydrofluoric acid-nitric acid mixture or an alkaline etching mixture.
  • coil springs 1, in particular those made of silicon or ceramic with a surface coating, for example of silicon oxide, silicon dioxide, silicon oxynitride, silicon carbide, diamond and / or with a DLC coating.
  • the deposition by means of the PVT process is preferably carried out with those in FIG. 7 specified method steps.
  • a flat, plate-shaped silicon substrate 11 is provided (position a) of FIG. 7 ).
  • This silicon substrate 11 is then provided on at least one surface side by thermal treatment or thermal oxidation, for example at a process temperature in the range between 900 ° C and 1200 ° C with a layer 12 of silicon dioxide (SiO 2 ), whose thickness is about 1 micron (position b) the FIG. 7 ).
  • a starting layer 13 of polycrystalline silicon is then applied to the layer 12 of silicon dioxide, for example by an LPCVD method (low pressure chemical vapor deposition) or by an LPE method or by a CVD method (position c ) of the FIG. 7 ).
  • the final formation of the polycrystalline silicon layer 14 takes place with a thickness corresponding to the height of the spiral spring 1 to be produced, for example with a thickness of 100 ⁇ m-140 ⁇ m.
  • the starting material for example the silicon or silicon carbide as a sublimate by sublimation (PVT process), ie by deposition in a protective gas atmosphere from a heated source of the starting material, for example for the silicon or silicon carbide.
  • the coil springs 1 are manufactured by masking and etching from the starting material thus prepared, wherein the layer 12 of silicon oxide serves as a barrier layer during the etching.
  • FIGS. 8 and 9 generally designated 101 swinging wheel balance is disk-shaped, ie with a designed as a flat disc and an opening 102 for securing a wave troubling body 103.
  • This consists of a glass or silicon material, such as silicate glass, or borosilicate or aluminoborosilicate or polycrystalline or single crystal silicon or silicon carbide.
  • the production takes place by etching or laser cutting, for example laser cutting or laser water cutting, etc., from a flat starting material.
  • a peculiarity of the vibrating wheel 101 is u.a. also in that it is disc-shaped, with the particular advantage that the disk-shaped training in moving, i. when oscillating swinging back and forth of the turbulizer 103 about the axis of the shaft 102 fixed in the shaft air turbulence are largely prevented and thereby also impaired accuracy of accuracy by Heilverwirbelung be avoided.
  • the vibrating wheel 1 made of glass or silicon material also consist in the fact that these materials are antimagnetic, so influencing the balance or the accuracy by magnetic fields from the outside is not given.
  • the materials used for the oscillating wheel 101 have a low coefficient of expansion, in any case an expansion coefficient which is substantially lower than that of materials that are commonly used for the balance of mechanical watches. Due to the low coefficient of thermal expansion, there is no effect on the accuracy of accuracy due to temperature fluctuations.
  • materials in the form of wafers are again suitable be used by microelectronic components or in the MEM process. Such materials are available on the market at low cost. Also conceivable is the use of polycrystalline silicon, which is produced in the manner described above by the PVT process.
  • the physical properties of the vibrating wheel 101 can be improved by the application of coatings, for example by the application of a ring or other geometric shape elements, also by coatings, especially on the periphery of e.g. With gold coatings, the physical properties, in particular the moment of inertia, can be significantly improved.
  • the Figures 10 shows, as a further embodiment, a vibrating wheel 101a, which differs from the vibrating wheel 101 only in that openings 104 are provided in the disc-shaped disturbing body 103a in order to improve the dynamic moment of inertia of the vibrating wheel.
  • FIGS. 11 and 12 show a vibrating wheel 101b, in which the Schwingrad- or troublemaker 103b is designed in a ring-like manner with spoke-like elements 105 which connect the ring of the troubled body 103b with an inner scar-like, the opening 102 having portion 106, which is also integral with the spoke-like elements 105 is formed.
  • FIGS. 13 and 14 show as a further embodiment a vibrating wheel 101c, which differs from the vibrating wheel 101b substantially only in that the oscillating wheel 101c is formed on one side with a recess 107, in that both the annular balance body 103 in the region of its inner annular surface , as well as the web-like portions 105 and the scar-like portion 106 with a compared to the outer portion of the annular Trouser 103 reduced thickness is executed.
  • the indicated with 108 coil spring balance can be partially arranged so that not only results in a particularly compact training, but also a training Heilverwirbellieux the oscillation of the balance and the associated coil spring and thereby largely avoids inaccuracies.
  • the vibrating wheels 101, 101a-101c are, for example, produced in one piece with other functional elements. In principle, it is also possible to manufacture the vibrating wheels in one piece with the balance or spiral spring.
  • FIGS. 15 and 16 show an oscillating wheel 101 d a balance with integrated clamp attachment for attachment to a shaft 109.
