WO2015125081A1 - Pièce micromécanique avec surface de contact réduite et son procédé de fabrication - Google Patents

Pièce micromécanique avec surface de contact réduite et son procédé de fabrication Download PDF

Info

Publication number
WO2015125081A1
WO2015125081A1 PCT/IB2015/051221 IB2015051221W WO2015125081A1 WO 2015125081 A1 WO2015125081 A1 WO 2015125081A1 IB 2015051221 W IB2015051221 W IB 2015051221W WO 2015125081 A1 WO2015125081 A1 WO 2015125081A1
Authority
WO
WIPO (PCT)
Prior art keywords
micromechanical component
elevations
contact surface
micromechanical
recesses
Prior art date
Application number
PCT/IB2015/051221
Other languages
German (de)
English (en)
Inventor
Konrad Damasko
Original Assignee
Damasko Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Damasko Gmbh filed Critical Damasko Gmbh
Publication of WO2015125081A1 publication Critical patent/WO2015125081A1/fr

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C99/00—Subject matter not provided for in other groups of this subclass
    • B81C99/0075—Manufacture of substrate-free structures
    • B81C99/0095—Aspects relating to the manufacture of substrate-free structures, not covered by groups B81C99/008 - B81C99/009
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/035—Microgears

Definitions

  • the present invention relates to a micromechanical component.
  • the micro-mechanical component has several contact surfaces. Each of the contact surfaces acts in operation with a mating contact surface of another micromechanical component. Each of the contact surfaces of the micromechanical component has a plurality of first elevations and a plurality of first depressions. Furthermore, the invention relates to a method for producing a micromechanical component.
  • a mechanical movement has as its central components a barrel with tension spring, gear train, escapement and oscillating system (balance).
  • the barrel with tension spring provides the drive of the movement.
  • the power is transmitted starting from the barrel via the gear train to the escape wheel, which represents a part of the escapement.
  • the gear train drives the hands of the watch and translates the spring force stored in the tension spring into rotational motions of different speeds, indicating seconds, minutes, hours and so on.
  • the task of the escapement is to supply the oscillating organ, the balance, with a minute amount of energy each time it passes the "dead point.”
  • the "dead point” is the position of the balance, in which it is nominally at rest located.
  • the amplitude of the balance is then 0 ° (zero crossing).
  • the balance oscillates evenly on both sides of the dead point with a certain amplitude and releases a tooth of the escape wheel at each zero crossing. This allows the gears and the hands to turn in small leaps at a regular frequency controlled by the balance.
  • the escapement releases the gear, it rests, while the balance remains in constant motion until the energy stored in the tension spring is released.
  • the two arms of the anchor each comprise an anchor stone ("pallet"), which usually consists of ruby, sapphire or garnet.
  • the anchor stones are either inserted into the two arms of the anchor or are made in one piece together with the anchor.
  • the anchors alternately engage in each one tooth of the escape wheel and hold it so firmly. Every time the balance passes through the dead spot in one direction or the other, it engages the anchor fork via the so-called lever mark (ellipse).
  • lever mark ellipse
  • the escape wheel Apart from the brief moment in which the escape wheel is connected to the balance wheel via the anchor fork, it oscillates as an oscillating element completely freely and independently of its drive mechanism. This is a basic requirement for the regular course of the watch. The few types of inhibitors which have this advantage are called "free inhibition.”
  • the anchor inhibition is therefore a free inhibition developed only towards the middle of the 18th century.
  • the pallet In the power transmission between the teeth of the escape wheel and the pallets of the armature, these two parts move under pressure against each other. At the beginning of the movement, the pallet is located on a contact surface of an escape wheel tooth, the so-called resting surface. As the pallet moves against the escape wheel, a frictional force occurs.
  • European Patent Application EP 2 107 434 A1 discloses a micromechanical component, in particular in the gear train of a mechanical timepiece. In this case, the micromechanical component is in contact with at least one second component, so that during operation of the timer a relative movement occurs between the contact surfaces of the first micromechanical component and the second micromechanical component.
  • At least the first micromechanical component is made of a hard and dimensionally stable non-metal such that the at least one contact surface between the first micromechanical component and the second micromechanical component has a length dimension of at most 200 pm perpendicular to the direction of said relative movement. Furthermore, said contact surface extends in the direction of this relative movement.
