EP1510339B1 - Durch magnetische Impulse betriebene Tintenstrahldüse - Google Patents
Durch magnetische Impulse betriebene Tintenstrahldüse Download PDFInfo
- Publication number
- EP1510339B1 EP1510339B1 EP04024060A EP04024060A EP1510339B1 EP 1510339 B1 EP1510339 B1 EP 1510339B1 EP 04024060 A EP04024060 A EP 04024060A EP 04024060 A EP04024060 A EP 04024060A EP 1510339 B1 EP1510339 B1 EP 1510339B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- ink
- actuator
- ink jet
- nozzle
- magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 59
- 230000033001 locomotion Effects 0.000 claims abstract description 38
- 239000012530 fluid Substances 0.000 claims abstract description 7
- 230000004913 activation Effects 0.000 claims abstract description 5
- 238000000034 method Methods 0.000 claims description 52
- 238000004519 manufacturing process Methods 0.000 claims description 51
- 239000000463 material Substances 0.000 claims description 31
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 19
- 229910052710 silicon Inorganic materials 0.000 claims description 19
- 239000010703 silicon Substances 0.000 claims description 19
- 239000000758 substrate Substances 0.000 claims description 13
- 230000000903 blocking effect Effects 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 7
- 238000005452 bending Methods 0.000 claims description 6
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 4
- WYTGDNHDOZPMIW-RCBQFDQVSA-N alstonine Natural products C1=CC2=C3C=CC=CC3=NC2=C2N1C[C@H]1[C@H](C)OC=C(C(=O)OC)[C@H]1C2 WYTGDNHDOZPMIW-RCBQFDQVSA-N 0.000 claims description 3
- 239000012141 concentrate Substances 0.000 claims description 3
- 238000001020 plasma etching Methods 0.000 claims description 2
- 230000004044 response Effects 0.000 claims description 2
- 238000007641 inkjet printing Methods 0.000 abstract description 18
- 239000000976 ink Substances 0.000 description 288
- 239000010410 layer Substances 0.000 description 38
- 238000010276 construction Methods 0.000 description 34
- 230000007246 mechanism Effects 0.000 description 24
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 24
- 239000004810 polytetrafluoroethylene Substances 0.000 description 24
- 238000005516 engineering process Methods 0.000 description 19
- 230000008901 benefit Effects 0.000 description 17
- 238000007639 printing Methods 0.000 description 16
- 230000008569 process Effects 0.000 description 16
- 230000035882 stress Effects 0.000 description 13
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 11
- 229910052802 copper Inorganic materials 0.000 description 11
- 239000010949 copper Substances 0.000 description 11
- 230000009467 reduction Effects 0.000 description 10
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 9
- 239000011521 glass Substances 0.000 description 9
- 150000004767 nitrides Chemical class 0.000 description 9
- 239000000049 pigment Substances 0.000 description 9
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 8
- 238000013461 design Methods 0.000 description 8
- 230000005684 electric field Effects 0.000 description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 8
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 7
- 229910052796 boron Inorganic materials 0.000 description 7
- 238000000926 separation method Methods 0.000 description 7
- 238000012546 transfer Methods 0.000 description 7
- 235000009899 Agrostemma githago Nutrition 0.000 description 6
- 238000001035 drying Methods 0.000 description 6
- 230000005686 electrostatic field Effects 0.000 description 6
- 238000010304 firing Methods 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 6
- 239000012943 hotmelt Substances 0.000 description 6
- 239000000696 magnetic material Substances 0.000 description 6
- 229910001172 neodymium magnet Inorganic materials 0.000 description 6
- 238000012545 processing Methods 0.000 description 6
- 230000002441 reversible effect Effects 0.000 description 6
- 230000008859 change Effects 0.000 description 5
- 239000000975 dye Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- -1 polytetrafluoroethylene Polymers 0.000 description 5
- 240000000254 Agrostemma githago Species 0.000 description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 4
- 230000003321 amplification Effects 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000009835 boiling Methods 0.000 description 4
- 229920001940 conductive polymer Polymers 0.000 description 4
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 239000011159 matrix material Substances 0.000 description 4
- 238000001465 metallisation Methods 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 238000003199 nucleic acid amplification method Methods 0.000 description 4
- 239000003921 oil Substances 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 229920000642 polymer Polymers 0.000 description 4
- 235000021251 pulses Nutrition 0.000 description 4
- 229910001285 shape-memory alloy Inorganic materials 0.000 description 4
- 239000004094 surface-active agent Substances 0.000 description 4
- QJVKUMXDEUEQLH-UHFFFAOYSA-N [B].[Fe].[Nd] Chemical compound [B].[Fe].[Nd] QJVKUMXDEUEQLH-UHFFFAOYSA-N 0.000 description 3
- 238000003491 array Methods 0.000 description 3
- BTANRVKWQNVYAZ-UHFFFAOYSA-N butan-2-ol Chemical compound CCC(C)O BTANRVKWQNVYAZ-UHFFFAOYSA-N 0.000 description 3
- 230000015556 catabolic process Effects 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 230000009977 dual effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910052746 lanthanum Inorganic materials 0.000 description 3
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 3
- 229910000734 martensite Inorganic materials 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 238000002161 passivation Methods 0.000 description 3
- 229910003321 CoFe Inorganic materials 0.000 description 2
- 229910000640 Fe alloy Inorganic materials 0.000 description 2
- CWYNVVGOOAEACU-UHFFFAOYSA-N Fe2+ Chemical compound [Fe+2] CWYNVVGOOAEACU-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 229910001329 Terfenol-D Inorganic materials 0.000 description 2
- 229910010380 TiNi Inorganic materials 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 2
- 244000178320 Vaccaria pyramidata Species 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000003115 biocidal effect Effects 0.000 description 2
- 239000003139 biocide Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- KPLQYGBQNPPQGA-UHFFFAOYSA-N cobalt samarium Chemical compound [Co].[Sm] KPLQYGBQNPPQGA-UHFFFAOYSA-N 0.000 description 2
- 239000003086 colorant Substances 0.000 description 2
- 235000009508 confectionery Nutrition 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000005137 deposition process Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- 239000004744 fabric Substances 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 238000007710 freezing Methods 0.000 description 2
- 239000003906 humectant Substances 0.000 description 2
- UGKDIUIOSMUOAW-UHFFFAOYSA-N iron nickel Chemical compound [Fe].[Ni] UGKDIUIOSMUOAW-UHFFFAOYSA-N 0.000 description 2
- 238000002715 modification method Methods 0.000 description 2
- 239000002991 molded plastic Substances 0.000 description 2
- 229910001000 nickel titanium Inorganic materials 0.000 description 2
- 238000007645 offset printing Methods 0.000 description 2
- 238000012856 packing Methods 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 229910052761 rare earth metal Inorganic materials 0.000 description 2
- 150000002910 rare earth metals Chemical class 0.000 description 2
- 229910000938 samarium–cobalt magnet Inorganic materials 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 230000009466 transformation Effects 0.000 description 2
- 230000001052 transient effect Effects 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 238000007514 turning Methods 0.000 description 2
- 101100269850 Caenorhabditis elegans mask-1 gene Proteins 0.000 description 1
- 241001164374 Calyx Species 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910001279 Dy alloy Inorganic materials 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229910001117 Tb alloy Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000012190 activator Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- ONRPGGOGHKMHDT-UHFFFAOYSA-N benzene-1,2-diol;ethane-1,2-diamine Chemical compound NCCN.OC1=CC=CC=C1O ONRPGGOGHKMHDT-UHFFFAOYSA-N 0.000 description 1
- 239000002041 carbon nanotube Substances 0.000 description 1
- 229910021393 carbon nanotube Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000002860 competitive effect Effects 0.000 description 1
- 239000002322 conducting polymer Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000005536 corrosion prevention Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000002059 diagnostic imaging Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- KBQHZAAAGSGFKK-UHFFFAOYSA-N dysprosium atom Chemical compound [Dy] KBQHZAAAGSGFKK-UHFFFAOYSA-N 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005323 electroforming Methods 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000003302 ferromagnetic material Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 229920005570 flexible polymer Polymers 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 230000008014 freezing Effects 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000000608 laser ablation Methods 0.000 description 1
- 238000007648 laser printing Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 229910001004 magnetic alloy Inorganic materials 0.000 description 1
- 238000007567 mass-production technique Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000005499 meniscus Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- HLXZNVUGXRDIFK-UHFFFAOYSA-N nickel titanium Chemical compound [Ti].[Ti].[Ti].[Ti].[Ti].[Ti].[Ti].[Ti].[Ti].[Ti].[Ti].[Ni].[Ni].[Ni].[Ni].[Ni].[Ni].[Ni].[Ni].[Ni].[Ni].[Ni].[Ni].[Ni].[Ni] HLXZNVUGXRDIFK-UHFFFAOYSA-N 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- ZBSCCQXBYNSKPV-UHFFFAOYSA-N oxolead;oxomagnesium;2,4,5-trioxa-1$l^{5},3$l^{5}-diniobabicyclo[1.1.1]pentane 1,3-dioxide Chemical compound [Mg]=O.[Pb]=O.[Pb]=O.[Pb]=O.O1[Nb]2(=O)O[Nb]1(=O)O2 ZBSCCQXBYNSKPV-UHFFFAOYSA-N 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 229920002492 poly(sulfone) Polymers 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920001690 polydopamine Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 229920000123 polythiophene Polymers 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000012899 standard injection Substances 0.000 description 1
- 230000000638 stimulation Effects 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000000153 supplemental effect Effects 0.000 description 1
- 229920003051 synthetic elastomer Polymers 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J3/00—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed
- B41J3/44—Typewriters or selective printing mechanisms having dual functions or combined with, or coupled to, apparatus performing other functions
- B41J3/445—Printers integrated in other types of apparatus, e.g. printers integrated in cameras
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14314—Structure of ink jet print heads with electrostatically actuated membrane
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14427—Structure of ink jet print heads with thermal bend detached actuators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1635—Manufacturing processes dividing the wafer into individual chips
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1637—Manufacturing processes molding
- B41J2/1639—Manufacturing processes molding sacrificial molding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1648—Production of print heads with thermal bend detached actuators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/17—Ink jet characterised by ink handling
- B41J2/175—Ink supply systems ; Circuit parts therefor
- B41J2/17596—Ink pumps, ink valves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2002/041—Electromagnetic transducer
Definitions
- the present invention relates to the field of ink jet printing systems.
