EP1826411B1 - Pompe rotative, mélangeur hydrodynamique avec une pompe rotative et utilisation de la pompe rotative pour le traitement de fluides - Google Patents

Pompe rotative, mélangeur hydrodynamique avec une pompe rotative et utilisation de la pompe rotative pour le traitement de fluides Download PDF

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Publication number
EP1826411B1
EP1826411B1 EP20060125600 EP06125600A EP1826411B1 EP 1826411 B1 EP1826411 B1 EP 1826411B1 EP 20060125600 EP20060125600 EP 20060125600 EP 06125600 A EP06125600 A EP 06125600A EP 1826411 B1 EP1826411 B1 EP 1826411B1
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EP
European Patent Office
Prior art keywords
fluid
pump housing
rotary pump
pump
storage container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP20060125600
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German (de)
English (en)
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EP1826411A1 (fr
Inventor
Dr. Jürgen Hahn
Dr. Shui Yuan Yu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thoratec Delaware LLC
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Levitronix LLC
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Filing date
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Priority to EP20060125600 priority Critical patent/EP1826411B1/fr
Publication of EP1826411A1 publication Critical patent/EP1826411A1/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D13/00—Pumping installations or systems
    • F04D13/16—Pumping installations or systems with storage reservoirs
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D1/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D13/00—Pumping installations or systems
    • F04D13/02—Units comprising pumps and their driving means
    • F04D13/06—Units comprising pumps and their driving means the pump being electrically driven
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D15/00—Control, e.g. regulation, of pumps, pumping installations or systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/42—Casings; Connections of working fluid for radial or helico-centrifugal pumps
    • F04D29/426—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for liquid pumps
    • F04D29/4273—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for liquid pumps suction eyes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/42—Casings; Connections of working fluid for radial or helico-centrifugal pumps
    • F04D29/426—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for liquid pumps
    • F04D29/428—Discharge tongues
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/42—Casings; Connections of working fluid for radial or helico-centrifugal pumps
    • F04D29/426—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for liquid pumps
    • F04D29/4293—Details of fluid inlet or outlet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D7/00—Pumps adapted for handling specific fluids, e.g. by selection of specific materials for pumps or pump parts
    • F04D7/02—Pumps adapted for handling specific fluids, e.g. by selection of specific materials for pumps or pump parts of centrifugal type
    • F04D7/04—Pumps adapted for handling specific fluids, e.g. by selection of specific materials for pumps or pump parts of centrifugal type the fluids being viscous or non-homogenous
    • F04D7/045—Pumps adapted for handling specific fluids, e.g. by selection of specific materials for pumps or pump parts of centrifugal type the fluids being viscous or non-homogenous with means for comminuting, mixing stirring or otherwise treating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2210/00—Working fluids
    • F05D2210/10—Kind or type
    • F05D2210/13—Kind or type mixed, e.g. two-phase fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/60—Fluid transfer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S415/00—Rotary kinetic fluid motors or pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/85978—With pump
    • Y10T137/86035—Combined with fluid receiver

Definitions

  • the invention relates to a rotary pump, a hydrodynamic mixer with such a rotary pump, and the use of the rotary pump for processing suspensions according to the preamble of the independent claim of the respective category.
  • CMP chemical-mechanical polishing processes
  • a suspension typically referred to as a slurry
  • a liquid is applied to a rotating wafer and serves there for polishing or lapping the very fine semiconductor structures.
  • photoresist to the wafer, or the roughening of surfaces of computer hard disks, to prevent sticking of the read / write heads by adhesion forces, for example by van der Waals forces.
  • FIG. 1 A suitable in principle for this purpose and known from the prior art dispensing device is in Fig. 1 illustrated.
  • those features that relate to features of prior art devices are provided with one or two apostrophes, while the features of examples according to the invention are not provided with an apostrophe are provided.
  • the known dispensing device 1 'of Fig. 1 comprises a reservoir 2 'which communicates with the fluid, e.g. B. slurry, is filled.
