WO2015125081A1

WO2015125081A1 - Micromechanical component with a reduced contact surface area, and method for producing same

Info

Publication number: WO2015125081A1
Application number: PCT/IB2015/051221
Authority: WO
Inventors: Konrad Damasko
Original assignee: Damasko Gmbh
Priority date: 2014-02-19
Filing date: 2015-02-18
Publication date: 2015-08-27
Also published as: DE102014102081A1

Abstract

The invention relates to a micromechanical component (1) and to a method for producing same. The micromechanical component (1) has multiple contact surfaces (3) which interact with a counter contact surface (4) of another micromechanical component (5). Each contact surface (3) of the micromechanical component (1) has multiple first elevations (11) and first depressions (21), and the first elevations (11) and the first depressions (21) of the contact surface (3) have multiple second elevations (12) and second depressions (22), the number and size of the second depressions (22) and the first elevations (11) being selected such that the sum of the flattened sections (10) of the second elevations (12) is smaller than a maximally possible active contact surface area (30).

Description

MICROMECHANICAL COMPONENT WITH REDUCED CONTACT AREA AND METHOD FOR THE PRODUCTION THEREOF

description

The present invention relates to a micromechanical component. The micro-mechanical component has several contact surfaces. Each of the contact surfaces acts in operation with a mating contact surface of another micromechanical component. Each of the contact surfaces of the micromechanical component has a plurality of first elevations and a plurality of first depressions. Furthermore, the invention relates to a method for producing a micromechanical component.

Background of the invention

A mechanical movement has as its central components a barrel with tension spring, gear train, escapement and oscillating system (balance). The barrel with tension spring provides the drive of the movement. The power is transmitted starting from the barrel via the gear train to the escape wheel, which represents a part of the escapement. The gear train drives the hands of the watch and translates the spring force stored in the tension spring into rotational motions of different speeds, indicating seconds, minutes, hours and so on.

The task of the escapement is to supply the oscillating organ, the balance, with a minute amount of energy each time it passes the "dead point." The "dead point" is the position of the balance, in which it is nominally at rest located. The amplitude of the balance is then 0 ° (zero crossing). The balance oscillates evenly on both sides of the dead point with a certain amplitude and releases a tooth of the escape wheel at each zero crossing. This allows the gears and the hands to turn in small leaps at a regular frequency controlled by the balance. Between the brief moments in which the escapement releases the gear, it rests, while the balance remains in constant motion until the energy stored in the tension spring is released. Only during the brief moment during the so-called uplifting, a tiny amount of energy is returned to the balance via the escapement. The resulting jerky movements of the gear train are z. B. to observe the advance of the second hand. Dozens of different inhibitions have been proposed for the most even release of energy.

Today, virtually all mechanical watches are equipped with the same type, namely the "Swiss lever escapement".

In the case of the "Swiss lever escapement", the two arms of the anchor each comprise an anchor stone ("pallet"), which usually consists of ruby, sapphire or garnet. The anchor stones are either inserted into the two arms of the anchor or are made in one piece together with the anchor. The anchors alternately engage in each one tooth of the escape wheel and hold it so firmly. Every time the balance passes through the dead spot in one direction or the other, it engages the anchor fork via the so-called lever mark (ellipse). As a result, the armature releases one tooth each of the escape wheel via the respective pallet, which thus briefly advances and returns a tiny fraction of energy across the armature to the lever block and thus to the balance. Apart from the brief moment in which the escape wheel is connected to the balance wheel via the anchor fork, it oscillates as an oscillating element completely freely and independently of its drive mechanism. This is a basic requirement for the regular course of the watch. The few types of inhibitors which have this advantage are called "free inhibition." The anchor inhibition is therefore a free inhibition developed only towards the middle of the 18th century. In the power transmission between the teeth of the escape wheel and the pallets of the armature, these two parts move under pressure against each other. At the beginning of the movement, the pallet is located on a contact surface of an escape wheel tooth, the so-called resting surface. As the pallet moves against the escape wheel, a frictional force occurs. In order to move two bodies, which lie against each other with parallel flat surfaces and in which the two bodies are pressed against each other by a force, to move relative to each other, a force in the direction of movement must be applied. First, the static friction of the two bodies has to be overcome. When the force on overcoming the static friction is sufficient, the bodies begin to move against each other. In order to maintain a uniform motion then a lower force is sufficient. To maintain the movement, the sliding friction is overcome. In an anchor escapement, the frictional and normal forces are essentially transmitted by the torque of the escape wheel drive. This torque is ultimately generated by the tension spring and transmitted via the gear train and the escapement wheel drive.

