EP2135096B1 - Testing of electronic circuits using an active probe integrated circuit - Google Patents

Testing of electronic circuits using an active probe integrated circuit Download PDF

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Publication number
EP2135096B1
EP2135096B1 EP08733706.9A EP08733706A EP2135096B1 EP 2135096 B1 EP2135096 B1 EP 2135096B1 EP 08733706 A EP08733706 A EP 08733706A EP 2135096 B1 EP2135096 B1 EP 2135096B1
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EP
European Patent Office
Prior art keywords
probe
apic
dut
signal
test
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Not-in-force
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EP08733706.9A
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German (de)
English (en)
French (fr)
Other versions
EP2135096A4 (en
EP2135096A1 (en
Inventor
Steven Slupsky
Brian Moore
Christopher V. Sellathamby
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Scanimetrics Inc
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Scanimetrics Inc
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Publication of EP2135096A1 publication Critical patent/EP2135096A1/en
Publication of EP2135096A4 publication Critical patent/EP2135096A4/en
Application granted granted Critical
Publication of EP2135096B1 publication Critical patent/EP2135096B1/en
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G01R1/06722—Spring-loaded
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G01R1/06727—Cantilever beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
    • G01R1/07385—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using switching of signals between probe tips and test bed, i.e. the standard contact matrix which in its turn connects to the tester
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/3025—Wireless interface with the DUT
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/3185—Reconfiguring for testing, e.g. LSSD, partitioning
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/3185—Reconfiguring for testing, e.g. LSSD, partitioning
    • G01R31/318505—Test of Modular systems, e.g. Wafers, MCM's
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/319—Tester hardware, i.e. output processing circuits
    • G01R31/31903—Tester hardware, i.e. output processing circuits tester configuration
    • G01R31/31905—Interface with the device under test [DUT], e.g. arrangements between the test head and the DUT, mechanical aspects, fixture
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card

Definitions

  • High speed testing includes RF or Memory or serial wired testing.
  • Prior art probe cards typically have a rigid architecture in which each probe is positioned so as to contact a specific site on a device under test (DUT).
  • the probes may be coupled to an integrated circuit (IC) so that signals between automated test equipment (ATE) and the DUT via the probes are conditioned or otherwise processed for transmission, as described by Rutten in United States Patent 6,747,469 .
  • IC integrated circuit
  • ATE automated test equipment
  • Rutten in United States Patent 6,747,469
  • PCIC pre-conditioning IC
  • NRE non-recurring engineering
  • the PCIC described by Rutten must be customized by final fabrication steps in the IC process. This customization is the final metal interconnects layers of an IC fabrication, which requires a large investment in design, tooling, capital and know-how. This also fixes the utility of the PCIC and restricts its use to specific DUT designs and specific DUT applications.
  • the Rutten embodiments are susceptible to unacceptably high failure rates of the PCIC due to electronic failure of the PCIC as a result of die cracks and other stress induced failure modes due to mechanical stresses of probes placed over active areas of the PCIC.
  • the United States Patent US 2005 237073 A1 describes a method of testing a DUT using a programmable FPGA circuit board that is located on a probe card.
  • This apparatus employs a circuit board and IC's on the probe card to distribute signals. No processing is done to analyse high-speed signals and convert to low-speed for eliminating high frequency resource requirements on the tester.
  • the United States Patent 2003085726 A1 describes a test system including a configurable preconditioning integrated circuit that is coupled between an automatic test equipment and a device under test.
  • the preconditioning integrated circuit is configured to precondition signals that are communicated to and from the device-under-test, and particularly, to precondition high-frequency signals so as to avoid the adverse effects caused by long lead lines between the automated test equipment and the device-under-test.
  • a probe card, according to claim 1 and a method for forming a probe card, according to claim 9, are disclosed.
  • a probe card comprising at least one reprogrammable active probe integrated circuit (APIC) capable of being coupled to one or more of a variety of probe arrays, such that the one or more probe array is selected to suit a device under test (DUT) and the APIC is programmed to suit the one probe array and the DUT.
  • APIC reprogrammable active probe integrated circuit
  • a probe for testing a device under test comprising a probe body having an active probe integrated circuit (APIC) incorporated into the probe body.
  • APIC active probe integrated circuit
  • a method of forming a probe card comprising the steps of: providing a programmable active probe integrated circuit (APIC); providing a configurable probe array in communication with the at least one APIC; characterizing a device under test (DUT); reprogramming the at least one APIC based on the characterization of the DUT; and reconfiguring the probe array based on the characterization of the DUT.