  • the reservoir 2 ' has an outlet 4', to which a pressure line 5 'is connected, which extends via a recirculation pump R' up to an inlet 6 'on the reservoir 2'.
  • Downstream of the recirculation pump R ' a plurality of removal points 7' in the pressure line 5 'are provided which lead to nozzles or other - usually referred to as a tool - apparatuses with which the fluid is applied to the wafer, for example.
  • Each removal point 7 ' is provided with a valve 8' in order to open or close the flow connection to the respective apparatus. If all removal points 7 'are closed, then the recirculation pump R' causes a mere circulation of the fluid, and thus a slight, in the reservoir 2 'locally limited mixing of the fluid.
  • the desired pressure with which the fluid is conveyed through the pressure line 5 'and the open removal points 7' to the apparatus and provided there can be generated or influenced by pressurization of the fluid in the reservoir 2 '.
  • an inlet 10 ' is provided on the storage container 2' through which a pressure medium can be introduced into the storage container via a pressure regulating valve 11 ', as symbolically represented by the arrow G.
  • a pressure medium is usually a gas, for.
  • nitrogen used with the reservoir 2 'an overpressure of, for example, 0.5 bar is maintained.
  • the in the EP 1 318 306 B1 proposed dispensing device 1 "of Fig. 2 can be used eg in a CMP process in the semiconductor industry.
  • a suspension of fine solid particles called slurry in a liquid is applied to a rotating wafer and serves for lapping or polishing the very fine semiconductor structures.
  • the fluid F "in this example is the suspension referred to as slurry FIG. 2
  • rotary pumps which are also referred to as centrifugal pumps, are meant in the context of this application, all those pumping devices having a rotor or an impeller, by the rotation of which a momentum transfer takes place on the fluid to be delivered.
  • the term rotary pump includes in particular centrifugal pumps, axial pumps and Side channel pumps.
  • the inlet and outlet are in continuous flow communication. For example, no valves are provided between the pump inlet and the outlet.
  • the rotor 31 "for mixing the fluid F" is arranged directly in the outlet of the storage container 2 ".
  • the rotor 31" protrudes at least partially into the storage container 2 "for thorough mixing of the fluid F".
  • the rotary pump 3 is "not only the pumping of the fluid F", but above all as an agitator, which mixes the fluid F "in the reservoir 2".
  • the rotor 31 "a plurality of wings 311", which are designed significantly larger than in known rotary pumps of comparable dimensions.
  • the wings 311 extendend into the reservoir 2" and provide (upon rotation of the rotor 3 ") for a certain circulation of the fluid F", as indicated by the arrows Z ".
  • the rotor 31 is arranged in a rotor housing 312" which forms part of the wall of the storage container 2 "."
  • the open, non-closed rotor housing 312 is an integral part of the storage container 2" here be.
  • the rotary pump 3 further includes a stator 32" having a stator winding 322 "for electrically driving the rotor 31".
  • the stator 32 “surrounds the rotor housing 312" and the stator 32 "is configured as a stator of a so-called temple motor, that is, the stator 32" has a plurality of stator teeth connected by a conclusion, wherein each stator tooth L-shaped with a shorter and a longer legs is formed.
  • the longer leg extends parallel to each The axis of rotation of the rotor and the shorter leg extends radially inwardly toward the axis of rotation.
  • the longer legs carry the stator winding 322 ".
  • the device of Fig. 2 further comprises a pressure line 41 ", through which the fluid F" to those already mentioned above and in Fig. 2 apparatuses or tools, not shown, can be pumped, with which the fluid F "can be applied eg to a wafer
  • the device of Fig. 2a also includes a reservoir 2 "for a fluid F". At the bottom of the reservoir 2 "there is provided a rotary pump 3" with a rotor 31 ".
  • the rotor 311" rotates in the direction of the arrow 3000 "in the tank 2". For reasons of clarity, the illustration of the pressure line 41 "was omitted.