- US Patent 3596275 by Sweet also discloses a process of a continuous ink jet printing including the step wherein the ink jet stream is modulated by a high frequency electro-static field so as to cause drop separation. This technique is still utilized by several manufacturers including Elmjet and Scitex (see also US Patent No. 3373437 by Sweet et al)
- Piezo-electric ink jet printers are also one form of commonly utilized ink jet printing device. Piezo-electric systems are disclosed by Kyser et. al. in US Patent No. 3946398 (1970) which utilises a diaphragm mode of operation, by Zolten in US Patent 3683212 (1970) which discloses a squeeze mode of operation of a piezo electric crystal, Stemme in US Patent No. 3747120 (1972) discloses a bend mode of piezo-electric operation, Howkins in US Patent No. 4459601 discloses a Piezo electric push mode actuation of the ink jet stream and Fischbeck in US 4584590 which discloses a sheer mode type of piezo-electric transducer element.
- the ink jet printing techniques include those disclosed by Endo et al in GB 2007162 (1979) and Vaught et al in US Patent 4490728. Both the aforementioned references disclosed ink jet printing techniques rely upon the activation of an electrothermal actuator which results in the creation of a bubble in a constricted space, such as a nozzle, which thereby causes the ejection of ink from an aperture connected to the confined space onto a relevant print media.
- Printing devices utilising the electro-thermal actuator are manufactured by manufacturers such as Canon and Hewlett Packard.
- DE3234283 describes an inkjet nozzle comprising an electromagnet and an armature constructed as a tongue.
- the electromagnet When the electromagnet is activated and deactivated, the tongue rapidly moves, thereby ejecting ink from the nozzle.
- JP05318724 describes an inkjet nozzle comprising a plastic magnetic plate positioned adjacent a magnetic substrate. Upon activation of an electromagnet, the magnetic plate is moved relative the substrate, thereby generating a pressure wave in the nozzle and causing ejection of ink.
- a printing technology should have a number of desirable attributes. These include inexpensive construction and operation, high speed operation, safe and continuous long term operation etc. Each technology may have its own advantages and disadvantages in the areas of cost, speed, quality, reliability, power usage, simplicity of construction operation, durability and consumables.
- esoteric techniques are also often utilized. These can include electroforming of nickel stage (Hewiett-Packard Journal, Vol. 36 no 5, pp33-37 (1985)), electro-discharge machining, laser ablation (U.S. Patent No. 5,208,604), micro-punching, etc.
- the preferred embodiments and other embodiments will be discussed under separate headings with the heading including an IJ number for ease of reference.
- the headings also include a type designator with T indicating thermal, S indicating shutter type and F indicating a field type.
- an array of ink jet nozzles is provided with each of the nozzles being under the influence of a outside pulsed magnetic field.
- the outside pulsed magnetic field causes selected nozzles to eject ink from their ink nozzle chambers.
- Fig. 138 and Fig. 139 there is illustrated a side perspective view, partly in section, of a single ink jet nozzle 910.
- Fig. 138 illustrates a nozzle in a quiescent position
- Fig. 139 illustrates a nozzle in an ink ejection position.
- the ink jet nozzle 910 has an ink ejection port 911 for the ejection of ink on demand.
- the ink jet ejection port 911 is connected to an ink nozzle chamber 912 which is usually filled with ink and supplied from an ink reservoir 913 via holes eg. 915.
- a magnetic actuation device 925 is included and comprises a magnetic soft core 917 which is surrounded by a nitride coating eg. 918.
- the nitride coating includes an end protuberance 927.
- the magnetic core 917 operates under the influence of an external pulsed magnetic field. Hence, when the external magnetic field is very high, the actuator 925 is caused to move rapidly downwards and to thereby cause the ejection of ink from the ink ejection port 911.
- Adjacent the actuator 920 is provided a locking mechanism 920 which comprises a thermal actuator which includes a copper resistive circuit having two arms 922, 924. A current is passed through the connected arms 922, 924 thereby causing them to be heated.
- the arm 922 being of a thinner construction undergoes more resistive heating than the arm 924 which has a much thicker structure.
- the arm 922 is also of a serpentine nature and is encased in polytetrafluoroethylene (PTFE) which has a high coefficient of thermal expansion, thereby increasing the degree of expansion upon heating.
- PTFE polytetrafluoroethylene
- the copper portions expand with the PTFE portions by means of concertinaing.
- the arm 924 has a thinned portion 929 (Fig. 140) which becomes the concentrated bending region in the resolution of the various forces activated upon heating. Hence, any bending of arm 924 is accentuated in the region 929 and upon heating, the region 929 bends so that end portion 926 (Fig. 138) moves out to block any downward movement of the edge 927 of the actuator 925.
- the locking mechanism 920 when it is desired to eject an ink drop from a current nozzle chamber, the locking mechanism 920 is not activated and as a result ink is ejected from the ink ejection port during the next external magnetic pulse phase.
- the locking mechanism 920 is activated to block any movement of the actuator 925 and therefore stop the ejection of ink from the chamber.
- the actuator 920 is located within a cavity 928 such that the volume of ink flowing past arm 922 is extremely low whereas the arm 924 receives a much larger volume of ink flow during operation.
- Fig. 140 there is illustrated an exploded perspective view of a single ink jet nozzle 910 illustrating the various layers which make up the nozzle.
- the nozzle 910 can be constructed on a semiconductor wafer utilizing standard semiconductor processing techniques in addition to those techniques commonly used for the construction of micro-electromechanical systems (MEMS).
- MEMS micro-electromechanical systems
- SPIE International Society for Optical Engineering
- volumes 2642 and 2882 which contain the proceedings for recent advances and conferences in this field.
- the bottom level 930 is constructed the nozzle plate including the ink ejection port 911.
- the nozzle plate 930 can be constructed from a buried boron doped epitaxial layer of a silicon wafer which has been back etched to the point of the epitaxial layer. The epitaxial layer itself is then etched utilizing a mask so as to form the nozzle rim (not shown) and the nozzle hole 911.
- the silicon wafer layer 932 which is etched so as to include the nozzle chamber 912.
- the silicon layer 932 can be etched to contain substantially vertical side walls through the utilisation of high density, low pressure plasma etching such as that available from Surface Technology. Systems and subsequently filled with sacrificial material which will be later etched away.
- CMOS circuitry layer 933 On top of the silicon layer is deposited a two level CMOS circuitry layer 933 which comprises substantially glass in addition to the usual metal and poly layers.
- the layer 933 includes the formation of the heater element contacts which can be constructed from copper.
- the PTFE layer 935 can be provided as a departure from normal construction with a bottom PTFE layer being first deposited followed by the copper layer 934 and a second PTFE layer to cover the copper layer 934.
- a nitride passivation layer 936 which acts to provide a passivation surface for the lower layers in addition to providing a base for a soft magnetic Nickel Ferrous layer 917 which forms the magnetic actuator portion of the actuator 925.
- the nitride layer 936 includes bending portions 940 utilized in the bending of the actuator.
- a nitride passivation layer 939 is provided so as to passivate the top and side surfaces of the nickel iron (NiFe) layer 917.
- the presently disclosed ink jet printing technology is potentially suited to a wide range of printing system including: colour and monochrome office printers, short run digital printers, high speed digital printers, offset press supplemental printers, low cost scanning printers high speed pagewidth printers, notebook computers with inbuilt pagewidth printers, portable colour and monochrome printers, colour and monochrome copiers, colour and monochrome facsimile machines, combined printer, facsimile and copying machines, label printers, large format plotters, photograph copiers, printers for digital photographic "minilabs", video printers, PhotoCD printers, portable printers for PDAs, wallpaper printers, indoor sign printers, billboard printers, fabric printers, camera printers and fault tolerant commercial printer arrays.
- the embodiments of the invention use an ink jet printer type device. Of course many different devices could be used. However presently popular ink jet printing technologies are unlikely to be suitable.
- thermal inkjet The most significant problem with thermal inkjet is power consumption. This is approximately 100 times that required for high speed, and stems from the energy-inefficient means of drop ejection. This involves the rapid boiling of water to produce a vapor bubble which expels the ink. Water has a very high heat capacity, and must be superheated in thermal inkjet applications. This leads to an efficiency of around 0.02%, from electricity input to drop momentum (and increased surface area) out.