If there is high friction, this reduces the amount of energy that is passed on to the balance. As a result, the running accuracy and the available power reserve are smaller than with a timer with low friction. In addition, the mentioned friction usually leads to a material removal, so wear, at the contact surfaces between the pallet and the teeth or the contact surface of the escape wheel. This can further reduce accuracy and replace the parts concerned from time to time. In order to minimize wear and friction, conventional escapements with an escape wheel made of steel and ruby pallets are required to use oils. However, these lubricants have the property by acceleration and centrifugal forces, such as this z. B. occur at the anchor and the escape wheel to migrate from the contact surfaces of both components. In order to prevent this, one tries to provide the contact surface with a friction-minimizing coating. The coating should therefore the migration of the Lubricants prevent what is only partially successful. This in turn requires that the movement must be serviced at regular intervals because the lubricants must be cleaned again and / or the escapement and the gear train. European Patent Application EP 2 107 434 A1 discloses a micromechanical component, in particular in the gear train of a mechanical timepiece. In this case, the micromechanical component is in contact with at least one second component, so that during operation of the timer a relative movement occurs between the contact surfaces of the first micromechanical component and the second micromechanical component. At least the first micromechanical component is made of a hard and dimensionally stable non-metal such that the at least one contact surface between the first micromechanical component and the second micromechanical component has a length dimension of at most 200 pm perpendicular to the direction of said relative movement. Furthermore, said contact surface extends in the direction of this relative movement. In particular, the micromechanical component according to the invention may be a component built into an anchor escapement. The contact surfaces, which are subject to friction, are at least designed as an edge and provided with a coating. The contact surface designed as an edge can be reduced to a point-like dimension.

European Patent Application EP 2 236 455 A1 shows a micromechanical component with reduced wear. The micromechanical component is in contact with a friction partner. At least that surface of the micromechanical component which is in contact with the friction partner is provided with a cover layer, which consists predominantly of an SP ² hybridized carbon. According to two different embodiments, the finishing layer may be applied with a thickness that is smaller than the roughness depth. It is likewise possible to form the layer thickness of the final layer greater than the roughness depth. Depending on the layer Thickness then results in a different behavior of the top layer when shrinking.

European Patent EP 1 504 200 B1 discloses a method for producing a sliding element. On a surface of a substrate, a diamond layer having a mean maximum roughness Rz is provided. The diamond layer has reproducible recesses for absorbing abrasion. The recesses are made with a predetermined depth in the surface of the substrate by applying a diamond layer by means of a CVD method. The resulting mean maximum roughness Rz of the diamond layer is smaller than the depth of the recesses. The recesses can be made mechanically, by etching or by laser. The resulting linear structures are oblique or transverse to a sliding direction and are formed accordingly. The linear structures have a width between 0.5 m and 10 mm. In this case, a proportion of 1% to 95% of the surface of the diamond layer is formed by the recesses.

US Pat. No. 5,428,259 discloses a micromechanical vibration sensor or a micromechanical motor in which the individual components are produced by means of microsystem technology. The problem of contact contact of the individual components is not addressed here.

US patent application US 2008/0078386 A1 discloses a respirator in which the air supply hose has a special topology to influence the flow resistance of the air. An interaction of two solids on specially structured contact surfaces is not disclosed. A. Schumann et. "Energy-Efficient Plastic Plain Bearings Through Microstructured Friction Surfaces" Published in the Proceedings of the 22nd Technical Meeting, Technology, ISBN 978-3-939382-10-2 Chemnitz 201 1, pp. 1-11, discloses the tribological logical optimization of the sliding contact "chain - slide rail", which has hitherto been limited to the incorporation of liquid and solid lubricants into the polymer materials or to the chemical bonding of slip additives. For In order to reduce the adhesive friction, surface structures are introduced in a friction partner. It is not intended that the surface structure changes by an enema process.

V. L. Popov; "Contact Mechanics and Friction", Springer-Verlag Berlin Heidelberg 2010, "7 Contact between rough surfaces", pp. 85-107, DOI 10.1007 / 978-3-642-13302-2_7 discloses that the surface roughness has an influence on the friction, Wear, adhesion, self-adhesive layers, etc. has. Nothing is disclosed regarding the change of surface texture due to an enema process.

Bhusha; J.Vac.Sci.Technol., Vol. B21, No. 6, Nov / Dec 2003, pp. 2262-2266 discloses the interaction of two surfaces with Indentations and elevations There is no mention of a reduction of the elevations due to an enema process.