  • wing 21 as in FIG Fig. 2 can be provided, which prevent the formation of a stable Vortex V ", ie break the rotating fluid flow.
  • the essential parameters which determine the mixing process, and if a pressure line 41 "is provided, are essentially determined by the geometry of the device or the parts constituting it, for example, the intensity or quality of mixing Fluids F “and 7 or the pump power of the rotor 31", if anything, only affect the number of revolutions of the rotor 31 "within certain limits.
  • the hydrodynamics of mixing can hardly be adjusted, that is, the distribution, size and Geometry of the vortex in the storage container 2 "is essentially determined by the geometry of the vanes 21", their size and arrangement in the storage container 2 "and its further components and components.
  • the pumping process and the mixing process are strictly coupled to each other and can not be adapted without structural changes.
  • the dispenser should be flexible and easy to use and in particular allow adequate mixing of the fluid.
  • the invention thus relates to a rotary pump comprising a rotor arranged in a closed pump housing, which is operatively connected to a drive for conveying a fluid, wherein on the pump housing an inlet opening for the inlet of the fluid into the pump housing, and on the pump housing an outlet opening for conveying the fluid from the pump housing in one with the fluid at least partially filled Reservoir is provided.
  • the outlet opening is arranged and configured on the pump housing such that the fluid can be supplied from the pump housing through the outlet opening to the storage container directly and without lines.
  • the pump pumps the fluid through the outlet openings in the reservoir, whereby a turbulence or a very good mixing of the fluid, which may be in particular a suspension, such as a slurry.
  • the fluid may also be an emulsion or a mixture of two liquids, in particular two liquids which are difficult to mix and which can be optimally mixed with the rotary pump according to the invention in the storage container.
  • the mixing is not carried out by a rotating mixer, which is provided on or in the reservoir, there is no stable vortex or vortex in the reservoir, which prevents good mixing of the fluid or at least massively deteriorated.
  • the direct and line-free direct pumping of the fluid into the reservoir through the one or more outlet openings optimum mixing achieved because on the one hand the reservoir is optimally mixed in the entire volume through the flowing out of the outlet openings in the reservoir fluid and on the other hand not the outlet openings are connected to an external conveyor circuit for conveying the fluid from the reservoir addition, but directly, without connection with an external line open directly into the storage tank and thus can only accomplish the function of mixing the fluid in the reservoir.
  • the outlet openings according to the present invention thus basically open directly into the reservoir. That is, the fluid is passed from the interior of the pump housing through the outlet openings, which may be formed simply as bores, nozzles or small tubular extensions in the pump housing, directly into the reservoir for mixing the fluid in the reservoir, without that on the way of the fluid from the interior of the pump housing via the outlet openings in the reservoir another use of the fluid flow is possible.
  • the fluid flow from the interior of the pump housing through the outlet openings in the reservoir is basically only the mixing of the fluid in the reservoir.
  • Fig. 1 the mixing of the fluid in the reservoir is negligibly small due to the return flow of the medium and is coupled directly with the intensity of the use of the fluid between the outlet of the pump and the reflux point in the reservoir. For example, if a lot of fluid between the outlet of the pump and the reservoir for use, for example, taken in a polishing process, the backflow of the fluid into the reservoir is small, whereby the already poor mixing is reduced even further.
  • the outlet openings of the rotary pump according to the invention are used exclusively for optimal mixing of the fluid in the storage tank, because they directly convey the fluid directly from the interior of the closed pump housing back into the storage tank, so that the quality of the mixing in the tank is always ensured consistent, even if, as will be explained below, in addition to the outlet openings on the pump housing or a delivery opening for conveying a portion of the fluid is provided in a delivery line.
  • the delivery of the fluid through the outlet openings into the storage tank takes place independently of the fact that the rotary pump according to the invention fulfills additional tasks in special embodiments, for example the simultaneous delivery of the fluid into an external pumping circuit for the use of the fluid in a particular application, for Example for polishing a wafer.