- piezoelectric inkjet The most significant problem with piezoelectric inkjet is size and cost. Piezoelectric crystals have a very small deflection at reasonable drive voltages, and therefore require a large area for each nozzle. Also, each piezoelectric actuator must be connected to its drive circuit on a separate substrate. This is not a significant problem at the current limit of around 300 nozzles per print head, but is a major impediment to the fabrication of pagewide print heads with 19,200 nozzles.
- the inkjet technologies used meet the stringent requirements of in-camera digital color printing and other high quality, high speed, low cost printing applications.
- new inkjet technologies have been created.
- the target features include:
- inkjet designs shown here are suitable for a wide range of digital printing systems, from battery powered one-time use digital cameras, through to desktop and network printers, and through to commercial printing systems
- the print head is designed to be a monolithic 0.5 micron CMOS chip with MEMS post processing.
- the print head is 100 mm long, with a width which depends upon the inkjet type.
- the smallest print head designed is IJ38, which is 0.35 mm wide, giving a chip area of 35 square mm.
- the print heads each contain 19,200 nozzles plus data and control circuitry.
- Ink is supplied to the back of the print head by injection molded plastic ink channels.
- the molding requires 50 micron features, which can be created using a lithographically micromachined insert in a standard injection molding tooL Ink flows through holes etched through the wafer to the nozzle chambers fabricated on the front surface of the wafer.
- the print head is connected to the camera circuitry by tape automated bonding.
- inkjet configurations can readily be derived from these 45 examples by substituting alternative configurations along one or more of the 11 axes.
- Most of the IJ01 to IJ45 examples can be made into inkjet print heads with characteristics superior to any currently available inkjet technology.
- Suitable applications include: Home printers, Office network printers, Short run digital printers, Commercial print systems, Fabric printers, Pocket printers, Internet WWW printers, Video printers, Medical imaging, Wide format printers, Notebook PC printers, Fax machines, Industrial printing systems, Photocopiers, Photographic minilabs etc.
- Piezoelectric A piezoelectric crystal such as lead lanthanum zirconate (PZT) is electrically activated, and either expands, shears, or bends to apply pressure to the ink, ejecting drops.
- PZT lead lanthanum zirconate
- the conductive plates may be in a comb or honeycomb structure, or stacked to increase the surface area and therefore the force.
- Low power consumption ⁇ Difficult to operate electrostatic devices in an aqueous environment ⁇ IJ02, IJ04 ⁇ Many ink types can be used ⁇
- the electrostatic actuator will normally need to be separated from the ink ⁇ Fast operation ⁇ Very large area required to achieve high forces ⁇ High voltage drive transistors may be required ⁇ Full pagewidth print heads are not competitive due to actuator size Electrostatic pull on ink A strong electric field is applied to tho ink, whereupon electrostatic attraction accelerates the ink towards the print medium.
- Examples are: Samarium Cobalt (SaCo) and magnetic materials in the neodymium iron boron family (NdFeB, NdDyFeBNb, NdDyFeB, etc) ⁇ Low power consumption ⁇ Complex fabrication ⁇ IJ07, IJ10 ⁇ Many ink types can be used ⁇ Permanent magnetic material such as Neodymium Iron Boron (NdFeB) required.
- SaCo Samarium Cobalt
- NdDyFeBNb neodymium iron boron family
- NdDyFeB neodymium iron boron family
- NdFeB Neodymium Iron Boron
- Soft magnetic core electro-magnetic A solenoid induced a magnetic field in a soft magnetic core or yoke fabricated from a ferrous material such as electroplated iron alloys such as CoNiFe [1], CoFe, or NiFe alloys. Typically, the soft magnetic material is in two parts, which are normally held apart by a spring. When the solenoid is actuated, the two parts attract, displacing the ink.
- the actuator uses the giant magnetostrictive effect of materials such as Terfenol-D (an alloy of terbium, dysprosium and iron developed at the Naval Ordnance Laboratory, hence Ter-Fe-NOL). For best efficiency, the actuator should be pre-stressed to approx. 8 MPa.
- a heater fabricated from a conductive material is incorporated.
- a 50 ⁇ m long PTFE bend actuator with polysilicon heater and 15 mW power input can provide 180 ⁇ N force and 10 ⁇ m deflection.
- Actuator motions include: ⁇ High force can be generated ⁇ Requires special material (e.g.
- the conducting polymer expands when resistively heated
- Examples of conducting dopants include: ⁇ High force can be generated ⁇ Requires special materials development (High CTE conductive polymer) ⁇ IJ24 1) Carbon nanotubes ⁇ Very low power consumption ⁇ Requires a PTFE deposition process, which is not yet standard in ULSI fabs 2) Metal fibers ⁇ Many ink types can be used ⁇ PTFE deposition cannot be followed with high temperature (above 350 °C) processing 3) Conductive polymers such as doped polythiophene ⁇ Simple planar fabrication ⁇ Evaporation and CVD deposition techniques cannot be used 4) Carbon granules ⁇ Small chip area required for each actuator ⁇ Pigmented inks may be infeasible, as pigment particles may jam the bend actuator ⁇ Fast operation ⁇ High efficiency ⁇ CMOS compatible voltages and currents ⁇ Easy extension from single nozzles to pagewidth print heads
- Shape memory alloy A shape memory alloy such as TiNi (also known as Nitin
- Linear Magnetic Actuator Linear magnetic actuators include the Linear Induction Actuator (LIA), Linear Permanent Magnet Synchronous Actuator (LPMSA), Linear Reluctance Synchronous Actuator (LRSA), Linear Switched Reluctance Actuator (LSRA), and the Linear Step
- Linear Magnetic actuators can be constructed with high thrust, long travel, and high efficiency using planar semiconductor fabrication techniques ⁇ Requires unusual semiconductor materials such as soft magnetic alloys (e.g. CoNiFe [1]) ⁇ IJ12 ⁇ Long actuator travel is available ⁇ Some varieties also require permanent magnetic materials such as Neodymium iron boron (NdFeB) ⁇ Medium force is available ⁇ Requires complex multi-phase drive circuitry ⁇ Low voltage operation ⁇ High current operation Basic operation mode Operational mode Description Advantages Disadvantages Examples Actuator directly pushes ink This is the simplest mode of operation: the actuator directly supplies sufficient kinetic energy to expel the drop. The drop must have a sufficient velocity to overcome the surface tension.
- ⁇ Simple operation ⁇ Drop repetition rate is usually limited to less than 10 KHz. However, this is not fundamental to the method, but is related to the refill method normally used ⁇ Thermal inkjet ⁇ No external fields required ⁇ All of the drop kinetic energy must be provided by the actuator ⁇ Piezoelectric inkjet ⁇ Satellite drops can be avoided if drop velocity is less than 4 m/s ⁇ Satellite drops usually form if drop velocity is greater than 4.5 m/s ⁇ IJ01, IJ02, IJ03, IJ04 ⁇ Can be efficient, depending upon the actuator used ⁇ IJ05, IJ06, IJ07, IJ09 ⁇ IJ11, IJ12, IJ14, IJ16 ⁇ IJ20, IJ22, IJ23, IJ24 ⁇ IJ25, IJ26, IJ27, IJ28 ⁇ IJ29, IJ30, IJ31, IJ32 ⁇ IJ33, IJ34, IJ35, IJ36 ⁇ IJ37,
- thermally induced surface tension reduction of pressurized ink Selected drops are separated from the ink in the nozzle by contact with the print medium or a transfer roller.
- Very simple print head fabrication can be used ⁇ Requires close proximity between the print head and the print media or transfer roller ⁇ Silverbrook, EP 0771 658 A2 and related patent applications ⁇
- the drop selection means does not need to provide the energy required to separate the drop from the nozzle ⁇ May require two print heads printing alternate rows of the image ⁇
- Monolithic color print heads are difficult Electrostatic pull on ink
- the drops to be printed are selected by some manner (e.g. thermally induced surface tension reduction of pressurized ink). Selected drops are separated from the ink in the nozzle by a strong electric field.
- Very simple print head fabrication can be used ⁇ Requires very high electrostatic field ⁇ Silverbrook, EP 0771 658 A2 and related patent applications ⁇
- the drop selection means does not need to provide the energy required to separate the drop from the nozzle ⁇ Electrostatic field for small nozzle sizes is above air breakdown ⁇ Tone-Jet ⁇ Electrostatic field may attract dust Magnetic pull on Ink
- the drops to be printed are selected by some manner (e.g. thermally induced surface tension reduction of pressurized ink). Selected drops are separated from the ink in the nozzle by a strong magnetic field acting on the magnetic ink.
- Actuators with small travel can be used ⁇ Moving parts are required ⁇ IJ08, IJ15, IJ18, IJ19 ⁇ Actuators with small force can be used ⁇ Requires ink pressure modulator ⁇ High speed (>50 KHz) operation can be achieved ⁇ Friction and wear must be considered ⁇ Stiction is possible Pulsed magnetic pull on ink pusher A pulsed magnetic field attracts an 'ink pusher' at the drop ejection frequency. An actuator controls a catch, which prevents the ink pusher from moving when a drop is not to be ejected.
