EP1318306B1 - Dispositif de distribution de liquid - Google Patents

Dispositif de distribution de liquid Download PDF

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Publication number
EP1318306B1
EP1318306B1 EP20020405937 EP02405937A EP1318306B1 EP 1318306 B1 EP1318306 B1 EP 1318306B1 EP 20020405937 EP20020405937 EP 20020405937 EP 02405937 A EP02405937 A EP 02405937A EP 1318306 B1 EP1318306 B1 EP 1318306B1
Authority
EP
European Patent Office
Prior art keywords
rotor
fluid
accordance
dispensing apparatus
rotary pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP20020405937
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German (de)
English (en)
Other versions
EP1318306A1 (fr
Inventor
Reto Schröb
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thoratec Delaware LLC
Original Assignee
Levitronix LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Levitronix LLC filed Critical Levitronix LLC
Priority to EP20020405937 priority Critical patent/EP1318306B1/fr
Publication of EP1318306A1 publication Critical patent/EP1318306A1/fr
Application granted granted Critical
Publication of EP1318306B1 publication Critical patent/EP1318306B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
    • B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D13/00—Pumping installations or systems
    • F04D13/16—Pumping installations or systems with storage reservoirs

Definitions

  • the invention relates to a dispensing device for a fluid according to the The preamble of independent claim 1 and the use of a such dispenser.
  • CMP chemical-mechanical polishing processes
  • slurry typically very fine solid particles and one liquid at a time applied rotating wafer and serves there for polishing or lapping the very fine semiconductor structures.
  • Photoresist on the wafer.
  • Another example concerns the pumping of Wastewater.
  • a corresponding device is for example in the US 6,241,485 B1.
  • the dispensing device 1 ' comprises a reservoir 2 'which communicates with the fluid, e.g. B. slurry, is filled.
  • a reservoir 2 ' which communicates with the fluid, e.g. B. slurry, is filled.
  • Reservoir 2 ' has an outlet 4' to which a pressure line 5 ' connected via a recirculation pump R 'up to a Input 6 'extends to the reservoir 2'.
  • Downstream of Recirculation pump R ' are a plurality of removal points 7' in the pressure line 5 ' provided that to nozzles or other - usually as a tool designated - equipments lead, with which the fluid on the wafers is applied.
  • Each removal point 7 ' is provided with a valve 8' to to open or close the flow connection to the respective apparatus closure. Are all sampling points 7 'closed, then causes the Recirculation pump R 'a mere circulation of the fluid.
  • an inlet to the reservoir 2 ' 10 ' is provided, through which a pressure regulating valve 11' via a pressure medium in the reservoir can be introduced, as symbolically by the arrow G. is shown.
  • a pressure medium is usually a gas, for. Nitrogen, used, with the in the reservoir 2 ', an overpressure of, for example 0.5 bar is maintained.
  • the task solving dispensing device is characterized by the features of independent claim 1.
  • a dispensing device for a fluid proposed with a reservoir for the fluid, which has an outlet having, which is connectable to a pressure line for the fluid, and with a rotary pump having a rotor for conveying the fluid into the Having pressure line, wherein the rotor for mixing the fluid is arranged directly in the outlet of the reservoir, wherein the rotor in a Rotor housing is provided, which is part of the wall of the reservoir forms.
  • the rotary pump thus fulfills two functions: First, it promotes that Fluid in the pressure line (pumping function), and on the other ensures the Arrangement of the rotor directly in the outlet of the reservoir a good and constant mixing of the fluid in the reservoir (Stirring function). This can be a separation or settling of particles in Suspensions, clumping or phase separation in the fluid be effectively prevented.
  • the Rotary pump has an inlet, the opening at least thirty Percent, in particular at least fifty percent of the diameter of the Rotor is.
  • a control unit is provided for the rotary pump, which the delivery pressure of the rotary pump on the speed of the rotor established.
  • the rotary pump in a work area with a operated low efficiency, there is a one-to-one for a given fluid Relationship between the speed of the rotor and the Pressure at the outlet of the pump. This has the great advantage that the pressure, with which the fluid is provided, in a simple manner and in a very short time Time, can be set or changed. An elaborate one Pressurization of the fluid in the reservoir is thus no longer necessary.