  • APIC programmable active probe integrated circuit
  • DUT device under test
  • reconfiguring the probe array based on the characterization of the DUT.
  • APIC devices are placed proximate to the probe points to translate control signals from an Automated Test Equipment tester ("ATE") to signals as required to stimulate one or more DUT's so as to reduce or eliminate signal degradation or losses, and to translate response signals from one or more DUT's to control signals sent to an ATE.
  • APIC devices can be used along with different probing technologies, such as cantilever, vertical, MEMs and non-contact probes. The other advantage of using APIC devices is that it be used to supply high-frequency signals to a DUT. The majority of high-speed and high-frequency processing is performed by the APIC to facilitate the use of slow speed and less costly test equipment.
  • an APIC device in combination with an enhanced probe needle configuration such as a Ground-Signal combination, Ground-Signal-Ground combination or Ground-Signal-Signal-Ground combination.
  • Other implementations include (but are not limited to): 1) forming the probe needle and APIC into a single monolithic circuit; 2) direct attachment of an APIC to a probe needle; 3) embedding an APIC into the probe needle.
  • the principles of both the apparatus and the method are applicable for probing and thereby testing of several types of IC, including but not limited to those for applications such as RF, serializer/deserializer (SerDes), memory, logic, parametric, digital signal processing, and analog circuitry and digital devices.
  • SerDes serializer/deserializer
  • the process and apparatus discussed herein is illustrated using as an example a probe card having an active probe for RF wafer testing, using RF as high frequency signals. It will be recognized by those of ordinary skill in the art that the principles apply to several other applications, such as to test, for example, high-speed digital circuits, networking circuits, microprocessors, high-frequency circuits, high precision analog, storage devices, and mixed signal circuits.
  • FIG. 1a , 1b and 2 There will first be given a discussion of the prior art with reference to FIG. 1a , 1b and 2 . Illustrative embodiments of the apparatus will then be described with reference to FIG. 3 through 15 .
  • FIG. 1a illustrates one type of advanced test system having a probe card 10 comprising a test head 102 that has a PCB substrate 104, an IC 106 and a plurality of contact points 108 in communication with an integrated circuit (IC) 106.
  • Signals are received by substrate 104 from a test controller such as automatic test equipment (ATE) 110 as illustrated via lead lines 112 which may include digital, high frequency, high precision analog, RF and power paths.
  • ATE automatic test equipment
  • Substrate 104 and IC 106 similarly are in electrical communication.
  • Contact points 108 may be selected from resilient electrically conducting contact means.
  • Contact points 108 are positioned in an array that is a mirror image of an array of contact points 114 on a DUT 116 so that, as probe card 10 is brought into contact with DUT 116 each of contact points 108 contacts the corresponding contact points 114, thus establishing electrical communication between probe card 10 and DUT 116.
  • Prior art methods and apparatus including that illustrated in FIG. 1a , have limitations imposed by the system architecture.
  • Prior art probe card 10 has contact points 108 in a specific array to mirror the corresponding contact points 114 of a specific design of DUT 116.
  • Prior art probe card 10 is limited to testing only one layout of DUT 116.
  • Significant routing of signals is required on the probe board for transmission via the IC, as illustrated in FIG. 2 , leading to signal distortions requiring further treatment of the signals. Tests necessarily are conducted sequentially or with a low degree of parallelism.
  • FIG. 1b shows a complete system that includes ATE 110, computer unit (115) for controlling the ATE 110 and test control unit (111).
  • the test controls signals and test data is delivered to and from the ATE 110 and DUT 117 through the lead lines and the probe card.
  • the DUT 117 is located on a controllable wafer stand (117).
  • probe card 10 has RF electronics circuitry 120 and a plurality of contact points 108 that are situated at distal ends 122 of cantilever probes 124. Electrical signals are communicated to and from probes 124 along wiring 126 and vias 128 to one or more IC 106 on probe card 10.
  • Rutten describes a test system comprising a probe card 10 in which contact points 108 are electrically connected to a preconditioning integrated circuit 106.
  • the geometry or physical layout of probe card 10 and IC 106 and the configuration of IC 106 each are designed specifically for testing one type and geometry or physical layout of DUT 116.
  • a different IC 106 must be used where such IC 106 may require redesign of the configuration or geometry or both to correspond to the specific architecture of the selected DUT 116.