- Oscillating ink pressure can provide a refill pulse, allowing higher operating speed ⁇ Requires external ink pressure oscillator ⁇ Silverbrook, EP 0771 658 A2 and related patent applications ⁇
- the actuators may operate with much lower energy ⁇ Ink pressure phase and amplitude must be carefully controlled ⁇ IJ08, IJ13, IJ15, IJ17 ⁇ Acoustic lenses can be used to focus the sound on the nozzles ⁇ Acoustic reflections in the ink chamber must be designed for ⁇ IJ18, IJ19, IJ21 Media proximity
- the print head is placed in close proximity to the print medium. Selected drops protrude from the print head further than unselected drops, and contact the print medium. The drop soaks into the medium fast enough to cause drop separation.
- Transient bend actuator A trilayer bend actuator where the two outside layers are identical. This cancels bend due to ambient temperature and residual stress. The actuator only responds to transient heating of one side or the other.
- Actuator stack A series of thin actuators are stacked. This can be appropriate where actuators require high electric field strength, such as electrostatic and piezoelectric actuators. ⁇ Increased travel ⁇ Increased fabrication complexity ⁇ Some piezoelectric ink jets ⁇ Reduced drive voltage ⁇ Increased possibility of short circuits due to pinholes ⁇ IJ04 Multiple actuators Multiple smaller actuators are used simultaneously to move the ink. Each actuator need provide only a portion of the force required.
- Actuator forces may not add linearly, reducing efficiency ⁇ IJ12, IJ13, IJ18, IJ20 ⁇
- Multiple actuators can be positioned to control ink flow accurately ⁇ IJ22, IJ28, IJ42, IJ43 Linear Spring
- a linear spring is used to transform a motion with small travel and high force into a longer travel, lower force motion.
- Matches low travel actuator with higher travel requirements ⁇ Requires print head area for the spring ⁇ IJ15 ⁇
- Non-contact method of motion transformation Reverse spring The actuator loads a spring. When the actuator is turned off, the spring releases.
- Coiled actuator A bend actuator is coiled to provide greater travel in a reduced chip area. ⁇ Increases travel ⁇ Generally restricted to planar implementations due to extreme fabrication difficulty in other orientations. ⁇ IJ17, IJ21, IJ34, IJ35 ⁇ Reduces chip area ⁇ Planar implementations are relatively easy to fabricate. Flexure bend actuator A bend actuator has a small region near the fixture point, which flexes much more readily than the remainder of the actuator.
- Low force, low travel actuators can be used ⁇ Moving parts are required ⁇ IJ13 ⁇ Can be fabricated using standard surface MEMS processes ⁇ Several actuator cycles are required ⁇ More complex drive electronics ⁇ Complex construction ⁇ Friction, friction, and wear are possible Catch The actuator controls a small catch. The catch either enables or disables movement of an ink pusher that is controlled in a bulk manner. ⁇ Very low actuator energy ⁇ Complex construction ⁇ IJ10 ⁇ Very small actuator size ⁇ Requires external force ⁇ Unsuitable for pigmented inks Buckle plate A buckle plate can be used to change a slow actuator into a fast motion. It can also convert a high force, low travel actuator into a high travel, medium force motion.
- acoustic lens is used to concentrate sound waves.
- No moving parts Large area required ⁇ 1993 Hadimioglu et al, EUP 550,192 ⁇ Only relevant for acoustic ink jets ⁇ 1993 Elrod et al, EUP 572,220 Sharp conductive point A sharp point is used to concentrate an electrostatic field.
- Simple construction ⁇ Difficult to fabricate using standard VLSI processes for a surface ejecting ink-jet ⁇ Tone-jet ⁇ Only relevant for electrostatic ink jets Actuator motion Actuator motion Description Advantages Disadvantages Examples Volume expansion The volume of the actuator changes, pushing the ink in all directions.
- the effective area of the actuator becomes the membrane area ⁇ Fabrication complexity ⁇ 1982 Howkins USP 4,459,601 ⁇ Actuator size ⁇ Difficulty of integration in a VLSI process
- Rotary levers may be used to increase travel
- Device complexity ⁇ IJ05, IJ08, IJ13, IJ28 ⁇ Small chip area requirements ⁇ May have friction at a pivot point Bend
- the actuator bends when energized. This may be due to differential thermal expansion, piezoelectric expansion, magnetostriction, or other form of relative dimensional change. ⁇ A very small change in dimensions can be converted to a large motion.
- the motion of the free end of the actuator ejects the ink.
- Easy to fabricate as a planar VLSI process ⁇ Difficult to fabricate for non-planar devices ⁇ IJ17, IJ21, IJ34, IJ35 ⁇ Small area required, therefore low cost ⁇ Poor out-of-plane stiffness
- nozzle firing is usually performed during a special clearing cycle, after first moving the print head to a cleaning station.
- IJ01-IJ07, IJ09-IJ12 ⁇ IJ14, IJ16, IJ20, IJ22 ⁇ IJ23-IJ34, IJ36-IJ45 Extra power to ink beater
- nozzle clearing can be achieved by over-powering the heater and boiling ink at the nozzle.
- nozzle clearing may be assisted by providing an enhanced drive signal to the actuator.
- a high nozzle clearing capability can be achieved ⁇
- High implementation cost if system does not already include an acoustic actuator ⁇ IJ08, IJ13, IJ15, IJ17 ⁇ May be implemented at very low cost in systems which already include acoustic actuators ⁇ IJ18, IJ19, IJ21 Nozzle clearing A microfabricated plate is pushed against plate the nozzles. The plate has a post for every nozzle.
- the blade is usually fabricated from a flexible polymer, e.g. rubber or synthetic elastomer.
- ⁇ Effective for planar print head surfaces ⁇ Difficult to use if print head surface is non-planar or very fragile ⁇ Many ink jet systems ⁇ Low cost ⁇ Requires mechanical parts ⁇ Blade can wear out in high volume print systems
- Separate ink boiling heater A separate heater is provided at the nozzle although the normal drop e-ection mechanism does not require it. The heaters do not require individual drive circuits, as many nozzles can be cleared simultaneously, and no imaging is required.
- Nozzles may be clogged by adhesive Glass capillaries Fine glass capillaries are drawn from glass tubing. This method has been used for making individual nozzles, but is difficult to use for bulk manufacturing of print heads with thousands of nozzles. ⁇ No expensive equipment required ⁇ Very small nozzle sizes are difficult to form ⁇ 1970 Zoltan USP 3,683,212 ⁇ Simple to make single nozzles ⁇ Not suited for mass production Monolithic, surface micro-machined using VLSI lithographic processes The nozzle plate is deposited as a layer using standard VLSI deposition techniques.
- Nozzles are etched in the nozzle plate using VLSI lithography and etching.
- High accuracy ( ⁇ 1 ⁇ m) ⁇ Requires sacrificial layer under the nozzle plate to form the nozzle chamber ⁇ Silverbrook, EP 0771 658 A2 and related patent applications ⁇ Monolithic ⁇ Surface may be fragile to the touch ⁇ IJ01, IJ02, IJ04, IJ11 ⁇ Low cost ⁇ IJ12, IJ17, IJ18, IJ20 ⁇ Existing processes can be used ⁇ IJ22, IJ24, IJ27, IJ28 ⁇ IJ29, IJ30, IJ31, IJ32 ⁇ IJ33, IJ34, IJ36, IJ37 ⁇ IJ38, IJ39, IJ40, IJ41 ⁇ IJ42, IJ43, IJ44 Monolithic, etched through substrate The nozzle plate is a buried etch stop in the wafer.
- Nozzle chambers are etched in the front of the wafer, and the wafer is thinned from the back side. Nozzles are then etched in the etch stop layer.
- High accuracy ( ⁇ 1 ⁇ m) ⁇ Requires long etch times ⁇ IJ03, IJ05, IJ06, IJ07 ⁇ Monolithic ⁇ Requires a support wafer ⁇ IJ08, IJ09, IJ10, IJ13 ⁇ Low cost ⁇ IJ14, IJ15, IJ16, IJ19 ⁇ No differential expansion ⁇ IJ21, IJ23, IJ25, IJ26 No nozzle plate Various methods have been tried to eliminate the nozzles entirely, to prevent nozzle clogging.
- ink jet printers A large number of new forms of ink jet printers have been developed to facilitate alternative ink jet technologies for the image processing and data distribution system. Various combinations of ink jet devices can be included in printer devices incorporated as part of the present invention.
- the present application may utilize advanced semiconductor fabrication techniques in the construction of large arrays of ink jet printers.
- the present application may utilize an ink delivery system to the ink jet head.
- the present application may utilize advanced semiconductor microelectromechanical techniques in the construction of large arrays of ink jet printers.
- the present application may include the utilization of a disposable camera system.
- the present application may include the utilization of a data distribution system.
- the present application may include the utilization of camera and data processing techniques such as an Artcam type device.