E. Graham et al .; International Journal of Precision Engineering and Manufacturing, Vol. 14, 2013, No. 9, pp. 1537-1646 discloses the production of functional surfaces. The invention is based on the object In order to reduce the friction between a micromechanical component and another component significantly, while at the same time the wear of these two components must be kept to a tolerable level Finally, the production of micromechanical components should be inexpensive, reproducible and easy to solve manufacturing technology.

This object is achieved by a micromechanical component comprising the features of claim 1. A further object of the invention is to provide a method with which at least one micromechanical component which is in contact with another component can be produced in such a way that the friction between the individual components is reduced and a constant value during use of the components Is accepted. In addition, the production of the at least one component can be solved inexpensively, reproducibly and in terms of manufacturing technology.

This object is achieved by a method for producing a micromechanical component comprising the features of claim 12. According to the invention, the micromechanical component is manufactured such that it has a plurality of contact surfaces. The plurality of contact surfaces cooperate with a mating contact surface of another micromechanical component. In this case, each contact surface of the micromechanical component is designed such that it has a plurality of first elevations and first depressions. In this case, the first elevations and first depressions of each contact surface itself carry a plurality of second elevations and second depressions. The number and size of the second elevations is selected such that some of the second elevations have each formed a flattening when the micromechanical component interacts with the further micromechanical component. A sum of the flattenings of the second elevations is smaller than a maximum possible effective contact area of the further micromechanical component which is in contact with the flattenings of the second elevations.

The aim is to minimize the friction between the individual micromechanical components. Applying this principle in particular to a micromechanical component, which is part of the anchor escapement, this achieves an extension of the service life, the accuracy and an extension of the maintenance intervals of a timepiece. It is advantageous if a proportion of the flattenings to the maximum possible effective contact surface is at most 80% and at least 2%, preferably at most 50% and at least 2% and particularly preferably at most 30% and at least 2%. According to one embodiment of the invention, the first depressions and the first elevations on the contact surface of the micromechanical component have a wave-shaped structure. Another possibility of the structure on the contact surface of the micromechanical component is that the elevations and the first depressions together form a trapezoidal structure. The first recesses of each contact surface of the micromechanical component are designed to receive a lubricant. The lubricant may be in liquid, pasty or solid form. Another advantage of the depressions is that the depressions can also absorb abrasion in addition to the lubricant, which occurs when the micromechanical components come in and thus forms the resulting flattenings.

According to a further embodiment of the invention, a channel may be formed which starts from at least one of the contact surfaces of the micromechanical component and extends into the material of the micromechanical component. Another possibility for forming the channel of the micromechanical component is that the micromechanical component consists of a first plate-shaped part and a second plate-shaped part which are connected to one another. In this case, before connecting the first plate-shaped component and the second plate-shaped component, the channel is formed in the first plate-shaped component or second plate-shaped component.

According to a further embodiment, the micromechanical component may additionally be provided with a coating. The mechanical properties, as well as the wear of the contact surfaces between the micromechanical components, depend essentially on the proportion of traction from the surface. A roughness depth specification does not provide any information about the proportion of the bearing surface at the maximum possible effective contact surface. A surface or contact surface with a small roughness depth can form a smaller proportion of the bearing surface than a contact surface with a large roughness depth. It must therefore be examined in individual cases, how high the pressure forces between the individual micromechanical components, which act on the sum of the bearing surfaces and whether then the sum of the bearing surfaces can be advantageously reduced. A reduction of the sum of the bearing surface leads to a reduction of the total friction and according to the invention advantageously creates space for lubricant and abrasion, which arises from the interaction of the two micromechanical components.

In the application of the present invention to timepieces, the contact area between the individual teeth of the escape wheel and the escapement is advantageously designed such that a proportion of the sum of the supporting surfaces is at most 80%. Thus, the surface apposition force of a closed surface is bypassed. According to the further embodiment described above, in the anchor escapement, the anchor pallets or the teeth of the escape wheel or its sliding surface (contact surface) z. B. be provided with a central channel, which serves to receive a lubricant. According to the invention, however, attention must be paid to the ratio of remaining possible effective contact area and to the surface pressure acting on this area. With optimal interpretation of the conditions, such. B. proportion of the bearing surface, pressure load of the surface support portion and the surface roughness of the wings with lubricant and / or suitable coating tion, can already set a value of the sliding friction coefficient of less than 0, 1.

