JP5389329B2 - 回転ポンプ、回転ポンプを有する流体ミキサ、及び流体処理のための回転ポンプの利用法 - Google Patents
回転ポンプ、回転ポンプを有する流体ミキサ、及び流体処理のための回転ポンプの利用法 Download PDFInfo
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- JP5389329B2 JP5389329B2 JP2007013856A JP2007013856A JP5389329B2 JP 5389329 B2 JP5389329 B2 JP 5389329B2 JP 2007013856 A JP2007013856 A JP 2007013856A JP 2007013856 A JP2007013856 A JP 2007013856A JP 5389329 B2 JP5389329 B2 JP 5389329B2
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- fluid
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D13/00—Pumping installations or systems
- F04D13/16—Pumping installations or systems with storage reservoirs
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D1/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D13/00—Pumping installations or systems
- F04D13/02—Units comprising pumps and their driving means
- F04D13/06—Units comprising pumps and their driving means the pump being electrically driven
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D15/00—Control, e.g. regulation, of pumps, pumping installations or systems
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/42—Casings; Connections of working fluid for radial or helico-centrifugal pumps
- F04D29/426—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for liquid pumps
- F04D29/4273—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for liquid pumps suction eyes
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/42—Casings; Connections of working fluid for radial or helico-centrifugal pumps
- F04D29/426—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for liquid pumps
- F04D29/428—Discharge tongues
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/42—Casings; Connections of working fluid for radial or helico-centrifugal pumps
- F04D29/426—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for liquid pumps
- F04D29/4293—Details of fluid inlet or outlet
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D7/00—Pumps adapted for handling specific fluids, e.g. by selection of specific materials for pumps or pump parts
- F04D7/02—Pumps adapted for handling specific fluids, e.g. by selection of specific materials for pumps or pump parts of centrifugal type
- F04D7/04—Pumps adapted for handling specific fluids, e.g. by selection of specific materials for pumps or pump parts of centrifugal type the fluids being viscous or non-homogenous
- F04D7/045—Pumps adapted for handling specific fluids, e.g. by selection of specific materials for pumps or pump parts of centrifugal type the fluids being viscous or non-homogenous with means for comminuting, mixing stirring or otherwise treating
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2210/00—Working fluids
- F05D2210/10—Kind or type
- F05D2210/13—Kind or type mixed, e.g. two-phase fluid
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2260/00—Function
- F05D2260/60—Fluid transfer
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S415/00—Rotary kinetic fluid motors or pumps
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/85978—With pump
- Y10T137/86035—Combined with fluid receiver
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
- Mixers Of The Rotary Stirring Type (AREA)
- Gas Separation By Absorption (AREA)
- Details And Applications Of Rotary Liquid Pumps (AREA)
Description
2 ポンプ・ハウジング
3 回転子
4 流体
5 駆動部
6 流入開口
7 流出開口
8 貯蔵容器
9 圧力管路
10 供給開口
11 カバー
12 固定子
13 ベアリングレス・モータ
80 還流開口
90 環状管路
100 流体ミキサ
600 流入口スタッブ管
611 矢印
700 流出口スタッブ管
800 壁
1000 供給装置
A 軸芯
α 傾斜角
Claims (12)
- 密閉型ポンプ・ハウジング(2)内に配置されて流体(4)のポンピング用駆動部(5)と作動的に連結された回転子(3)を含み、前記ポンプ・ハウジング(2)に、該ポンプ・ハウジング(2)内に前記流体(4)を取り入れるための流入開口(6)と、該ポンプ・ハウジングから前記流体(4)を少なくとも部分的に該流体(4)で充填された貯蔵容器(8)内へ送るための流出開口(7)とを備えた回転ポンプであって、
前記流入開口(6)が、前記貯蔵容器(8)の壁部の一部を形成する前記ポンプ・ハウジング(2)の壁部に設けられていて、該ポンプ・ハウジング(2)内に前記流体(4)を所定の方向へ流入させるようになっており、
前記流出開口(7)が、前記ポンプ・ハウジングの前記壁部の、前記流入開口(6)の外側位置に複数設けられていて、前記流体(4)を、該ポンプ・ハウジング(2)の該壁部から該流出開口(7)を通して前記貯蔵容器(8)へ配管なしで直接供給することができるように構成され、
前記各流出開口(7)が、前記流入開口(6)から離れる方向へ向いており、