  • NRE non-recurring engineering costs
  • a probe card 100 for testing DUT 116 has a plurality of probes 202 and a plurality of active probe integrated circuits (APIC) 204. There may be multiple probes for each APIC 204 or multiple APICs 204 for each probe 202 or a one to one relationship. Each probe 202 is immediately adjacent to corresponding APIC 204 so as to minimize signal wire lengths extending between them. Thus there is minimum distortion of signals between APIC 204 and corresponding probe 202 and therefore minimum distortion of the signal transmitted to or from DUT 116. Each APIC 204 may be designed so as to provide for conducting a specific test on DUT 116, or may be designed to conduct one or more tests from among several tests.
  • APIC 204 may be designed so as to provide for conducting a specific test on DUT 116, or may be designed to conduct one or more tests from among several tests.
  • FIG. 3a illustrates use of cantilever probes 202 and substrate 220. It will be recognized that other types of probes may be used such as solder balls, microsprings, and other electrically conducting resilient contacts as well as non-contact probes. Further, it will be recognized APIC 204 may be mounted directly to the probe card 100 without substrate (or "interposer") 220. APIC 204 as illustrated are at proximate end 210 of each probe 202. It will be recognized that APIC 204 may be located at different sites relative to probe 202, as illustrated in FIG. 5 and described below. APIC 204 may be in communication by electrical communication between substrate 220 and substrate 218. Alternatively, substrate 220 may be in electrical communication using vias 128 with components (not shown) situated at an opposite face of substrate 218.
  • Probes 202 may be reconfigured by repositioning them. Additionally, they may be reconfigured by actuating the probes electromechanically or by bending them.
  • FIG. 3b illustrates another embodiment wherein probe card 100 has a plurality of probes 202 and APICs 204 to test one DUT 116.
  • FIG. 3c illustrates another embodiment wherein probe card 100 has a plurality of APICs 204 and probes 202 to test more than one DUT 116.
  • FIG. 3d is a diagram showing multiple APIC 204 testing a single DUT (not shown).
  • FIG. 3e - 3g show APICs with alternate companion ground lines.
  • FIG. 3e illustrates a single probe 202 with a single ground 225
  • FIG. 3f illustrates a single probe 202 with dual grounds 225
  • FIG. 3g illustrates a dual probe 202 with dual grounds 225.
  • These types of configuration at the probe end 202 are known as GS, GSG and GSSG, respectively.
  • FIG. 4a-4d are block diagrams illustrating four embodiments of probe card 100 comprising different type of probes 202. It will be recognized that the examples shown are for illustrative purposes, showing several among the architectures available, and are non-limiting.
  • probe card 100 may have a probe needle 202, a wireless probe 202A, and an antenna 222 to allow for wireless communication, which may or may not be mounted on active probe 204.
  • FIG. 5a-5f illustrates six of the various possible options for relative placement of combinations of probe 202 and a corresponding APIC 204 or probe 202 and corresponding substrates 220 having APIC 204.
  • a mechanical support 206 typically epoxy resin, secures cantilever probe 202 to a substrate 208.
  • APIC 204 can be situated at a proximate end 210 of probe 202 as illustrated in FIG. 5a , within mechanical support 206 as illustrated in FIG. 5b , on mechanical support 206 as illustrated in FIG. 5d , adjacent mechanical support 206 as illustrated in FIG. 5c , or between mechanical support 206 and a distal end 212 of probe 202.
  • FIG. 5a-5f illustrates six of the various possible options for relative placement of combinations of probe 202 and a corresponding APIC 204 or probe 202 and corresponding substrates 220 having APIC 204.
  • a mechanical support 206 typically epoxy resin, secures cantilever probe 202 to a substrate 208.
  • APIC 204 can be situated
  • probe 202 is situated so that distal end 212 is able to make contact with a selected contact point 114 on DUT 116.
  • FIG. 5e illustrates an option whereby APIC 204 is in contactless communication with DUT 116 through the use of antennae 222 situated on each of APIC 204 and antennae 222 on contact point 114 of DUT 116.
  • APIC 204 may be one component of a substrate 220 for non-contact testing of DUT 116.
  • antennae 222 may be located on substrate 220 to facilitate communication between APIC 204 and DUT 116.
  • FIG. 5f illustrates another embodiment in which APIC 204 at distal end 212 of probe 202 has a contact 202B for contacting DUT 116 for purpose of electrical communication.
