EP2577264A1 - Dispositif d'analyse spectrométrique uv de composés gazeux - Google Patents
Dispositif d'analyse spectrométrique uv de composés gazeuxInfo
- Publication number
- EP2577264A1 EP2577264A1 EP11710163.4A EP11710163A EP2577264A1 EP 2577264 A1 EP2577264 A1 EP 2577264A1 EP 11710163 A EP11710163 A EP 11710163A EP 2577264 A1 EP2577264 A1 EP 2577264A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- measurement channel
- gas
- channel
- flow
- window
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 150000001875 compounds Chemical class 0.000 title claims abstract description 20
- 238000004458 analytical method Methods 0.000 title claims abstract description 17
- 238000005259 measurement Methods 0.000 claims abstract description 98
- 230000005855 radiation Effects 0.000 claims abstract description 41
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 17
- 239000011800 void material Substances 0.000 claims description 14
- 229910052805 deuterium Inorganic materials 0.000 claims description 11
- YZCKVEUIGOORGS-OUBTZVSYSA-N Deuterium Chemical compound [2H] YZCKVEUIGOORGS-OUBTZVSYSA-N 0.000 claims description 10
- 239000010453 quartz Substances 0.000 claims description 9
- 238000004817 gas chromatography Methods 0.000 claims description 8
- 229910001635 magnesium fluoride Inorganic materials 0.000 claims description 7
- 229910001618 alkaline earth metal fluoride Inorganic materials 0.000 claims description 6
- 239000000377 silicon dioxide Substances 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 101
- 235000012239 silicon dioxide Nutrition 0.000 description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
- 239000011261 inert gas Substances 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 239000012159 carrier gas Substances 0.000 description 6
- 238000001228 spectrum Methods 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 4
- 230000015556 catabolic process Effects 0.000 description 3
- 238000006731 degradation reaction Methods 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000001276 controlling effect Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000000870 ultraviolet spectroscopy Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000000862 absorption spectrum Methods 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 125000001931 aliphatic group Chemical group 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 150000001975 deuterium Chemical class 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- -1 from a GC Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000002594 sorbent Substances 0.000 description 1
- 238000002798 spectrophotometry method Methods 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/33—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using ultraviolet light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0291—Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/03—Cuvette constructions
- G01N21/09—Cuvette constructions adapted to resist hostile environments or corrosive or abrasive materials
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/15—Preventing contamination of the components of the optical system or obstruction of the light path
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/15—Preventing contamination of the components of the optical system or obstruction of the light path
- G01N2021/151—Gas blown
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/33—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using ultraviolet light
- G01N2021/335—Vacuum UV
Abstract
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CZ2010-398A CZ305797B6 (cs) | 2010-05-24 | 2010-05-24 | Zařízení pro měření spekter plynných látek nebo par v UV oblasti pod 190 nm v průtokovém uspořádání |