According to the invention, the size of the effectively possible contact surface between the pallet and a tooth of the escape wheel is already determined by the introduction of the first depressions or of the channel into the contact surface greatly reduced. In addition, the first wells and also the channel can be filled with a lubricant.

When reducing the contact surface or the sum of the bearing surfaces, the tooth force does not change with a constant torque of the drive of the escape wheel. However, the pressure on the bearing surfaces between the two cooperating micromechanical components (tooth of the escape wheel and escapement) increases sharply, so that there is a risk of increased wear of the contacting surfaces of the escape wheel and the escapement. In order to preempt this predictable effect, the present invention provides in a preferred embodiment that the proportion of the bearing surface at the maximum possible effective contact surface is at most 80%. In addition, the contact surfaces between the teeth of the escape wheel and the anchor escapement are formed from an extremely hard material, as is possible, for example, with a photosensitive glass from Schott. This photosensitive glass is sold under the name Foturan®, which can be excellently structured due to its photosensitivity. The micromechanical component is thus made of a non-metallic glass material.

According to a further embodiment of the invention, in addition to the first recesses, a channel (fluid channel) can also be worked out, which extends into an arm of the escape wheel. This channel thus also increases the lubricant reservoir. The escape wheel consists of a first plate-shaped part and a second plate-shaped part. The elaboration of the channel is carried out in at least one of the two plate-shaped parts with a photolithographic patterning process. These photolithographic patterning processes are known in silicon processing as MEMS processes. Conceivable in the elaboration or structuring are also methods that work with micro-beams or with laser. Also, a mechanical processing is conceivable. After the channel has been formed in one of the two plate-shaped components of the escape wheel, the two parts are cleaned and miteinan- the connected. The two plate-shaped parts may consist of the same or of another, non-metallic glass material. The connection of the two parts can, for. B. by a thermal diffusion joining process, a so-called. Bonding or Waferbonden be performed.

For components which are subject to lower loads, a structuring of the effectively possible maximum contact surfaces on the first or the second plate can already be sufficient, without the explicit elaboration of a depression in the form of a micro or fluid channel. In such an embodiment, the proportion of the supporting surface can be further reduced. A reduction to a proportion of the bearing surface of 30% to 10% is conceivable, but it must be at least 2% of the maximum possible effective contact area, to possibly more space for the lubricant to be introduced, such. In the form of solid lubricant. It is therefore clear that the dimension of the supporting surface is directly related to the first recesses, the second recesses and possibly the channel. The minimum depth of the second wells is calculated according to the

Formula 0.02 x ^ area. Thus, the ratio of the first recesses and the second recesses per maximum possible contact surface can be adjusted depending on the existing surface pressure. Depending on the selected material pairing and type of lubricant, the proportion of the sum of the bearing areas of the second elevations on the maximum possible effective contact area may be at least 80%, 70%, 60%, 50%, 40%, but at least 2%. Also with regard to the depth of the first recesses and the second recesses, it has been found that with a high proportion of the supporting surface (of eg 80%), the depth of the first recesses and the second recesses should be increased in size Commissioning of the two micromechanical components to a Erstabrieb and in a certain way depending on the hardness and nature of a so-called. Run-in of the surfaces of the two micromechanical components comes. It is advantageous in the present invention that the abrasion in the first wells of the Contact surface of the micromechanical component collects. In the event that the wells are too small, or the proportion of the bearing surface too high, this abrasion is distributed uncontrollably in the environment of the component. If the ratio of the proportion of the bearing surface is correctly selected, or if the first depressions are correctly designed, the lubricant introduced in the depressions or in the channel can bind the first abrasion in the first depressions. This is particularly preferably when using a solid lubricant.

Likewise, by applying further coatings, the friction between the micromechanical components can be reduced even further and the breaking strength of the base substrate, from which the micromechanical components are produced, can be further increased. This again leads to a reduction in the proportion of the bearing surface at the maximum possible effective contact area of the respective micromechanical component. Such coatings are z. B. by sputtering, steaming, electroplating, etc. possible. When using the micromechanical components in a timer, a CVD and a PVD method is preferably used with which z. As silicon nitrite, silicon carbide, carbon in the form of diamond, or DLC, or graphene, etc. are applied. After coating, the depressions and elevations in the layer surface are largely the same. According to the invention, the method for producing a micromechanical component from a non-metallic glass material is characterized in that initially a plurality of contact surfaces are formed such that a plurality of first elevations and first depressions are formed at each contact surface of the micromechanical component. Likewise, a plurality of second ridges and second pits are formed on the outer surface of the first ridges and the first pits of each contact surface. Before the first startup of the micromechanical component according to the invention, the removal of tips of the second elevations takes place. This removal takes place by the interaction of the micromechanical component with a mating contact surface of a further micromechanical Component. By removing the tips, a bearing surface of the second elevations is formed such that it is smaller than a maximum possible effective contact area of the first elevations.

