EP1508444B1 - Tintenstrahldrucker mit elektrostatisch betätigten Platten - Google Patents

Tintenstrahldrucker mit elektrostatisch betätigten Platten Download PDF

Info

Publication number
EP1508444B1
EP1508444B1 EP04024058A EP04024058A EP1508444B1 EP 1508444 B1 EP1508444 B1 EP 1508444B1 EP 04024058 A EP04024058 A EP 04024058A EP 04024058 A EP04024058 A EP 04024058A EP 1508444 B1 EP1508444 B1 EP 1508444B1
Authority
EP
European Patent Office
Prior art keywords
ink
nozzle
actuator
ink jet
plates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP04024058A
Other languages
English (en)
French (fr)
Other versions
EP1508444A3 (de
EP1508444A2 (de
Inventor
Kia Silverbrook
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Silverbrook Research Pty Ltd
Original Assignee
Silverbrook Research Pty Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from AUPO8063A external-priority patent/AUPO806397A0/en
Priority claimed from AUPO8044A external-priority patent/AUPO804497A0/en
Priority claimed from AUPO8075A external-priority patent/AUPO807597A0/en
Priority claimed from AUPO8071A external-priority patent/AUPO807197A0/en
Priority claimed from AUPO8077A external-priority patent/AUPO807797A0/en
Priority claimed from AUPO8036A external-priority patent/AUPO803697A0/en
Priority claimed from AUPO8058A external-priority patent/AUPO805897A0/en
Priority claimed from AUPO8072A external-priority patent/AUPO807297A0/en
Priority claimed from AUPO8070A external-priority patent/AUPO807097A0/en
Priority claimed from AUPO8047A external-priority patent/AUPO804797A0/en
Priority claimed from AUPO8067A external-priority patent/AUPO806797A0/en
Priority claimed from AUPO8004A external-priority patent/AUPO800497A0/en
Priority claimed from AUPO8056A external-priority patent/AUPO805697A0/en
Priority claimed from AUPO8065A external-priority patent/AUPO806597A0/en
Priority claimed from AUPO7933A external-priority patent/AUPO793397A0/en
Priority claimed from AUPO7936A external-priority patent/AUPO793697A0/en
Priority claimed from AUPO8069A external-priority patent/AUPO806997A0/en
Priority claimed from AUPO8053A external-priority patent/AUPO805397A0/en
Priority claimed from AUPO8035A external-priority patent/AUPO803597A0/en
Priority claimed from AUPO8001A external-priority patent/AUPO800197A0/en
Priority claimed from AUPO8066A external-priority patent/AUPO806697A0/en
Priority claimed from AUPO8060A external-priority patent/AUPO806097A0/en
Priority claimed from AUPO8054A external-priority patent/AUPO805497A0/en
Priority claimed from AUPO8055A external-priority patent/AUPO805597A0/en
Priority claimed from AUPO7935A external-priority patent/AUPO793597A0/en
Priority claimed from AUPO8073A external-priority patent/AUPO807397A0/en
Priority claimed from AUPO8061A external-priority patent/AUPO806197A0/en
Priority claimed from AUPO8076A external-priority patent/AUPO807697A0/en
Priority claimed from AUPO8059A external-priority patent/AUPO805997A0/en
Priority claimed from AUPO8049A external-priority patent/AUPO804997A0/en
Priority claimed from AUPO7950A external-priority patent/AUPO795097A0/en
Priority claimed from AUPO7949A external-priority patent/AUPO794997A0/en
Priority claimed from AUPO8041A external-priority patent/AUPO804197A0/en
Priority claimed from AUPO8048A external-priority patent/AUPO804897A0/en
Priority claimed from AUPP3983A external-priority patent/AUPP398398A0/en
Priority claimed from AUPP3982A external-priority patent/AUPP398298A0/en
Application filed by Silverbrook Research Pty Ltd filed Critical Silverbrook Research Pty Ltd
Publication of EP1508444A2 publication Critical patent/EP1508444A2/de
Publication of EP1508444A3 publication Critical patent/EP1508444A3/de
Application granted granted Critical
Publication of EP1508444B1 publication Critical patent/EP1508444B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J3/00—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed
    • B41J3/44—Typewriters or selective printing mechanisms having dual functions or combined with, or coupled to, apparatus performing other functions
    • B41J3/445—Printers integrated in other types of apparatus, e.g. printers integrated in cameras
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14314—Structure of ink jet print heads with electrostatically actuated membrane
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14427—Structure of ink jet print heads with thermal bend detached actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1648—Production of print heads with thermal bend detached actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/17—Ink jet characterised by ink handling
    • B41J2/175—Ink supply systems ; Circuit parts therefor
    • B41J2/17596—Ink pumps, ink valves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2002/041—Electromagnetic transducer