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Ink Jet (AREA)
Claims (11)
- Tintenstrahl-Düsenanordnung (910), umfassend:eine Düsenkammer (912) mit einer Tintenausstoßöffnung (911) zum Ausstoßen von Tinte aus der Düsenkammer;einen Tintenvorratsbehälter (913) zum Zuführen von Tinte zu der Düsenkammer (912); undein magnetisches Stellorgan (925), das zwischen der Düsenkammer (912) und dem Tintenvorratsbehälter (913) sitzt, um Tinte im Ansprechen auf von außen zugeführte Magnetimpulszyklen auszustoßen;gekennzeichnet durch
eine Blockiereinrichtung (920) zum Blockieren einer Bewegung des magnetischen Stellorgans (925), wenn es gewünscht ist, während eines Magnetimpulszyklus keine Tinte aus der Düsenkammer (912) auszustoßen. - Tintenstrahl-Düsenanordnung (910) nach Anspruch 1, wobei die Blockiereinrichtung ein thermisches Stellorgan (922, 924) mit einem beweglichen endseitigen Vorsprung umfasst, der in eine Position bewegt werden kann, in der er die Bewegungsbahn des magnetischen Stellorgans versperrt.
- Tintenstrahl-Düsenanordnung (910) nach einem der Ansprüche 1 oder 2, wobei das magnetische Stellorgan (925) einen endseitigen Vorsprung (927) umfasst, der so ausgelegt ist, dass er bei Bewegung des Stellorgans an der Blockiereinrichtung (920) angreift.
- Tintenstrahl-Düsenanordnung (910) nach einem der Ansprüche 1 bis 3, wobei das magnetische Stellorgan (925) an einer angrenzenden Wand der Düsenkammer mittels zweier biegbarer Streifenabschnitte (940) befestigt ist, die eine Biegebewegung des magnetischen Stellorgans bei Aktivierung durch die von außen zugeführten Magnetimpulszyklen ermöglichen.
- Tintenstrahl-Düsenanordnung (910) nach Anspruch 2, wobei das thermische Stellorgan im Wesentlichen zwei an einem Substrat befestigte Arme umfasst, wobei ein erster Arm (922) eine dünne, gewundene Struktur hat, die in ein Material mit einem hohen Wärmeausdehnungskoeffizienten eingebettet ist, und ein zweiter Arm (924) einen dickeren Arm mit einem sich verjüngenden dünnen Abschnitt nahe dem an das Substrat angeschlossenen Ende umfasst, um jegliche Biegung des Stellorgans (925) an einem dem Substrat nahe liegenden Punkt zu konzentrieren.
- Tintenstrahl-Düsenanordnung (910) nach einem der Ansprüche 1 bis 5, wobei die Blockiereinrichtung (920) in einer Aussparung sitzt, die einen geringen Grad an Fluidströmung durch sie hindurch aufweist.
- Tintenstrahl-Düsenanordnung (910) nach Anspruch 6, wobei die Blockiereinrichtung in einer Aussparung (928) sitzt, die einen geringen Grad an Fluidströmung durch sie hindurch aufweist, und der gewundene Arm entlang einer Innenwand der Aussparung angeordnet ist.
- Tintenstrahl-Düsenanordnung (910) nach einem der Ansprüche 1 bis 7, wobei die Düse über Herstellung eines Siliziumwafers unter Anwendung von Halbleiter-Herstellungstechniken aufgebaut wird.
- Tintenstrahl-Düsenanordnung (910) nach einem der Ansprüche 1 bis 8, wobei Abschnitte der Stellorgane nach Bedarf eine Beschichtung aus Siliziumnitrid umfassen, um sie von angrenzenden Abschnitten zu isolieren und zu passivieren.
- Tintenstrahl-Düsenanordnung (910) nach einem der Ansprüche 1 bis 9, wobei die Düsenkammer (912) durch ein bei hoher Dichte und niedrigem Druck stattfindenden Plasmaätzen eines Siliziumsubstrats gebildet wird.
- Düsenfeld mit mehreren Tintenstrahl-Düsenanordnungen nach einem der vorhergehenden Ansprüche.
Applications Claiming Priority (73)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AUPO8076A AUPO807697A0 (en) | 1997-07-15 | 1997-07-15 | A method of manufacture of an image creation apparatus (IJM16) |
AUPO793597 | 1997-07-15 | ||
AUPO7950A AUPO795097A0 (en) | 1997-07-15 | 1997-07-15 | A method of manufacture of an image creation apparatus (IJM11) |
AUPO8004A AUPO800497A0 (en) | 1997-07-15 | 1997-07-15 | Image creation method and apparatus (IJ26) |
AUPO8041A AUPO804197A0 (en) | 1997-07-15 | 1997-07-15 | Image creation method and apparatus (IJ25) |
AUPO804997 | 1997-07-15 | ||
AUPO793397 | 1997-07-15 | ||
AUPO8067A AUPO806797A0 (en) | 1997-07-15 | 1997-07-15 | Image creation method and apparatus (IJ16) |
AUPO806197 | 1997-07-15 | ||
AUPO807397 | 1997-07-15 | ||
AUPO794997 | 1997-07-15 | ||
AUPO8059A AUPO805997A0 (en) | 1997-07-15 | 1997-07-15 | A method of manufacture of an image creation apparatus (IJM14) |
AUPO806397 | 1997-07-15 | ||
AUPO805997 | 1997-07-15 | ||
AUPO806097 | 1997-07-15 | ||
AUPO805697 | 1997-07-15 | ||
AUPO8035A AUPO803597A0 (en) | 1997-07-15 | 1997-07-15 | Image creation method and apparatus (IJ06) |
AUPO8069A AUPO806997A0 (en) | 1997-07-15 | 1997-07-15 | Image creation method and apparatus (IJ11) |
AUPO806997 | 1997-07-15 | ||
AUPO793697 | 1997-07-15 | ||
AUPO8055A AUPO805597A0 (en) | 1997-07-15 | 1997-07-15 | A method of manufacture of an image creation apparatus (IJM07) |
AUPO795097 | 1997-07-15 | ||
AUPO805897 | 1997-07-15 | ||
AUPO807597 | 1997-07-15 | ||
AUPO8053A AUPO805397A0 (en) | 1997-07-15 | 1997-07-15 | A method of manufacture of an image creation apparatus (IJM08) |
AUPO806797 | 1997-07-15 | ||
AUPO8049A AUPO804997A0 (en) | 1997-07-15 | 1997-07-15 | Image creation method and apparatus (IJ12) |
AUPO8044A AUPO804497A0 (en) | 1997-07-15 | 1997-07-15 | Image creation method and apparatus (IJ07) |
AUPO803597 | 1997-07-15 | ||
AUPO8066A AUPO806697A0 (en) | 1997-07-15 | 1997-07-15 | Image creation method and apparatus (IJ01) |
AUPO8063A AUPO806397A0 (en) | 1997-07-15 | 1997-07-15 | Image creation method and apparatus (IJ08) |
AUPO8047A AUPO804797A0 (en) | 1997-07-15 | 1997-07-15 | Image creation method and apparatus (IJ05) |
AUPO805497 | 1997-07-15 | ||
AUPO8073A AUPO807397A0 (en) | 1997-07-15 | 1997-07-15 | A method of manufacture of an image creation apparatus (IJM15) |
AUPO8036A AUPO803697A0 (en) | 1997-07-15 | 1997-07-15 | Image creation method and apparatus (IJ13) |
AUPO805597 | 1997-07-15 | ||
AUPO8072A AUPO807297A0 (en) | 1997-07-15 | 1997-07-15 | Image creation method and apparatus (IJ02) |
AUPO8065A AUPO806597A0 (en) | 1997-07-15 | 1997-07-15 | A method of manufacture of an image creation apparatus (IJM06) |
AUPO800497 | 1997-07-15 | ||
AUPO7949A AUPO794997A0 (en) | 1997-07-15 | 1997-07-15 | A method of manufacture of an image creation apparatus (IJM12) |
AUPO807097 | 1997-07-15 | ||
AUPO805397 | 1997-07-15 | ||
AUPO8071A AUPO807197A0 (en) | 1997-07-15 | 1997-07-15 | Image creation method and apparatus (IJ04) |
AUPO8058A AUPO805897A0 (en) | 1997-07-15 | 1997-07-15 | A method of manufacture of an image creation apparatus (IJM26) |
AUPO807297 | 1997-07-15 | ||
AUPO804197 | 1997-07-15 | ||
AUPO8001A AUPO800197A0 (en) | 1997-07-15 | 1997-07-15 | Image creation method and apparatus (IJ17) |
AUPO803697 | 1997-07-15 | ||
AUPO8054A AUPO805497A0 (en) | 1997-07-15 | 1997-07-15 | A method of manufacture of an image creation apparatus (IJM05) |
AUPO8070A AUPO807097A0 (en) | 1997-07-15 | 1997-07-15 | Image creation method and apparatus (IJ15) |
AUPO8056A AUPO805697A0 (en) | 1997-07-15 | 1997-07-15 | Image creation method and apparatus (IJ10) |
AUPO7933A AUPO793397A0 (en) | 1997-07-15 | 1997-07-15 | A method of manufacture of an image creation_apparatus (IJM10) |
AUPO8048A AUPO804897A0 (en) | 1997-07-15 | 1997-07-15 | Image creation method and apparatus (IJ14) |
AUPO7936A AUPO793697A0 (en) | 1997-07-15 | 1997-07-15 | A method of manufacture of an image creation apparatus (IJM02) |
AUPO806597 | 1997-07-15 | ||
AUPO8060A AUPO806097A0 (en) | 1997-07-15 | 1997-07-15 | A method of manufacture of an image creation apparatus (IJM13) |