The first elevations and the first depressions can be formed such that they have a wave-shaped structure. Another possibility consists in the formation of the first elevations and the first depressions in that together they form a trapezoidal structure.

As already mentioned above, in the method according to the invention the friction between the micromechanical component and the further micromechanical component can be reduced to the effect that a channel is incorporated in the material of the micromechanical component. The channel starts from at least one contact surface and extends into the material of the micromechanical component. In the development of the channel processes are used, which are well known in the structuring of semiconductors or silicon. In the event that the micromechanical component is to have a channel, the micromechanical component is constructed from a first plate and a second plate. In the production of the channel this is incorporated in a first plate. After cleaning the first plate, a second plate of the same or another glass material is applied flat. This application can z. Example by means of a thermal diffusion joining method, a so-called. Bonding or wafer bonding done. In a next step, a mask is applied to the two connected plates, so that in a second step the corresponding micromechanical components can be structured by means of a lithography process. The mask depicts the outer shape of the finished micromechanical component. It goes without saying that the mask and consequently also the component are positioned in such a way that a precisely defined position in the finished component is obtained during the microstructures (channel) worked out in the previous step. In a subsequent step, the components by suitable micro-processing methods, such as these z. In the halfway conductor industry are sufficiently well-developed. The finished outer contour of the components can, if necessary, a further treatment, z. B. by a polishing process such. B. by KAH etching. After the micromechanical component has been worked out accordingly, z. As the micromechanical component in a timer, this still be provided with a lubricant, which further provides for a reduction of the friction between the two micromechanical components. The lubricant collects in the first recesses, or in the channel of the micromechanical component. As lubricants are preferably pasty lubricants such. B. MoS2 is used, which are particularly suitable for the introduction of the lubricant in the first wells or the channel. The pasty lubricants are less prone to migration when accelerated or centrifugal. According to the invention, a sliding friction coefficient of less than 0.15 is also desired. It should be noted that the Gleitreibzahl depends on the roughness of the respective surface in which the bearing surface is formed.

In the following, embodiments of the invention and their advantages with reference to the accompanying figures will be explained in more detail. The proportions in the figures do not always correspond to the actual size ratios, as some shapes are simplified and other shapes are shown enlarged in relation to other elements for ease of illustration. Showing:

Fig. 1 is a schematic plan view of an escapement showing the interaction of the armature with the escape wheel;

FIG. 2 shows a perspective view of the micromechanical component according to the invention, which is an escape wheel; FIG.

3 shows an enlarged plan view of a toothed wheel of the micromechanical component with an indicated theoretical contact surface; an enlarged plan view of a wheel tooth of mikromechani see component; 5 shows a perspective and enlarged view of the region of the micromechanical component marked K in FIG. 2;

6 shows a schematic view of a further embodiment of the contact surface of a toothed wheel of the micromechanical component;

7 shows a further embodiment of the micromechanical component, which consists of two connected plates;

8 shows a perspective and enlarged view of the region of the micromechanical component marked K in FIG. 7;

9 is a plan view of the wheel tooth according to the embodiment of FIG.

7;

10 shows a schematic sectional view of part of the contact surface of a toothed wheel of the micromechanical component;

1 is a schematic sectional view of part of the contact surface of a wheel tooth of the micromechanical component with an envelope;

12 shows a schematic sectional view of a part of another embodiment of the contact surface of a toothed wheel of the micromechanical component;

13 shows a schematic sectional view of a part of the contact surface from FIG. 12 of a toothed wheel of the micromechanical component with an envelope;

14 shows a schematic sectional view of the interaction of the contact surface of the micromechanical component and the mating contact surface of a further micromechanical component;

Fig. 15 is a schematic sectional view of the supporting surfaces formed on the first ridges; Fig. 16 is a schematic sectional view of the supporting surfaces formed on the first ridges of the embodiment of the contact surface of Fig. 12; and

17 shows a schematic sectional view of part of the contact surface of a toothed wheel of the micromechanical component, according to another

Embodiment of the invention.

Although the following description refers to an escape wheel as a micromechanical component, this should not be construed as limiting the invention. It is obvious to a person skilled in the art that the contact surfaces configured according to the invention between a micromechanical component and a further micromechanical component designed according to the invention can be used for any applications in which the micromechanical component and the further micromechanical component come into frictional contact.

