EP2188224A1 - Procédé d'application d'un revêtement transparent sur un substrat avec du plasma sous pression atmosphérique - Google Patents

Procédé d'application d'un revêtement transparent sur un substrat avec du plasma sous pression atmosphérique

Info

Publication number
EP2188224A1
EP2188224A1 EP08803253A EP08803253A EP2188224A1 EP 2188224 A1 EP2188224 A1 EP 2188224A1 EP 08803253 A EP08803253 A EP 08803253A EP 08803253 A EP08803253 A EP 08803253A EP 2188224 A1 EP2188224 A1 EP 2188224A1
Authority
EP
European Patent Office
Prior art keywords
coating
transparent
substrate
plasma treatment
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP08803253A
Other languages
German (de)
English (en)
Inventor
Florian Eder
Rudolf Gensler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of EP2188224A1 publication Critical patent/EP2188224A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11Anti-reflection coatings
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23Oxides
    • C03C17/25Oxides by deposition from the liquid phase
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23Oxides
    • C03C17/25Oxides by deposition from the liquid phase
    • C03C17/256Coating containing TiO2
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3417Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials all coatings being oxide coatings
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0005Other surface treatment of glass not in the form of fibres or filaments by irradiation
    • C03C23/006Other surface treatment of glass not in the form of fibres or filaments by irradiation by plasma or corona discharge
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/1204Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material inorganic material, e.g. non-oxide and non-metallic such as sulfides, nitrides based compounds
    • C23C18/1208Oxides, e.g. ceramics
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/1225Deposition of multilayers of inorganic material
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/125Process of deposition of the inorganic material
    • C23C18/1254Sol or sol-gel processing
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/125Process of deposition of the inorganic material
    • C23C18/1295Process of deposition of the inorganic material with after-treatment of the deposited inorganic material
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00Coatings on glass
    • C03C2217/70Properties of coatings
    • C03C2217/73Anti-reflective coatings with specific characteristics
    • C03C2217/734Anti-reflective coatings with specific characteristics comprising an alternation of high and low refractive indexes
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00Methods for coating glass
    • C03C2218/10Deposition methods
    • C03C2218/11Deposition methods from solutions or suspensions
    • C03C2218/113Deposition methods from solutions or suspensions by sol-gel processes