PCT/EP2011/053990 WO2011147603A1 (fr) | 2010-05-24 | 2011-03-16 | Dispositif d'analyse spectrométrique uv de composés gazeux |
Publications (2)
Publication Number | Publication Date |
---|---|
EP2577264A1 true EP2577264A1 (fr) | 2013-04-10 |
EP2577264B1 EP2577264B1 (fr) | 2018-05-30 |
Family
ID=44060763
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP11710163.4A Active EP2577264B1 (fr) | 2010-05-24 | 2011-03-16 | Dispositif d'analyse spectrométrique uv de composés gazeux |
EP11709698.2A Active EP2577263B1 (fr) | 2010-05-24 | 2011-03-16 | Dispositif d'analyse spectrométrique uv de composés gazeux |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP11709698.2A Active EP2577263B1 (fr) | 2010-05-24 | 2011-03-16 | Dispositif d'analyse spectrométrique uv de composés gazeux |
Country Status (11)
Country | Link |
---|---|
US (2) | US9018592B2 (fr) |
EP (2) | EP2577264B1 (fr) |
KR (1) | KR101774547B1 (fr) |
CN (1) | CN102985805B (fr) |
BR (1) | BR112012029970B1 (fr) |
CZ (1) | CZ305797B6 (fr) |
DK (1) | DK2577263T3 (fr) |
ES (1) | ES2685487T3 (fr) |
RU (1) | RU2558014C2 (fr) |
SG (1) | SG185382A1 (fr) |
WO (2) | WO2011147602A2 (fr) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012121651A1 (fr) * | 2011-03-05 | 2012-09-13 | Chromalytica Ab | Gaz d'appoint et de protection pour matériaux de fenêtre de passage de lumière et pour une amélioration de la résolution spatiale en chromatographie en phase gazeuse - détection d'uv |
US9116158B2 (en) | 2012-10-18 | 2015-08-25 | Vuv Analytics, Inc. | Vacuum ultraviolet absorption spectroscopy system and method |
US10677767B2 (en) | 2018-06-12 | 2020-06-09 | Vuv Analytics, Inc. | Vacuum ultraviolet absorption spectroscopy system and method |
RU200181U1 (ru) * | 2020-08-10 | 2020-10-08 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Вологодский государственный университет" | Устройство для экспресс-анализа молекулярных структур |
CN113414775A (zh) * | 2021-06-06 | 2021-09-21 | 安徽省志成建设工程咨询股份有限公司 | 辅助监理机器人 |
WO2024058733A1 (fr) | 2022-09-16 | 2024-03-21 | Haus Sps Makina Elektronik Bilisim Sanayi Ve Ticaret Anonim Sirketi | Dispositif de mesure de propriétés élémentaires et moléculaires avec des ondes électromagnétiques hybrides |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4188534A (en) * | 1978-04-20 | 1980-02-12 | Fuji Electric Co., Ltd. | Infrared gas analyzer |
US4255052A (en) * | 1979-09-25 | 1981-03-10 | Beckman Instruments, Inc. | Method of generating nitrogen for flameless emission spectroscopy |
SE8302468L (sv) * | 1983-05-02 | 1984-11-03 | Lagesson Andrasko Ludmila | Anordning vid en gasflodescell for spektrofotometrisk analys av kemiska substanser |
US5322799A (en) * | 1988-02-03 | 1994-06-21 | The State Of Oregon Acting By And Through The State Board Of Higher Education On Behalf Of Oregon State University | Observation cell and mixing chamber |
US4927265A (en) * | 1988-04-29 | 1990-05-22 | 501 Microphoretic Systems, Inc. | Detector for fluorescence and absorption spectroscopy |
US5135304A (en) * | 1990-05-11 | 1992-08-04 | Boc Health Care, Inc. | Gas analysis system having buffer gas inputs to protect associated optical elements |
DE4114276C2 (de) * | 1991-05-02 | 1996-09-19 | Spectro Analytical Instr | Gasgefülltes UV-Spektrometer |
DE4232371C2 (de) | 1992-09-26 | 1995-02-02 | Kernforschungsz Karlsruhe | Analysengerät zur Bestimmung von Gasen oder Flüssigkeiten |
RU2112960C1 (ru) * | 1993-02-08 | 1998-06-10 | Северо-Осетинский государственный университет им.К.Л.Хетагурова | Устройство для измерения дымности отработавших газов дизелей |