Figure 1 shows a plan view of an escapement with a balance 50, an armature 52 and an escape wheel 54, which are well known in the prior art. The armature 52 has an input pallet 56 and an output pallet 58, which alternately come to rest against an armature tooth 60. The escape wheel 54 is biased by the (not shown) elevator spring on the (also not shown) gear train in the direction of rotation D. The resting surfaces of the anchor pallets 56, 58 do not point to the center of the escape wheel 54, but are at an angle Z to this. As a result, the armature 52 is securely pressed by the escape wheel 54 to one of the limit pins 62. If this were not the case, the armature horn in the anchor fork would strike the security roller 64 of the balance 50 every time it is shaken. The escape wheel 54 and the input palette 56 and the output palette 58 of the armature 52 cooperate in the manner described above, so that a small amount of energy is transmitted to the balance 50 at zero crossing. FIG. 2 shows a perspective view of the micromechanical component 1 according to the invention, which is designed as an escape wheel. The micromechanical component 1 is produced from a photosensitive glass by means of a photolithographic patterning process. The photosensitive glass may, for. B. be a glass of the company Schott, which is sold under the name Foturan®. By means of the photolithographic patterning process, a plurality of micromechanical components 1 are patterned in a plate made of the photosensitive glass. After completion of the structuring process, the individual micromechanical components 1 are separated and can optionally be installed in a timer. The micromechanical component has a plurality of wheel teeth 2.

FIG. 3 shows an enlarged plan view of a wheel tooth 2 of the micromechanical component 1. As can be seen from the representation of FIG. 2, the micromechanical component 1 has a multiplicity of wheel teeth 2. Each of the wheel teeth 2 has a contact surface 3.

In the representation of the wheel tooth 2 of the micromechanical component 1 shown in FIG. 4, the embodiment of the maximum possible effective contact surface 30 is shown. The maximum possible effective contact surface 30 has a plurality of first depressions 21 and a plurality of first elevations 1 1. FIG. 5 shows a perspective and enlarged view of the region of the micromechanical component 1 labeled K in FIG. 2. The maximum possible effective contact surface 30 of the Radzahns 2 consists of a plurality of first recesses 21 and first elevations 1 first The contact surface 3 of the Radzahns 2 has a length L and a height H. Along the length L of the Radzahns 2, the first elevations 1 1 and the first recesses 21 are arranged in a trapezoidal sequence.

Figure 6 shows a plan view of the contact surface 3 of a Radzahns 2, according to another embodiment of the invention. The first elevations 1 1 are statistically distributed over the contact surface 3. Between the first 1 1, the first recesses 21 are formed, or the first elevations 1 1 are separated from each other by the first recesses 21. It is obvious to a person skilled in the art that the embodiments of the arrangements of the first elevations 11 and the first depressions 21 shown in FIG. 5 and in FIG. 6 can not be regarded as limiting the inventions. The arrangement of the first elevations 1 1 and the first recesses 21 can take on any shapes and distributions.

FIG. 7 shows a perspective view of a further embodiment of the micromechanical component 1. The micromechanical component 1 consists of a first plate-shaped part 101 and a second plate-shaped part 102. The first plate-shaped part 101 is permanently connected to the second plate-shaped part 102. In the manufacture of the micromechanical component 1, two plates of the structurable photosensitive and non-metallic glass are connected to one another and then provided with a mask, so that finally the micromechanical components 1 can be structured and thus produced from the two connected plates. The first plate-shaped part 101 and the second plate-shaped part 102 are connected to one another in such a way that the channels 6 (see FIG. 8) are arranged in the structured wheel tooth 2. FIG. 8 shows an enlarged view of the area marked K in FIG. As already mentioned in the description of FIG. 7, the micromechanical component 1 consists of a first plate-shaped part 101 and a second plate-shaped part 102. As can be seen from the description of FIG. 8, this relationship also extends into the art Radzahn 2 of the micromechanical component 1 by. Here, however, a channel 6 is formed in one of the two plate-shaped parts 101, 102, which extends from the contact surface 3 into the material 7 of the micromechanical component 1, or its wheel tooth 2. For the production of the embodiment described in FIG. 7, the positions of the channels 6 of the individual micromechanical components 1 are first patterned in a plate (not shown) of the photopatternable non-metallic glass. After a Cleaning this part, a second plate is connected to the first plate. This bonding can be done by conventional techniques known in semiconductor technology. Subsequently, a mask is applied in exact registry on the two connected plates, so that the individual micromechanical components 1 can be produced from the bonded plates, or can be released. The mask is applied so precisely that the previously structured channels 6 are also present and accessible in the wheel teeth 2 of the singulated micromechanical components 1.