AUPO8075A AUPO807597A0 (en) | 1997-07-15 | 1997-07-15 | A method of manufacture of an image creation apparatus (IJM17) |
AUPO807697 | 1997-07-15 | ||
AUPO804797 | 1997-07-15 | ||
AUPO7935A AUPO793597A0 (en) | 1997-07-15 | 1997-07-15 | A method of manufacture of an image creation apparatus (IJM01) |
AUPO807797 | 1997-07-15 | ||
AUPO804497 | 1997-07-15 | ||
AUPO806697 | 1997-07-15 | ||
AUPO804897 | 1997-07-15 | ||
AUPO800197 | 1997-07-15 | ||
AUPO8061A AUPO806197A0 (en) | 1997-07-15 | 1997-07-15 | A method of manufacture of an image creation apparatus (IJM04) |
AUPO807197 | 1997-07-15 | ||
AUPO8077A AUPO807797A0 (en) | 1997-07-15 | 1997-07-15 | A method of manufacture of an image creation apparatus (IJM25) |
AUPP3983A AUPP398398A0 (en) | 1998-06-09 | 1998-06-09 | Image creation method and apparatus (ij45) |
AUPP398298 | 1998-06-09 | ||
AUPP3982A AUPP398298A0 (en) | 1998-06-09 | 1998-06-09 | A method of manufacture of an image creation apparatus (ijm45) |
AUPP398398 | 1998-06-09 | ||
EP98933350A EP0999933B1 (de) | 1997-07-15 | 1998-07-15 | Magnetfeld-betätigte tintenstrahldüse |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP98933350A Division EP0999933B1 (de) | 1997-07-15 | 1998-07-15 | Magnetfeld-betätigte tintenstrahldüse |
Publications (3)
Publication Number | Publication Date |
---|---|
EP1510339A2 EP1510339A2 (de) | 2005-03-02 |
EP1510339A3 EP1510339A3 (de) | 2005-03-09 |
EP1510339B1 true EP1510339B1 (de) | 2007-01-24 |
Family
ID=27586944
Family Applications (11)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP04024059A Expired - Lifetime EP1512535B1 (de) | 1997-07-15 | 1998-07-15 | Tintenstrahldrucker mit magnetisch angetriebenem Kolben |
EP04024061A Expired - Lifetime EP1508448B1 (de) | 1997-07-15 | 1998-07-15 | Tintenstrahldüse mit angeschrägtem magnetischen Kolben |
EP04024065A Expired - Lifetime EP1510341B1 (de) | 1997-07-15 | 1998-07-15 | Tintenstrahldüse mit elektromagnetischem Verschluss |
EP98933350A Expired - Lifetime EP0999933B1 (de) | 1997-07-15 | 1998-07-15 | Magnetfeld-betätigte tintenstrahldüse |
EP04024060A Expired - Lifetime EP1510339B1 (de) | 1997-07-15 | 1998-07-15 | Durch magnetische Impulse betriebene Tintenstrahldüse |
EP04024058A Expired - Lifetime EP1508444B1 (de) | 1997-07-15 | 1998-07-15 | Tintenstrahldrucker mit elektrostatisch betätigten Platten |
EP04024064A Expired - Lifetime EP1508445B1 (de) | 1997-07-15 | 1998-07-15 | Tintenstrahldüse mit Lorentz-Kraft-Element |
EP04024066A Expired - Lifetime EP1508446B1 (de) | 1997-07-15 | 1998-07-15 | Tintenstrahldüse mit elektromagnetischem Betätigungselement |
EP04024057A Expired - Lifetime EP1508443B1 (de) | 1997-07-15 | 1998-07-15 | Tintenstrahldüse mit elektromagnetisch aktiviertem Tintenkolben |
EP04024063A Expired - Lifetime EP1510340B1 (de) | 1997-07-15 | 1998-07-15 | Tintenstrahldüse mit geschlitztem Kolben |
EP04024062A Expired - Lifetime EP1508449B1 (de) | 1997-07-15 | 1998-07-15 | Tintenstrahldüse mit magnetischer Antriebskammer |
Family Applications Before (4)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP04024059A Expired - Lifetime EP1512535B1 (de) | 1997-07-15 | 1998-07-15 | Tintenstrahldrucker mit magnetisch angetriebenem Kolben |
EP04024061A Expired - Lifetime EP1508448B1 (de) | 1997-07-15 | 1998-07-15 | Tintenstrahldüse mit angeschrägtem magnetischen Kolben |
EP04024065A Expired - Lifetime EP1510341B1 (de) | 1997-07-15 | 1998-07-15 | Tintenstrahldüse mit elektromagnetischem Verschluss |
EP98933350A Expired - Lifetime EP0999933B1 (de) | 1997-07-15 | 1998-07-15 | Magnetfeld-betätigte tintenstrahldüse |
Family Applications After (6)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP04024058A Expired - Lifetime EP1508444B1 (de) | 1997-07-15 | 1998-07-15 | Tintenstrahldrucker mit elektrostatisch betätigten Platten |
EP04024064A Expired - Lifetime EP1508445B1 (de) | 1997-07-15 | 1998-07-15 | Tintenstrahldüse mit Lorentz-Kraft-Element |
EP04024066A Expired - Lifetime EP1508446B1 (de) | 1997-07-15 | 1998-07-15 | Tintenstrahldüse mit elektromagnetischem Betätigungselement |
EP04024057A Expired - Lifetime EP1508443B1 (de) | 1997-07-15 | 1998-07-15 | Tintenstrahldüse mit elektromagnetisch aktiviertem Tintenkolben |
EP04024063A Expired - Lifetime EP1510340B1 (de) | 1997-07-15 | 1998-07-15 | Tintenstrahldüse mit geschlitztem Kolben |
EP04024062A Expired - Lifetime EP1508449B1 (de) | 1997-07-15 | 1998-07-15 | Tintenstrahldüse mit magnetischer Antriebskammer |
Country Status (4)
Country | Link |
---|---|
EP (11) | EP1512535B1 (de) |
JP (6) | JP4170582B2 (de) |
AT (8) | ATE352422T1 (de) |
WO (1) | WO1999003680A1 (de) |
Families Citing this family (57)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7410243B2 (en) * | 1997-07-15 | 2008-08-12 | Silverbrook Research Pty Ltd | Inkjet nozzle with resiliently biased ejection actuator |
US6855264B1 (en) | 1997-07-15 | 2005-02-15 | Kia Silverbrook | Method of manufacture of an ink jet printer having a thermal actuator comprising an external coil spring |
US7753491B2 (en) | 1997-07-15 | 2010-07-13 | Silverbrook Research Pty Ltd | Printhead nozzle arrangement incorporating a corrugated electrode |
AUPP654598A0 (en) | 1998-10-16 | 1998-11-05 | Silverbrook Research Pty Ltd | Micromechanical device and method (ij46h) |
US7328975B2 (en) * | 1997-07-15 | 2008-02-12 | Silverbrook Research Pty Ltd | Injet printhead with thermal bend arm exposed to ink flow |
US7360871B2 (en) * | 1997-07-15 | 2008-04-22 | Silverbrook Research Pty Ltd | Inkjet chamber with ejection actuator between inlet and nozzle |
AUPP922399A0 (en) * | 1999-03-16 | 1999-04-15 | Silverbrook Research Pty Ltd | A method and apparatus (ij46p2) |
AUPP993099A0 (en) * | 1999-04-22 | 1999-05-20 | Silverbrook Research Pty Ltd | A micromechancial device and method(ij46p2b) |
AU2004202252B2 (en) * | 1999-04-22 | 2005-06-30 | Silverbrook Research Pty Ltd | Liquid ejection using a micro-electromechanical device |
WO2001002179A1 (en) * | 1999-06-30 | 2001-01-11 | Silverbrook Research Pty Ltd | Testing a micro electro-mechanical device |
US6382779B1 (en) | 1999-06-30 | 2002-05-07 | Silverbrook Research Pty Ltd | Testing a micro electro- mechanical device |
AU761820B2 (en) * | 1999-06-30 | 2003-06-12 | Silverbrook Research Pty Ltd | Calibrating a micro electro-mechanical device |
AUPQ130999A0 (en) | 1999-06-30 | 1999-07-22 | Silverbrook Research Pty Ltd | A method and apparatus (IJ47V11) |
AU761821B2 (en) * | 1999-06-30 | 2003-06-12 | Silverbrook Research Pty Ltd | Fault detection in a micro electro-mechanical device |
AU761670B2 (en) * | 1999-06-30 | 2003-06-05 | Silverbrook Research Pty Ltd | Testing a micro electro-mechanical device |
ATE488817T1 (de) | 1999-09-17 | 2010-12-15 | Silverbrook Res Pty Ltd | Verfahren und system zur instruktion eines computers |
DE60039312D1 (de) * | 2000-04-18 | 2008-08-07 | Silverbrook Res Pty Ltd | Tintenstrahlausstosser |
US20050134660A1 (en) | 2002-08-19 | 2005-06-23 | Kia Silverbrook | Ink supply system for multiple ink printing |
US6428133B1 (en) | 2000-05-23 | 2002-08-06 | Silverbrook Research Pty Ltd. | Ink jet printhead having a moving nozzle with an externally arranged actuator |
WO2001089839A1 (en) | 2000-05-23 | 2001-11-29 | Silverbrook Research Pty. Ltd. | Ink jet printhead having a moving nozzle with an externally arranged actuator |
US6557970B2 (en) | 2000-05-23 | 2003-05-06 | Silverbrook Research Pty Ltd | Nozzle guard for a printhead |
US6526658B1 (en) | 2000-05-23 | 2003-03-04 | Silverbrook Research Pty Ltd | Method of manufacture of an ink jet printhead having a moving nozzle with an externally arranged actuator |
