EP2527048A3 - Verfahren zum Herstellen dünner Schichten und entsprechende Schicht - Google Patents

Verfahren zum Herstellen dünner Schichten und entsprechende Schicht Download PDF

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Publication number
EP2527048A3
EP2527048A3 EP20120181651 EP12181651A EP2527048A3 EP 2527048 A3 EP2527048 A3 EP 2527048A3 EP 20120181651 EP20120181651 EP 20120181651 EP 12181651 A EP12181651 A EP 12181651A EP 2527048 A3 EP2527048 A3 EP 2527048A3
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EP
European Patent Office
Prior art keywords
layer
layers
mixture
producing thin
amount
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
EP20120181651
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English (en)
French (fr)
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EP2527048A2 (de
EP2527048B1 (de
Inventor
Klaus-Dieter Vissing
Matthias Ott
Christopher DÖLLE
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Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
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Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
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Publication of EP2527048A2 publication Critical patent/EP2527048A2/de
Publication of EP2527048A3 publication Critical patent/EP2527048A3/de
Application granted granted Critical
Publication of EP2527048B1 publication Critical patent/EP2527048B1/de
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/14—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by electrical means
    • B05D3/141—Plasma treatment
    • B05D3/145—After-treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/06—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
    • B05D5/08—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain an anti-friction or anti-adhesive surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2202/00—Metallic substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2202/00—Metallic substrate
    • B05D2202/20—Metallic substrate based on light metals
    • B05D2202/25—Metallic substrate based on light metals based on Al
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2203/00—Other substrates
    • B05D2203/30—Other inorganic substrates, e.g. ceramics, silicon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2601/00—Inorganic fillers
    • B05D2601/20—Inorganic fillers used for non-pigmentation effect
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/06—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation
    • B05D3/061—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation using U.V.
    • B05D3/065—After-treatment
    • B05D3/066—After-treatment involving also the use of a gas
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31652—Of asbestos
    • Y10T428/31663—As siloxane, silicone or silane

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Laminated Bodies (AREA)
  • Paints Or Removers (AREA)

Abstract

Die Erfindung betrifft ein Beschichtungsverfahren, umfassend die Schritte
a) Bereitstellen einer Mischung oder eines Reinstoffs, umfassend oder bestehend aus reaktionsträgen, flüssigen Precursoren,
b) Aufbringen einer flüssigen Schicht aus der Mischung oder dem Reinstoff auf eine zu beschichtende Oberfläche,
c) Vernetzten der flüssigen Precursoren mittels Strahlung mit einer Wellenlänge von ≤ 250 nm, so dass aus der Mischung eine feste Schicht entsteht und die Schicht ≥ 10 Atom-% C umfasst, bezogen auf die Menge der in der Schicht enthaltenen Atome ohne H und F,
und so dass der in der Schicht enthaltene C zu maximal 50 Atom-% des C, bezogen auf die Menge der in der Schicht enthaltenen C-Atome, Bestandteil einer Methoxygruppe ist.
Sie betrifft ferner mittels dieses Verfahrens herstellbare oder erzeugte Schichten und deren Verwendungen sowie entsprechende beschichtete Gegenstände und deren Verwendungen.
EP12181651.6A 2007-04-30 2008-04-30 Verfahren zum Herstellen dünner Schichten und entsprechende Schicht Active EP2527048B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE200710020655 DE102007020655A1 (de) 2007-04-30 2007-04-30 Verfahren zum Herstellen dünner Schichten und entsprechende Schicht
EP08749932A EP2144714A2 (de) 2007-04-30 2008-04-30 Verfahren zum herstellen dünner schichten und entsprechende schicht

Related Parent Applications (2)

Application Number Title Priority Date Filing Date
EP08749932.3 Division 2008-04-30
EP08749932A Division EP2144714A2 (de) 2007-04-30 2008-04-30 Verfahren zum herstellen dünner schichten und entsprechende schicht

Publications (3)

Publication Number Publication Date
EP2527048A2 EP2527048A2 (de) 2012-11-28
EP2527048A3 true EP2527048A3 (de) 2013-01-16
EP2527048B1 EP2527048B1 (de) 2015-12-30

Family

ID=39809566

Family Applications (2)

Application Number Title Priority Date Filing Date
EP12181651.6A Active EP2527048B1 (de) 2007-04-30 2008-04-30 Verfahren zum Herstellen dünner Schichten und entsprechende Schicht
EP08749932A Withdrawn EP2144714A2 (de) 2007-04-30 2008-04-30 Verfahren zum herstellen dünner schichten und entsprechende schicht

Family Applications After (1)

Application Number Title Priority Date Filing Date
EP08749932A Withdrawn EP2144714A2 (de) 2007-04-30 2008-04-30 Verfahren zum herstellen dünner schichten und entsprechende schicht

Country Status (4)

Country Link
US (1) US20100173167A1 (de)
EP (2) EP2527048B1 (de)
DE (1) DE102007020655A1 (de)
WO (1) WO2008132230A2 (de)

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DE102007020655A1 (de) 2008-11-06
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