Definitions

  • the present invention relates to the field of transparent materials, especially the transparent materials whose reflection has been reduced.
  • a method for the treatment of transparent coatings is proposed, characterized in that it comprises a plasma treatment.
  • plasma treatment in the sense of the present invention means or comprises in particular all processes and / or processes in which ionized molecules, in particular radicals of a gas which have been generated by an energy source such as radio frequency or microwaves, act on the substrate. This is usually associated with a temperature increase. Surprisingly, it has been found that for coatings and / or substrates by plasma treatment in many applications, a substantial improvement in the surface quality and other properties can be achieved without adversely affecting the other properties of the coating or deteriorate only insignificantly.
  • the energy input to the coating is limited compared to the methods of the prior art to a level harmless for the substrate.
  • plasma treatment within the meaning of the present invention, in particular also a corona treatment falls, even if this is often handled differently in linguistic usage.
  • a plasma treatment within the meaning of the present invention thus also explicitly includes a corona treatment; this represents in particular a preferred embodiment of the invention.
  • the plasma treatment is carried out as atmospheric pressure plasma. This has proved to be very advantageous in many applications of the present invention.
  • atmospheric pressure plasma in the sense of the present invention means or comprises in particular all processes and / or processes in which a plasma is oxidized under atmospheric pressure. spherical environmental conditions is applied to the substrate.
  • the treatment by the plasma treatment comprises curing and / or crosslinking.
  • curing is understood in particular to mean that the resistance of the coating is increased by plasma-induced reactions (including, in particular, oxidations and / or condensation reactions).
  • crosslinking is meant, in particular, that condensation reactions are induced by the plasma treatment on the coating (and / or any precursor materials present).
  • the plasma treatment is preferably carried out at a process gas pressure of ⁇ 2 bar to ⁇ 8 bar. This has proven advantageous in many applications of the present invention.
  • the process gas pressure is preferably ⁇ 3 bar to ⁇ 6 bar, preferably ⁇ 3.5 bar to ⁇ 5 bar.
  • the plasma treatment is preferably carried out such that the energy input to the coating is ⁇ 50 W / cm 2 to ⁇ 250 W / cm 2 .
  • the plasma treatment is carried out so that the energy input to the coating is ⁇ IOO W / cm 2 to ⁇ 200 W / cm 2 .
  • the plasma treatment is carried out while rotating the nozzle.
  • a sol-gel process is performed prior to the plasma treatment.
  • sol-gel process or sol-gel process in the sense of the present invention means or comprises in particular all processes and / or processes in which metal prepurcursor materials, in particular metal halides and / or metal alkoxides in solution, are subjected to hydrolysis and subsequent condensation become.
  • a preferred embodiment of the invention is characterized in that at least one porosity-causing component is present during at least part of the sol-gel process, which component is removed and / or destroyed after completion of the sol-gel process.
  • the porosity-causing component is at least partially removed and / or destroyed by means of the plasma treatment.
  • a preferred embodiment of the invention is characterized in that the at least one porosity-causing component is a polymer, the average molar mass of the polymer preferably being ⁇ 10000 Da to ⁇ 10,000 Da, more preferably ⁇ 10,000 Da to ⁇ 50,000 There is.
  • a preferred embodiment of the invention is characterized in that the polymer is an organic polymer, preferably selected from the group comprising polyethylene glycol, polypropylene glycol, copolymers of polyethylene glycol and polypropylene glycol, polyvinylpyrrolidone, polyether, alkyl, cycloalkyl and / or aryl-substituted polyethers, polyesters alkyl-, cycloalkyl- and / or aryl-substituted polyesters, in particular polyhydroxybutyric acid or mixtures thereof.
  • General Groups / Molecule Definition Within the specification and claims, general groups or molecules such as alkyl, alkoxy, aryl, etc. are claimed and described. Unless otherwise described, the following groups within the generally described groups / molecules are preferably used in the context of the present invention:
  • Alkyl linear and branched C 1 -C 8 -alkyls
  • long-chain alkyls linear and branched C5-C20 alkyls
  • Alkenyl C2-C6-alkenyl
  • Cycloalkyl C3-C8-cycloalkyl
  • Alkoxide / alkoxy C 1 -C 6 alkoxy, linear and branched
  • long-chain alkoxide / alkoxy linear and branched C5-C20 alkoxy
  • Aryl selected from aromatics with a molecular weight below 300 Da.
  • Polyether selected from the group consisting of H- (O-CH 2 - CH (R)) n-OH and H- (0-CH 2 -CH (R)) n -H wherein R is independently selected from: hydrogen, alkyl , Aryl, halogen and n from 1 to 250
  • Substituted polyethers selected from the group consisting of R 2 - (O-CH 2 -CH (R 1 )) n -OR 3 and R 2 - (O-CH 2 -CH (R 2 )) n -R 3 where R i, R 2 , R 3 is independently selected from: hydrogen, alkyl, long chain alkyl, aryl, halogen and n is from 1 to 250
  • Ether The compound Ri-OR 2 , wherein each Ri and R 2 are independently selected from the group consisting of hydrogen, halogen, alkyl, cycloalkyl, aryl, long chain alkyl Unless otherwise stated, the following groups / molecules are more preferred groups / molecules within the general group / molecule definition:
  • Alkyl linear and branched C 1 -C 6 -alkyl
  • Alkenyl C3-C6 alkenyl
  • Cycloalkyl C6-C8-cycloalkyl
  • long-chain alkoxy linear and branched C5-C10 alkoxy, preferably linear C6-C8 alkoxy
  • Polyether selected from the group consisting of H- (O-CH 2 - CH (R)) n-OH and H- (0-CH 2 -CH (R)) n -H wherein R is independently selected from: hydrogen, alkyl , aryl, halogen and n is from 10 to 250.
  • Substituted polyethers selected from the group consisting of R 2 - (O-CH 2 -CH (R 1 )) n -OR 3 and R 2 - (O-CH 2 -CH (R 2 )) n -R 3 where R i, R 2 , R 3 is independently selected from hydrogen, alkyl, long chain alkyl, aryl, halogen and n is from 10 to 250.
  • the present invention also relates to a transparent coating treated according to the method of the invention.
  • transparent in the sense of the present invention means or in particular includes a permeability of ⁇ 90% in the respectively used wavelength range, in particular in the visible wavelength range.
  • the coating is substantially homogeneous to the human eye and for many applications a single coating is sufficient (unlike the multilayer systems listed above).
  • the thickness of the coating produced (or in the case of "multi-layer coatings" of the individual sublayers) is - as will be described below - in many applications in the range of ⁇ 50- ⁇ 500 nanometers. It is therefore largely insensitive to thermal and mechanical stress (in particular bending stress) and affects component dimensions and tolerances only insignificantly.
  • the coating is preferably based on metal oxides, preferably SiO 2 / or TiO 2 .
  • the term "based on metal oxide” in the sense of the present invention means or comprises in particular that the coating contains this metal oxide (after carrying out the process according to the invention) as the main component. Preference is given to ⁇ 70%, more preferably ⁇ 80% and most preferably ⁇ 90% to ⁇ 1010 of the metal oxide coating.
  • the coating comprises a plurality of layers and / or the coating is a multi-layer coating.
  • multi-layer coating is meant, in particular, that the coating is applied in layers to a substrate, wherein, if appropriate, plasma application takes place after application of a layer.
  • plasma application takes place after application of a layer.
  • the plasma treatment is carried out after each application of a layer.
  • the coating is preferably a so-called "3-layer coating” or "multi-layer coating".
  • a preferred embodiment of the invention is characterized in that the coating is essentially a porous shaped article, in particular a homogeneous porous shaped article or forms such a body.
  • the term "essentially” designates in particular ⁇ 90 vol%, preferably ⁇ 95 vol% of the coating.
  • a preferred embodiment of the invention is characterized in that the coating has transmission-increasing properties, in particular for light in the visible wavelength range.
  • the coating is preferably capable of increasing the transmission of the substrate by ⁇ 2%, preferably by ⁇ 4%, in the respectively used wavelength range, in particular in the visible wavelength range.
  • the invention also relates to a transparent coating for a transparent substrate produced by the method according to the invention.
  • a preferred embodiment of the invention is characterized in that the substrate is selected from the group comprising glass, transparent plastics, preferably selected from the group comprising polycarbonate, polyacrylic, PET, PEN, COC, PES, PSU, metals, transparent thermosetting materials , in particular epoxides and acrylates and mixtures thereof, and mixtures thereof.
  • the invention also relates to an optical component comprising a transparent substrate and a coating applied and / or arranged on the substrate according to the present invention
  • the present invention also relates to a method for producing an optical component according to the invention, characterized in that the coating is applied to the substrate by dipping and / or spin-coating and subsequently subjected to a plasma treatment.
  • the present invention also relates to the use of a coating according to the invention and / or an optical component according to the invention for
  • FIG. 1 shows a polycarbonate substrate coated in half according to Example 1;
  • FIG. 2 shows the illustration of a scratch test for measuring the scratch resistance
  • Fig. 3 three slides (Comparative Examples 1 and 2 and Inventive Example 2) after performing the scratch test
  • FIG. 1 relates to an example according to the invention which, purely illustratively, underlines the advantages of the method according to the invention and of the coating according to the invention on the basis of a 3-layer coating by way of example.
  • a 3-layer anti-reflection coating was applied in half on a polycarbonate substrate of about 3 mm thickness.
  • the substrate was cleaned (IPA ultrasonically, followed by rinsing with deionized water) and even pretreated with atmospheric pressure plasma to improve the wetting of the coating solution.
  • a device from the company Plasmatreat was used with a high-frequency generator FG 3001 and a rotary nozzle RD 1004, which was equipped with a nozzle head type AGR123.
  • the sample distance to the nozzle was 8mm. It was set a travel speed of 2 cm / sec.
  • a silicon dioxide / titanium dioxide mixed layer (layer 1) was subsequently applied by dip coating, followed by a titanium dioxide layer (layer 2), and finally a silicon dioxide layer (layer 3).
  • the coating material used was the silica sol H2000 sold by the company FEW Chemicals and the titanium oxide sol H 9005.
  • layer 1 a 1: 1 (vol.) Mixture of both sols was used.
  • the application was carried out by dip coating. The mixture was then dried for 20 min at 100 0 C and carried out as described above plasma treatment.
  • Fig. 1 shows the polycarbonate substrate with the coating (right half). Clearly the anti-reflective coating can be seen.
  • the third slide (Example 2) was first at 100 0 C for 20 min. dried and then subjected to a plasma treatment as described above.
  • Fig. 2 shows a photograph while performing this test. The results of the test are shown in Table 1 and in FIG.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Thermal Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Metallurgy (AREA)
  • Dispersion Chemistry (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • Plasma & Fusion (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Ceramic Engineering (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Laminated Bodies (AREA)
  • Coating Of Shaped Articles Made Of Macromolecular Substances (AREA)
  • Surface Treatment Of Glass (AREA)