  • the micromechanical component according to the invention may be a component built into an anchor escapement.
  • the contact surfaces, which are subject to friction, are at least designed as an edge and provided with a coating. The contact surface designed as an edge can be reduced to a point-like dimension.
  • European Patent Application EP 2 236 455 A1 shows a micromechanical component with reduced wear.
  • the micromechanical component is in contact with a friction partner.
  • At least that surface of the micromechanical component which is in contact with the friction partner is provided with a cover layer, which consists predominantly of an SP 2 hybridized carbon.
  • the finishing layer may be applied with a thickness that is smaller than the roughness depth. It is likewise possible to form the layer thickness of the final layer greater than the roughness depth. Depending on the layer Thickness then results in a different behavior of the top layer when shrinking.
  • European Patent EP 1 504 200 B1 discloses a method for producing a sliding element.
  • a diamond layer having a mean maximum roughness Rz On a surface of a substrate, a diamond layer having a mean maximum roughness Rz is provided.
  • the diamond layer has reproducible recesses for absorbing abrasion.
  • the recesses are made with a predetermined depth in the surface of the substrate by applying a diamond layer by means of a CVD method.
  • the resulting mean maximum roughness Rz of the diamond layer is smaller than the depth of the recesses.
  • the recesses can be made mechanically, by etching or by laser.
  • the resulting linear structures are oblique or transverse to a sliding direction and are formed accordingly.
  • the linear structures have a width between 0.5 m and 10 mm. In this case, a proportion of 1% to 95% of the surface of the diamond layer is formed by the recesses.
  • US Pat. No. 5,428,259 discloses a micromechanical vibration sensor or a micromechanical motor in which the individual components are produced by means of microsystem technology. The problem of contact contact of the individual components is not addressed here.
  • a further object of the invention is to provide a method with which at least one micromechanical component which is in contact with another component can be produced in such a way that the friction between the individual components is reduced and a constant value during use of the components Is accepted.
  • the production of the at least one component can be solved inexpensively, reproducibly and in terms of manufacturing technology.
  • the micromechanical component is manufactured such that it has a plurality of contact surfaces.
  • the plurality of contact surfaces cooperate with a mating contact surface of another micromechanical component.
  • each contact surface of the micromechanical component is designed such that it has a plurality of first elevations and first depressions.
  • the first elevations and first depressions of each contact surface itself carry a plurality of second elevations and second depressions.
  • the number and size of the second elevations is selected such that some of the second elevations have each formed a flattening when the micromechanical component interacts with the further micromechanical component.
  • a sum of the flattenings of the second elevations is smaller than a maximum possible effective contact area of the further micromechanical component which is in contact with the flattenings of the second elevations.
  • the aim is to minimize the friction between the individual micromechanical components. Applying this principle in particular to a micromechanical component, which is part of the anchor escapement, this achieves an extension of the service life, the accuracy and an extension of the maintenance intervals of a timepiece. It is advantageous if a proportion of the flattenings to the maximum possible effective contact surface is at most 80% and at least 2%, preferably at most 50% and at least 2% and particularly preferably at most 30% and at least 2%.
  • the first depressions and the first elevations on the contact surface of the micromechanical component have a wave-shaped structure. Another possibility of the structure on the contact surface of the micromechanical component is that the elevations and the first depressions together form a trapezoidal structure.
  • the first recesses of each contact surface of the micromechanical component are designed to receive a lubricant.
  • the lubricant may be in liquid, pasty or solid form.
  • Another advantage of the depressions is that the depressions can also absorb abrasion in addition to the lubricant, which occurs when the micromechanical components come in and thus forms the resulting flattenings.
  • a channel may be formed which starts from at least one of the contact surfaces of the micromechanical component and extends into the material of the micromechanical component.