FIG. 9 shows a top view of the gear tooth 2, according to the embodiment of the invention shown in FIG. Starting from the contact surface 3, the channel 6 formed extends into the material 7 of the wheel tooth 2. Of the contact surface 3 are further, the channel 6 surrounding the first elevations 1 1 and the first recesses 21 are formed.

FIG. 10 shows a schematic sectional view of part of the contact surface 3 of a wheel tooth 2 of the micromechanical component 1. The outer surface of the Radzahns 2 and the contact surface 3 of the Radzahns 2 is formed of a plurality of first elevations 1 1 and first recesses 21. The first elevations 11 and the first depressions 21 themselves carry a multiplicity of second elevations 12 and second depressions 22. In the sectional view of the part of the contact surface 3 of a gear tooth 2 of the micromechanical component 1 shown in FIG. 11, an envelope 16 is drawn. With the help of the envelope 16, it can be seen that in the embodiment shown here, the first elevations 11 and the first depressions 21 are trapezoidal in shape. The first projections 11 and the first recesses 21 themselves carry a plurality of second projections 12 and second recesses 22. The first recesses 21 have a depth T formed.

In the embodiment shown in FIG. 12, the first elevations 11 and the second depressions 22 are arranged in a wave form. Analogous to the in 10, the first elevations 11 and the first depressions 21 likewise have second elevations 12 and second depressions 22.

In the illustration shown in FIG. 13, the envelope 16 is shown, so that the wave-shaped arrangement of the first elevations 11 and the first depressions 21 can be seen better.

FIG. 14 shows a schematic sectional view of the interaction of the contact surface 3 of the micromechanical component 1 and a mating contact surface 4 of a further micromechanical component 5. A lubricant 14 is introduced into the first recesses 21 of the micromechanical component 1. In the interaction of the micromechanical component 1 and the further micromechanical component 5, the tips 18 of the first elevations 11 are removed. These tips 18 accumulate in the lubricant 14 provided in the first recesses 21. This removal, or shrinkage of the interaction of the micromechanical component 1 and the further micromechanical component 5 can also be carried out before the installation of the two micromechanical components 1, 5 in the timer.

In the illustrations shown in FIG. 15 and FIG. 16, the bearing surfaces 10 are shown, which form due to the interaction of the micromechanical component 1 with the further micromechanical component 5 at the first elevations 11. As already mentioned in the description of FIG. 14, the tips 18 of the second elevations 12 are removed by the interaction of the micromechanical component 1 with the further micromechanical component 5. As a result of this removal, the bearing surfaces 10 are formed, which ultimately interact with the mating contact surface 4 of the further micromechanical component 5. At each first elevation 11 of the contact surface 3, a plurality of bearing surfaces 10 are formed. In this case, at the contact surface 3 of the micromechanical component 1, the first elevations 11 and the first depressions 21, as well as the second elevations 12 and the second depressions 22, in terms of number and Size is formed so that a sum of the formed bearing surfaces 10 of the second projections 12 is smaller than a maximum possible effective contact surface 30. Here, the maximum possible effective contact surface 30 is the surface of the Radzahns 2, in the embodiment shown in Fig. 5. If the wheel tooth 2 has formed a channel 6, the effectively possible contact surface 30 is reduced by the surface of the channel 6.

FIG. 17 shows a schematic sectional view of part of the contact surface 3 of a wheel tooth 2 of the micromechanical component 1 according to a further embodiment of the invention. Here, the second elevations 12, and the second recesses 22 of the first elevations 1 1, and first recesses 21 coated with a coating 8. The coating 8 may have a greater hardness than the material of the wheel tooth 2 or of the micromechanical component 1. Due to the greater hardness of the coating 8, it is also possible to reduce the load rating, which results from the sum of the individual bearing surfaces 10, which ultimately leads to a lower friction.