  • a feed opening connectable to a pressure line for conveying the fluid into the pressure line is provided on the pump housing. It is essential that the delivery opening in no case is identical to the outlet opening on the pump housing, since the transport of the fluid through the outlet opening in the reservoir in each case by the flow of fluid through another opening of the pump housing, for example, the promotion of the fluid in the pressure line, is decoupled in the sense that the entire amount of fluid that is transported from the pump housing via the outlet opening into the reservoir also directly, that is, leads into the reservoir without wires. It is therefore at the outlet opening and the delivery opening in in each case by two different, separate opening in the pump housing.
  • the inlet opening and / or the outlet opening is provided in a cover of the pump housing, in particular in a removable cover of the pump housing and may e.g. simply by holes and / or short tubular attachments that extend into the reservoir, be formed.
  • the inlet opening and / or the outlet opening have a circular cross-section and / or an oval cross-section and / or an extended cross-section, in particular a rectangular and / or a ring-shaped cross-section and / or another cross-section and / or a cross-sectional area of the outlet opening is between 10% and 100%, preferably between 30% and 70%, in particular between 50% and 60% of a cross-sectional area of the inlet opening.
  • the cross-sectional area of the outlet opening is preferably smaller than the cross-sectional area of the inlet opening.
  • a regulating means may be provided in special cases at the inlet opening and / or at the outlet opening, with which the cross section of the inlet opening and / or the outlet opening is variable, so that the flow of the fluid through the inlet opening and / or the outlet opening by the regulating means is adjustable.
  • the regulating means may be provided, for example, as a valve, orifice, shutter or other regulating means at or in the inlet opening and / or the outlet opening.
  • a further optimization of the mixing in the storage container can also be achieved, for example, by tilting the inlet opening and / or the outlet opening at a predeterminable angle with respect to an axis of the pump housing and / or the inlet opening as an inlet connection piece directed outwards relative to the pump housing which may for example be formed as a short tubular extension, and / or the outlet opening as outwardly directed with respect to the pump housing outlet nozzle, which may also be formed, for example, as a short tubular extension be executed.
  • the rotary pump has a stator for driving the rotor, wherein the rotor is mechanically and / or magnetically, in particular non-contact magnetically mounted with respect to the stator and / or the rotary pump is designed as a bearingless motor and / or the rotor designed as an integral rotor is and / or the rotor is permanently magnetic.
  • the invention further relates to a hydrodynamic mixer with a reservoir for receiving a fluid to be mixed, wherein an above described inventive rotary pump is provided.
  • the rotary pump is disposed within the reservoir, in particular completely within the reservoir in the reservoir of fluid. That is, in particular, the rotary pump need not be fixed or rigidly connected to the reservoir to form a novel hydrodynamic mixer.
  • the inlet opening of the rotary pump is connected via a supply line to a supply tank, so that the rotary pump from the supply tank, the fluid is supplied and / or the reservoir from an additional container, an additive can be supplied. That is, the inlet opening of the rotary pump can be connected to a further, externally arranged supply tank, from which for example by means of gravity Fluid in the inlet opening of the rotary pump can be supplied, so that the fluid through the outlet opening to the reservoir for mixing and refilling of the reservoir can be fed.
  • the inlet opening and / or the outlet opening is provided in a hydrodynamic mixer according to the invention in a cover of the pump housing, in particular in a removable cover of the pump housing, and / or the lid of the pump housing is on a wall of the reservoir, in particular on one Bottom surface of the reservoir, wherein in particular the lid forms a part of the wall, preferably a part of the bottom surface of the reservoir.
  • the fluid in another embodiment, in a hydrodynamic mixer, can be conveyed via the pressure line to a removal point and / or it is a means for controlling and / or regulating a fluid flow, in particular for controlling and / or regulating a fill level in the reservoir and / or a means provided for controlling and / or regulating an amount of additive, wherein preferably the control and / or regulation by a programmable data processing system can be supported or made.