Definitions

  • the present invention relates to the field of ink jet printing systems.
  • Ink jet printers themselves come in many different types.
  • the utilisation of a continuous stream ink in ink jet printing appears to date back to at least 1929 wherein US Patent No. 1941001 by Hansell discloses a simple form of continuous stream electro-static ink jet printing.
  • US Patent 3596275 by Sweet also discloses a process of a continuous ink jet printing including the step wherein the ink jet stream is modulated by a high frequency electro-static field so as to cause drop separation. This technique is still utilized by several manufacturers including Elmjet and Scitex (see also US Patent No. 3373437 by Sweet et al )
  • Piezo-electric ink jet printers are also one form of commonly utilized ink jet printing device. Piezo-electric systems are disclosed by Kyser et. al. in US Patent No. 3946398 (1970 ) which utilises a diaphragm mode of operation, by Zolten in US Patent 3683212 (1970 ) which discloses a squeeze .mode of operation of a piezo electric crystal, Stemme in US Patent No. 3747120 (1972 ) discloses a bend mode of piezo-electric operation, Howkins in US Patent No. 4459601 discloses a Piezo electric push mode actuation of the ink jet stream and Fischbeck in US 4584590 which discloses a sheer mode type of piezo-electric transducer element.
  • the ink jet printing techniques include those disclosed by Endo et al in GB 2007162 (1979 ) and Vaught et al in US Patent 4490728 . Both the aforementioned references disclosed ink jet printing techniques rely upon the activation of an electrothermal actuator which results in the creation of a bubble in a constricted space, such as a nozzle, which thereby causes the ejection of ink from an aperture connected to the confined space onto a relevant print media.
  • Printing devices utilising the electro-thermal actuator are manufactured by manufacturers such as Canon and Hewlett Packard.
  • JP6106725 describes an inkjet nozzle comprising a rigid electrode and an opposed elastic electrode. Upon actuation, the elastic electrode deforms towards the rigid electrode by an electrostatic attracting force, causing ejection of an ink droplet from the nozzle.
  • a printing technology should have a number of desirable attributes. These include inexpensive construction and operation, high speed operation, safe and continuous long term operation etc. Each technology may have its own advantages and disadvantages in the areas of cost, speed, quality, reliability, power usage, simplicity of construction operation, durability and consumables.
  • esoteric techniques are also often utilized. These can include electroforming of nickel stage ( Hewlett-Packard Journal, Vol. 36 no 5, pp33-37 (1985) ), etectro-discharge machining, laser ablation ( U.S. Patent No. 5,208,604 ), micro-punching, etc.
  • the preferred embodiments and other embodiments will be discussed under separate headings with the heading including an IJ number for ease of reference.
  • the headings also include a type designator with T indicating thermal, S indicating shutter type and F indicating a field type.
  • a stacked capacitive actuator which has alternative electrode layers sandwiched between a compressible polymer.
  • the plates are drawn together compressing the polymer thereby storing energy in the compressed polymer.
  • the capacitor is then deactivated or drained with the result that the compressed polymer acts to return the actuator to its original position and thereby causes the ejection of ink corn and ink ejection port.
  • the nozzle arrangement 310 includes an ink ejection portal 311 for the ejection of ink on demand.
  • the ink is ejected from a nozzle chamber 312 by means of a stacked capacitor-type device 313.
  • the stacked capacitor device 313 consists of capacitive plates sandwiched between a compressible polymer. Upon charging of the capacitive plates, the polymer is compressed thereby resulting in a general "accordion" or “concertinaing" of the actuator 313 so that it's top surface moves away from the ink ejection portal 311. The compression of the polymer sandwich stores energy in the compressed polymer.
  • the capacitors are subsequently rapidly discharged resulting in the energy in the compressed polymer being released upon the polymer's return to quiescent position.
  • the return of the actuator to ifs quiescent position results in the ejection of ink from the nozzle chamber 312.
  • the process is illustrated schematically in Fig. 38 to Fig. 41, with Fig. 38 illustrating the nozzle chamber 310 in it's quiescent or idle state, having an ink meniscus 314 around the nozzle ejection portal 311.
  • the electrostatic actuator 313 is activated resulting in it's contraction as indicated in Fig. 39.
  • the contraction results in the meniscus 314 changing shape as indicated with the resulting surface tension effects resulting in the drawing in of ink around the meniscus and consequently ink 316 flows into nozzle chamber 312.
  • the meniscus 314 After sufficient time, the meniscus 314 returns to its quiescent position with the capacitor 313 being loaded ready for firing (Fig. 40).
  • the capacitor plates 313 are then rapidly discharged resulting, as illustrated in Fig. 41, in the rapid return of the actuator 313 to it's original position.
  • the rapid return imparts a momentum to the ink within the nozzle chamber 312 so as to cause the expansion of the ink meniscus 314 and the subsequent ejection of ink from the nozzle chamber 312.
  • the actuator 313 consists of a series of interleaved plates 320, 321 between which is sandwiched a compressive material 322, for example styrene-ethylene-butylene-styrene block co-polymer.
  • a compressive material 322 for example styrene-ethylene-butylene-styrene block co-polymer.
  • One group of electrodes, e.g. 320, 323, 325 jut out at one side of the stacked capacitor layout.
  • a second series of electrodes, e.g. 321, 324 jut out a second side of the capacitive actuator.
  • the electrodes are connected at one side to a first conductive material 327 and the other series of electrodes, e.g. 321, 324 are connected to second conductive material 328 (Fig. 37).
  • the two conductive materials 327, 328 are electrically isolated from one another and are in turn interconnected to lower signal and drive layers as will become more readily apparent here and
  • the stacked capacitor device 313 consists of other thin film materials in place of the example styrene-ethylene-butylene-styrene block co-polymer.
  • Such materials may include:
  • the electrode actuator 313 can be rapidly constructed utilizing chemical vapor deposition (CVD) techniques.
  • the various layers, 320, 321, 322 can be layed down on a planer wafer one after another covering the whole surface of the wafer.
  • a stack can be built up rapidly utilizing CVD techniques.
  • the two sets of electrodes are preferably deposited utilizing separate metals. For example, aluminum and tantalum could be utilized as materials for the metal layers.
  • the utilisation of different metal layers allows for selective etching utilizing a mask layer so as to form the structure as indicated in Fig. 42.
  • the CVD sandwich can be first layed down and then a series of selective etchings utilizing appropriate masks can be utilized to produced the overall stacked capacitor structure.
  • the utilisation of the CVD process substantially enhances the efficiency of production of the stacked capacitor devices.
  • Fig. 43 there is shown an exploded perspective view illustrating the construction of a single ink jet nozzle in accordance with an embodiment.
  • the ink jet nozzle arrangement 310 is constructed on a standard silicon wafer 330 on top of which is constructed data drive circuitry which can be constructed in the usual manner such as a two-level metal CMOS layer 331.
  • CMOS layer 331 On top of the CMOS layer 331 is constructed a nitride passivation layer 332 which provides passivation protection for the lower layers during operation an also should an etchant be utilized which would normally dissolve the lower layers.
  • the various layers of the stacked device 313, for example 320, 321, 322, can be layed down utilizing CVD techniques.
  • the stacked device 313 is constructed utilizing the aforementioned production steps including utilizing appropriate masks for selective etchings to produce the overall stacked capacitor structure. Further, interconnection can be provided between the electrodes 327, 328 and the circuitry in the CMOS layer 331.
  • a nitride layer 333 is provided so as to form the walls of the nozzle chamber, e.g. 334, and posts, e.g. 335, in one open wall 336 of the nozzle chamber.
  • the surface layer 337 of the layer 333 can be deposited onto a sacrifical material. The sacrificial material is subsequently etched so as to form the nozzle chamber 312 (Fig. 37).
  • the top layer 337 includes etchant holes, e.g. 338, so as to speed up the etching process in addition to the ink ejection portal 311.
  • the diameter of the etchant holes, e.g. 338, is significantly smaller than that of the ink ejection portal 311.
  • an additional nitride layer may be provided on top of the layer 320 to protect the stacked device 313 during the etching of the sacrificial material to form the nozzle chamber 312 (Fig. 37) and during operation of the inkjet nozzle.
  • the presently disclosed ink jet printing technology is potentially suited to a wide range of printing system including: colour and monochrome office printers, short run digital printers, high speed digital printers, offset press supplemental printers, low cost scanning printers high speed pagewidth printers, notebook computers with inbuilt pagewidth printers, portable colour and monochrome printers, colour and monochrome copiers, colour and monochrome facsimile machines, combined printer, facsimile and copying machines, label printers, large format plotters, photograph copiers, printers for digital photographic "minilabs", video printers, PhotoCD printers, portable printers for PDAs, wallpaper printers, indoor sign printers, billboard printers, fabric printers, camera printers and fault tolerant commercial printer arrays.
  • inventions of the invention use an ink jet printer type device. Of course many different devices could be used. However presently popular ink jet printing technologies are unlikely to be suitable:
  • thermal inkjet The most significant problem with thermal inkjet is power consumption. This is approximately 100 times that required for high speed, and stems from the energy-inefficient means of drop ejection. This involves the rapid boiling of water to produce a vapor bubble which expels the ink. Water has a very high heat capacity, and must be superheated in thermal inkjet applications. This leads to an efficiency of around 0.02%, from electricity input to drop momemum (and increased surface area) out.
  • piezoelectric inkjet The most significant problem with piezoelectric inkjet is size and cost. Piezoelectric crystals have a very small deflection at reasonable drive voltages, and therefore require a large area for each nozzle. Also, each piezoelectric actuator must be connected to its drive circuit on a separate substrate. This is not a significant problem at the current limit of around 300 nozzles per print head, but is a major impediment to the fabrication of pagewide print heads with 19,200 nozzles.
  • the inkjet technologies used meet the stringent requirements of in-camera digital color printing and other high quality, high speed, low cost printing applications.
  • new inkjet technologies have been created.
