EP1538132A4 - Keramik und herstellungsverfahren dafür - Google Patents

Keramik und herstellungsverfahren dafür

Info

Publication number
EP1538132A4
EP1538132A4 EP03795349A EP03795349A EP1538132A4 EP 1538132 A4 EP1538132 A4 EP 1538132A4 EP 03795349 A EP03795349 A EP 03795349A EP 03795349 A EP03795349 A EP 03795349A EP 1538132 A4 EP1538132 A4 EP 1538132A4
Authority
EP
European Patent Office
Prior art keywords
terms
ceramic
amount
al2o3
oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP03795349A
Other languages
English (en)
French (fr)
Other versions
EP1538132B1 (de
EP1538132A1 (de
Inventor
Yoshiharu Okiyama
Ryo Yamaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sodick Co Ltd
Original Assignee
Sodick Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sodick Co Ltd filed Critical Sodick Co Ltd
Publication of EP1538132A1 publication Critical patent/EP1538132A1/de
Publication of EP1538132A4 publication Critical patent/EP1538132A4/de
Application granted granted Critical
Publication of EP1538132B1 publication Critical patent/EP1538132B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
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    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/10—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on aluminium oxide
    • C04B35/111—Fine ceramics
    • C04B35/117—Composites
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
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    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/10—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on aluminium oxide
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    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
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    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3201—Alkali metal oxides or oxide-forming salts thereof
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    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
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    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3205—Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
    • C04B2235/3206—Magnesium oxides or oxide-forming salts thereof
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    • C04B2235/3208—Calcium oxide or oxide-forming salts thereof, e.g. lime
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    • C04B2235/3208—Calcium oxide or oxide-forming salts thereof, e.g. lime
    • C04B2235/3212—Calcium phosphates, e.g. hydroxyapatite
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    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
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    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
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    • C04B2235/3234—Titanates, not containing zirconia
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    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
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    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3262—Manganese oxides, manganates, rhenium oxides or oxide-forming salts thereof, e.g. MnO
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    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/327—Iron group oxides, their mixed metal oxides, or oxide-forming salts thereof
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    • C04B2235/34—Non-metal oxides, non-metal mixed oxides, or salts thereof that form the non-metal oxides upon heating, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
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    • C04B2235/349—Clays, e.g. bentonites, smectites such as montmorillonite, vermiculites or kaolines, e.g. illite, talc or sepiolite
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    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/656—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
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    • C04B2235/80—Phases present in the sintered or melt-cast ceramic products other than the main phase
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    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
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    • C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
    • C04B2235/963—Surface properties, e.g. surface roughness
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    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
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    • C04B2235/9646—Optical properties
EP03795349.4A 2002-09-12 2003-09-10 Keramik und herstellungsverfahren dafür Expired - Lifetime EP1538132B1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2002267186A JP4248833B2 (ja) 2002-09-12 2002-09-12 セラミックス及びその製造方法
JP2002267186 2002-09-12
PCT/JP2003/011538 WO2004024649A1 (ja) 2002-09-12 2003-09-10 セラミックスおよびその製造方法

Publications (3)

Publication Number Publication Date
EP1538132A1 EP1538132A1 (de) 2005-06-08
EP1538132A4 true EP1538132A4 (de) 2009-09-02
EP1538132B1 EP1538132B1 (de) 2013-07-24

Family

ID=31986693

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03795349.4A Expired - Lifetime EP1538132B1 (de) 2002-09-12 2003-09-10 Keramik und herstellungsverfahren dafür

Country Status (7)