  • the rotary pump according to the invention and / or the hydrodynamic mixer according to the invention is preferred for processing suspensions, in particular of slurry, especially in a CMP process in a wafer production or the production of a computer hard disk, and / or for circulating and / or mixing and / or pumping a suspension in a storage container and / or for dissolving and / or mixing a powder with a fluid, and / or for producing emulsions, and / or for mixing and / or aerating a bioreactor used.
  • the rotary pump according to the invention can be used especially advantageously in cases where the fluid, for example a suspension such as slurry, tends to agglomerate and therefore has to be constantly kept in motion.
  • the inventive rotary pump prevents in particular the formation of dead zones in the reservoir, thus preventing the formation of areas in which the fluid is practically not in motion, whereby it, as mentioned, is particularly suitable for use in suspending clumping suspensions.
  • Fig. 3a schematically shows a simple first embodiment of an inventive hydrodynamic mixer.
  • the hydrodynamic mixer 100 comprises a reservoir 8 for receiving a fluid 4, for example a slurry 4.
  • the reservoir 8 is mounted on a pump housing 2 of a rotary pump 1, so that the lid 11 of the pump housing 2 forms a bottom plate of the reservoir 8.
  • the fluid 4 is introduced into the pump housing 2 in the operating state through the inlet opening 6 and pumped back through the rotary pump 1 through the outlet openings 7, as shown by the arrows 711, in the reservoir 8, whereby a very good Mixing of the fluid 4 in the reservoir 8 can be reached.
  • rotary pumps are crucial to the present invention, since they are constant, ie. deliver stationary pressure conditions. This is especially important because e.g. in the semiconductor industry with increasingly finer suspensions, i. with suspensions that include particles with sizes down to the nanometer range, worked, which are particularly difficult to mix, or in which a continuously consistent mixing can be maintained very difficult. Especially here, but not only here, it is of particular importance that constant, i. E. stationary pressure conditions can be realized, as provided by rotary pumps.
  • the Fig. 3b shows a mixer 100 according to Fig. 3a which is equipped with a bearingless engine.
  • the rotary pump 1 in known per se, the rotary pump 1, a stator 12 for driving the rotor 3, wherein the rotor 3 with respect to the stator 12 is mechanically and / or magnetically, in particular magnetically non-contact. That is, the rotary pump 1 is preferably designed as a bearingless motor 13, wherein in particular the rotor 3 may be configured as an integral rotor 3 and is preferably permanent magnetic.
  • Fig. 3c and Fig. 3d is a further embodiment of an inventive hydrodynamic mixer gem.
  • Fig. 3a illustrated, wherein in the embodiments of the Fig. 3c and 3d
  • a delivery opening 10 is provided, which is connectable to a pressure line 9, so that in addition by the rotary pump 1, an external tool can be supplied with fluid.
  • the external tool may be a polishing station used to polish wafers or any other device to which the well-mixed fluid 4 must be supplied.
  • the example of Fig. 3d is only a special embodiment according to Fig. 3c , which as rotary pump 1, a rotary pump 1 with bearingless engine, as under Fig. 3b already described.
  • rotary pumps 1 are rotary pumps 1 with a substantially closed pump housing 2, which is substantially dependent on the state of the art, as described, for example, in US Pat Fig. 2 is differentiated.
  • Fig. 4 is a further embodiment of an inventive hydrodynamic mixer 100 shown with rotary pump 1, in which the rotary pump 1 is placed completely within the reservoir 8.
  • the rotary pump 1 can be on the reservoir 8 with in Fig. 4 Fixing means, not shown, for example, be fixed with screws, or simply without being fixed to the reservoir 8, simply stored in the reservoir.
  • the mixer 100 additionally comprises a delivery opening 10 connected to a pressure line 9, so that in addition to the mixing of the fluid 4, which symbolically again analogous to the Fig. 3a - 3d is shown by the arrows 611 and 711, with the rotary pump 1 at the same time fluid 4 can be conveyed for further processing via the pressure line 9 from the reservoir 8 out.