  • the target features include:
  • inkjet designs shown here are suitable for a wide range of digital printing systems, from battery powered one-time use digital cameras, through to desktop and network printers, and through to commercial printing systems
  • the print head is designed to be a monolithic 0.5 micron CMOS chip with MEMS post processing.
  • the print head is 100 mm long, with a width which depends upon the inkjet type.
  • the smallest print head designed is IJ38, which is 0.35 mm wide, giving a chip area of 35 square mm.
  • the print heads each contain 19,200 nozzles plus data and control circuitry.
  • Ink is supplied to the back of the print head by injection molded plastic ink channels.
  • the molding requires 50 micron features, which can be created using a lithographically micromachined insert in a standard injection molding tool.
  • Ink flows through holes etched through the wafer to the nozzle chambers fabricated on the front surface of the wafer.
  • the print head is connected to the camera circuitry by tape automated bonding.
  • inkjet configurations can readily be derived from these 45 examples by substituting alternative configurations along one or more of the 11 axes.
  • Most of the IJ01 to IJ45 examples can be made into inkjet print heads with characteristics superior to any currently available inkjet technology.
  • Suitable applications include: Home printers, Office network printers. Short run digital printers, Commercial print systems, Fabric printers, Pocket printers, Internet WWW printers, Video printers, Medical imaging, Wide format printers, Notebook PC printers, Fax machines, Industrial printing systems, Photocopiers, Photographic minilabs etc.
  • Actuator mechanism (applied only to selected ink drops)
  • Actuator Mechanism Description Advantages Disadvantages Examples Thermal bubble An electrothermal heater heats the ink to above bolling point, transferring significant heat to the aqueous ink. A bubble nucleates and quickly forms, expelling the ink. The efficiency of the process is low, with typically less than 0.05% of the electrical energy being transformed into kinetic energy of the drop.
  • Perovskite materials such as tin modified lead lanthanum zirconate titanate (PLZSnT) exhibit large strains of up to 1% associated with the AFE to FE phase transition.
  • ⁇ Low power consumption ⁇ Many ink types can be used ⁇ Fast operation ( ⁇ 1 ⁇ s) ⁇ Relatively high longitudinal strain ⁇ High efficiency ⁇ Electric field strength of around 3 V/ ⁇ m can be readily provided ⁇ Difficult to Integrate with electronics ⁇ Unusual materials such as PLZSnT are required ⁇ Actuators require a large area ⁇ IJ04 Electrostatic plates Conductive plates are separated by a compressible or fluid dielectric (usually air).
  • the conductive plates may be in a comb or honeycomb structure, or stacked to increase the surface area and therefore the force.
  • Low power consumption ⁇ Many ink types can be used ⁇ Fast operation ⁇ Difficult to operate etectrostatic devices in an aqueous environment ⁇
  • the electrostatic actuator will normally need to be separated from the ink ⁇ Very large area required to achieve high forces ⁇ High voltage drive transistors may be required ⁇ Full pagewidth print heads are not competitive due to actuator size ⁇ IJ02, IJ04 Electrostatic pull on ink A strong electric field is applied to the Ink, whereupon electrostatic attraction accelerates the ink towards the print medium.
  • Examples are: Samarium Cobalt (SaCo) and magnetic materials in the neodymium iron boron family (NdFeB, NdDyFeBNb, NdDyFeB, etc) ⁇ Low power consumption ⁇ Many ink types can be used ⁇ Fast operation ⁇ High efficiency ⁇ Easy extension from single nozzles to pagewidth print heads ⁇ Complex fabrication ⁇ Permanent magnetic material such as Neodymium Iron Boron (NdFeB) required.
  • SaCo Samarium Cobalt
  • NdDyFeBNb neodymium iron boron family
  • NdDyFeB neodymium iron boron family
  • NdFeB Neodymium Iron Boron
  • the actuator should be pre-stressed to approx. 8 MPa.
  • Many ink types can be used ⁇ Fast operation ⁇ Easy extension from single nozzles to pagewidth print. heads ⁇ High force is available ⁇ Force acts as a twisting motion ⁇ Unusual materials such as Terfenol-D are required ⁇ High local currents required ⁇ Copper metalization should be used for long electromigration lifetime and low resistivity ⁇ Pre-stressing may be required ⁇ Fischenbeck, USP 4,032,929 ⁇ IJ25 Surface tension reduction Ink under positive pressure is held in a nozzle by surface tension. The surface tension of the ink is reduced below the bubble threshold, causing the ink to egress from the nozzle.
  • EUP 572,220 Thermoelastic bend actuator An actuator which relies upon differential thermal expansion upon Joule heating is used. ⁇ Low power consumption ⁇ Many ink types can be used ⁇ Simple planar fabrication ⁇ Small chip area required for each actuator ⁇ Fast operation ⁇ High efficiency ⁇ CMOS compatible voltages and currents ⁇ Standard MEMS processes can be used ⁇ Easy extension from single nozzles to pagewidth print heads ⁇ Efficient aqueous operation requires a thermal insulator on the hot side ⁇ Corrosion prevention can be difficult ⁇ Pigmented inks may be infeasible, as pigment particles may jam the bend actuator ⁇ IJ03, IJ09, IJ 17, IJ18 ⁇ IJ19, IJ20, IJ21, IJ22 ⁇ IJ23, IJ24, IJ27, IJ28 ⁇ IJ29, IJ30, IJ31, IJ32 ⁇ IJ33, IJ34, IJ35, IJ36 ⁇ IJ37, I
  • a heater fabricated from a conductive material is incorporated.
  • a 50 ⁇ m long PTFE bend actuator with polysilicon heater and 15 mW power input can provide 180 ⁇ N force and 10 ⁇ m deflection.
  • Actuator motions include: 1) Bend 2) Push 3) Buckle 4) Rotate ⁇ High force can be generated ⁇ PTFE is a candidate for low dielectric constant insulation in ULSI ⁇ Very low power consumption ⁇ Many ink types can be used ⁇ Simple planar fabrication ⁇ Small chip area required for each actuator ⁇ Fast operation ⁇ High efficiency ⁇ CMOS compatible voltages and currents ⁇ Easy extension from single nozzles to pagewidth print heads ⁇ Requires special material (e.g.
  • PTFE Requires a PTFE deposition process, which is not yet standard in ULSI fabs ⁇ PTFE deposition cannot be followed with high temperature (above 350 °C) processing ⁇ Pigmented inks may be infeasible, as pigment particles may jam the bend actuator ⁇ IJ09, IJ17, IJ18, IJ20 ⁇ IJ21, U22, IJ23, IJ24 ⁇ IJ27, IJ28, IJ29, IJ30 ⁇ IJ31, IJ42, IJ43, IJ44 Conductive polymer thermoelastic actuator A polymer with a high coefficient of thermal expansion (such as PTFE) is doped with conducting substances to increase its conductivity to about 3 orders of magnitude below that of copper.
  • the conducting polymer expands when resistively heated.
  • conducting dopants include: 1) Carbon nanotubes 2) Metal fibers 3) Conductive polymers such as doped polythiophene 4) Carbon granules ⁇ High force can be generated ⁇ Very low power consumption ⁇ Many ink types can be used ⁇ simple planar fabrication ⁇ Small chip area required for each actuator ⁇ Fast operation ⁇ High efficiency ⁇ CMOS compatible voltages and currents and ⁇ Easy extension from single nozzles to pagewidth print heads ⁇ Requires special materials development (High CTE conductive polymer) ⁇ Requires a PTFE deposition process, which is not yet standard in ULSI fabs ⁇ PTFE deposition cannot be followed with high temperature (above 350 °C) processing ⁇ Evaporation and CVD deposition techniques cannot be used ⁇ Pigmented inks may be infeasible, as pigment particles may jam the bend pigment particles may jam the bend actuator ⁇ IJ24 Shape memory alloy A shape memory alloy such as TiNi (also known
  • Linear Magnetic Actuator Linear magnetic actuators include the Linear Induction Actuator (LIA), Linear Permanent Magnet Synchronous Actuator (LPMSA), Linear Reluctance Synchronous Actuator (LRSA), Linear Switched Reluctance Actuator (LSRA), and the Linear Step
  • Linear Magnetic actuators can be constructed with high thrust, long travel, and high efficiency using planar semiconductor fabrication techniques ⁇ Long actuator travel is available ⁇ Medium force is available ⁇ Low voltage operation ⁇ Requires unusual semiconductor materials such as soft magnetic alloys (e.g. CoNiFe [1]) ⁇ Some varieties also require permanent magnetic materials such as Neodymium iron boron (NdFeB) ⁇ Requires complex multi-phase drive circuitry ⁇ High current operation ⁇ IJ12
  • Actuator directly pushes Ink This is the simplest mode of operation: the actuator directly supplies sufficient kinetic energy to expel the drop. The drop must have a sufficient velocity to overcome the surface tension. ⁇ Simple operation.
  • Very simple print head fabrication can be used ⁇
  • the drop selection means does not need to provide the energy required to separate the drop. from the nozzle ⁇ Requires very high electrostatic field ⁇ Electrostatic field for small nozzle sizes is above air breakdown Electrostatic field may attract dust ⁇ Silverbrook, EP 0771 658 A2 and related patent applications ⁇ Tone-Jet Magnetic pull on ink
  • the drops to be printed are selected by some manner (e.g. thermally induced surface tension reduction of pressurized ink). Selected drops are separated from the ink in the nozzle by a strong magnetic field acting on the magnetic ink.
  • Very simple print head fabrication can be used ⁇
  • the drop selection means does not need to provide the energy required to separate the drop from the nozzle ⁇
  • Requires magnetic ink ⁇
  • Ink colors other than black are difficult ⁇
  • Requires very high magnetic fields ⁇
  • Silverbrook, EP 0771 658 A2 and related patent applications Shutter The actuator moves a shutter to block Ink flow to the nozzle.
  • the ink pressure is pulsed at a multiple of the drop ejection frequency.
  • Actuators with small travel can be used
  • Actuators with small force can be used
  • High speed (>50 KHz) operation can be achieved
  • Moving parts are required
  • Requires ink pressure modulator ⁇ Friction and wear must be considered
  • Stiction is possible
  • Pulsed magnetic pull on ink pusher A pulsed magnetic field attracts an 'ink pusher'at the drop ejection frequency.
  • An actuator controls a catch, which prevents the ink pusher from moving when a drop is not to be ejected.
  • Extremely low energy operation is possible
  • No heat dissipation problems ⁇ Requires an external pulsed magnetic field
  • Requires special materials for both the actuator and the ink pusher ⁇ Complex construction ⁇ IJ10
  • the ink pressure oscillation may be achieved by vibrating the print head, or preferably by an actuator in the ink supply.
  • ⁇ Oscillating ink pressure can provide a refill pulse, allowing higher operating speed
  • the actuators may operate with much lower energy
  • ⁇ Acoustic lenses can be used to focus the sound on the nozzles
  • Requires external ink pressure oscillator ⁇ Ink pressure phase and amplitude must be carefully Controlled ⁇ Acoustic reflections in the ink chamber must be designed for ⁇ Silverbrook, EP 0771658 A2 and related patent applications ⁇ IJOB, IJ13, IJ15, IJ17 ⁇ IJ18, IJ19, IJ21 Media proximity
  • the print head is placed in close proximity to the print medium.
  • a transfer roller can also be used for proximity drop separation ⁇
  • High accuracy ⁇ Wide range of print substrates can be used
  • Ink can be dried on the transfer roller ⁇ Bulky ⁇ Expensive ⁇ Complex construction ⁇ Silverbrook, EP 0771658 A2 and related patent applications ⁇ Tektronix hot melt piezoelectric inkjet ⁇ Any of the IJ series Electrostatic An electric field is used to accelerate selected drops towards the print medium.