US6921153B2 (en) | 2000-05-23 | 2005-07-26 | Silverbrook Research Pty Ltd | Liquid displacement assembly including a fluidic sealing structure |
ATE367266T1 (de) | 2000-05-24 | 2007-08-15 | Silverbrook Res Pty Ltd | Herstellungsverfahren für einen tintenstrahldruckkopf mit bewegender düse und externem betätiger |
AU4732600A (en) | 2000-05-24 | 2001-12-03 | Silverbrook Res Pty Ltd | Fluidic seal for an ink jet nozzle assembly |
CN100417523C (zh) * | 2000-05-24 | 2008-09-10 | 西尔弗布鲁克研究有限公司 | 带有隔离的喷嘴控制器的喷墨打印头 |
US6364460B1 (en) | 2000-06-13 | 2002-04-02 | Chad R. Sager | Liquid delivery system |
IL153433A (en) * | 2000-06-30 | 2005-09-25 | Silverbrook Res Pty Ltd | Buckle resistant thermal bend actuators |
CN100335278C (zh) * | 2000-06-30 | 2007-09-05 | 西尔弗布鲁克研究有限公司 | 热弯作动器抗扭曲装置 |
AU2006225215B2 (en) * | 2000-06-30 | 2009-04-09 | Zamtec Limited | An ink ejector for an inkjet printer with an arm and paddle arrangement |
SG165980A1 (en) * | 2000-06-30 | 2010-11-29 | Silverbrook Res Pty Ltd | A micro-electromechanical actuator with buckle-resistant properties |
US6406129B1 (en) * | 2000-10-20 | 2002-06-18 | Silverbrook Research Pty Ltd | Fluidic seal for moving nozzle ink jet |
US7066577B2 (en) | 2004-07-19 | 2006-06-27 | Silverbrook Research Pty Ltd | Pressure enhancing formations in an ink jet printhead |
AU2004203502B2 (en) * | 2000-10-20 | 2004-09-30 | Zamtec Limited | Nozzle for an ink jet printhead |
US6623101B1 (en) * | 2000-10-20 | 2003-09-23 | Silverbrook Research Pty Ltd | Moving nozzle ink jet |
US6505916B1 (en) | 2000-10-20 | 2003-01-14 | Silverbrook Research Pty Ltd | Nozzle poker for moving nozzle ink jet |
US6863379B2 (en) | 2002-11-23 | 2005-03-08 | Silverbrook Research Pty Ltd | Ink jet printhead that includes nozzles having pressure-enhancing formations |
US6350015B1 (en) * | 2000-11-24 | 2002-02-26 | Xerox Corporation | Magnetic drive systems and methods for a micromachined fluid ejector |
US6561627B2 (en) * | 2000-11-30 | 2003-05-13 | Eastman Kodak Company | Thermal actuator |
US6572218B2 (en) * | 2001-01-24 | 2003-06-03 | Xerox Corporation | Electrostatically-actuated device having a corrugated multi-layer membrane structure |
US6508947B2 (en) * | 2001-01-24 | 2003-01-21 | Xerox Corporation | Method for fabricating a micro-electro-mechanical fluid ejector |
KR100757363B1 (ko) * | 2002-11-21 | 2007-09-11 | 실버브룩 리서치 피티와이 리미티드 | 유체씨일을 구비한 잉크 젯 노즐 조립체 |
JP3912267B2 (ja) * | 2002-11-29 | 2007-05-09 | ソニー株式会社 | 液滴吐出装置、検査用チップ処理装置、液滴吐出方法、検査用チップ処理方法 |
EP2082075B1 (de) | 2006-09-08 | 2017-05-17 | Massachusetts Institute of Technology | Automatisierte schicht durch schichtaufsprühtechnologie |
KR100973979B1 (ko) * | 2008-08-22 | 2010-08-05 | 한국과학기술원 | 전자기력을 이용한 다축 구동기 |
KR102022392B1 (ko) | 2012-12-11 | 2019-11-05 | 삼성디스플레이 주식회사 | 노즐프린터 |
KR20140094957A (ko) | 2013-01-23 | 2014-07-31 | 삼성디스플레이 주식회사 | 노즐프린터용 노즐유닛 및 이를 구비하는 노즐프린터 |
CN104401129B (zh) * | 2014-11-21 | 2016-08-24 | 常俊环 | 大字符喷码机喷头 |
DE102015225726A1 (de) * | 2015-12-17 | 2017-06-22 | Ksb Aktiengesellschaft | Pumpe mit verformbarem Förderelement |
US10589980B2 (en) * | 2017-04-07 | 2020-03-17 | Texas Instruments Incorporated | Isolated protrusion/recession features in a micro electro mechanical system |
CN109144885B (zh) * | 2017-06-27 | 2022-04-29 | 北京忆恒创源科技股份有限公司 | 固态存储设备的垃圾回收方法与固态存储设备 |
GB2573117B (en) * | 2018-04-24 | 2021-02-17 | Adey Holdings 2008 Ltd | Magnetic filter |
KR20200085510A (ko) * | 2019-01-07 | 2020-07-15 | 에스케이하이닉스 주식회사 | 데이터 저장 장치 및 동작 방법과, 이를 위한 컨트롤러 |
CN110389317B (zh) * | 2019-06-03 | 2021-08-10 | 广州南盾通讯设备有限公司 | 一种对散序对象快速定位的低功耗柜体及定位方法 |
CN112652529B (zh) * | 2019-10-09 | 2022-03-22 | 长鑫存储技术有限公司 | 半导体器件及半导体器件的电容孔制备方法 |
CN112787237B (zh) * | 2021-01-16 | 2023-06-23 | 四川省盛源鑫智能电气有限责任公司 | 基于拨动机构的电气自动化控制柜 |
CN113607122B (zh) * | 2021-08-23 | 2022-11-25 | 中国建筑第八工程局有限公司 | 箱型钢板墙内部校正用的智能小车、设备及方法 |
Family Cites Families (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4032929A (en) * | 1975-10-28 | 1977-06-28 | Xerox Corporation | High density linear array ink jet assembly |
DE2700010A1 (de) * | 1976-01-15 | 1977-07-21 | Xerox Corp | Geraet zur erzeugung von abtrennbaren fluessigkeitstroepfchen und antriebselemente dafuer |
JPS5559972A (en) * | 1978-10-28 | 1980-05-06 | Seiko Epson Corp | Ink jet recording head |
US4210920A (en) * | 1979-01-31 | 1980-07-01 | The Mead Corporation | Magnetically activated plane wave stimulator |
US4460905A (en) * | 1982-03-29 | 1984-07-17 | Ncr Corporation | Control valve for ink jet nozzles |
DE3245283A1 (de) * | 1982-12-07 | 1984-06-07 | Siemens AG, 1000 Berlin und 8000 München | Anordnung zum ausstoss von fluessigkeitstroepfchen |
DE3302617C2 (de) * | 1983-01-27 | 1987-04-23 | Domino Printing Sciences Plc, Cambridge | Farbspritzkopf |
JPS60131254A (ja) * | 1983-12-20 | 1985-07-12 | Ricoh Co Ltd | インクジエツト噴射ヘツド |
DE3445720A1 (de) * | 1984-12-14 | 1986-06-19 | Siemens AG, 1000 Berlin und 8000 München | Anordnung zum ausstoss von einzeltroepfchen aus austrittsoeffnungen eines tintenschreibkopfes |
SE447222B (sv) * | 1984-12-21 | 1986-11-03 | Swedot System Ab | Elektromagnetiskt manovrerbar ventilanordning, serskilt for alstring av droppar i en vetskestralskrivare |
US4618808A (en) * | 1985-01-30 | 1986-10-21 | International Business Machines Corporation | Electromagnetic actuator system using stepper motor with closed loop position sensing, electronic commutation and dynamic position and anomaly correction |
GB8507688D0 (en) * | 1985-03-25 | 1985-05-01 | Lane International Ltd John | Fluid applicator |
US4723131A (en) * | 1986-09-12 | 1988-02-02 | Diagraph Corporation | Printhead for ink jet printing apparatus |
JPH0234342A (ja) * | 1988-07-25 | 1990-02-05 | Seiko Epson Corp | インクジェットヘッド |
JPH02150353A (ja) * | 1988-11-30 | 1990-06-08 | Nec Home Electron Ltd | インクジェットヘッド |
GB8828047D0 (en) * | 1988-12-01 | 1989-01-05 | Willett Int Ltd | Method of operating valve |
JPH02219655A (ja) * | 1989-02-20 | 1990-09-03 | Sharp Corp | インクジェットヘッド |
JPH02273241A (ja) * | 1989-04-14 | 1990-11-07 | Ricoh Co Ltd | インクジェット記録装置 |
JPH0365349A (ja) * | 1989-08-03 | 1991-03-20 | Matsushita Electric Ind Co Ltd | インクジェットヘッド |
JP2839345B2 (ja) * | 1989-09-11 | 1998-12-16 | 松下電器産業株式会社 | インク記録装置 |
JPH04126255A (ja) * | 1990-09-18 | 1992-04-27 | Seiko Epson Corp | インクジェットヘッド |
US5534900A (en) * | 1990-09-21 | 1996-07-09 | Seiko Epson Corporation | Ink-jet recording apparatus |
JPH04129745A (ja) * | 1990-09-21 | 1992-04-30 | Seiko Epson Corp | インクジェットヘッド |
JPH04357039A (ja) * | 1991-06-03 | 1992-12-10 | Rohm Co Ltd | インクジェットプリントヘッド |
JPH04368851A (ja) * | 1991-06-17 | 1992-12-21 | Seiko Epson Corp | 磁場発生基板及びそれを用いたインクジェットヘッド |
GB9121851D0 (en) * | 1991-10-15 | 1991-11-27 | Willett Int Ltd | Device |
DE4139731A1 (de) * | 1991-12-03 | 1993-06-09 | Inno-Print Verpackungs- + Beschriftungssysteme Gmbh, 5060 Bergisch Gladbach, De | Tintenstrahl-matrixdrucker aus einzelelementen |
JPH05318724A (ja) * | 1992-05-19 | 1993-12-03 | Seikosha Co Ltd | インクジェット記録装置 |
JPH06106725A (ja) * | 1992-08-14 | 1994-04-19 | Ricoh Co Ltd | 静電変形型インクジェットによる記録方法及び静電変形型インクジェットヘッド |
JPH06134985A (ja) * | 1992-10-28 | 1994-05-17 | Ricoh Co Ltd | 1ドット多値が可能な記録装置及び1ドット多値が可能な記録方法 |
JPH06336011A (ja) * | 1993-05-31 | 1994-12-06 | Sharp Corp | プリントヘッド装置 |
EP0671271B1 (de) * | 1994-03-09 | 2000-07-05 | Seiko Epson Corporation | Tintenstrahlaufzeichnungsgerät |
US5828394A (en) * | 1995-09-20 | 1998-10-27 | The Board Of Trustees Of The Leland Stanford Junior University | Fluid drop ejector and method |
-
1998
- 1998-07-15 EP EP04024059A patent/EP1512535B1/de not_active Expired - Lifetime