  • the micromechanical component consists of a first plate-shaped part and a second plate-shaped part which are connected to one another. In this case, before connecting the first plate-shaped component and the second plate-shaped component, the channel is formed in the first plate-shaped component or second plate-shaped component.
  • the micromechanical component may additionally be provided with a coating.
  • the mechanical properties, as well as the wear of the contact surfaces between the micromechanical components, depend essentially on the proportion of traction from the surface.
  • a roughness depth specification does not provide any information about the proportion of the bearing surface at the maximum possible effective contact surface.
  • a surface or contact surface with a small roughness depth can form a smaller proportion of the bearing surface than a contact surface with a large roughness depth. It must therefore be examined in individual cases, how high the pressure forces between the individual micromechanical components, which act on the sum of the bearing surfaces and whether then the sum of the bearing surfaces can be advantageously reduced.
  • a reduction of the sum of the bearing surface leads to a reduction of the total friction and according to the invention advantageously creates space for lubricant and abrasion, which arises from the interaction of the two micromechanical components.
  • the contact area between the individual teeth of the escape wheel and the escapement is advantageously designed such that a proportion of the sum of the supporting surfaces is at most 80%.
  • the surface apposition force of a closed surface is bypassed.
  • the anchor pallets or the teeth of the escape wheel or its sliding surface (contact surface) z. B. be provided with a central channel, which serves to receive a lubricant.
  • proportion of the bearing surface, pressure load of the surface support portion and the surface roughness of the wings with lubricant and / or suitable coating tion can already set a value of the sliding friction coefficient of less than 0, 1.
  • the size of the effectively possible contact surface between the pallet and a tooth of the escape wheel is already determined by the introduction of the first depressions or of the channel into the contact surface greatly reduced.
  • the first wells and also the channel can be filled with a lubricant.
  • the present invention provides in a preferred embodiment that the proportion of the bearing surface at the maximum possible effective contact surface is at most 80%.
  • the contact surfaces between the teeth of the escape wheel and the anchor escapement are formed from an extremely hard material, as is possible, for example, with a photosensitive glass from Schott. This photosensitive glass is sold under the name Foturan®, which can be excellently structured due to its photosensitivity.
  • the micromechanical component is thus made of a non-metallic glass material.
  • a channel in addition to the first recesses, can also be worked out, which extends into an arm of the escape wheel.
  • This channel thus also increases the lubricant reservoir.
  • the escape wheel consists of a first plate-shaped part and a second plate-shaped part.
  • the elaboration of the channel is carried out in at least one of the two plate-shaped parts with a photolithographic patterning process.
  • photolithographic patterning processes are known in silicon processing as MEMS processes. Conceivable in the elaboration or structuring are also methods that work with micro-beams or with laser. Also, a mechanical processing is conceivable.
  • the two plate-shaped parts may consist of the same or of another, non-metallic glass material.
  • the connection of the two parts can, for. B. by a thermal diffusion joining process, a so-called. Bonding or Waferbonden be performed.
  • the proportion of the supporting surface can be further reduced.
  • a reduction to a proportion of the bearing surface of 30% to 10% is conceivable, but it must be at least 2% of the maximum possible effective contact area, to possibly more space for the lubricant to be introduced, such.
  • the dimension of the supporting surface is directly related to the first recesses, the second recesses and possibly the channel. The minimum depth of the second wells is calculated according to the
  • the ratio of the first recesses and the second recesses per maximum possible contact surface can be adjusted depending on the existing surface pressure.
  • the proportion of the sum of the bearing areas of the second elevations on the maximum possible effective contact area may be at least 80%, 70%, 60%, 50%, 40%, but at least 2%.
  • the depth of the first recesses and the second recesses it has been found that with a high proportion of the supporting surface (of eg 80%), the depth of the first recesses and the second recesses should be increased in size Commissioning of the two micromechanical components to a Warabrieb and in a certain way depending on the hardness and nature of a so-called.