  • the similar to the vibrating wheel 101 b and 101 c formed vibrating wheel 101 d in the scar-shaped portion 106 with a shaft 109 receiving, deviating from the circular opening 110, ie formed in the illustrated embodiment of a triangular opening 110 which is bounded at its triangle sides by elastically deformable web-like portions 111.
  • These are transversely to their longitudinal extent, that is elastically deformable radially to the central axis of the opening 110 and are resilient against the mounted shaft 109, ie the vibrating wheel 101d is held by a press fit on the shaft 109.
  • the web-like sections 111 are produced in one piece with the oscillating wheel 101d or with the scar-like section 106, in such a way that they respectively merge with one end 111.1 into the scar-like section 106.
  • the web-like portions 111 are separated from the scar-like portion 106 respectively by slit-shaped recesses 112 over the greater part of their length.
  • the sections 111 are separated from the scar-like section 106, but there are approximately hook-shaped, so that each end 111.2 abuts against an integrally formed projection 113 at the end adjacent the slot-shaped end Support recess 112, in the axial direction both perpendicular to the longitudinal extent of the respective web and in the axial directions parallel to the longitudinal extent of the web.
  • 201 is a coil spring for the oscillating system or for the balance of a clockwork oscillating system, for example a watch movement.
  • the coil spring 201 has a plurality of turns 202 and is in the illustrated embodiment made in one piece with a central roller 203, with which the coil spring 201 can be mounted on a shaft, not shown, of the oscillating system (balance).
  • the outer end of the coil spring is further formed integrally with a reinforced attachment portion 204.
  • the coil spring has a maximum diameter of about 4 to 10 mm.
  • the coil spring 201 has a rectangular winding cross section in such a manner that the larger cross-sectional side is oriented in the direction of the axis of the coil spring 201.
  • the height of the coil spring 201 is in the range of 0.05 to 0.2 mm, preferably in the range between 0.7 and 0.16 mm, with a cross-sectional width corresponding to about one third of the cross-sectional height.
  • the winding cross-section is preferably about 0.4 mm ⁇ 0.12 mm.
  • the coil spring 201 is provided with a surface coating, for example of silicon oxide, silicon dioxide, silicon nitride and / or silicon carbide.
  • polycrystalline silicon is used, namely, that obtained by a PVT process.
  • the production of the respective spiral spring 201 from the starting material is preferably carried out by etching using etching masks and an etchant suitable for etching silicon.
  • Other methods of "cutting out" the respective coil spring 201 from the starting material are also conceivable, for example, cutting with a laser fluid jet, i. with a bundled laser beam guided in a fluid jet, for example in a water jet. This combined laser and fluid jet achieves a very smooth cut of the starting material without changing the polycrystalline structure of the silicon starting material.
  • this starting material is produced, for example, by a PVT process, in the manner described above in connection with US Pat FIG. 7 described.
  • FIG. 19 shows in simplified representation and in plan view, an escape wheel 205 and the FIG. 20 also in a simplified representation and in plan view the armature 206 of the mechanical vibration system.
  • Both the escape wheel 205 and the armature 206 are made of the non-metallic material, preferably of the polycrystalline silicon source material formed by PVT, by etching using etch masks and etchant suitable for etching silicon, or by, for example, cutting out a laser, preferably with a combined laser and fluid jet, as described above for the balance or spiral spring 1 or 201.
  • the escape wheel 205 and the armature 206 are also provided, for example, with a surface coating, for example of silicon oxide, silicon dioxide, Silicon nitride and / or silicon carbide.
  • a surface coating for example of silicon oxide, silicon dioxide, Silicon nitride and / or silicon carbide.
  • the coil spring 1 or 201, the oscillating wheel 101, 101a - 101d and the armature wheel 205 and the armature 206 for example, still DLC coated, ie provided with a diamond-like plastic coating, the further improved properties, especially with respect to surface hardness and lubricity.
  • the invention has been described in connection with the production of functional elements for the mechanical vibration system of the mechanical movement of a clock, in particular wristwatch.
  • it is possible to manufacture other mechanical functional elements of a movement and in particular a watch movement for watches, such as gears of the movement in the same way.
  • the coil spring 1 is integrally formed with the roller 3 and the mounting portion 4. Basically, it is also possible to manufacture the coil spring 1 without the roller 3 and / or without the attachment portion 4 and / or form the coil spring in one piece with other functional elements.
  • the invention has been described above in connection with the production of functional elements for the mechanical vibration system of the mechanical movement of a watch, in particular a wristwatch. Basically, there is the possibility of other mechanical functional elements of a movement and in particular a watch movement for wristwatches, such as gears of the In the same way, specifically from the silicon deposited by the PVT process.