  • Low power ⁇ Simple print head construction ⁇ Field strength required for separation of small drops is near or above air breakdown ⁇ Silverbrook, EP 0771 658 A2 and related patent applications ⁇ Tone-Jet Direct magnetic field A magnetic field is used to accelerate selected drops of magnetic ink towards the print medium.
  • the actuator directly drives the drop ejection process.
  • Operational simplicity ⁇ Many actuator mechanisms have insufficient travel, or insufficient force, to efficiently drive the drop ejection process ⁇
  • Thermal Bubble Inkjet ⁇ IJ01, IJ02, IJ06, IJ07 ⁇ IJ16, IJ25,IJ26
  • Differential expansion bend actuator An actuator material expands more on one side than on the other. The expansion may be thermal, piezoelectric, magnetostrictive, or other mechanism.
  • the bend actuator converts a high force low travel actuator mechanism to high travel, lower force mechanism.
  • the actuator only responds to transient heating of one side or the other ⁇ Very good temperature stability ⁇ High speed, as a new drop can be fired before heat dissipates ⁇ Cancels residual stress of formation ⁇ High stresses are involved ⁇ Care must be taken that the materials do not delaminate ⁇ IJ40, IJ41 Actuator stack A series of thin actuators are stacked. This can be appropriate where actuators require high electric field strength, such as electrostatic and piezoelectric actuators. ⁇ Increased travel ⁇ Reduced drive voltage ⁇ Increased fabrication complexity ⁇ Increased possibility of short circuits due to pinholes ⁇ Some piezoelectric ink jets ⁇ IJ04 Multiple actuators Multiple smaller actuators are used simultaneously to move the ink.
  • Each actuator need provide only a portion of the force required. ⁇ Increases the force available from an actuator ⁇ Multiple actuators can be positioned to control ink flow accurately ⁇ Actuator forces may not add linearly, reducing efficiency ⁇ IJ12, IJ13, IJ18, U20 ⁇ IJ22, IJ28, IJ42 IJ43 Linear Spring A linear spring is used to transform a motion with small travel and high force into a longer travel, lower force motion. ⁇ Matches low travel actuator with higher travel requirements ⁇ Non-contact method of motion transformation ⁇ Requires print head area for the spring ⁇ IJ15 Reverse spring The actuator loads a spring. When the actuator is turned off, the spring releases.
  • the actuator flexing is effectively converted from an even coiling to an angular bend, resulting in greater travel of the actuator tip.
  • Simple means of increasing travel of a bend actuator ⁇ Care must be taken not to exceed the elastic limit in the flexure area ⁇ Stress distribution is very uneven ⁇ Difficult to accurately model with finite element analysis ⁇ IJ10, IJ19, IJ33 Gears Gears can be used to increase travel at the expense of duration. Circular gears, rack and pinion, ratchets, and other gearing methods can be used. ⁇ Low force, low travel actuators.
  • IJ13 Catch The actuator controls a small catch. The catch either enables or disables movement of an ink pusher that is controlled in a bulk manner. ⁇ Very low actuator energy ⁇ Very small actuator size ⁇ Complex construction ⁇ Requires external force ⁇ Unsuitable for pigmented inks ⁇ IJ10 Buckle plate.
  • a buckle plate can be used to change a slow actuator into a fast motion. It can also convert a high force, low travel actuator into a high travel, medium force motion.
  • acoustic lens is used to concentrate sound waves.
  • No moving parts Large area required ⁇ Only relevant for acoustic ink jets ⁇ 1993 Hadimioglu et al, EUP 550,192 ⁇ 1993 Elrod et al, EUP 572,220 Sharp conductive point A sharp point is used to concentrate an electrostatic field.
  • Simple construction ⁇ Difficult to fabricate using standard VLSI processes for a surface ejecting ink-jet ⁇ Only relevant for electrostatic ink jets ⁇ Tone-jet .
  • Actuator motion Description Advantages Disadvantages: Volume expansion The volume of the actuator changes, pushing the ink in all directions. ⁇ Simple construction in the case of thermal inkjet ⁇ High energy is typically required to achieve volume expansion. This leads to thermal stress, cavitation, and kogation in thermal ink jet implementations ⁇ Hewlett-Packard Thermal Inkjet ⁇ Canon Bubblejet Linear, normal to chip surface The actuator moves in a direction normal to the print head surface.
  • the nozzle is typically in the line of movement, ⁇ Efficient coupling to ink drops ejected normal to the surface ⁇ High fabrication complexity may be required to achieve perpendiculer motion ⁇ IJ01, IJ02, IJ04, IJ07 ⁇ IJ11, IJ14 Linear, parallel to chip surface The actuator moves parallel to the print head surface. Drop ejection may still be normal to the surface. ⁇ Suitable for planar fabrication ⁇ Fabrication complexity ⁇ Friction ⁇ Stiction ⁇ IJ12, IJ13, IJ15, IJ33, ⁇ IJ34, IJ35, IJ36 Membrane push An actuator with a high force but small area is used to push a stiff membrane that is in contact with the ink.
  • the effective area of the actuator becomes the membrane area ⁇ Fabrication complexity ⁇ Actuator size ⁇ Difficulty of Integration in a VLSI process ⁇ 1982 Howkins USP 4,459,601 Rotary
  • the actuator causes the rotation of some element, such a grill or impeller ⁇
  • Rotary levers may be used to increase travel ⁇ Small chip area requirements ⁇
  • Device complexity ⁇ May have friction at a pivot point ⁇ IJ05, IJ08, IJ13, IJ28 Bend
  • the actuator bends when energized. This may be due to differential thermal expansion, piezoelectric expansion, magnetostriction, or other form of relative dimensional change. ⁇ A very small change in dimensions can be converted to a large motion.
  • the actuator ⁇ Requires the actuator to be made from at least two distinct layers, or to have a thermal difference across the actuator ⁇ 1970 Kyser et al 3,946,398 USP ⁇ 1973 Stemme 3,747,120 USP ⁇ IJ03, IJ09, IJ10, IJ19 ⁇ IJ23, IJ24, IJ25, IJ29 ⁇ IJ30, IJ31, IJ33, IJ34 ⁇ IJ35 Swivel
  • the actuator swivels around a central pivot. This motion is suitable where there are opposite forces applied to opposite sides of the paddle, e.g. Lorenz force.
  • Nozzle refill method Description Advantages Disadvantages Examples Surface tension After the actuator is energized, it typically returns rapidly to its normal position. This rapid return sucks in air through the nozzle opening. The ink surface tension at the nozzle then exerts a small force restoring the meniscus to a minimum area.
  • a filter is located between the ink inlet and the nozzle chamber.
  • the filter has a multitude of small holes or slots, restricting ink flow.
  • the filter also removes particles which may block the nozzle.
  • ⁇ Additional advantage of ink filtration ⁇ Ink filter may be fabricated with no additional process steps ⁇ Restricts refill rate ⁇ May result in complex construction ⁇ IJ04, IJ12, IJ24, IJ27 ⁇ U29, U30 Small inlet compared to nozzle The ink inlet channel to the nozzle chamber has a substantially smaller cross section than that of the nozzle, resulting in easier ink egress out of the nozzle than out of the inlet. ⁇ Design simplicity ⁇ Restricts refill rate ⁇ May result in a relatively large chip area ⁇ Only partially effective ⁇ IJ02, IJ37, U44 Inlet shutter A secondary actuator controls the position of a shutter, closing off the ink inlet when the main actuator is energized.
  • Nozzle Clearing method Description Advantages Disadvantages Examples Normal nozzle firing All of the nozzles are fired periodically, before the ink has a chance to dry. When not in use the nozzles are sealed (capped) against air. The nozzle firing is usually performed during a special clearing cycle, after first moving the print head to a cleaning station.
  • the blade is usually fabricated from a flexible polymer, e.g. rubber or synthetic elastomer.
  • ⁇ Effective for planar print head surfaces ⁇ Low cost ⁇ Difficult to use if print head surface is non-plonar or very fragile ⁇ Requires mechanical parts ⁇ Blade can wear out in high volume print systems ⁇ Many ink jet systems Separate ink boiling heater A separate heater is provided at the nozzle although the normal drop e-ection mechanism does not require it. The heaters do not require Individual drive circuits, as many nozzles can be cleared simultaneously, and no imaging is required. ⁇ Can be effective where other nozzle clearing methods cannot be used ⁇ Can be implemented at no additional cost in some inkjet configurations ⁇ Fabrication complexity ⁇ Can be used with many U series Ink jets
  • Nozzle plate construction Description Advantages Disadvantages Examples Electroformed nickel A nozzle plate is separately fabricated from electroformed nickel, and bonded to the print head chip. ⁇ Fabrication simplicity ⁇ High temperatures and pressures are required to bond nozzle plate ⁇ Minimum thickness constraints ⁇ Differential thermal expansion ⁇ Hewlett Packard Thermal Inkjet Laser ablated or drilled polymer Individual nozzle holes are ablated by an Intense UV laser in a nozzle plate, which is typically a polymer such as polyimide or polysulphone ⁇ No masks required ⁇ Can be quite fast ⁇ Some control over nozzle profile is possible ⁇ Equipment required is relatively low cost ⁇ Each hole must be individually formed ⁇ Special equipment required ⁇ Slow where there are many thousands of nozzles per print head ⁇ May produce thin burrs at exit holes ⁇ Canon Bubblejet ⁇ 1988 Sercel et al., SPIE, Vol.
  • Nozzle chambers are etched in the front of the wafer, and the wafer is thinned from the back side. Nozzles are then etched in the etch stop layer.
  • High accuracy ( ⁇ 1 ⁇ m) ⁇ Monolithic ⁇ Low cost ⁇ No differential expansion ⁇ Requires long etch times ⁇ Requires a support wafer ⁇ IJ03, IJ05, IJ06, IJ07 ⁇ IJ08, IJ09, IJ10, IJ13 ⁇ IJ14, IJ15, U16, IJ19 ⁇ IJ21, IJ23, IJ25, IJ26
  • Various methods have been tried to eliminate the nozzles entirely, to prevent nozzle clogging.
  • Suitable for piezoelectric print heads require several thousand connections to drive circuits ⁇ Cannot be manufactured in standard CMOS fabs ⁇ Complex assembly required ⁇ Epson Stylus ⁇ Tektronix hot melt piezoelectric ink jets
  • Aqueous, dye Water based ink which typically contains: water, dye, surfactant, humectant, and biocide.
  • Modem ink dyes have high water-fastness, light fastness ⁇
  • Environmentally friendly ⁇ No odor ⁇ Slow drying ⁇ Corrosive ⁇ Bleeds on paper ⁇ May strikethrough ⁇ Cockles paper ⁇
  • Most existing inkjets ⁇ All U series ink jets ⁇ Silverbrook, EP 0771 658 A2 and related patent applications
  • Aqueous, pigment Water based ink which typically contains: water, pigment, surfactant, humectant, and biocide. Pigments have an advantage in reduced bleed, wicking and Strikethrough.
  • ink jet printers A large number of new forms of ink jet printers have been developed to facilitate alternative ink jet technologies for the image processing and data distribution system. Various combinations of ink jet devices can be included in printer devices incorporated as part of the present invention.
  • the present application may utilize advanced semiconductor fabrication techniques in the construction of large arrays of ink jet printers.
  • the present application may utilize an ink delivery system to the ink jet head.
  • the present application may utilize advanced semiconductor microelectromechanical techniques in the construction of large arrays of ink jet printers.
  • the present application may include the utilization of a disposable camera system.
  • the present application may include the utilization of a data distribution system.
  • the present application may include the utilization of camera and data processing techniques such as an Artcam type device.