- 1998-07-15 EP EP04024061A patent/EP1508448B1/de not_active Expired - Lifetime
- 1998-07-15 EP EP04024065A patent/EP1510341B1/de not_active Expired - Lifetime
- 1998-07-15 EP EP98933350A patent/EP0999933B1/de not_active Expired - Lifetime
- 1998-07-15 AT AT04024065T patent/ATE352422T1/de not_active IP Right Cessation
- 1998-07-15 EP EP04024060A patent/EP1510339B1/de not_active Expired - Lifetime
- 1998-07-15 AT AT98933350T patent/ATE289922T1/de not_active IP Right Cessation
- 1998-07-15 JP JP2000502941A patent/JP4170582B2/ja not_active Expired - Fee Related
- 1998-07-15 AT AT04024064T patent/ATE353053T1/de not_active IP Right Cessation
- 1998-07-15 EP EP04024058A patent/EP1508444B1/de not_active Expired - Lifetime
- 1998-07-15 AT AT04024060T patent/ATE352420T1/de not_active IP Right Cessation
- 1998-07-15 AT AT04024063T patent/ATE352421T1/de not_active IP Right Cessation
- 1998-07-15 AT AT04024057T patent/ATE355972T1/de not_active IP Right Cessation
- 1998-07-15 EP EP04024064A patent/EP1508445B1/de not_active Expired - Lifetime
- 1998-07-15 EP EP04024066A patent/EP1508446B1/de not_active Expired - Lifetime
- 1998-07-15 EP EP04024057A patent/EP1508443B1/de not_active Expired - Lifetime
- 1998-07-15 AT AT04024059T patent/ATE381991T1/de not_active IP Right Cessation
- 1998-07-15 EP EP04024063A patent/EP1510340B1/de not_active Expired - Lifetime
- 1998-07-15 EP EP04024062A patent/EP1508449B1/de not_active Expired - Lifetime
- 1998-07-15 AT AT04024062T patent/ATE352423T1/de not_active IP Right Cessation
- 1998-07-15 WO PCT/AU1998/000548 patent/WO1999003680A1/en active IP Right Grant
-
2006
- 2006-10-02 JP JP2006270641A patent/JP4171037B2/ja not_active Expired - Fee Related
- 2006-10-02 JP JP2006270743A patent/JP4137964B2/ja not_active Expired - Fee Related
- 2006-10-02 JP JP2006270831A patent/JP4173174B2/ja not_active Expired - Fee Related
- 2006-10-02 JP JP2006270974A patent/JP4137965B2/ja not_active Expired - Fee Related
- 2006-10-02 JP JP2006270310A patent/JP4185538B2/ja not_active Expired - Fee Related
Also Published As
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP1510339B1 (de) | Durch magnetische Impulse betriebene Tintenstrahldüse | |
US7970275B2 (en) | Digital camera system for simultaneous printing and magnetic recording | |
US8029101B2 (en) | Ink ejection mechanism with thermal actuator coil | |
US6180427B1 (en) | Method of manufacture of a thermally actuated ink jet including a tapered heater element | |
US6727948B1 (en) | Utilizing autofocus information for image processing in a digital camera | |
US20010043253A1 (en) | Ink jet with coiled actuator | |
US20010045969A1 (en) | Shutter ink jet | |
US6137500A (en) | Utilizing of brush stroking techniques in the generation of computer images | |
US6225138B1 (en) | Method of manufacture of a pulsed magnetic field ink jet printer | |
AU2002323712B2 (en) | A field actuated ink jet | |
AU2006202041B2 (en) | Inkjet nozzle with solenoid actuator | |
AU2002325589B2 (en) | A thermally actuated ink jet | |
AU2004203658B2 (en) | A replenishable one time use camera system with recapping mechanism |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
PUAL | Search report despatched |
Free format text: ORIGINAL CODE: 0009013 |
|
17P | Request for examination filed |
Effective date: 20041008 |
|
AC | Divisional application: reference to earlier application |
Ref document number: 0999933 Country of ref document: EP Kind code of ref document: P |
|
AK | Designated contracting states |
Kind code of ref document: A2 Designated state(s): AT BE CH DE DK ES FI FR GB GR IE IT LI NL PT SE |
|
AK | Designated contracting states |
Kind code of ref document: A3 Designated state(s): AT BE CH DE DK ES FI FR GB GR IE IT LI NL PT SE |
|
AKX | Designation fees paid |
Designated state(s): AT BE CH DE DK ES FI FR GB GR IE IT LI NL PT SE |
|
GRAP | Despatch of communication of intention to grant a patent |
Free format text: ORIGINAL CODE: EPIDOSNIGR1 |
|
GRAS | Grant fee paid |
Free format text: ORIGINAL CODE: EPIDOSNIGR3 |
|
GRAA | (expected) grant |
Free format text: ORIGINAL CODE: 0009210 |
|
AC | Divisional application: reference to earlier application |
Ref document number: 0999933 Country of ref document: EP Kind code of ref document: P |
|
AK | Designated contracting states |
Kind code of ref document: B1 Designated state(s): AT BE CH DE DK ES FI FR GB GR IE IT LI NL PT SE |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: LI Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20070124 Ref country code: DK Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20070124 Ref country code: AT Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20070124 Ref country code: FI Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20070124 Ref country code: CH Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20070124 Ref country code: NL Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20070124 |
|
REG | Reference to a national code |
Ref country code: GB Ref legal event code: FG4D |
|
REG | Reference to a national code |
Ref country code: CH Ref legal event code: EP |
|
REG | Reference to a national code |
Ref country code: IE Ref legal event code: FG4D |
|
REF | Corresponds to: |
Ref document number: 69836993 Country of ref document: DE Date of ref document: 20070315 Kind code of ref document: P |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: SE Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20070424 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: ES Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20070505 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: PT Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20070625 |
|
REG | Reference to a national code |
Ref country code: CH Ref legal event code: PL |
|
NLV1 | Nl: lapsed or annulled due to failure to fulfill the requirements of art. 29p and 29m of the patents act | ||
EN | Fr: translation not filed | ||
PLBE | No opposition filed within time limit |
Free format text: ORIGINAL CODE: 0009261 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT |
|
26N | No opposition filed |
Effective date: 20071025 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: BE Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20070124 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: DE Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20070425 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: FR Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20070914 Ref country code: IT Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20070124 Ref country code: GR Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20070425 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: FR Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20070124 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: GB Payment date: 20120727 Year of fee payment: 15 Ref country code: IE Payment date: 20120727 Year of fee payment: 15 |
|
GBPC | Gb: european patent ceased through non-payment of renewal fee |
Effective date: 20130715 |
|
REG | Reference to a national code |
Ref country code: IE Ref legal event code: MM4A |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: GB Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20130715 |
|
REG | Reference to a national code |
Ref country code: GB Ref legal event code: 732E Free format text: REGISTERED BETWEEN 20140619 AND 20140625 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: IE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20130715 |