  • FIG. 5g illustrates another embodiment in which substrate 220 at distal end 212 of probe 202 has a contact 202B for contacting DUT 116 for purpose of electrical communication.
  • FIG. 6a through 6i are schematic diagrams of different embodiments of probes having inlet/outlet ports and an IC used for translating control signals to and from advanced testing equipment and stimulus and response signals to and from a DUT.
  • substrate 220 has a tester interface 214, a DUT interface 216, and an APIC 204 that may be a signal test processor 224.
  • DUT interface 216 of APIC 204 is electrically connected to probe 202 for communication of stimulus (for example, high frequency) signals 218 between APIC 204 and DUT 116.
  • Tester interface 214 is for communication of control signals (such as low frequency analog, digital or a combination of digital and analog signals) 219 between APIC 204 and ATE 110 electronically using hardwire connections and/or by wireless signals transmitted using radio frequencies or light.
  • Signal test processor 224 transforms signals 219 received from ATE 110 to signals 218 for transmission to DUT 116 via probe 202, and transforms signals 218 received from DUT 116 to signals 219 for transmission to ATE 110.
  • the sequencing is illustrated in FIG. 9a through 9c .
  • Signals 218 and 219 may be low frequency, high frequency, radio frequency, low precision, high precision, DC or digital.
  • DUT interface 216 may be an antenna, a MEMS probe 202C on substrate 220 as shown in FIG. 6b , wired for electrical communication, or a hybrid of these options.
  • APIC 204 may be in "flip chip” orientation and electrically connected to substrate 220 using solder balls or other means familiar to those skilled in the art.
  • FIG. 6d and 6e are diagrams of another embodiment of a chip having integrated high speed probe structures with a plurality of inlet/outlet ports and an IC used for translating control signals to and from advanced testing equipment and stimulus and response signals to and from DUT 116, similar to that illustrated in FIG. 6a through 6c .
  • an integrally incorporated probe 202d is created from the body of the APIC 204 using one of many known MEMS fabrication techniques. These techniques can be used to add a microfabricated probe tip structure 202d during manufacture, or to create a microfabricated probe tip structure using subtractive processes. Probe tip 202d has a modified probe contact created out of the body of the APIC 204.
  • FIG. 6f and 6g are diagrams of a further embodiment of APIC chip having substrate 220 and APIC 204, providing serialization and de-serialization function close to the circuit under test.
  • APIC 204 has electrical communication channels 219a for multiple parallel low speed signals for interfacing the ATE 110 side while the DUT 116 side has serial high speed lines 218. Lines 219a and 202a show multiple signal channels for interfacing with ATE 110.
  • FIG. 6h and 6i are diagrams of another embodiment of APIC 204 chip providing memory testing functions as well as serialization and de-serialization function close to the circuit under test.
  • APIC 204 has multiple parallel low speed signals for interfacing the ATE 110 side while the DUT 116 side has serial high speed lines.
  • a component 220a provides memory test patterns at high speed to DUT 116. This enables low speed lines to interact with the APIC 204 chip and the memory testing can be off loaded from the tester 110.
  • Item 224a is the memory testing block within the APIC 204 IC.
  • FIG. 6j shows a perspective view of a monolithic APIC and probe which can be constructed using known techniques out of one monolithic piece of silicon.
  • the probe tip and arm and body are integral with the APIC processing elements enabling high volume extreme precision in the production and signal processing.
  • FIG. 6k shows a perspective view of a monolithic APIC and probe with divisional signal processing which is enabled by the monolithic construction of the probe, probe arm, and APIC processing elements.
  • This figure creates a two level processing APIC in which the APIC element 204A is the back end interfacing to ATE equipment while the APIC element 204B is the front end used for processing signals at the tip end. This enables very high fidelity signal processing with virtually no signal loss and noise.
  • the advantage of the APIC concept with monolithic construction enables various probe shapes to be created out of the same base APIC substrate.
  • An example embodiment of divisional processing may be a pre-amplifier at APIC 204B while APIC 204A may contain digital signal processing. This can be used for a variety of applications including RF, Memory, and SerDes etc.
  • FIG. 6l shows a perspective view of a monolithic APIC and probe with a straight lever arm on the probe side of the monolithic body. This has utility in that the length of the arm can be created to minimize DUT probe damage based on the technology of the DUT.