  • Run-in of the surfaces of the two micromechanical components comes. It is advantageous in the present invention that the abrasion in the first wells of the Contact surface of the micromechanical component collects. In the event that the wells are too small, or the proportion of the bearing surface too high, this abrasion is distributed uncontrollably in the environment of the component. If the ratio of the proportion of the bearing surface is correctly selected, or if the first depressions are correctly designed, the lubricant introduced in the depressions or in the channel can bind the first abrasion in the first depressions. This is particularly preferably when using a solid lubricant.
  • the friction between the micromechanical components can be reduced even further and the breaking strength of the base substrate, from which the micromechanical components are produced, can be further increased. This again leads to a reduction in the proportion of the bearing surface at the maximum possible effective contact area of the respective micromechanical component.
  • Such coatings are z. B. by sputtering, steaming, electroplating, etc. possible.
  • a CVD and a PVD method is preferably used with which z.
  • silicon nitrite, silicon carbide, carbon in the form of diamond, or DLC, or graphene, etc. are applied. After coating, the depressions and elevations in the layer surface are largely the same.
  • the method for producing a micromechanical component from a non-metallic glass material is characterized in that initially a plurality of contact surfaces are formed such that a plurality of first elevations and first depressions are formed at each contact surface of the micromechanical component. Likewise, a plurality of second ridges and second pits are formed on the outer surface of the first ridges and the first pits of each contact surface.
  • the removal of tips of the second elevations takes place. This removal takes place by the interaction of the micromechanical component with a mating contact surface of a further micromechanical Component. By removing the tips, a bearing surface of the second elevations is formed such that it is smaller than a maximum possible effective contact area of the first elevations.
  • the first elevations and the first depressions can be formed such that they have a wave-shaped structure. Another possibility consists in the formation of the first elevations and the first depressions in that together they form a trapezoidal structure.
  • the friction between the micromechanical component and the further micromechanical component can be reduced to the effect that a channel is incorporated in the material of the micromechanical component.
  • the channel starts from at least one contact surface and extends into the material of the micromechanical component.
  • the micromechanical component is constructed from a first plate and a second plate. In the production of the channel this is incorporated in a first plate. After cleaning the first plate, a second plate of the same or another glass material is applied flat. This application can z. Example by means of a thermal diffusion joining method, a so-called.
  • a mask is applied to the two connected plates, so that in a second step the corresponding micromechanical components can be structured by means of a lithography process.
  • the mask depicts the outer shape of the finished micromechanical component. It goes without saying that the mask and consequently also the component are positioned in such a way that a precisely defined position in the finished component is obtained during the microstructures (channel) worked out in the previous step.
  • the components by suitable micro-processing methods, such as these z. In the halfway conductor industry are sufficiently well-developed.
  • the finished outer contour of the components can, if necessary, a further treatment, z. B. by a polishing process such. B. by KAH etching.
  • a lubricant which further provides for a reduction of the friction between the two micromechanical components.
  • the lubricant collects in the first recesses, or in the channel of the micromechanical component.
  • lubricants are preferably pasty lubricants such. B. MoS2 is used, which are particularly suitable for the introduction of the lubricant in the first wells or the channel.
  • the pasty lubricants are less prone to migration when accelerated or centrifugal. According to the invention, a sliding friction coefficient of less than 0.15 is also desired. It should be noted that the Gleitreibiere depends on the roughness of the respective surface in which the bearing surface is formed.
  • Fig. 1 is a schematic plan view of an escapement showing the interaction of the armature with the escape wheel
  • FIG. 2 shows a perspective view of the micromechanical component according to the invention, which is an escape wheel
  • FIG. 3 shows an enlarged plan view of a toothed wheel of the micromechanical component with an indicated theoretical contact surface; an enlarged plan view of a wheel tooth of mikromechani see component; 5 shows a perspective and enlarged view of the region of the micromechanical component marked K in FIG. 2;
  • FIG. 6 shows a schematic view of a further embodiment of the contact surface of a toothed wheel of the micromechanical component