  • a rotary pump 1 may be placed in the reservoir 8, which has no additional delivery opening 10 and thus only the mixing of the fluid 4 is used.
  • a particular advantage of the embodiment according to Fig. 4 of course lies in the extraordinary flexibility of the arrangement.
  • the rotary pump 1 can be placed in a particularly simple manner in the reservoir 8 or removed therefrom again, without expensive assembly work being necessary, so that in particular the replacement of the rotary pump 1 or the repair or maintenance of such a system is particularly simple and inexpensive feasible ,
  • Fig. 5a - Fig. 5e are exemplified five different embodiments of a lid 11 of a pump housing 2 shown schematically, depending on the requirements, ie depending on the nature or property of the fluid 4, mixability of the fluid 4, size or geometry of the reservoir 8, or depending on whether from the associated rotary pump 1 additionally a pumping power must be made in an outer circle via a delivery opening 10 or not, etc., have special advantages.
  • the inlet opening 6 and the outlet opening 7 may, for example, in Fig. 5a, 5b and 5c illustrated a circular cross-section 61, 71, or the outlet opening 7 can according to Fig. 5e an oval, ring-shaped or an elongated cross-section 63, 73, in particular according to Fig. 5d have a rectangular cross section 63, 73.
  • Fig. 5e an oval, ring-shaped or an elongated cross-section 63, 73
  • Fig. 5d have a rectangular cross section 63, 73.
  • all possible suitable combinations of the shapes shown, both at the inlet openings 6 and at the inlet openings 7 are possible.
  • the inlet nozzle 6 and / or the outlet nozzle 7 can also extend significantly into the reservoir 8, so that an even better mixing of the fluid 4 can be achieved.
  • the inlet nozzle 6 and / or the outlet nozzle 7 may be extended, for example, by hoses and / or pipes, the hoses or pipes may be distributed in the reservoir 8 in a certain way, so that the mixing is further optimized.
  • a cross-sectional area 71, 72, 73 of the outlet opening 7 between 10% and 100%, preferably between 30% and 70% in particular between 50% and 60% of a cross-sectional area 61, 62, 63 of the inlet opening 6 and / or at the Inlet opening 6 and / or at the outlet opening 7 in the Fig. 5a - 5e not shown regulating means provided with which the cross section 61, 62, 63 of the inlet opening 6 and / or the cross section 71, 72, 73 of the outlet opening 7 is changeable, so that the flow of the fluid 4 through an inlet opening 6 and / or through an outlet opening 7 is adjustable, or is adjustable to a predetermined value.
  • the angle ⁇ under which the outlet nozzle 700 and / or an inlet nozzle 600 can be inclined against an axis A of the pump housing 2, can be varied by suitable means, or can be set to a predeterminable value, whereby, for example, the mixing of the fluid 4 in Reservoir 8 can be further optimized.
  • a complete delivery device 1000 with a hydraulic mixer 100 according to the invention with a rotary pump 1 is shown schematically.
  • the dispenser 1000 of Fig. 6 comprises a storage tank 8 containing, for example, a fluid 4 in the form of a slurry 4, which serves, for example, to polish a wafer to be polished in a polishing device, not shown, which communicates with the discharge point 13 for supplying the fluid 4.
  • the slurry 4 is pumped by the erfindungemässe rotary pump 1 from the reservoir 8 via the delivery opening 10 in the pressure line 9, which is formed in the present case as a ring line 90, so that fluid 4, which was not removed at one of the sampling points 13 to further use of the ring line 90 and the return port 80 in the reservoir 8 can be traced.