US5804827A (en) * | 1995-10-27 | 1998-09-08 | Nikon Corporation | Infrared ray detection device and solid-state imaging apparatus |
US6783705B1 (en) * | 1997-04-11 | 2004-08-31 | Waters Investments Limited | Calibration medium for wavelength calibration of U.V. absorbance detectors and methods for calibration |
SE512786C2 (sv) * | 1997-09-26 | 2000-05-15 | Verner Lagesson | Anordning vid gasflödescell samt en metod att medelst gasflödescellen analysera kemiska substanser |
DE10318786B4 (de) * | 2003-04-25 | 2006-03-09 | Nattkemper, Andreas, Dr.-Ing. | FTIR-Messzelle zur Analyse aggressiver Gase |
WO2004104707A2 (fr) * | 2003-05-22 | 2004-12-02 | Philips Intellectual Property & Standards Gmbh | Procede et dispositif pour nettoyer au moins un composant optique |
JP4211983B2 (ja) * | 2004-02-24 | 2009-01-21 | セントラル硝子株式会社 | F2ガス濃度の測定方法並びに測定装置 |
DE102004028420B3 (de) * | 2004-06-04 | 2006-02-09 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Vorrichtung und Verfahren zur optischen Detektion von in Abgasen chemischer Prozesse enthaltenen Stoffen |
JP4571892B2 (ja) * | 2005-07-05 | 2010-10-27 | フロンティア・ラボ株式会社 | 高分子試料分析装置 |
WO2007014019A2 (fr) * | 2005-07-21 | 2007-02-01 | North Dakota State University | Spectrometrie de photoemission a mobilite ionique dans l'air ambiant |
RU2299422C1 (ru) * | 2005-10-11 | 2007-05-20 | Общество с ограниченной ответственностью "Интеллект-Клуб РадиоФосфор-32" | Оптико-электронный спектральный газоанализатор |
US7511802B2 (en) * | 2006-05-26 | 2009-03-31 | Spectrasensors, Inc. | Measuring trace components of complex gases using gas chromatography/absorption spectrometry |
JP5221881B2 (ja) * | 2007-02-09 | 2013-06-26 | 大陽日酸株式会社 | ガス分析装置 |
-
2010
- 2010-05-24 CZ CZ2010-398A patent/CZ305797B6/cs not_active IP Right Cessation
-
2011
- 2011-03-16 BR BR112012029970A patent/BR112012029970B1/pt active IP Right Grant
- 2011-03-16 WO PCT/EP2011/053989 patent/WO2011147602A2/fr active Application Filing
- 2011-03-16 EP EP11710163.4A patent/EP2577264B1/fr active Active
- 2011-03-16 WO PCT/EP2011/053990 patent/WO2011147603A1/fr active Application Filing
- 2011-03-16 US US13/699,283 patent/US9018592B2/en active Active
- 2011-03-16 CN CN201180025480.1A patent/CN102985805B/zh active Active
- 2011-03-16 RU RU2012155864/28A patent/RU2558014C2/ru active
- 2011-03-16 KR KR1020127029927A patent/KR101774547B1/ko active IP Right Grant
- 2011-03-16 SG SG2012080388A patent/SG185382A1/en unknown
- 2011-03-16 ES ES11710163.4T patent/ES2685487T3/es active Active
- 2011-03-16 US US13/699,286 patent/US8841626B2/en active Active
- 2011-03-16 DK DK11709698.2T patent/DK2577263T3/da active
- 2011-03-16 EP EP11709698.2A patent/EP2577263B1/fr active Active
Non-Patent Citations (1)
Title |
---|
See references of WO2011147603A1 * |
Also Published As
Publication number | Publication date |
---|---|
SG185382A1 (en) | 2012-12-28 |
CN102985805B (zh) | 2016-01-20 |
KR101774547B1 (ko) | 2017-09-04 |
ES2685487T3 (es) | 2018-10-09 |
US20140145087A1 (en) | 2014-05-29 |
WO2011147603A1 (fr) | 2011-12-01 |
DK2577263T3 (da) | 2022-01-10 |
US9018592B2 (en) | 2015-04-28 |
US20130256549A1 (en) | 2013-10-03 |
WO2011147602A2 (fr) | 2011-12-01 |
CZ2010398A3 (cs) | 2011-12-07 |
EP2577263B1 (fr) | 2021-09-29 |
EP2577264B1 (fr) | 2018-05-30 |
CN102985805A (zh) | 2013-03-20 |
US8841626B2 (en) | 2014-09-23 |
RU2012155864A (ru) | 2014-06-27 |
BR112012029970B1 (pt) | 2019-09-03 |
WO2011147602A3 (fr) | 2015-07-23 |
CZ305797B6 (cs) | 2016-03-16 |
RU2558014C2 (ru) | 2015-07-27 |
EP2577263A2 (fr) | 2013-04-10 |
BR112012029970A2 (pt) | 2017-03-01 |
KR20130123293A (ko) | 2013-11-12 |
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