  • FIG. 7 shows a further embodiment of the micromechanical component, which consists of two connected plates
  • FIG. 8 shows a perspective and enlarged view of the region of the micromechanical component marked K in FIG. 7;
  • FIG. 9 is a plan view of the wheel tooth according to the embodiment of FIG.
  • FIG. 10 shows a schematic sectional view of part of the contact surface of a toothed wheel of the micromechanical component
  • 1 is a schematic sectional view of part of the contact surface of a wheel tooth of the micromechanical component with an envelope
  • FIG. 12 shows a schematic sectional view of a part of another embodiment of the contact surface of a toothed wheel of the micromechanical component
  • FIG. 13 shows a schematic sectional view of a part of the contact surface from FIG. 12 of a toothed wheel of the micromechanical component with an envelope
  • FIG. 14 shows a schematic sectional view of the interaction of the contact surface of the micromechanical component and the mating contact surface of a further micromechanical component
  • Fig. 15 is a schematic sectional view of the supporting surfaces formed on the first ridges
  • Fig. 16 is a schematic sectional view of the supporting surfaces formed on the first ridges of the embodiment of the contact surface of Fig. 12;
  • 17 shows a schematic sectional view of part of the contact surface of a toothed wheel of the micromechanical component, according to another
  • Figure 1 shows a plan view of an escapement with a balance 50, an armature 52 and an escape wheel 54, which are well known in the prior art.
  • the armature 52 has an input pallet 56 and an output pallet 58, which alternately come to rest against an armature tooth 60.
  • the escape wheel 54 is biased by the (not shown) elevator spring on the (also not shown) gear train in the direction of rotation D.
  • the resting surfaces of the anchor pallets 56, 58 do not point to the center of the escape wheel 54, but are at an angle Z to this.
  • the armature 52 is securely pressed by the escape wheel 54 to one of the limit pins 62.
  • FIG. 2 shows a perspective view of the micromechanical component 1 according to the invention, which is designed as an escape wheel.
  • the micromechanical component 1 is produced from a photosensitive glass by means of a photolithographic patterning process.
  • the photosensitive glass may, for. B. be a glass of the company Schott, which is sold under the name Foturan®.
  • micromechanical components 1 are patterned in a plate made of the photosensitive glass. After completion of the structuring process, the individual micromechanical components 1 are separated and can optionally be installed in a timer.
  • the micromechanical component has a plurality of wheel teeth 2.
  • FIG. 3 shows an enlarged plan view of a wheel tooth 2 of the micromechanical component 1.
  • the micromechanical component 1 has a multiplicity of wheel teeth 2.
  • Each of the wheel teeth 2 has a contact surface 3.
  • the maximum possible effective contact surface 30 has a plurality of first depressions 21 and a plurality of first elevations 1 1.
  • FIG. 5 shows a perspective and enlarged view of the region of the micromechanical component 1 labeled K in FIG. 2.
  • the maximum possible effective contact surface 30 of the Rad leopards 2 consists of a plurality of first recesses 21 and first elevations 1 first
  • the contact surface 3 of the Rad leopards 2 has a length L and a height H. Along the length L of the Rad leopards 2, the first elevations 1 1 and the first recesses 21 are arranged in a trapezoidal sequence.
  • Figure 6 shows a plan view of the contact surface 3 of a Rad leopards 2, according to another embodiment of the invention.
  • the first elevations 1 1 are statistically distributed over the contact surface 3. Between the first 1 1, the first recesses 21 are formed, or the first elevations 1 1 are separated from each other by the first recesses 21. It is obvious to a person skilled in the art that the embodiments of the arrangements of the first elevations 11 and the first depressions 21 shown in FIG. 5 and in FIG. 6 can not be regarded as limiting the inventions.
  • the arrangement of the first elevations 1 1 and the first recesses 21 can take on any shapes and distributions.
  • FIG. 7 shows a perspective view of a further embodiment of the micromechanical component 1.
  • the micromechanical component 1 consists of a first plate-shaped part 101 and a second plate-shaped part 102.
  • the first plate-shaped part 101 is permanently connected to the second plate-shaped part 102.
  • two plates of the structurable photosensitive and non-metallic glass are connected to one another and then provided with a mask, so that finally the micromechanical components 1 can be structured and thus produced from the two connected plates.
  • the first plate-shaped part 101 and the second plate-shaped part 102 are connected to one another in such a way that the channels 6 (see FIG. 8) are arranged in the structured wheel tooth 2.