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Ink Jet (AREA)

Claims (9)

  1. Tintenstrahldüse, umfassend:
    eine Düsenkammer mit einer Tintenausstoßöffnung in einer Wand der Kammer;
    eine Tintenzufuhrquelle, die mit der Düsenkammer verbunden ist;
    einen elektrostatischen Aktuator, um Tinte aus der Düsenkammer über die Tintenausstoßöffnung auszustoßen, dadurch gekennzeichnet, dass der elektrostatische Aktuator umfasst:
    eine Reihe von leitfähigen parallelen Platten, zwischen denen sich jeweils ein elastisch zusammendrückbares Material befindet; derart, dass
    durch einen Potentialunterschied an den Platten benachbarte Platten sich gegenseitig anziehen, wodurch eine elastische Verformung des zusammendrückbaren Materials hervorgerufen wird; und
    eine Reduzierung des Potentialunterschieds das zusammendrückbare Material in seinen Ruhezustand zurückbringt, was das Ausstoßen von Tinte aus der Tintenausstoßöffnung zur Folge hat.
  2. Tintenstrahldüse nach Anspruch 1, wobei die elastische Verformung des zusammendrückbaren Materials dazu führt, dass durch Oberflächenspannungseffekte um die Tintenausstoßöffnung herum Tinte in die Düsenkammer eingesaugt wird.
  3. Tintenstrahldüse nach Anspruch 1, wobei das zusammendrückbare Material ein Material mit einer hohen Dielektrizitätskonstanten aufweist.
  4. Tintenstrahldüse nach Anspruch 1, wobei der elektrostatische Aktuator unter Einsatz von Halbleiter-Herstellungstechniken aufgebaut wird, indem jeweils eine planare Schicht abgelegt wird, um eine ursprünglich sandwichartige Vorform zu bilden, und anschließend die Vorform selektiv geätzt wird, um für eine elektrische Verschaltung der leitfähigen parallelen Platten zu sorgen.
  5. Tintenstrahldüse nach Anspruch 1, wobei Gruppen der Reihen der leitfähigen parallelen Platten aus verschiedenen Materialien aufgebaut sind, um ein selektives Ätzen der Platten zu ermöglichen, um sie so in zwei Gruppen unterschiedlicher Polaritäten während des Betriebs aufzuteilen.
  6. Tintenstrahldüse nach Anspruch 5, wobei Platten aus jeder Gruppe mit einem gemeinsamen leitfähigen Abschnitt verschaltet sind, um den leitfähigen Platten eine Ladung zur Verfügung zu stellen.
  7. Tintenstrahldüse nach Anspruch 1, wobei die Platten unter Einsatz von chemischen Dampfabscheidungstechniken aufgebaut werden.
  8. Tintenstrahldüse nach Anspruch 1, wobei eine Außenfläche der Düsenkammern mehrere Ätzlöcher umfasst, die dazu vorgesehen sind, ein schnelleres Ätzen von Opferschichten während des Aufbauens zu ermöglichen.
  9. Tintenstrahldüse nach Anspruch 1, darüber hinaus umfassend:
    eine Steuerungseinrichtung zum Erzeugen eines Potentialunterschieds an den Platten, so dass das Material elastisch zusammengedrückt wird, derart, dass bei Deaktivierung der elektrostatische Aktuator ein Ausstoßen von Tinte über die Tintenausstoßöffnung verursacht.
EP04024058A 1997-07-15 1998-07-15 Tintenstrahldrucker mit elektrostatisch betätigten Platten Expired - Lifetime EP1508444B1 (de)

Applications Claiming Priority (73)