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  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
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EP17155135.1A 2007-10-18 2008-10-14 Procédé de fabrication d'éléments fonctionnels pour des mouvements d'horlogerie et élément fonctionnel fabriqué selon ce procédé Withdrawn EP3203328A1 (fr)

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
DE102007050330 2007-10-18
DE102007062993 2007-12-21
DE102008008362 2008-02-08
DE102008009747 2008-02-18
DE102008021816 2008-04-30
DE102008021817 2008-04-30
DE102008026646 2008-06-04
DE102008029429A DE102008029429A1 (de) 2007-10-18 2008-06-23 Verfahren zum Herstellen von mechanischen Funktionselementen für Uhrwerke sowie nach diesem Verfahren hergestelltes Funktionselement
EP14157676.9A EP2741149A1 (fr) 2007-10-18 2008-10-14 Procédé de fabrication d'éléments fonctionnels pour des mouvements d'horlogerie et élément fonctionnel fabriqué selon ce procédé
EP08839033A EP2201428A1 (fr) 2007-10-18 2008-10-14 Procédé de fabrication d'éléments fonctionnels pour des mouvements d'horlogerie et élément fonctionnel fabriqué selon ce procédé

Related Parent Applications (2)

Application Number Title Priority Date Filing Date
EP08839033A Division EP2201428A1 (fr) 2007-10-18 2008-10-14 Procédé de fabrication d'éléments fonctionnels pour des mouvements d'horlogerie et élément fonctionnel fabriqué selon ce procédé
EP14157676.9A Division EP2741149A1 (fr) 2007-10-18 2008-10-14 Procédé de fabrication d'éléments fonctionnels pour des mouvements d'horlogerie et élément fonctionnel fabriqué selon ce procédé

Publications (1)

Publication Number Publication Date
EP3203328A1 true EP3203328A1 (fr) 2017-08-09

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EP17155135.1A Withdrawn EP3203328A1 (fr) 2007-10-18 2008-10-14 Procédé de fabrication d'éléments fonctionnels pour des mouvements d'horlogerie et élément fonctionnel fabriqué selon ce procédé
EP08839033A Ceased EP2201428A1 (fr) 2007-10-18 2008-10-14 Procédé de fabrication d'éléments fonctionnels pour des mouvements d'horlogerie et élément fonctionnel fabriqué selon ce procédé
EP14157676.9A Withdrawn EP2741149A1 (fr) 2007-10-18 2008-10-14 Procédé de fabrication d'éléments fonctionnels pour des mouvements d'horlogerie et élément fonctionnel fabriqué selon ce procédé

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EP08839033A Ceased EP2201428A1 (fr) 2007-10-18 2008-10-14 Procédé de fabrication d'éléments fonctionnels pour des mouvements d'horlogerie et élément fonctionnel fabriqué selon ce procédé
EP14157676.9A Withdrawn EP2741149A1 (fr) 2007-10-18 2008-10-14 Procédé de fabrication d'éléments fonctionnels pour des mouvements d'horlogerie et élément fonctionnel fabriqué selon ce procédé

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EP (3) EP3203328A1 (fr)
DE (1) DE102008029429A1 (fr)
WO (1) WO2009049591A1 (fr)

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DE102013113380B3 (de) * 2013-11-27 2015-04-09 Damasko Gmbh Verfahren zur herstellung von funktionselementen für mechanische uhrwerke und funktionselement
CH708925A1 (fr) * 2013-12-05 2015-06-15 Tgm Développement Sa C O Etude Tissot Pièce mécanique en diamant pour mouvement de montre.
CH708926A3 (fr) * 2013-12-05 2015-07-31 Tgm Développement Sa C O Etude Tissot Pièce mécanique en diamant et procédé de fabrication d'une pièce mécanique en diamant pour mouvement de montre.
WO2015087252A1 (fr) 2013-12-11 2015-06-18 Damasko Gmbh Ressort hélicoïdal destiné à un mouvement d'horlogerie mécanique
EP2942147B1 (fr) 2014-05-08 2018-11-21 Nivarox-FAR S.A. Mécanisme d'échappement d'horlogerie sans lubrification
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EP3783445B1 (fr) 2019-08-22 2023-06-14 ETA SA Manufacture Horlogère Suisse Mécanisme régulateur d'horlogerie à haut facteur de qualité et à lubrification minimale

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