EP2599103A4 - Détecteur d'électrons comprenant une combinaison de scintillateur-photomultiplicateur couplés intimement, et microscope électronique et détecteur de rayons x l'employant - Google Patents
Détecteur d'électrons comprenant une combinaison de scintillateur-photomultiplicateur couplés intimement, et microscope électronique et détecteur de rayons x l'employantInfo
- Publication number
- EP2599103A4 EP2599103A4 EP11813281.0A EP11813281A EP2599103A4 EP 2599103 A4 EP2599103 A4 EP 2599103A4 EP 11813281 A EP11813281 A EP 11813281A EP 2599103 A4 EP2599103 A4 EP 2599103A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- electron
- intimately
- employing same
- electron microscope
- ray detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
- G01N23/2255—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident ion beams, e.g. proton beams
- G01N23/2257—Measuring excited X-rays, i.e. particle-induced X-ray emission [PIXE]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/20—Measuring radiation intensity with scintillation detectors
- G01T1/2018—Scintillation-photodiode combinations
- G01T1/20185—Coupling means between the photodiode and the scintillator, e.g. optical couplings using adhesives with wavelength-shifting fibres
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/20—Measuring radiation intensity with scintillation detectors
- G01T1/2018—Scintillation-photodiode combinations
- G01T1/20188—Auxiliary details, e.g. casings or cooling
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2441—Semiconductor detectors, e.g. diodes
- H01J2237/24415—X-ray
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2443—Scintillation detectors
Landscapes
- Analytical Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Physics & Mathematics (AREA)
- High Energy & Nuclear Physics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Molecular Biology (AREA)
- General Health & Medical Sciences (AREA)
- Pathology (AREA)
- Immunology (AREA)
- Biochemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Measurement Of Radiation (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US36935310P | 2010-07-30 | 2010-07-30 | |
PCT/US2011/045988 WO2012016198A2 (fr) | 2010-07-30 | 2011-07-29 | Détecteur d'électrons comprenant une combinaison de scintillateur-photomultiplicateur couplés intimement, et microscope électronique et détecteur de rayons x l'employant |
Publications (3)
Publication Number | Publication Date |
---|---|
EP2599103A2 EP2599103A2 (fr) | 2013-06-05 |
EP2599103A4 true EP2599103A4 (fr) | 2015-05-27 |
EP2599103B1 EP2599103B1 (fr) | 2017-03-15 |
Family
ID=45525758
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP11813281.0A Active EP2599103B1 (fr) | 2010-07-30 | 2011-07-29 | Détecteur d'électrons comprenant une combinaison de scintillateur-photomultiplicateur étroitement liés, microscope électronique employant celui-ci et procédé d'imagerie |
Country Status (4)
Country | Link |
---|---|
US (2) | US8729471B2 (fr) |
EP (1) | EP2599103B1 (fr) |
JP (2) | JP5801891B2 (fr) |
WO (1) | WO2012016198A2 (fr) |
Families Citing this family (62)
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US9076632B2 (en) * | 2012-02-12 | 2015-07-07 | El-Mul Technologies Ltd. | Position sensitive STEM detector |
CN102592932A (zh) * | 2012-02-21 | 2012-07-18 | 南京特能电子有限公司 | 半导体背散射电子探测器 |
US9217795B2 (en) * | 2012-07-24 | 2015-12-22 | Siemens Medical Solutions Usa, Inc. | Integrated digital discriminator for a silicon photomultiplier |
DE102012017950A1 (de) * | 2012-09-11 | 2014-03-13 | Carl Zeiss Microscopy Gmbh | Partikelstrahlmikroskop zur Erzeugung von Materialbestandteilen |
KR20140102944A (ko) * | 2013-02-15 | 2014-08-25 | 한국전자통신연구원 | 실리콘 포토멀티플라이어 및 상기 실리콘 포토멀티플라이어의 제조 방법 |
US9245722B2 (en) * | 2013-09-16 | 2016-01-26 | Georgia Tech Research Corporation | SMS probe and SEM imaging system and methods of use |
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GB201322940D0 (en) | 2013-12-23 | 2014-02-12 | Johnson Matthey Plc | Radiation detection apparatus and method |
US9564291B1 (en) | 2014-01-27 | 2017-02-07 | Mochii, Inc. | Hybrid charged-particle beam and light beam microscopy |
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JP2015170593A (ja) * | 2014-03-04 | 2015-09-28 | 株式会社東芝 | 分析装置 |
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WO2016069959A1 (fr) * | 2014-10-29 | 2016-05-06 | Massachusetts Institute Of Technology | Procédés et appareil pour l'imagerie par rayons x à partir de mesures temporelles |
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EP3329507A4 (fr) * | 2015-07-31 | 2019-04-10 | FEI Company | Détecteur segmenté destiné à un dispositif à faisceau de particules chargées |
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WO2018179029A1 (fr) | 2017-03-27 | 2018-10-04 | 株式会社日立ハイテクノロジーズ | Système de faisceau de particules chargées |
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2011
- 2011-07-29 JP JP2013522009A patent/JP5801891B2/ja active Active
- 2011-07-29 WO PCT/US2011/045988 patent/WO2012016198A2/fr active Application Filing
- 2011-07-29 EP EP11813281.0A patent/EP2599103B1/fr active Active
- 2011-07-29 US US13/194,611 patent/US8729471B2/en active Active
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2013
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See also references of WO2012016198A2 * |
Also Published As
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US20120025074A1 (en) | 2012-02-02 |
JP2013541799A (ja) | 2013-11-14 |
EP2599103A2 (fr) | 2013-06-05 |
WO2012016198A2 (fr) | 2012-02-02 |
EP2599103B1 (fr) | 2017-03-15 |
WO2012016198A3 (fr) | 2014-03-27 |
JP5801891B2 (ja) | 2015-10-28 |
US20140042316A1 (en) | 2014-02-13 |
US9341585B2 (en) | 2016-05-17 |
JP2015181122A (ja) | 2015-10-15 |
US8729471B2 (en) | 2014-05-20 |
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