  • FIG. 6m shows a perspective view of a monolithic APIC and probe with divisional signal processing with a straight lever arm Probe.
  • FIG. 6j through 6m show a method for mass production of APICs.
  • the monolithic elements can be more easily placed in a probe card because of the 'handle' of the monolithic element which is easier to handle than individual probe needles.
  • the apparatus is not limited in application to high speed RF signals.
  • the apparatus describe herein provides advantages to several application areas where the APIC IC can be designed to optimize a particular application.
  • FIG. 6f and 6g show that SerDes is an application area where the apparatus can provide advantages over current techniques.
  • the very high speed SerDes signals are conditioned by the APIC device enabling these high speed signals to be effectively tested using standard ATE.
  • This embodiment of APIC 204 can be used to condition, amplify or even provide a local Serialization or De-serialization function to enable low speed ATE 110 to be used by sending the lower speed signals through the probe card and thus to ATE 110.
  • APIC 204 can be designed to interface to high speed signals used for memory systems such as static or dynamic RAM. Such devices have very high demands on speed of signals from testers. In this case, at least one APIC 204 can provide very high speed signals and level testing within DUT 116. This application area can also benefit from an APIC 204 providing some intelligence for memory testing as well as a SerDes function to enable lower speed testing to be carried out, shown in FIG. 6h and 6i .
  • APIC 204 can be designed to facilitate parametric testing of devices. This would include the APIC providing, conditioning and sensing power supply lines. Currently, parametric testing is limited to low frequencies by the limitations of the probe card and ATE speeds. In contrast, for this application an APIC 204 can enable very high speed parametric testing using normal ATE infrastructure. These limitations also limit packaged test or Strip Testing. As an application of the APIC, signal testing for package or strip testing can be enhanced. Conventionally only specialized probe cards and single sited locations can be utilized. With APIC 204, multiple high speed parametric testing can be carried out. In a similar manner to SerDes the APIC IC can be designed to include parametric measurements or conditioning. An example of this is high speed transistor testing for which the high speed parameters are difficult to obtain using low speed methods.
  • FIG. 7b shows another embodiment APIC which in this case includes a source measurement unit (SMU) 244a which is typically on the ATE equipment.
  • SMU 244a is incorporated with or is part of APIC 204, thus providing both higher speed and lower interference from long signal runs.
  • APIC System in Package
  • RCP Redistributed Chip Package
  • Strip testing of multiple ICs is another application.
  • appropriate embodiments of APIC 204 can be used to test in-process or final packaged parts at both high speed and medium and/or low speed, thus providing greater coverage than is currently available.
  • components may be constructed as chip-in-chip.
  • APIC 204 is programmable, as illustrated in examples shown in FIG. 7a , 7b , 8a , 8b , 8c and 8d .
  • FIG. 7a shows schematically the components of a programmable APIC 204.
  • FIG. 7a and 7b illustrate that an APIC 204 can contain signal processing and conditioning elements within one IC body which can carry out various processes such as power conditioning/monitoring, RF signalling and conversion/monitoring, High speed serial signalling or high speed memory interface conditioning. These functions do not have to be individually fabricated but can be controlled to be active via the ATE interface signals 219.
  • FIG. 7b shows another embodiment of APIC 204 that includes a source measurement unit (SMU) 244a instead of a comparator 244 shown in FIG. 7a .
  • FIG. 8a shows schematically a series of APIC 204 independently in communication with ATE 110 via a high speed bus 250.
  • FIG. 8b shows a series of APIC 204 connected in series with ATE 110.
  • FIG. 8c shows a series of APIC 204 in communication with ATE 110 via bus 250 and with each other.
  • FIG. 8d shows a wireless interface for communications signals 219a between APICs and the ATE probe card signals.
  • substrate 220 may include tester interface 214, DUT interface 216, APIC 204 programmed for signal conditioning 224, a memory 240, a controller 242, a comparator 244 and A/D - D/A switching capability 246.
  • substrate 220 has the components illustrated schematically in FIG. 7a .
  • ATE 110 sends signals to program individual APIC 204 to conduct a specific test or tests.
  • Each probe 202 is in communication with a different corresponding APIC 204.
  • Each corresponding APIC 204 can be individually programmed to conduct a specific test or tests, and so several tests on one or more DUT 116 can be performed in parallel using several probes 202.
  • ATE 110 may program one specific APIC 204 to configure its function as a low noise amplifier, a high frequency signal generator, an I/O cell, or some other function.