  • FIG. 8 shows an enlarged view of the area marked K in FIG. As already mentioned in the description of FIG.
  • the micromechanical component 1 consists of a first plate-shaped part 101 and a second plate-shaped part 102. As can be seen from the description of FIG. 8, this relationship also extends into the art Rad leopard 2 of the micromechanical component 1 by. Here, however, a channel 6 is formed in one of the two plate-shaped parts 101, 102, which extends from the contact surface 3 into the material 7 of the micromechanical component 1, or its wheel tooth 2.
  • the positions of the channels 6 of the individual micromechanical components 1 are first patterned in a plate (not shown) of the photopatternable non-metallic glass. After a Cleaning this part, a second plate is connected to the first plate. This bonding can be done by conventional techniques known in semiconductor technology.
  • a mask is applied in exact registry on the two connected plates, so that the individual micromechanical components 1 can be produced from the bonded plates, or can be released.
  • the mask is applied so precisely that the previously structured channels 6 are also present and accessible in the wheel teeth 2 of the singulated micromechanical components 1.
  • FIG. 9 shows a top view of the gear tooth 2, according to the embodiment of the invention shown in FIG. Starting from the contact surface 3, the channel 6 formed extends into the material 7 of the wheel tooth 2. Of the contact surface 3 are further, the channel 6 surrounding the first elevations 1 1 and the first recesses 21 are formed.
  • FIG. 10 shows a schematic sectional view of part of the contact surface 3 of a wheel tooth 2 of the micromechanical component 1.
  • the outer surface of the Radeuxs 2 and the contact surface 3 of the Rad leopards 2 is formed of a plurality of first elevations 1 1 and first recesses 21.
  • the first elevations 11 and the first depressions 21 themselves carry a multiplicity of second elevations 12 and second depressions 22.
  • an envelope 16 is drawn in the sectional view of the part of the contact surface 3 of a gear tooth 2 of the micromechanical component 1 shown in FIG. 11, an envelope 16 is drawn. With the help of the envelope 16, it can be seen that in the embodiment shown here, the first elevations 11 and the first depressions 21 are trapezoidal in shape.
  • the first projections 11 and the first recesses 21 themselves carry a plurality of second projections 12 and second recesses 22.
  • the first recesses 21 have a depth T formed.
  • first elevations 11 and the second depressions 22 are arranged in a wave form. Analogous to the in 10, the first elevations 11 and the first depressions 21 likewise have second elevations 12 and second depressions 22.
  • the envelope 16 is shown, so that the wave-shaped arrangement of the first elevations 11 and the first depressions 21 can be seen better.
  • FIG. 14 shows a schematic sectional view of the interaction of the contact surface 3 of the micromechanical component 1 and a mating contact surface 4 of a further micromechanical component 5.
  • a lubricant 14 is introduced into the first recesses 21 of the micromechanical component 1.
  • the tips 18 of the first elevations 11 are removed. These tips 18 accumulate in the lubricant 14 provided in the first recesses 21. This removal, or shrinkage of the interaction of the micromechanical component 1 and the further micromechanical component 5 can also be carried out before the installation of the two micromechanical components 1, 5 in the timer.
  • the bearing surfaces 10 are shown, which form due to the interaction of the micromechanical component 1 with the further micromechanical component 5 at the first elevations 11.
  • the tips 18 of the second elevations 12 are removed by the interaction of the micromechanical component 1 with the further micromechanical component 5.
  • the bearing surfaces 10 are formed, which ultimately interact with the mating contact surface 4 of the further micromechanical component 5.
  • a plurality of bearing surfaces 10 are formed.
  • the first elevations 11 and the first depressions 21, as well as the second elevations 12 and the second depressions 22, in terms of number and Size is formed so that a sum of the formed bearing surfaces 10 of the second projections 12 is smaller than a maximum possible effective contact surface 30.
  • the maximum possible effective contact surface 30 is the surface of the Radeuxs 2, in the embodiment shown in Fig. 5. If the wheel tooth 2 has formed a channel 6, the effectively possible contact surface 30 is reduced by the surface of the channel 6.
  • FIG. 17 shows a schematic sectional view of part of the contact surface 3 of a wheel tooth 2 of the micromechanical component 1 according to a further embodiment of the invention.
  • the coating 8 may have a greater hardness than the material of the wheel tooth 2 or of the micromechanical component 1. Due to the greater hardness of the coating 8, it is also possible to reduce the load rating, which results from the sum of the individual bearing surfaces 10, which ultimately leads to a lower friction.