Application Number Priority Date Filing Date Title
AUPO803597 1997-07-15
AUPO8036A AUPO803697A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ13)
AUPO793597 1997-07-15
AUPO8058A AUPO805897A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM26)
AUPO807397 1997-07-15
AUPO8072A AUPO807297A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ02)
AUPO807197 1997-07-15
AUPO8070A AUPO807097A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ15)
AUPO8047A AUPO804797A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ05)
AUPO805397 1997-07-15
AUPO8067A AUPO806797A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ16)
AUPO8004A AUPO800497A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ26)
AUPO8056A AUPO805697A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ10)
AUPO8065A AUPO806597A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM06)
AUPO7933A AUPO793397A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation_apparatus (IJM10)
AUPO804897 1997-07-15
AUPO804997 1997-07-15
AUPO807097 1997-07-15
AUPO807697 1997-07-15
AUPO8054A AUPO805497A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM05)
AUPO800197 1997-07-15
AUPO805697 1997-07-15
AUPO8069A AUPO806997A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ11)
AUPO8053A AUPO805397A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM08)
AUPO8035A AUPO803597A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ06)
AUPO8001A AUPO800197A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ17)
AUPO805997 1997-07-15
AUPO804197 1997-07-15
AUPO8063A AUPO806397A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ08)
AUPO806797 1997-07-15
AUPO807597 1997-07-15
AUPO806397 1997-07-15
AUPO8071A AUPO807197A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ04)
AUPO806197 1997-07-15
AUPO806597 1997-07-15
AUPO7936A AUPO793697A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM02)
AUPO794997 1997-07-15
AUPO806997 1997-07-15
AUPO8055A AUPO805597A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM07)
AUPO7935A AUPO793597A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM01)
AUPO8073A AUPO807397A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM15)
AUPO805497 1997-07-15
AUPO8061A AUPO806197A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM04)
AUPO804497 1997-07-15
AUPO800497 1997-07-15
AUPO805597 1997-07-15
AUPO803697 1997-07-15
AUPO8076A AUPO807697A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM16)
AUPO804797 1997-07-15
AUPO8059A AUPO805997A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM14)
AUPO8049A AUPO804997A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ12)
AUPO806097 1997-07-15
AUPO795097 1997-07-15
AUPO7950A AUPO795097A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM11)
AUPO8044A AUPO804497A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ07)
AUPO806697 1997-07-15
AUPO793697 1997-07-15
AUPO8041A AUPO804197A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ25)
AUPO8048A AUPO804897A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ14)
AUPO7949A AUPO794997A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM12)
AUPO807297 1997-07-15
AUPO793397 1997-07-15
AUPO805897 1997-07-15
AUPO807797 1997-07-15
AUPO8060A AUPO806097A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM13)
AUPO8066A AUPO806697A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ01)
AUPO8077A AUPO807797A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM25)
AUPO8075A AUPO807597A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM17)
AUPP398398 1998-06-09
AUPP398298 1998-06-09
AUPP3983A AUPP398398A0 (en) 1998-06-09 1998-06-09 Image creation method and apparatus (ij45)
AUPP3982A AUPP398298A0 (en) 1998-06-09 1998-06-09 A method of manufacture of an image creation apparatus (ijm45)
EP98933350A EP0999933B1 (de) 1997-07-15 1998-07-15 Magnetfeld-betätigte tintenstrahldüse

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
EP98933350A Division EP0999933B1 (de) 1997-07-15 1998-07-15 Magnetfeld-betätigte tintenstrahldüse

Publications (3)

Publication Number Publication Date
EP1508444A2 EP1508444A2 (de) 2005-02-23
EP1508444A3 EP1508444A3 (de) 2005-03-16
EP1508444B1 true EP1508444B1 (de) 2007-11-21

Family

ID=27586944

Family Applications (11)

Application Number Title Priority Date Filing Date
EP04024061A Expired - Lifetime EP1508448B1 (de) 1997-07-15 1998-07-15 Tintenstrahldüse mit angeschrägtem magnetischen Kolben
EP98933350A Expired - Lifetime EP0999933B1 (de) 1997-07-15 1998-07-15 Magnetfeld-betätigte tintenstrahldüse
EP04024066A Expired - Lifetime EP1508446B1 (de) 1997-07-15 1998-07-15 Tintenstrahldüse mit elektromagnetischem Betätigungselement
EP04024059A Expired - Lifetime EP1512535B1 (de) 1997-07-15 1998-07-15 Tintenstrahldrucker mit magnetisch angetriebenem Kolben
EP04024058A Expired - Lifetime EP1508444B1 (de) 1997-07-15 1998-07-15 Tintenstrahldrucker mit elektrostatisch betätigten Platten
EP04024063A Expired - Lifetime EP1510340B1 (de) 1997-07-15 1998-07-15 Tintenstrahldüse mit geschlitztem Kolben
EP04024064A Expired - Lifetime EP1508445B1 (de) 1997-07-15 1998-07-15 Tintenstrahldüse mit Lorentz-Kraft-Element
EP04024062A Expired - Lifetime EP1508449B1 (de) 1997-07-15 1998-07-15 Tintenstrahldüse mit magnetischer Antriebskammer
EP04024060A Expired - Lifetime EP1510339B1 (de) 1997-07-15 1998-07-15 Durch magnetische Impulse betriebene Tintenstrahldüse
EP04024065A Expired - Lifetime EP1510341B1 (de) 1997-07-15 1998-07-15 Tintenstrahldüse mit elektromagnetischem Verschluss
EP04024057A Expired - Lifetime EP1508443B1 (de) 1997-07-15 1998-07-15 Tintenstrahldüse mit elektromagnetisch aktiviertem Tintenkolben

Family Applications Before (4)

Application Number Title Priority Date Filing Date
EP04024061A Expired - Lifetime EP1508448B1 (de) 1997-07-15 1998-07-15 Tintenstrahldüse mit angeschrägtem magnetischen Kolben
EP98933350A Expired - Lifetime EP0999933B1 (de) 1997-07-15 1998-07-15 Magnetfeld-betätigte tintenstrahldüse
EP04024066A Expired - Lifetime EP1508446B1 (de) 1997-07-15 1998-07-15 Tintenstrahldüse mit elektromagnetischem Betätigungselement
EP04024059A Expired - Lifetime EP1512535B1 (de) 1997-07-15 1998-07-15 Tintenstrahldrucker mit magnetisch angetriebenem Kolben

Family Applications After (6)

Application Number Title Priority Date Filing Date
EP04024063A Expired - Lifetime EP1510340B1 (de) 1997-07-15 1998-07-15 Tintenstrahldüse mit geschlitztem Kolben
EP04024064A Expired - Lifetime EP1508445B1 (de) 1997-07-15 1998-07-15 Tintenstrahldüse mit Lorentz-Kraft-Element
EP04024062A Expired - Lifetime EP1508449B1 (de) 1997-07-15 1998-07-15 Tintenstrahldüse mit magnetischer Antriebskammer
EP04024060A Expired - Lifetime EP1510339B1 (de) 1997-07-15 1998-07-15 Durch magnetische Impulse betriebene Tintenstrahldüse
EP04024065A Expired - Lifetime EP1510341B1 (de) 1997-07-15 1998-07-15 Tintenstrahldüse mit elektromagnetischem Verschluss
EP04024057A Expired - Lifetime EP1508443B1 (de) 1997-07-15 1998-07-15 Tintenstrahldüse mit elektromagnetisch aktiviertem Tintenkolben

Country Status (4)

Country Link
EP (11) EP1508448B1 (de)
JP (6) JP4170582B2 (de)
AT (8) ATE353053T1 (de)
WO (1) WO1999003680A1 (de)