  • the stirring function of the rotor can be positively influenced when the rotor is designed and arranged so that it at least partially in the Inlet tank extends.
  • the rotor comprises a plurality of wings extending in the Extend reservoir into it. This is especially possible Realize that the wings compared to known rotary pumps are oversized, so are significantly larger. The wings are thus used in addition to the pressure generation as stirring elements, which the fluid in the Keep the storage container in motion.
  • the rotary pump has a stator for driving of the rotor, wherein the rotor with respect to the stator without contact is magnetically stored.
  • the rotary pump is a bearingless motor is designed and the rotor as integral rotor, because this is a very compact and space-saving design represents.
  • the invention serves Dispensing device for dispensing suspensions, in particular of Slurry, especially in a CMP process, or for delivering photoresist.
  • inventive Dispensing device are determining the viscosity of a liquid as well the verification of properties of a fluid, in particular the Verification of the mixing ratio in a fluid resulting from composed of several components.
  • Fig. 1 shows a dispensing device 1 ', which represents prior art and has already been explained at the beginning.
  • Fig. 2 shows a schematic representation of an embodiment of a inventive dispensing device, the total with the Reference numeral 1 is designated.
  • the dispensing device 1 comprises a Reservoir 2 for a fluid F having an output 4.
  • a rotary pump 3 is provided with a rotor 31, here as Centrifugal pump is formed.
  • the outlet 41 of the rotary pump 3 is connected to a pressure line 5 extending from this outlet 41 of the Rotary pump 3 via a pressure reducing valve 9 to an input 6 of the Reservoir 2 extends.
  • the pressure line 5 faces upstream of the Pressure Reducing Valve 9 at least one - here, for example, three - Ent Seastellen 7, each of which via a line 71 with a Apparatus T for dispensing the fluid F, e.g. As a nozzle, or a tool connected is.
  • a valve 8 is provided, with which the flow connection between the sampling point 7 and the tool T can be opened or closed separately.
  • the outlet 4 is arranged at the bottom of the storage container 2.
  • the opening the output 4 - which means its diameter - is identical to the Opening B of the inlet 30 of the rotary pump 3. This opening B is greater than half the diameter of the rotor 31.
  • CMP chemical-mechanical polishing
  • the apparatus or Tools T each include a nozzle or other means with which the fluid F can be applied to the wafer.
  • rotary pumps which are also referred to as centrifugal pumps, are all those pumping devices which include a rotor 31 and a Impeller, by the rotation of a momentum transfer to the promoting fluid takes place.
  • the term rotary pump includes in particular Centrifugal pumps, axial and side channel pumps.
  • the inlet and the outlet are more constant Flow connection. For example, there are no valves between Pump inlet and outlet 41 is provided.
  • the rotor 31 is for mixing the fluid F arranged directly in the outlet of the reservoir 2.
  • the rotor 31 protrudes the rotor 31 for mixing of the fluid F. at least partially into the reservoir 2 inside.
  • the serves Rotary pump 3 not only the pumping of the fluid F, but also as Agitator, which mixes the fluid F in the reservoir 2.
  • the rotor 31 has a plurality of blades 311, which clearly are designed larger than comparable with known rotary pumps Dimensioning. As shown in FIG. 2 and FIG. 3, the wings are sufficient 311 in the reservoir 2 into and and provide here (during rotation of the Rotor 3) for a circulation of the fluid as indicated by the arrows Z. is.
  • the representation of the wings 311 in Fig. 2 and Fig. 3 is of course only exemplary to understand.
  • the wings can still further approaches or larger areas or other suitable means to positively affect the stirring function influence.
  • the rotor 31 is arranged in a rotor housing 312, which is a part of the Wall of the reservoir 2 forms.
  • the rotor housing 312 may be integral part of the reservoir 2 or as a separate part be attached to this.
  • the rotatipon pump 3 further includes a stator 32 having a Stator winding 322 to electrically drive the rotor 31. Furthermore, a Control unit 12 is provided, which controls the rotary pump 3 and regulates.
  • the stator 32 surrounds the rotor housing 312.
  • the Stator 32 designed as a stator of a so-called temple motor.
  • the means (see Fig. 2 and Fig. 3), the stator 32 has several by a Conclusion associated stator teeth, each stator tooth L-shaped is formed with a shorter and a longer leg. The longer one Leg extends in each case parallel to the axis of rotation of the rotor and the shorter leg extends radially inwardly toward the axis of rotation.