  • the fluid 4 in the storage container 8 is simultaneously optimally mixed by the rotary pump 1, as described above in detail, via the inlet 6, according to the arrow 611, fluid 4 into the pump housing 2 of the Roationspumpe 1 is introduced and is returned through the outlet openings 7 for mixing the fluid 4 back into the tank.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Mixers Of The Rotary Stirring Type (AREA)
  • Gas Separation By Absorption (AREA)
  • Details And Applications Of Rotary Liquid Pumps (AREA)

Claims (13)

  1. Pompe rotative, comprenant un rotor (3) disposé dans un carter de pompe fermé (2) qui, pour le convoyage d'un fluide (4), est fonctionnellement relié à un entraînement (5), où est prévue au carter de pompe (2) une ouverture d'entrée (6) pour l'admission du fluide (4) dans le carter de pompe (2), et est prévue au carter de pompe (2) une ouverture de sortie (7) pour le convoyage du fluide (4) du carter de pompe (2) dans un réservoir (8) rempli au moins partiellement avec le fluide (4), caractérisée en ce que l'ouverture de sortie (7) est disposée et configurée de telle sorte au carter de pompe (2) que le fluide (4) peut être amené du carter de pompe (2) à travers l'ouverture de sortie (7) au réservoir (8) directement et sans conduite.
  2. Pompe rotative selon la revendication 1, où est prévu au carter de pompe (2) une ouverture de convoyage (10) pouvant être reliée à une conduite sous pression (9) pour le convoyage du fluide (4) dans la conduite sous pression (9).
  3. Pompe rotative selon l'une des revendications 1 ou 2, où l'ouverture d'entrée (6) et/ou l'ouverture de sortie (7) sont prévues dans un couvercle (11) du carter de pompe (2), en particulier dans un couvercle démontable (11) du carter de pompe (2).
  4. Pompe rotative selon l'une des revendications précédentes, où l'ouverture d'entrée (6) et/ou l'ouverture de sortie (7) possèdent une section transversale circulaire (61, 71) et/ou une section transversale ovale (62, 72) et/ou une section transversale étirée (63, 73), en particulier une section transversale rectangulaire et/ou en forme de cercle partiel (63, 73) et/ou une autre section transversale et/ou est une face en section transversale (71, 72, 73) de l'ouverture de sortie (7) entre 10% et 100%, de préférence entre 30% et 70%, en particulier entre 50% et 60% d'une face en section transversale (61, 62, 63) de l'ouverture d'entrée (6) et/ou est prévu à l'ouverture d'entrée (6) et/ou à l'ouverture de sortie (7) un moyen de régulation au moyen duquel la section transversale (61, 62, 63) de l'ouverture d'entrée (6) et/ou la section transversale (71, 72, 73) de l'ouverture de sortie (7) est modifiable.
  5. Pompe rotative selon l'une des revendications précédentes, où l'ouverture d'entrée (6) et/ou l'ouverture de sortie (7) est inclinée par rapport à un axe (A) du carter de pompe (2) selon un angle prédéfinissable (α).
  6. Pompe rotative selon l'une des revendications précédentes, où l'ouverture d'entrée (6) est réalisée comme tubulure d'entrée (600) dirigée par rapport au carter de pompe (2) vers l'extérieur et/ou l'ouverture de sortie (7) comme une tubulure de sortie (700) dirigée par rapport au carter de pompe (2) vers l'extérieur.
  7. Pompe rotative selon l'une des revendications précédentes, où la pompe rotative présente un stator (12) pour l'entraînement du rotor (3), où le rotor (3) est logé relativement au stator (12) mécaniquement et/ou magnétiquement, en particulier magnétiquement sans contact et/ou la pompe de rotation est réalisée comme moteur sans palier (13) et/ou le rotor (3) est réalisé comme rotor intégral (3) et/ou le rotor (3) est à aimants permanents.
  8. Mélangeur hydrodynamique avec un réservoir (8) pour la réception d'un fluide (4) à mélanger, caractérisé en ce qu'il est prévu une pompe rotative (1) selon l'une des revendications 1 à 7.