Families Citing this family (57)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AUPP654598A0 (en) 1998-10-16 1998-11-05 Silverbrook Research Pty Ltd Micromechanical device and method (ij46h)
US7360871B2 (en) * 1997-07-15 2008-04-22 Silverbrook Research Pty Ltd Inkjet chamber with ejection actuator between inlet and nozzle
US7753491B2 (en) 1997-07-15 2010-07-13 Silverbrook Research Pty Ltd Printhead nozzle arrangement incorporating a corrugated electrode
US7328975B2 (en) * 1997-07-15 2008-02-12 Silverbrook Research Pty Ltd Injet printhead with thermal bend arm exposed to ink flow
US7410243B2 (en) * 1997-07-15 2008-08-12 Silverbrook Research Pty Ltd Inkjet nozzle with resiliently biased ejection actuator
US6188415B1 (en) 1997-07-15 2001-02-13 Silverbrook Research Pty Ltd Ink jet printer having a thermal actuator comprising an external coil spring
AUPP922399A0 (en) * 1999-03-16 1999-04-15 Silverbrook Research Pty Ltd A method and apparatus (ij46p2)
AUPP993099A0 (en) * 1999-04-22 1999-05-20 Silverbrook Research Pty Ltd A micromechancial device and method(ij46p2b)
AU2004202252B2 (en) * 1999-04-22 2005-06-30 Silverbrook Research Pty Ltd Liquid ejection using a micro-electromechanical device
AU761670B2 (en) * 1999-06-30 2003-06-05 Silverbrook Research Pty Ltd Testing a micro electro-mechanical device
AUPQ130999A0 (en) 1999-06-30 1999-07-22 Silverbrook Research Pty Ltd A method and apparatus (IJ47V11)
AU761821B2 (en) * 1999-06-30 2003-06-12 Silverbrook Research Pty Ltd Fault detection in a micro electro-mechanical device
AU761820B2 (en) * 1999-06-30 2003-06-12 Silverbrook Research Pty Ltd Calibrating a micro electro-mechanical device
US6382779B1 (en) 1999-06-30 2002-05-07 Silverbrook Research Pty Ltd Testing a micro electro- mechanical device
WO2001002179A1 (en) * 1999-06-30 2001-01-11 Silverbrook Research Pty Ltd Testing a micro electro-mechanical device
WO2001022207A1 (en) 1999-09-17 2001-03-29 Silverbrook Research Pty Ltd Method and system for instruction of a computer
AU2000242753B2 (en) * 2000-04-18 2004-09-30 Zamtec Limited Ink jet ejector
US7287839B2 (en) 2002-08-19 2007-10-30 Silverbrook Research Pty Ltd Inkjet printhead having bicuspid valved ink ejection arrangement
US6557970B2 (en) 2000-05-23 2003-05-06 Silverbrook Research Pty Ltd Nozzle guard for a printhead
US6526658B1 (en) 2000-05-23 2003-03-04 Silverbrook Research Pty Ltd Method of manufacture of an ink jet printhead having a moving nozzle with an externally arranged actuator
US6921153B2 (en) 2000-05-23 2005-07-26 Silverbrook Research Pty Ltd Liquid displacement assembly including a fluidic sealing structure
US6428133B1 (en) 2000-05-23 2002-08-06 Silverbrook Research Pty Ltd. Ink jet printhead having a moving nozzle with an externally arranged actuator
IL153028A (en) * 2000-05-24 2005-06-19 Silverbrook Res Pty Ltd Ink jet printhead having a moving nozzle with an externally arranged actuator
CN100417523C (zh) * 2000-05-24 2008-09-10 西尔弗布鲁克研究有限公司 带有隔离的喷嘴控制器的喷墨打印头
AU2000247326B2 (en) 2000-05-24 2004-03-18 Memjet Technology Limited Fluidic seal for an ink jet nozzle assembly
US7169316B1 (en) 2000-05-24 2007-01-30 Silverbrook Research Pty Ltd Method of manufacture of an ink jet printhead having a moving nozzle with an externally arranged actuator
US6364460B1 (en) 2000-06-13 2002-04-02 Chad R. Sager Liquid delivery system
AU2006225215B2 (en) * 2000-06-30 2009-04-09 Zamtec Limited An ink ejector for an inkjet printer with an arm and paddle arrangement
SG165980A1 (en) * 2000-06-30 2010-11-29 Silverbrook Res Pty Ltd A micro-electromechanical actuator with buckle-resistant properties
ATE369985T1 (de) * 2000-06-30 2007-09-15 Silverbrook Res Pty Ltd Knickresistente, thermisch biegende betätiger
US6417757B1 (en) 2000-06-30 2002-07-09 Silverbrook Research Pty Ltd Buckle resistant thermal bend actuators
US6406129B1 (en) * 2000-10-20 2002-06-18 Silverbrook Research Pty Ltd Fluidic seal for moving nozzle ink jet
AU2004203502B2 (en) * 2000-10-20 2004-09-30 Zamtec Limited Nozzle for an ink jet printhead
US6623101B1 (en) * 2000-10-20 2003-09-23 Silverbrook Research Pty Ltd Moving nozzle ink jet
US7066577B2 (en) 2004-07-19 2006-06-27 Silverbrook Research Pty Ltd Pressure enhancing formations in an ink jet printhead
US6505916B1 (en) 2000-10-20 2003-01-14 Silverbrook Research Pty Ltd Nozzle poker for moving nozzle ink jet
US6863379B2 (en) 2002-11-23 2005-03-08 Silverbrook Research Pty Ltd Ink jet printhead that includes nozzles having pressure-enhancing formations
US6350015B1 (en) * 2000-11-24 2002-02-26 Xerox Corporation Magnetic drive systems and methods for a micromachined fluid ejector
US6561627B2 (en) * 2000-11-30 2003-05-13 Eastman Kodak Company Thermal actuator
US6572218B2 (en) * 2001-01-24 2003-06-03 Xerox Corporation Electrostatically-actuated device having a corrugated multi-layer membrane structure
US6508947B2 (en) * 2001-01-24 2003-01-21 Xerox Corporation Method for fabricating a micro-electro-mechanical fluid ejector
KR100757363B1 (ko) * 2002-11-21 2007-09-11 실버브룩 리서치 피티와이 리미티드 유체씨일을 구비한 잉크 젯 노즐 조립체
JP3912267B2 (ja) 2002-11-29 2007-05-09 ソニー株式会社 液滴吐出装置、検査用チップ処理装置、液滴吐出方法、検査用チップ処理方法
JP2010502433A (ja) 2006-09-08 2010-01-28 マサチューセッツ・インスティテュート・オブ・テクノロジー 自動的レイヤー・バイ・レイヤー吹付け技術
KR100973979B1 (ko) * 2008-08-22 2010-08-05 한국과학기술원 전자기력을 이용한 다축 구동기
KR102022392B1 (ko) 2012-12-11 2019-11-05 삼성디스플레이 주식회사 노즐프린터
KR20140094957A (ko) 2013-01-23 2014-07-31 삼성디스플레이 주식회사 노즐프린터용 노즐유닛 및 이를 구비하는 노즐프린터
CN104401129B (zh) * 2014-11-21 2016-08-24 常俊环 大字符喷码机喷头
DE102015225726A1 (de) * 2015-12-17 2017-06-22 Ksb Aktiengesellschaft Pumpe mit verformbarem Förderelement
US10589980B2 (en) * 2017-04-07 2020-03-17 Texas Instruments Incorporated Isolated protrusion/recession features in a micro electro mechanical system
CN109144885B (zh) * 2017-06-27 2022-04-29 北京忆恒创源科技股份有限公司 固态存储设备的垃圾回收方法与固态存储设备
GB2573117B (en) 2018-04-24 2021-02-17 Adey Holdings 2008 Ltd Magnetic filter
KR20200085510A (ko) * 2019-01-07 2020-07-15 에스케이하이닉스 주식회사 데이터 저장 장치 및 동작 방법과, 이를 위한 컨트롤러
CN110389317B (zh) * 2019-06-03 2021-08-10 广州南盾通讯设备有限公司 一种对散序对象快速定位的低功耗柜体及定位方法
CN112652529B (zh) * 2019-10-09 2022-03-22 长鑫存储技术有限公司 半导体器件及半导体器件的电容孔制备方法
CN112787237B (zh) * 2021-01-16 2023-06-23 四川省盛源鑫智能电气有限责任公司 基于拨动机构的电气自动化控制柜
CN113607122B (zh) * 2021-08-23 2022-11-25 中国建筑第八工程局有限公司 箱型钢板墙内部校正用的智能小车、设备及方法