  • the longer legs carry the stator winding 322nd
  • the rotary pump 3 preferably has a complete magnetically mounted rotor 31, that is, the rotor 31 is with respect to the Stators 32 non-contact magnetically mounted.
  • the absence mechanical bearing for the rotor 31 has several advantages. That's how it works Problem avoided that abrasive particles damage mechanical bearings can. Furthermore, there is no risk of contamination of the fluid Lubricant or bearing wear. Also sealing problems are avoided.
  • the rotor 31 is permanently magnetic.
  • the rotor 31 comprises a Permanent magnet, for example, a permanent magnetic ring 313rd
  • This ring 313 is disposed around a central bore 314 which along the desired axis of rotation of the rotor 31 therethrough extends.
  • the magnetization of the ring 313 is indicated by the arrows (without Reference numeral) indicated in its interior.
  • a particularly preferred rotary pump z In EP-A-0 819 330 or US-A-6,100,618.
  • This rotary pump has a So-called integral rotor and is designed as a bearingless engine.
  • integral rotor is meant that the pump rotor and the Rotor of the motor driving the pump are identical.
  • the rotor 31 acts both as a rotor of the motor drive and as the rotor of the Pump.
  • bearingless engine is meant that the rotor is stored completely magnetic, with no separate magnetic bearing are provided.
  • the stator 32 is both stator of the electric drive as also stator of magnetic bearing. This includes the stator winding 322 a drive winding of the pole pair number p and a control winding of Pole pair number p ⁇ 1. This makes it possible to both drive the rotor 31 and also to store completely contact-free magnetically in the stator.
  • Further details of such a rotary pump is here on the already referenced documents.
  • Stator winding 322 is a rotary drive field that provides torque to the rotor 31 causes and this set in rotation. Furthermore, the generated Control winding of the stator winding 322 a magnetic control panel, with in which the position of the rotor 31 with respect to the stator 32 is controllable.
  • the fluid F passes from the pressure line 5 through the lines 71 to the individual tools T.
  • the remainder of the fluid F, which is not delivered to the tools T. is, passes through the pressure reducing valve 9 and the input 6 back into the Reservoir 2, whereby a recirculation of the fluid F and thus a Mixing in the reservoir 2 is realized.
  • the inventive Dispensing device 1 in contrast to known Dispensing devices (Fig. 1), the delivery pressure with the rotary pump. 3 is generated and not by pressurizing the fluid with a Gas G, results in a much simpler construction.
  • the must Reservoir 2 is not designed to be gas-tight, which is a simpler Refilling possible.
  • control unit 12 the delivery pressure of Rotary pump 3 via the rotational speed of the rotor 31 a, which is hereafter is explained.
  • efficiency is the hydraulic efficiency of Rotation pump meant, that is the ratio of hydraulic Performance of the pump and mechanical power for the pump Drive of the rotor (without possibly existing friction losses in Storage or similar).
  • EP-A-1284369 becomes explains that for such operating ranges of the rotary pump 3, in which the efficiency is well below the maximum efficiency, one-to-one Relationship between the speed of the pump rotor and the delivery pressure (delivery) and also between the speed and the Volume flow (flow) exists. In these operating areas is the Delivery pressure approximately proportional to the square of the speed of the Rotor. This opens up the possibility of conveying pressure directly and without adjust additional pressure measurement on the speed of the rotor 31 and to regulate.
  • the one-to-one relationship between speed and delivery pressure or of course also depends on the speed between the flow and volume promoting fluid F, in particular from its viscosity.
  • EP-A-1284369 therefore becomes proposed the one-to-one context in Very low efficiency operating ranges exist for determining the viscosity or the dynamic viscosity of the fluid to use.
  • the explanations in this European Referenced patent application in the same way, the same Inventive dispensing device 1 can be used to Properties of the fluid F, such as its viscosity or else determine its density or other quantities derived therefrom monitor.
  • the inventive Dispensing device 1 additionally a quality control of the fluid online or to perform inline.
  • the determination of the viscosity of the fluid F is based on the motor current, with which the rotation of the rotor 31 is driven.