Country Link
US (1) US7091146B2 (de)
EP (1) EP1538132B1 (de)
JP (1) JP4248833B2 (de)
KR (1) KR100961629B1 (de)
CN (1) CN1296313C (de)
TW (1) TW200413270A (de)
WO (1) WO2004024649A1 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1309681C (zh) * 2005-08-10 2007-04-11 武汉科技大学 一种合成锰铝尖晶石及其制备方法
JP2010177415A (ja) * 2009-01-29 2010-08-12 Kyocera Corp 保持用治具およびこれを備えた吸着装置
KR101168863B1 (ko) 2009-02-23 2012-07-30 가부시키가이샤 소딕 착색 세라믹 진공 척 및 그 제조 방법
JP5396353B2 (ja) * 2009-09-17 2014-01-22 日本碍子株式会社 静電チャック及びその製法
CN101962287B (zh) * 2010-09-14 2012-10-17 石家庄铁道大学 可加工的氧化铝基复合陶瓷材料及其制备方法
US8882871B2 (en) 2010-11-01 2014-11-11 Showa Denko K.K. Alumina sintered body, abrasive grains, and grindstone
JP4976601B2 (ja) 2010-11-01 2012-07-18 昭和電工株式会社 アルミナ質焼結体、砥粒、及び砥石
SI2636657T1 (sl) * 2010-11-01 2016-08-31 Showa Denko K.K. Postopek za izdelavo sintranega telesa iz aluminijevega oksida, sintrano telo iz aluminijevega oksida, abrazivna zrna in brus
JP5998787B2 (ja) * 2011-12-02 2016-09-28 Toto株式会社 半導電性セラミックス焼結体
JP6056312B2 (ja) 2011-12-02 2017-01-11 Toto株式会社 半導電性セラミックス焼結体
JP6017895B2 (ja) * 2012-09-03 2016-11-02 日本特殊陶業株式会社 アルミナ質焼結体の製造方法、真空チャックの製造方法、及び静電チャックの製造方法
JP6088346B2 (ja) * 2013-05-09 2017-03-01 新光電気工業株式会社 静電チャック及び半導体製造装置
PL2933236T3 (pl) * 2014-04-15 2016-10-31 Ogniotrwały zestaw ceramiczny, zastosowanie takiego zestawu oraz metalurgiczne naczynie do topienia
CN107663080B (zh) * 2016-07-27 2020-05-08 北京华卓精科科技股份有限公司 应用于j-r型静电卡盘的氧化铝陶瓷及其制备方法
RU2633463C1 (ru) * 2016-07-29 2017-10-12 Общество с ограниченной ответственностью "АЛОКС" СПОСОБ ПРИГОТОВЛЕНИЯ ШИХТЫ ДЛЯ КОРУНДОВОЙ КЕРАМИКИ (варианты)
JP6712652B2 (ja) * 2016-12-26 2020-06-24 京セラ株式会社 耐食性部材
US10585358B2 (en) * 2017-09-19 2020-03-10 Corning Incorpotated Method for manufacturing a flat polymer coated electrostatic chuck
CN108395222B (zh) * 2018-03-15 2021-09-17 江苏瓷光光电有限公司 一种反射式激光显示用光转换、散热一体化陶瓷材料及其制备方法
CN108649148B (zh) * 2018-06-20 2021-05-14 上海定向材料科技有限公司 一种瘠性钛酸铝复合材料匣钵的制备方法
KR102188831B1 (ko) * 2018-12-12 2020-12-09 한국세라믹기술원 산화티탄-산화망간 복합 세라믹스의 제조방법
JP7194306B1 (ja) 2022-07-27 2022-12-21 黒崎播磨株式会社 アルミナ焼結体及び静電チャック

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US4714640A (en) * 1986-02-04 1987-12-22 General Electric Co. (Alumina electrically conductive) guide article
EP0339903A1 (de) * 1988-04-26 1989-11-02 Toto Ltd. Verfahren zur Herstellung dielektrischer Keramik für elektrostatische Haltevorrichtungen
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CN1622924A (zh) 2005-06-01
EP1538132B1 (de) 2013-07-24
US7091146B2 (en) 2006-08-15
JP4248833B2 (ja) 2009-04-02
EP1538132A1 (de) 2005-06-08
WO2004024649A1 (ja) 2004-03-25
JP2004099413A (ja) 2004-04-02
KR20050052489A (ko) 2005-06-02
TW200413270A (en) 2004-08-01
CN1296313C (zh) 2007-01-24
US20040266606A1 (en) 2004-12-30
KR100961629B1 (ko) 2010-06-09

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