Family Cites Families (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4032929A (en) * 1975-10-28 1977-06-28 Xerox Corporation High density linear array ink jet assembly
DE2700010A1 (de) * 1976-01-15 1977-07-21 Xerox Corp Geraet zur erzeugung von abtrennbaren fluessigkeitstroepfchen und antriebselemente dafuer
JPS5559972A (en) * 1978-10-28 1980-05-06 Seiko Epson Corp Ink jet recording head
US4210920A (en) * 1979-01-31 1980-07-01 The Mead Corporation Magnetically activated plane wave stimulator
US4460905A (en) * 1982-03-29 1984-07-17 Ncr Corporation Control valve for ink jet nozzles
DE3245283A1 (de) * 1982-12-07 1984-06-07 Siemens AG, 1000 Berlin und 8000 München Anordnung zum ausstoss von fluessigkeitstroepfchen
DE3302617C2 (de) * 1983-01-27 1987-04-23 Domino Printing Sciences Plc, Cambridge Farbspritzkopf
JPS60131254A (ja) * 1983-12-20 1985-07-12 Ricoh Co Ltd インクジエツト噴射ヘツド
DE3445720A1 (de) * 1984-12-14 1986-06-19 Siemens AG, 1000 Berlin und 8000 München Anordnung zum ausstoss von einzeltroepfchen aus austrittsoeffnungen eines tintenschreibkopfes
SE447222B (sv) * 1984-12-21 1986-11-03 Swedot System Ab Elektromagnetiskt manovrerbar ventilanordning, serskilt for alstring av droppar i en vetskestralskrivare
US4618808A (en) * 1985-01-30 1986-10-21 International Business Machines Corporation Electromagnetic actuator system using stepper motor with closed loop position sensing, electronic commutation and dynamic position and anomaly correction
GB8507688D0 (en) * 1985-03-25 1985-05-01 Lane International Ltd John Fluid applicator
US4723131A (en) * 1986-09-12 1988-02-02 Diagraph Corporation Printhead for ink jet printing apparatus
JPH0234342A (ja) * 1988-07-25 1990-02-05 Seiko Epson Corp インクジェットヘッド
JPH02150353A (ja) * 1988-11-30 1990-06-08 Nec Home Electron Ltd インクジェットヘッド
GB8828047D0 (en) * 1988-12-01 1989-01-05 Willett Int Ltd Method of operating valve
JPH02219655A (ja) * 1989-02-20 1990-09-03 Sharp Corp インクジェットヘッド
JPH02273241A (ja) * 1989-04-14 1990-11-07 Ricoh Co Ltd インクジェット記録装置
JPH0365349A (ja) * 1989-08-03 1991-03-20 Matsushita Electric Ind Co Ltd インクジェットヘッド
JP2839345B2 (ja) * 1989-09-11 1998-12-16 松下電器産業株式会社 インク記録装置
JPH04126255A (ja) * 1990-09-18 1992-04-27 Seiko Epson Corp インクジェットヘッド
JPH04129745A (ja) * 1990-09-21 1992-04-30 Seiko Epson Corp インクジェットヘッド
US5534900A (en) * 1990-09-21 1996-07-09 Seiko Epson Corporation Ink-jet recording apparatus
JPH04357039A (ja) * 1991-06-03 1992-12-10 Rohm Co Ltd インクジェットプリントヘッド
JPH04368851A (ja) * 1991-06-17 1992-12-21 Seiko Epson Corp 磁場発生基板及びそれを用いたインクジェットヘッド
GB9121851D0 (en) * 1991-10-15 1991-11-27 Willett Int Ltd Device
DE4139731A1 (de) * 1991-12-03 1993-06-09 Inno-Print Verpackungs- + Beschriftungssysteme Gmbh, 5060 Bergisch Gladbach, De Tintenstrahl-matrixdrucker aus einzelelementen
JPH05318724A (ja) * 1992-05-19 1993-12-03 Seikosha Co Ltd インクジェット記録装置
JPH06106725A (ja) * 1992-08-14 1994-04-19 Ricoh Co Ltd 静電変形型インクジェットによる記録方法及び静電変形型インクジェットヘッド
JPH06134985A (ja) * 1992-10-28 1994-05-17 Ricoh Co Ltd １ドット多値が可能な記録装置及び１ドット多値が可能な記録方法
JPH06336011A (ja) * 1993-05-31 1994-12-06 Sharp Corp プリントヘッド装置
EP0671271B1 (de) * 1994-03-09 2000-07-05 Seiko Epson Corporation Tintenstrahlaufzeichnungsgerät
US5828394A (en) * 1995-09-20 1998-10-27 The Board Of Trustees Of The Leland Stanford Junior University Fluid drop ejector and method

Also Published As

Publication number Publication date
EP1510339B1 (de) 2007-01-24
EP1510341A2 (de) 2005-03-02
JP4171037B2 (ja) 2008-10-22
EP0999933B1 (de) 2005-03-02
EP0999933A4 (de) 2000-12-20
EP1508445A1 (de) 2005-02-23
WO1999003680A1 (en) 1999-01-28
EP1510339A3 (de) 2005-03-09
ATE352421T1 (de) 2007-02-15
JP2007062380A (ja) 2007-03-15
ATE381991T1 (de) 2008-01-15
EP1508443B1 (de) 2007-03-07
EP1510341A3 (de) 2005-03-16
EP1508444A3 (de) 2005-03-16
EP1512535B1 (de) 2007-12-26
EP1508449B1 (de) 2007-01-24
EP1508448B1 (de) 2007-01-17
JP2001510107A (ja) 2001-07-31
EP1510340B1 (de) 2007-01-24
EP1510341B1 (de) 2007-01-24
EP1508445B1 (de) 2007-01-31
JP2007062383A (ja) 2007-03-15
JP4170582B2 (ja) 2008-10-22
EP1510340A3 (de) 2005-03-09
ATE352423T1 (de) 2007-02-15
EP1508443A2 (de) 2005-02-23
JP4185538B2 (ja) 2008-11-26
EP1508443A3 (de) 2005-03-16
ATE352422T1 (de) 2007-02-15
EP1508446A1 (de) 2005-02-23
ATE352420T1 (de) 2007-02-15
EP1508444A2 (de) 2005-02-23
EP1508448A1 (de) 2005-02-23
JP4173174B2 (ja) 2008-10-29
JP4137964B2 (ja) 2008-08-20
ATE355972T1 (de) 2007-03-15
ATE289922T1 (de) 2005-03-15
JP2007062379A (ja) 2007-03-15
EP1508449A1 (de) 2005-02-23
ATE353053T1 (de) 2007-02-15
EP1512535A1 (de) 2005-03-09
EP1510340A2 (de) 2005-03-02
JP2007062381A (ja) 2007-03-15
JP2007062382A (ja) 2007-03-15
JP4137965B2 (ja) 2008-08-20
EP1508446B1 (de) 2007-01-10
EP0999933A1 (de) 2000-05-17
EP1510339A2 (de) 2005-03-02

Similar Documents

Publication Publication Date Title
EP1508444B1 (de) Tintenstrahldrucker mit elektrostatisch betätigten Platten
US8029101B2 (en) Ink ejection mechanism with thermal actuator coil
US7970275B2 (en) Digital camera system for simultaneous printing and magnetic recording
US6180427B1 (en) Method of manufacture of a thermally actuated ink jet including a tapered heater element
US20010043253A1 (en) Ink jet with coiled actuator
US20010045969A1 (en) Shutter ink jet
US7753484B2 (en) Printhead provided with individual nozzle enclosures
US6137500A (en) Utilizing of brush stroking techniques in the generation of computer images
US20080111856A1 (en) Printhead Nozzle Arrangement Having A Looped Heater Element
US6225138B1 (en) Method of manufacture of a pulsed magnetic field ink jet printer
AU2002323712B2 (en) A field actuated ink jet
AU2006202041B2 (en) Inkjet nozzle with solenoid actuator

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

17P Request for examination filed

Effective date: 20041008

AC Divisional application: reference to earlier application

Ref document number: 0999933

Country of ref document: EP

Kind code of ref document: P

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AT BE CH DE DK ES FI FR GB GR IE IT LI NL PT SE

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): AT BE CH DE DK ES FI FR GB GR IE IT LI NL PT SE

AKX Designation fees paid

Designated state(s): AT BE CH DE DK ES FI FR GB GR IE IT LI NL PT SE

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AC Divisional application: reference to earlier application

Ref document number: 0999933

Country of ref document: EP

Kind code of ref document: P

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AT BE CH DE DK ES FI FR GB GR IE IT LI NL PT SE

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

REF Corresponds to:

Ref document number: 69838764

Country of ref document: DE

Date of ref document: 20080103

Kind code of ref document: P

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20071121

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20080221

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20071121

Ref country code: CH

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20071121

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20080304

NLV1 Nl: lapsed or annulled due to failure to fulfill the requirements of art. 29p and 29m of the patents act
PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20071121

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20071121

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20071121

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20071121

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20080421

26N No opposition filed

Effective date: 20080822

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20080222

Ref country code: FR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20080905

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20080222

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20080715

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20080731

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20120727

Year of fee payment: 15

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20130715

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20130715

REG Reference to a national code

Ref country code: GB

Ref legal event code: 732E

Free format text: REGISTERED BETWEEN 20140619 AND 20140625