Abstract

La présente invention concerne un procédé permettant d'améliorer les propriétés de revêtements appliqués sur des matériaux transparents, par traitement au plasma, de préférence au moyen d'un plasma sous pression atmosphérique.
EP08803253A 2007-09-13 2008-08-27 Procédé d'application d'un revêtement transparent sur un substrat avec du plasma sous pression atmosphérique Withdrawn EP2188224A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007043650A DE102007043650A1 (de) 2007-09-13 2007-09-13 Verfahren zur Verbesserung der Eigenschaften von Beschichtungen
PCT/EP2008/061186 WO2009037073A1 (fr) 2007-09-13 2008-08-27 Procédé d'application d'un revêtement transparent sur un substrat avec du plasma sous pression atmosphérique

Publications (1)

Publication Number Publication Date
EP2188224A1 true EP2188224A1 (fr) 2010-05-26

Family

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Application Number Title Priority Date Filing Date
EP08803253A Withdrawn EP2188224A1 (fr) 2007-09-13 2008-08-27 Procédé d'application d'un revêtement transparent sur un substrat avec du plasma sous pression atmosphérique

Country Status (6)

Country Link
US (1) US8632859B2 (fr)
EP (1) EP2188224A1 (fr)
JP (1) JP5264914B2 (fr)
CN (1) CN101815686A (fr)
DE (1) DE102007043650A1 (fr)
WO (1) WO2009037073A1 (fr)

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WO2009037073A1 (fr) 2009-03-26
JP5264914B2 (ja) 2013-08-14
JP2010538816A (ja) 2010-12-16
CN101815686A (zh) 2010-08-25
US20100213164A1 (en) 2010-08-26
DE102007043650A1 (de) 2009-04-02
US8632859B2 (en) 2014-01-21

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