  • ATE 110 can program another APIC 204 to configure its function differently. In this manner, ATE 110 may sequence and program several APIC 204 to perform several different tests on one or more DUT 116.
  • ATE 110 ability of ATE 110 to perform several tests in parallel confers advantages through use of test head 200 over use of all prior art systems. In the prior art ATE 110 conducted tests on DUT 116 in sequence.
  • APIC 204 can be implemented with a wireless ATE interface.
  • FIG. 8d shows a wireless interface connection between multiple APIC 204 and the ATE probe card, showing communications signals 219a. It will be recognized that not only wireless communications can be sent over this link but, as well, power can be sent to provide power to APIC 204 and any DUT 116 connected to it. RF power can be converted to DC power in APIC 204 for internal and external use. This provides very high isolation and signal integrity, thus enabling more applications for APIC 204 when compared with hardwired techniques.
  • APIC 204 is programmed to analyze the response from DUT 116.
  • substrate 220 may be programmed to compare incoming ( FIG. 9a ) and outgoing signals ( FIG. 9b ) from DUT 116, data from DUT 116 against standard data, or other analytical functions.
  • APIC 204 analyzes the data from DUT 116 and conveys the result from the analysis to ATE 110.
  • ATE 110 may be programmed to compare incoming ( FIG. 9a ) and outgoing signals ( FIG. 9b ) from DUT 116, data from DUT 116 against standard data, or other analytical functions.
  • APIC 204 analyzes the data from DUT 116 and conveys the result from the analysis to ATE 110.
  • ATE 110 may result in a simple pass/fail decision.
  • APIC 204 transmits this result to ATE 110, as illustrated in FIG. 9c , instead of the plurality of data that led to this result, resulting in time savings for ATE 110 functions and more rapid test sequencing..
  • FIG. 10a shows examples of signal transformations using APIC 204 in transmission mode, sending signals from ATE 110 to DUT 116.
  • FIG. 10b shows examples of signal transformations using APIC 204 in receiver mode, sending signals from DUT 116 to ATE 110.
  • FIG. 11 shows schematically testing of several DUT 116 using testing equipment which may be high speed ATE but using APIC to provide enhanced signal conversion/ conditioning.
  • FIG. 12 shows one protocol for conducting testing of DUT 116 using prior art testing equipment. Tests necessarily are conducted on one or very few DUT 116 at any one time and, if more than one test is needed, such tests are conducted sequentially. A consequence is that testing is a time consuming process.
  • FIG. 13a and 13b illustrate the use of a plurality of active probes 202, each having APIC 204, for simultaneous, parallel testing of several DUT 116.
  • one test can be conducted on several DUT 116, or several tests can be conducted on any one DUT 116, or several tests can be conducted on several DUT 116 in parallel.
  • FIG. 14 shows one protocol for conventional sequential testing of several DUT 116 using active probes 202.
  • FIG. 15 shows one protocol for simultaneous, parallel testing of several DUT 116 using a plurality of active probes 202.
  • Cantilever probe 300 typically comprises a supporting arm 302 and a contacting needle 304.
  • Supporting arm 302 is attached at a base end 306 to the test unit structure.
  • Contacting needle 304 is attached at a distal end 308 of supporting arm 302, and extends to a probe end 310 used to contact a DUT.
  • This is the baseline case that represents the current means by which wafers are being tested using contact probes.
  • FIG. 16 is a representative model of the probe structure, and not limiting.
  • a single cantilever probe 300 has a characteristic impedance of 300 ⁇ .
  • a "balanced cantilever" probe 320 is formed that can be modeled as a balanced transmission line, which delivers signal energy between wafer and a probe card.
  • the characteristic impedance of balanced probe 320 is 200 ⁇ . If it is driven by a source with source resistance 50 ⁇ and terminated by a load with load resistance 50 ⁇ , there is an improvement with respect to the single probe case as can be seen in the simulation shown in FIG. 19 .
  • the signal return probe proximate to the signal probe does not necessarily have to touch DUT 116, it may instead be connected by way of a small gap 324 or with a dielectric 326, as shown in FIG. 22 .
  • probe needles can be used. For instance, improved performance at high frequencies can be realized by the use of vertical 328 or "cobra" type 330 probes, normally with a grounded guard 332, as illustrated in FIG. 22a, 22b, 22c and 22d . Similarly, micromachined probe needles and membrane probe needles could be used to improve performance.