LIST OF REFERENCE NUMBERS

1 micromechanical component

2 wheel tooth

3 contact surface

4 mating contact surface

5 further micromechanical component

6 channel

7 material

8 coating

10 bearing surface

1 1 first increases

12 second raises

14 lubricant

16 envelopes

18 tips

21 first wells

22 second wells

30 effective contact area

50 balance

52 anchors

54 escape wheel

56 entrance pallet

58 output palette

60 anchor tooth

62 limiting pin

64 security role

101 first plate-shaped part

102 second plate-shaped part

D direction of rotation

P medium diameter pores Height length depth angle

Claims

claims:

1. micromechanical component (1), with a plurality of contact surfaces (3) which cooperate with a mating contact surface (4) of a further micromechanical component (5), wherein each contact surface (3) of the micromechanical

Component (1) has a plurality of first elevations (1 1) and a plurality of first recesses (21) has formed, characterized in that the first elevations (1 1) and first recesses (21) even a plurality of second elevations (12) and second recesses (22 ), the number and size of the second elevations (12) being selected such that some of the second elevations (12) each have a flattening (10) when the micromechanical component (5) interacts with the further micromechanical component (5) ) and a sum of the flattenings (10) of the second elevations (12) is smaller than a maximum possible effective contact area (30) of the further micromechanical component (5) which coincides with the flattenings (10) of the second elevations (12). is in contact.

2. The micromechanical component (1) according to claim 1, wherein a proportion of the flattened areas (10) to the maximum possible effective contact area (30) at most 80% and at least 2%, preferably at most 50% and at least 2% and particularly preferably at most 30% and at least 2%.

3. micromechanical component (1) according to claim 1, wherein the first elevations (1 1) and the first recesses (21) on the contact surface (3) of the micromechanical component (1) have a wave-shaped structure.

4. micromechanical component (1) according to the preceding claims, wherein the first elevations (1 1) and the first recesses (21) on the

Contact surface (3) have a trapezoidal structure.

5. micromechanical component (1) according to claim 1, wherein the first recesses (21) for receiving abraded tips (18) of the second elevations (12) and / or a lubricant (14) are provided.

6. micromechanical component (1) according to claim 5, wherein the lubricant (14) is in liquid, pasty or solid form.

7. Micromechanical component (1) according to the preceding claims, wherein a channel (6) is provided which extends from at least one contact surface (3) into a material (7) of the micromechanical component (1).

8. micromechanical component (1) according to claim 6, wherein the micromechanical component (1) consists of an interconnected first plate-shaped part (101) and second plate-shaped part (102) and in one of the two plate-shaped parts (101, 102) of the channel (6) is formed.

9. micromechanical component (1) according to the preceding claims, wherein the micromechanical component (1) is made of silicon or a non-metallic glass material.

10. Micromechanical component (1) according to the preceding claims, wherein the micromechanical component (1) carries a coating (8) at least on the contact surfaces (3).

11. A mechanical timepiece with escapement comprising at least one mechanical component according to one or more of the preceding claims.

12. A method for producing a micromechanical component (1), comprising the following steps:

• Forming a plurality of contact surfaces (3), so that at each contact surface (3) of the micromechanical component (1) a plurality of first elevations (1 1) and first recesses (21) arise;

Forming a plurality of second elevations (12) and second depressions (22) on the first elevations (11) and the first depressions (21) of each contact area (3); and Removing tips (18) of the second elevations (12) by cooperation with a counter contact area (4) of a further micromechanical component (5), so that a flattening (10) is formed in some of the second elevations (12) and wherein one Sum of the flats (10) of the second elevations (12) is smaller than a maximum possible effective contact area (30) of the further micromechanical component (5) which is in contact with the flattened areas (10) of the second elevations (12).

13. The method according to claim 12, wherein a channel (6) in a material (7) of the micromechanical component (1) is incorporated, which starting from at least one contact surface (3) in the material (7) of the micromechanical component (1 ) extends into it.

14. The method of claim 13, wherein in a first plate-shaped part (101) or a second plate-shaped part (102) of the channel (6) is formed and the two plate-shaped parts (101, 102) are permanently connected to each other form micromechanical component (1) and wherein the channel (6) is closed on several sides.

15. The method according to claims 12 to 14, wherein at least on the contact surface (3) of the micromechanical component (1) with a PVD or CVD method, a coating (8) is applied.

16. The method according to claims 12 to 14, wherein at least on the tack surface (3) of the micromechanical component (1) by sputtering, vapor deposition, or a galvanic coating (8) is applied.

17. The method according to claims 15 or 16, wherein as coating (8) silicon nitride, boron nitride, silicon carbide, carbon as diamond, DLC or graphene is applied.

18. The method according to claims 12 to 17, wherein during a run-in operation, some tips (18) of the second elevations (14) are removed by the further micromechanical component (5), and the tips (18) and / or a lubricant (14) in the first recesses (21) of the micromechanical component (3) are introduced.