  • the motor current is directly a measure of the torque at which the rotor 31 is driven becomes.
  • the torque at which the rotor is driven in very good Approximation coincides with the torque transmitted to the fluid.
  • the torque corresponding to the rotor on the Liquid transfers, essentially, that is, except for mechanical Frictional losses, the driving torque with which the rotor is driven becomes. This is especially true for magnetically mounted rotors.
  • the Drive torque in turn is given by the motor current, which drives the rotor.
  • the motor current is doing as the armature current denoted torque-forming portion of the current in the electrical Drive meant.
  • the armature current is a very good measure of the Torque with which the rotor is driven.
  • a Temperature sensor 315 (see FIG. 3) is provided, with which the Temperature of the fluid F is detected.
  • the Delivery pressure under which the fluid F provided in the pressure line 5 is, from the control unit 12 directly on the rotational speed of the rotor 31st be set and regulated.
  • the Delivery pressure is, for example, at time intervals of less than 100 Adjustable in milliseconds.
  • Fig. 4 illustrates another embodiment, which especially suitable for those uses where the viscosity of the fluid or other of its properties. in the The following is based only on the differences from the embodiment Fig. 2 received.
  • the reference numerals have the already introduced Importance.
  • means for controlling the level of the Reservoir 2 comprise a tank 13 a Connecting line 14, which the tank 13 with the reservoir. 2 connects, and a constant volume of gas 15, which in the reservoir. 2 is provided. Of course, this gas volume 15 can also be zero. purpose this means 13, 14, 15 is to the level in the reservoir 2 to constant hold.
  • the tank 13 has a variable level, it can also be refilled become. If now by means of the rotary pump 3 from the reservoir. 2 Fluid F is removed, then flows from the tank 13 through the Connecting line 14 fluid after. In this way, a constant Adjust level FS in storage tank 2.
  • the level control in the reservoir 2 is particularly advantageous then if with the inventive dispensing device 1, the viscosity or other properties of the fluid F are to be determined or monitored. Due to the constant level FS in the reservoir 2 is namely ensures that always the same amount of fluid F or liquid (ie the same amount) is applied in the reservoir 2 with stirring power. This stirring power is therefore a particularly good measure of the specific fluid friction and thus provides an accurate measure of the Viscosity. This is a much more accurate determination of the viscosity or other properties of the fluid.
  • the reservoir 2 serves as a mixing container, in which the two Components are mixed to the fluid.
  • the mixing ratio of the two Components are monitored or checked.
  • Fig. 4 shows a variant of the embodiment and the Arrangement of the rotor 31.
  • the rotor 31 is configured and arranged that its wings 311 not into the reservoir 2 into it pass.
  • the opening B and the diameter B of the inlet 30 is here too, more than fifty percent of the diameter of the rotor 31, around one to achieve good mixing.
  • Fig. 3 shows a variant of the reservoir 2.
  • the reference numerals have the same meaning as explained with reference to FIG.
  • static guide elements 21 are provided in the storage container 2 . These cause that of the Rotary pump 3 generated fluid flows further upwards (as shown in FIG. 3) are directed, as the arrows with the reference Z indicate.
  • Storage containers 2 can be ensured by such a measure be that the constant mixing of the fluid F the entire Reservoir 2 includes and not locally to the vicinity of the rotor. 3 remains limited.
  • the dispensing device 1 is particularly suitable for such Fluids F, which lead to clumping, phase separations, Precipitates or settling of particles tend, for example Suspensions, especially slurry solutions.
  • Fluids F which lead to clumping, phase separations, Precipitates or settling of particles tend, for example Suspensions, especially slurry solutions.
  • inventive dispensing device 1 is not on here described application, namely the promotion of a slurry suspension or limited CMP processes. It is also suitable among other things generally for the conveyance of suspensions, emulsions, paints, Foods (eg juices or concentrates).
  • a special advantage is the combination of pumping function and Stirring function, the delivery pressure in a very simple manner and extremely can be quickly adjusted and controlled electronically.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)