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)

Abstract

L'invention concerne une pièce micromécanique (1) et un procédé pour sa fabrication. La pièce micromécanique (1) possède plusieurs surfaces de contact (3) qui coopèrent avec une surface de contact conjuguée (4) d'une autre pièce micromécanique. Chaque surface de contact (3) de la pièce micromécanique (1) possède plusieurs premières élévations (11) et premiers creux (21). Les premières élévations (11) et les premiers creux (21) de la surface de contact (3) sont eux-mêmes formés de plusieurs secondes élévations (12) et seconds creux (22), le nombre et la taille des seconds creux (22) et des premières élévations (11) étant choisis de telle sorte qu'une somme des méplats (10) des secondes élévations (12) est inférieure à une surface de contact efficace maximale possible (30).
PCT/IB2015/051221 2014-02-19 2015-02-18 Pièce micromécanique avec surface de contact réduite et son procédé de fabrication WO2015125081A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102014102081.2 2014-02-19
DE102014102081.2A DE102014102081A1 (de) 2014-02-19 2014-02-19 Mikromechanisches Bauteil und Verfahren zur Herstellung eines mikromechanischen Bauteils

Publications (1)

Publication Number Publication Date
WO2015125081A1 true WO2015125081A1 (fr) 2015-08-27

Family

ID=52706216

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB2015/051221 WO2015125081A1 (fr) 2014-02-19 2015-02-18 Pièce micromécanique avec surface de contact réduite et son procédé de fabrication

Country Status (2)

Country Link
DE (1) DE102014102081A1 (fr)
WO (1) WO2015125081A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20210034015A1 (en) * 2018-02-07 2021-02-04 Patek Philippe Sa Geneve Micro-mechanical timepiece part

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5428259A (en) 1990-02-02 1995-06-27 Nec Corporation Micromotion mechanical structure and a process for the production thereof
EP1504200B1 (fr) 2002-04-24 2007-10-10 DIACCON GmbH Procede de production d' un element a glissement
US20080078386A1 (en) 2004-09-03 2008-04-03 Karl Andreas Feldhahn Respirator
EP2107434A1 (fr) 2008-04-02 2009-10-07 Manufacture et fabrique de montres et chronomètres Ulysse Nardin Le Locle SA Composant mécanique, en particulier dans le rouage d'un chronomètre mécanique
EP2236455A1 (fr) 2009-04-02 2010-10-06 GFD Gesellschaft für Diamantprodukte mbH Composant micromécanique avec une usure réduite

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5428259A (en) 1990-02-02 1995-06-27 Nec Corporation Micromotion mechanical structure and a process for the production thereof
EP1504200B1 (fr) 2002-04-24 2007-10-10 DIACCON GmbH Procede de production d' un element a glissement
US20080078386A1 (en) 2004-09-03 2008-04-03 Karl Andreas Feldhahn Respirator
EP2107434A1 (fr) 2008-04-02 2009-10-07 Manufacture et fabrique de montres et chronomètres Ulysse Nardin Le Locle SA Composant mécanique, en particulier dans le rouage d'un chronomètre mécanique
EP2236455A1 (fr) 2009-04-02 2010-10-06 GFD Gesellschaft für Diamantprodukte mbH Composant micromécanique avec une usure réduite