  • This approach also works for multiple probe situations such as balanced lines or 'double' probes as illustrated in FIG. 23 .
  • a single cantilever probe was modeled and simulated with a characteristic impedance of 300 ⁇ and driven by a source with source resistance 300 ⁇ and terminated by a load with load resistance 300 ⁇ .
  • the source and load resistances are equal to the characteristic impedance of the probe but that this is non-limiting.
  • the source impedance could be 50 ⁇ and the load impedance could be 300 ⁇ .
  • the latter case can be achieved where an APIC is designed to interface with a probe needle and the impedance of the APIC is matched to the impedance of the probe needle (in this case 300 ⁇ ).
  • FIG. 20 it is observed that at 5 GHz there is an insertion loss improvement in using matched line to source and load is from -9 dB to -1.5 dB.
  • a balanced cantilever probe was modeled and simulated with a characteristic impedance of 200 ⁇ , is driven by a voltage source with source resistance 200 ⁇ and terminated by a load with load resistance 200 ⁇ .
  • the source and load resistances are equal to the characteristic impedance of the probe but that this is non-limiting.
  • the source impedance could be 50 ⁇ and the load impedance could be 200 ⁇ .
  • the latter case can be achieved where an APIC is designed to interface with a probe needle and the impedance of the APIC is matched to the impedance of the probe needle (in this case 200 ⁇ ).
  • the insertion loss at 5 GHz is improved in using matched line to source and load is from -4 dB to -0.1 dB.
  • a further advantage of the architectures illustrated in FIG. 5 is cost saving through amortization of develop and production costs over a larger number of chips 220 and consequent reduction of costs per test.
  • a disadvantage of prior art systems, as illustrated in FIG. 1 is that they require design of a chip comprising substrate 104 and IC 106 specifically for testing each design of DUT 116.
  • the architecture of substrate 220 may be common for testing several different types of DUT 116.
  • Test head 200 has a plurality of APIC 204, each of which is individually programmable, and each of which is programmed so that separate probes 202 conduct several parallel tests on DUT 116. Probes 202 on test head 200 necessarily have a spatial arrangement that enables contact with each of the required contact points 114 of DUT 116.
  • APIC devices are placed very close to the DUT the high speed/RF signals to and from the DUT can be converted to low speed/DC signals from and to the ATE. This enables the use of economical, low speed testers for high-speed and high frequency tests since the APIC can perform the high speed/RF data conversion and processing.
  • APICs placed on probe heads reduce noise and potential for channel interference.
  • the APIC provides a configurable conversion of signals between the ATE and the DUT.
  • digital or analog channels are used between ATE and APIC devices instead of RF to eliminate signal degradation, fan out and noise interference.
  • major components of test data processing and analysis can be performed by the APIC, and so only a limited data signal needs to be communicated between the ATE and APIC, thus reducing the signal information content. This makes it possible to use slow speed testers and parallel connection of multiple APIC devices for parallel testing, a major cost advantage over single device test per touch down, and reduction in overall wafer test time.
  • APICs convert the signals from ATE to a format that can be understood by the DUTs and vice versa.
  • APIC More advantage accrues from using the APIC closer to the probe head tip so as to provide higher reliability than current solutions available in the market.
  • Digital signals instead of analog can be used for more advanced versions of APIC for configurability, programmability and enhanced control of APIC devices for advanced solutions.
  • APICs may also be used to match impedances.
  • an APIC may be specially designed to match the characteristic impedance of an RF probe need to the APIC.
  • Such impedance matching can provide for significant improvement in insertion loss resulting in improved signal fidelity and integrity.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Tests Of Electronic Circuits (AREA)
EP08733706.9A 2007-04-03 2008-04-03 Testing of electronic circuits using an active probe integrated circuit Not-in-force EP2135096B1 (en)

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KR101499047B1 (ko) 2015-03-05
KR20100016139A (ko) 2010-02-12
JP2013257334A (ja) 2013-12-26
EP2135096A4 (en) 2012-05-02
JP5572084B2 (ja) 2014-08-13
JP2010523945A (ja) 2010-07-15
EP2135096A1 (en) 2009-12-23
US20150276805A1 (en) 2015-10-01
WO2008119179A1 (en) 2008-10-09
WO2008119179B1 (en) 2008-12-04
CN101680914A (zh) 2010-03-24
US8928343B2 (en) 2015-01-06
US20100164519A1 (en) 2010-07-01

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