前記流出開口(7)が、前記ポンプ・ハウジングの前記壁部から前記貯蔵容器(8)の中へ延在する複数の方向性スタッブを含み、前記方向性スタッブは、該ポンプ・ハウジングの該壁部に対して、前記所定の方向から離れるように方向性を持って構成されたそれぞれのスタッブ出口を有する、回転ポンプ。 - 圧力管路(9)内へ前記流体(4)を送るために、前記圧力管路(9)に連結可能な供給開口(10)を前記ポンプ・ハウジング(2)に設けた請求項1に記載の回転ポンプ。
- 前記ポンプ・ハウジングの前記壁部が、前記ポンプ・ハウジングのカバー(11)である請求項1又は請求項2に記載の回転ポンプ。
- 前記流入開口(6)及び/又は前記流出開口(7)が円形断面(61、71)及び/又は楕円形の断面(62、72)及び/又は伸長された断面、特に長方形のもの及び/又は環状断面(63、73)及び/又は別の断面を有し、且つ/又は前記流出開口(7)の断面積(71、72、73)が前記流入開口(6)の断面積(61、62、63)に対して、10%と100%の間であり、且つ/又は前記流入開口(6)及び/又は前記流出開口(7)に調整手段が設けられ、それによって前記流入開口(6)の前記断面(61、62、63)及び/又は前記流出開口(7)の前記断面(71、72、73)を変更することができるようになっている請求項1から請求項3までのいずれか一項に記載の回転ポンプ。
- 前記流入開口(6)及び/又は前記流出開口(7)が、前記ポンプ・ハウジング(2)の軸芯(A)に対して所定の角度(α)で傾けられている請求項1から請求項4までのいずれか一項に記載の回転ポンプ。
- 前記流入開口(6)が前記ポンプ・ハウジング(2)の前記壁部に対して外側に向けられた流入口スタッブ(600)として形成され、且つ/又は前記流出開口(7)が前記ポンプ・ハウジング(2)の前記壁部に対して外側に向けられた流出口スタッブ(700)として形成される請求項1から請求項5までのいずれか一項に記載の回転ポンプ。
- 前記回転子(3)を駆動するための固定子(12)を有し、前記回転子(3)が前記固定子(12)に対して、機械的及び/又は磁気的に、特に磁気的且つ非接触にジャーナル軸受けされ、且つ/又はベアリングレス・モータ(13)として設計され、且つ/又は前記回転子(3)が一体型回転子(3)として設計され、且つ/又は前記回転子(3)が永久磁石である請求項1から請求項6までのいずれか一項に記載の回転ポンプ。
- 混合されるべき流体(4)を受け入れる貯蔵容器(8)を有し、請求項1から請求項7までのいずれか一項に記載の回転ポンプ(1)を備えることを特徴とする流体ミキサ。
- 前記回転ポンプ(1)の前記流入開口(6)が供給管路を介して供給タンクと接続されて、前記供給タンクから前記回転ポンプ(1)に前記流体(4)を供給することができ、且つ/又は他の材料を他の容器から前記貯蔵容器(8)に供給することができるようになっている請求項8に記載の流体ミキサ。
- 前記ポンプ・ハウジングの前記壁部が前記ポンプ・ハウジングのカバー(11)であり、且つ前記ポンプ・ハウジング(2)の前記カバー(11)が前記貯蔵容器(8)の前記壁部(800)の一部を形成している請求項8または請求項9に記載の流体ミキサ。
- 前記流体(4)を、前記圧力管路(9)を介して抽出箇所(13)に送ることができ、且つ/又は流体流量を制御及び/又は調整する手段が設けられ、且つ/又は添加剤の量を制御及び/又は調整する手段が設けられる請求項8から請求項10までのいずれか一項に記載の流体ミキサ。
- ウェハ製造又はコンピュータ・ハードドライブの製造でのCMP工程における、流体、特にスラリ等の懸濁液(4)の処理のため、並びに/或いは貯蔵容器(8)内の懸濁液(4)の循環及び/又は混合及び/又はポンピングのため、並びに/或いは粉末の流体(4)への溶解及び/又は混合のため、並びに/或いは乳濁液(4)の製作のため、並びに/或いはバイオリアクターの通過混合及び/又は曝気のための、請求項1から請求項7までのいずれか一項に記載の回転ポンプ(1)及び/又は請求項8から請求項11までのいずれか一項に記載の流体ミキサ(100)の利用法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP06405079 | 2006-02-23 | ||
EP06405079.2 | 2006-02-23 |
Publications (2)
Publication Number | Publication Date |
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JP2007224901A JP2007224901A (ja) | 2007-09-06 |
JP5389329B2 true JP5389329B2 (ja) | 2014-01-15 |
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Application Number | Title | Priority Date | Filing Date |
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JP2007013856A Active JP5389329B2 (ja) | 2006-02-23 | 2007-01-24 | 回転ポンプ、回転ポンプを有する流体ミキサ、及び流体処理のための回転ポンプの利用法 |
Country Status (8)
Country | Link |
---|---|
US (1) | US8092074B2 (ja) |
EP (1) | EP1826411B1 (ja) |
JP (1) | JP5389329B2 (ja) |
KR (1) | KR101344386B1 (ja) |
CN (1) | CN101025166B (ja) |
AT (1) | ATE433053T1 (ja) |
DE (1) | DE502006003874D1 (ja) |
TW (1) | TWI384123B (ja) |
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TWI384123B (zh) * | 2006-02-23 | 2013-02-01 | Levitronix Technologies Llc | 旋轉泵,具有旋轉泵的液體動力混合機,及使用旋轉泵來處理流體 |
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2006
- 2006-11-28 TW TW95143989A patent/TWI384123B/zh active
- 2006-12-07 EP EP20060125600 patent/EP1826411B1/de active Active
- 2006-12-07 AT AT06125600T patent/ATE433053T1/de not_active IP Right Cessation
- 2006-12-07 DE DE200650003874 patent/DE502006003874D1/de active Active
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2007
- 2007-01-19 US US11/656,064 patent/US8092074B2/en active Active
- 2007-01-24 JP JP2007013856A patent/JP5389329B2/ja active Active
- 2007-01-24 KR KR1020070007506A patent/KR101344386B1/ko active IP Right Grant
- 2007-02-15 CN CN2007100852482A patent/CN101025166B/zh active Active
Also Published As
Publication number | Publication date |
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KR20070087491A (ko) | 2007-08-28 |
TWI384123B (zh) | 2013-02-01 |
JP2007224901A (ja) | 2007-09-06 |
US20070193635A1 (en) | 2007-08-23 |
CN101025166B (zh) | 2012-11-14 |
KR101344386B1 (ko) | 2013-12-23 |
CN101025166A (zh) | 2007-08-29 |
TW200738966A (en) | 2007-10-16 |
EP1826411A1 (de) | 2007-08-29 |
EP1826411B1 (de) | 2009-06-03 |
DE502006003874D1 (de) | 2009-07-16 |
ATE433053T1 (de) | 2009-06-15 |
US8092074B2 (en) | 2012-01-10 |
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