  9. Mélangeur hydrodynamique selon la revendication 8, où la pompe de rotation (1) est disposée à l'intérieur du réservoir (8), en particulier complètement à l'intérieur de la réserve de fluide (4) se trouvant dans le réservoir (8).
  10. Mélangeur hydrodynamique selon l'une des revendications 8 ou 9, où l'ouverture d'entrée (6) de la pompe rotative (1) est reliée par une conduite d'alimentation à un réservoir d'alimentation de sorte que le fluide (4) peut être amené à la pompe de rotation (1) du réservoir d'alimentation et/ou qu'une matière d'addition peut être amenée au réservoir (8) à partir d'un réservoir additionnel.
  11. Mélangeur hydrodynamique selon l'une des revendications 8 à 10, où l'ouverture d'entrée (6) et/ou l'ouverture de sortie (7) est prévue dans un couvercle (11) du carter de pompe (2), en particulier dans un couvercle démontable (11) du carter de pompe (2), et/ou le couvercle (11) du carter de pompe (2) est disposé à une paroi (800) du réservoir (8), en particulier à une face de fond (800) du réservoir (8), où en particulier le couvercle (11) forme une partie de la paroi (800), de préférence une partie de la face de fond (800) du réservoir (8).
  12. Mélangeur hydrostatique selon l'une des revendications 8 à 11, où le fluide (4) peut être convoyé par la conduite sous pression (9) à un emplacement de prélèvement (13) et/ou sont prévus des moyens pour la commande et/ou la régulation d'un écoulement de fluide, en particulier pour la commande et/ou la régulation d'un niveau dans le réservoir (8) et/ou un moyen pour la commande et/ou la régulation d'une quantité de matière d'addition.
  13. Utilisation d'une pompe rotative (1) selon l'une des revendications 1 à 7 et/ou d'un mélangeur hydrodynamique (100) selon l'une des revendications 8 à 12 pour le traitement de fluides, en particulier de suspensions (4), en particulier de boue (4), en particulier dans un procédé CMP lors de la production de plaquettes ou de la production d'un disque dur d'ordinateur et/ou pour faire circuler et/ou mélanger et/ou pomper une suspension (4) dans un réservoir (8) et/ou pour dissoudre et/ou mélanger une poudre avec un fluide (4), et/ou pour la préparation d'émulsions (4) et/ou pour le mélange et/ou l'aération d'un bioréacteur.
EP20060125600 2006-02-23 2006-12-07 Pompe rotative, mélangeur hydrodynamique avec une pompe rotative et utilisation de la pompe rotative pour le traitement de fluides Active EP1826411B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP20060125600 EP1826411B1 (fr) 2006-02-23 2006-12-07 Pompe rotative, mélangeur hydrodynamique avec une pompe rotative et utilisation de la pompe rotative pour le traitement de fluides

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EP06405079 2006-02-23
EP20060125600 EP1826411B1 (fr) 2006-02-23 2006-12-07 Pompe rotative, mélangeur hydrodynamique avec une pompe rotative et utilisation de la pompe rotative pour le traitement de fluides

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EP (1) EP1826411B1 (fr)
JP (1) JP5389329B2 (fr)
KR (1) KR101344386B1 (fr)
CN (1) CN101025166B (fr)
AT (1) ATE433053T1 (fr)
DE (1) DE502006003874D1 (fr)
TW (1) TWI384123B (fr)

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ATE433053T1 (de) 2009-06-15
TWI384123B (zh) 2013-02-01
TW200738966A (en) 2007-10-16
CN101025166A (zh) 2007-08-29
JP2007224901A (ja) 2007-09-06
EP1826411A1 (fr) 2007-08-29
JP5389329B2 (ja) 2014-01-15
KR20070087491A (ko) 2007-08-28
US20070193635A1 (en) 2007-08-23
KR101344386B1 (ko) 2013-12-23
US8092074B2 (en) 2012-01-10
DE502006003874D1 (de) 2009-07-16
CN101025166B (zh) 2012-11-14

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