EP2599103A4 - Détecteur d'électrons comprenant une combinaison de scintillateur-photomultiplicateur couplés intimement, et microscope électronique et détecteur de rayons x l'employant - Google Patents

Détecteur d'électrons comprenant une combinaison de scintillateur-photomultiplicateur couplés intimement, et microscope électronique et détecteur de rayons x l'employant

Info

Publication number
EP2599103A4
EP2599103A4 EP11813281.0A EP11813281A EP2599103A4 EP 2599103 A4 EP2599103 A4 EP 2599103A4 EP 11813281 A EP11813281 A EP 11813281A EP 2599103 A4 EP2599103 A4 EP 2599103A4
Authority
EP
European Patent Office
Prior art keywords
electron
intimately
employing same
electron microscope
ray detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP11813281.0A
Other languages
German (de)
English (en)
Other versions
EP2599103A2 (fr
EP2599103B1 (fr
Inventor
Nicholas C Barbi
Felip Lopour
Claudio Piedmonte
Richard B Mott
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pulsetor LLC
Original Assignee
Pulsetor LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pulsetor LLC filed Critical Pulsetor LLC
Publication of EP2599103A2 publication Critical patent/EP2599103A2/fr
Publication of EP2599103A4 publication Critical patent/EP2599103A4/fr
Application granted granted Critical
Publication of EP2599103B1 publication Critical patent/EP2599103B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • G01N23/2255Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident ion beams, e.g. proton beams
    • G01N23/2257Measuring excited X-rays, i.e. particle-induced X-ray emission [PIXE]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/244Detectors; Associated components or circuits therefor
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01TMEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16Measuring radiation intensity
    • G01T1/20Measuring radiation intensity with scintillation detectors
    • G01T1/2018Scintillation-photodiode combinations
    • G01T1/20185Coupling means between the photodiode and the scintillator, e.g. optical couplings using adhesives with wavelength-shifting fibres
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01TMEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16Measuring radiation intensity
    • G01T1/20Measuring radiation intensity with scintillation detectors
    • G01T1/2018Scintillation-photodiode combinations
    • G01T1/20188Auxiliary details, e.g. casings or cooling
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244Detection characterized by the detecting means
    • H01J2237/2441Semiconductor detectors, e.g. diodes
    • H01J2237/24415X-ray
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244Detection characterized by the detecting means
    • H01J2237/2443Scintillation detectors

Landscapes

  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Molecular Biology (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Immunology (AREA)
  • Biochemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Measurement Of Radiation (AREA)
EP11813281.0A 2010-07-30 2011-07-29 Détecteur d'électrons comprenant une combinaison de scintillateur-photomultiplicateur étroitement liés, microscope électronique employant celui-ci et procédé d'imagerie Active EP2599103B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US36935310P 2010-07-30 2010-07-30
PCT/US2011/045988 WO2012016198A2 (fr) 2010-07-30 2011-07-29 Détecteur d'électrons comprenant une combinaison de scintillateur-photomultiplicateur couplés intimement, et microscope électronique et détecteur de rayons x l'employant

Publications (3)

Publication Number Publication Date
EP2599103A2 EP2599103A2 (fr) 2013-06-05
EP2599103A4 true EP2599103A4 (fr) 2015-05-27
EP2599103B1 EP2599103B1 (fr) 2017-03-15

Family

ID=45525758

Family Applications (1)

Application Number Title Priority Date Filing Date
EP11813281.0A Active EP2599103B1 (fr) 2010-07-30 2011-07-29 Détecteur d'électrons comprenant une combinaison de scintillateur-photomultiplicateur étroitement liés, microscope électronique employant celui-ci et procédé d'imagerie

Country Status (4)

Country Link
US (2) US8729471B2 (fr)
EP (1) EP2599103B1 (fr)
JP (2) JP5801891B2 (fr)
WO (1) WO2012016198A2 (fr)

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Title
BUZHAN P ET AL: "Timing by silicon photomultiplier: A possible application for TOF measurements", NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH. SECTION A: ACCELERATORS, SPECTROMETERS, DETECTORS, AND ASSOCIATED EQUIPMENT, ELSEVIER BV * NORTH-HOLLAND, NL, vol. 567, no. 1, 15 June 2006 (2006-06-15), pages 353 - 355, XP027925801, ISSN: 0168-9002, [retrieved on 20060615], DOI: 10.1016/J.NIMA.2006.05.142 *
See also references of WO2012016198A2 *

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US20120025074A1 (en) 2012-02-02
JP2013541799A (ja) 2013-11-14
EP2599103A2 (fr) 2013-06-05
WO2012016198A2 (fr) 2012-02-02
EP2599103B1 (fr) 2017-03-15
WO2012016198A3 (fr) 2014-03-27
JP5801891B2 (ja) 2015-10-28
US20140042316A1 (en) 2014-02-13
US9341585B2 (en) 2016-05-17
JP2015181122A (ja) 2015-10-15
US8729471B2 (en) 2014-05-20

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