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
A. SCHUMANN: "Energieeffiziente Kunststoff-Gleitlager durch mikrostrukturierte Reibflächen", ERSCHIENEN IM TAGUNGSBAND ZUR 22. FACHTAGUNG TECHNOMER, 2011, pages 1 - 11
B. BHUSHA: "Adhesion and stiction: Mechanisms, measurement techniquesm, and methods for reduction", J.VAC. SCI.TECHNOL., vol. B21, no. 6, November 2003 (2003-11-01), pages 2262 - 2296
E. GRAHAM ET AL.: "Fabrication of micro-dimpled surfaces through micro ball end milling", INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, vol. 14, no. 9, 2013, pages 1537 - 1646
V.L. POPOV: "7 Kontakt zwischen rauen Oberflächen", 2010, SPRINGER-VERLAG, article "Kontaktmechanik und Reibung", pages: 85 - 107

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20210034015A1 (en) * 2018-02-07 2021-02-04 Patek Philippe Sa Geneve Micro-mechanical timepiece part
US11829107B2 (en) * 2018-02-07 2023-11-28 Patek Philippe Sa Geneve Micro-mechanical timepiece part

Also Published As

Publication number Publication date
DE102014102081A1 (de) 2015-08-20

Similar Documents

Publication Publication Date Title
EP2107434B1 (fr) Chronomètre mécanique
EP2511229B1 (fr) Composant micromécanique doté de flancs renforcés
EP3237764B1 (fr) Surface structurée à adhésion variable de manière étagée
EP2727880B2 (fr) Composant micromécanique tridimensionnel chanfreiné et son procédé de fabrication
DE102008061182A1 (de) Verfahren zum Herstellen eines Mikrobauteils
EP2236455B1 (fr) Composant micromécanique avec une usure réduite
EP3203328A1 (fr) Procédé de fabrication d'éléments fonctionnels pour des mouvements d'horlogerie et élément fonctionnel fabriqué selon ce procédé
EP2687916A1 (fr) Ancrage pour un échappement de montre dans une montre mécanique
CH703781A2 (de) Uhrrad und Uhr.
CH700863B1 (de) Gleitkomponente und Uhr.
DE102011076410A1 (de) Maschinenelement
DE202015009914U1 (de) Uhrreguliermechanismus, Uhrwerk für eine Uhr und Uhr mit einem solchen Mechanismus
DE102012211074A1 (de) Werkzeuge und Verfahren zum mechanischen Aufrauen
DE102013114211B3 (de) Spiralfeder für mechanische Uhrwerke
WO2015125081A1 (fr) Pièce micromécanique avec surface de contact réduite et son procédé de fabrication
EP2512277A2 (fr) Dispositif à adhésion commandable
DE10026477A1 (de) Schutzüberzug für metallische Bauelemente
CH702171A2 (de) Uhrenbestandteil und Uhr.
EP1233314A1 (fr) Mouvement d'horlogerie
EP3001256B1 (fr) Échappement à ancre
DE102011079959A1 (de) Lagerteil, insbesondere Lagerring oder Wälzkörper, für ein Wälzlager
WO2008152151A2 (fr) Dépôt de couche structuré sur plaquettes traitées en technologie des microsystèmes
DE102015014722B3 (de) Strickmaschine mit einem Führungskanal und einem darin geführten Strickelement
DE2733810A1 (de) Uhrenteil und verfahren zu seiner herstellung
EP4180879A1 (fr) Module micromécanique, son procédé de fabrication et son utilisation

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 15711577

Country of ref document: EP

Kind code of ref document: A1

122 Ep: pct application non-entry in european phase

Ref document number: 15711577

Country of ref document: EP

Kind code of ref document: A1