Claims (14)

  1. Dispositif de distribution d'un fluide avec un réservoir de stockage (2) pour le fluide, qui présente une sortie (4) pouvant être reliée à une conduite sous pression (5) pour le fluide (F), et avec une pompe de rotation (3) qui présente un rotor (31) pour le convoyage du fluide (F) dans la conduite sous pression, caractérisé en ce que le rotor (31), pour le mélange du fluide (F), est disposé directement dans la sortie (4) du réservoir de stockage (2), où le rotor (31) est prévu dans un carter de rotor (312) qui forme une partie de la paroi du réservoir de stockage (2).
  2. Dispositif de distribution selon la revendication 1, où la pompe de rotation (3) présente une entrée (30) dont l'ouverture (B) représente au moins trente pour cent, en particulier au moins cinquante pour cent du diamètre du rotor (31).
  3. Dispositif de distribution selon la revendication 1 ou 2, avec une unité de contrôle (12) de la pompe de rotation (3), qui règle la pression de convoyage de la pompe de rotation (3) par le nombre de tours du rotor (31).
  4. Dispositif de distribution selon l'une des revendications précédentes, où le rotor (31) est configuré et disposé de façon à faire saillie au moins partiellement dans le réservoir de stockage (2).
  5. Dispositif de distribution selon l'une des revendications précédentes, où le rotor (31) comprend plusieurs ailettes (311) qui s'étendent dans le réservoir de stockage (2).
  6. Dispositif de distribution selon l'une des revendications précédentes, où la pompe de rotation (3) présente un stator (32) pour entraíner le rotor (31), où le rotor (31) est logé par rapport au stator (32) de manière magnétique sans contact.
  7. Dispositif de distribution selon l'une des revendications précédentes, où la pompe de rotation (3) est réalisée comme moteur sans palier et le rotor (31) comme rotor intégral.
  8. Dispositif de distribution selon l'une des revendications précédentes, où le rotor (31) est aimanté en permanence.
  9. Dispositif de distribution selon l'une des revendications précédentes, où des éléments conducteurs (21) sont prévus dans le réservoir de stockage (2).
  10. Dispositif de distribution selon l'une des revendications précédentes avec une conduite sous pression (5), qui s'étend d'une sortie (41) de la pompe de rotation (3) jusqu'à une entrée (6) du réservoir de stockage (2) et qui présente au moins un emplacement de prélèvement (7).
  11. Dispositif de distribution selon l'une des revendications précédentes avec des moyens (13, 14, 15) pour régler le niveau de remplissage du réservoir de stockage.
  12. Utilisation d'un dispositif de distribution selon l'une des revendications précédentes, pour distribuer des suspensions, en particulier des boues, spécialement lors d'un processus CMP, ou pour distribuer de la laque photosensible.
  13. Utilisation d'un dispositif de distribution selon l'une des revendications 1 à 11 pour déterminer la viscosité d'un liquide.
  14. Utilisation d'un dispositif de distribution selon l'une des revendications 1 à 11 pour vérifier les propriétés d'un fluide, en particulier pour vérifier un rapport de mélange.
EP20020405937 2001-12-04 2002-11-04 Dispositif de distribution de liquid Expired - Lifetime EP1318306B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP20020405937 EP1318306B1 (fr) 2001-12-04 2002-11-04 Dispositif de distribution de liquid

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP01811180 2001-12-04
EP01811180 2001-12-04
EP20020405937 EP1318306B1 (fr) 2001-12-04 2002-11-04 Dispositif de distribution de liquid

Publications (2)

Publication Number Publication Date
EP1318306A1 EP1318306A1 (fr) 2003-06-11
EP1318306B1 true EP1318306B1 (fr) 2005-06-01

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101025166B (zh) * 2006-02-23 2012-11-14 列维特龙尼克斯科技有限责任公司 旋转泵、带旋转泵的流体动力混合器及旋转泵的用途
DE102013010590A1 (de) * 2013-06-26 2014-12-31 Udo Tartler Behälter mit Tauchpumpe
DE102008010360B4 (de) * 2008-02-15 2020-02-27 Flux-Geräte GmbH Pumpeneinrichtung

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111304881B (zh) * 2020-03-02 2023-10-13 珠海格力电器股份有限公司 洗涤液盒、洗衣机、洗涤液液位检测及降低粘稠度的方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH426391A (de) * 1965-02-22 1966-12-15 Laeuppi Werner Anlage mit Fluidumpumpen zum Fördern von Flüssigkeiten oder Gasen
FR2536575A1 (fr) * 1982-11-19 1984-05-25 Sfermi Dispositif pour la decontamination de surfaces par electropolissage
FR2782506B1 (fr) * 1998-08-18 2000-09-22 Labeille Ets Dispositif et procede de distribution de suspension abrasive pour le polissage mecanique de substrat

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101025166B (zh) * 2006-02-23 2012-11-14 列维特龙尼克斯科技有限责任公司 旋转泵、带旋转泵的流体动力混合器及旋转泵的用途
KR101344386B1 (ko) 2006-02-23 2013-12-23 레비트로닉스 테크놀로지스, 엘엘씨 로터리 펌프, 로터리 펌프를 갖는 유압 믹서, 및 유체처리를 위한 로터리 펌프의 용도
DE102008010360B4 (de) * 2008-02-15 2020-02-27 Flux-Geräte GmbH Pumpeneinrichtung
DE102013010590A1 (de) * 2013-06-26 2014-12-31 Udo Tartler Behälter mit Tauchpumpe

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