EP1510339B1 - Durch magnetische Impulse betriebene Tintenstrahldüse - Google Patents

Durch magnetische Impulse betriebene Tintenstrahldüse Download PDF

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Publication number
EP1510339B1
EP1510339B1 EP04024060A EP04024060A EP1510339B1 EP 1510339 B1 EP1510339 B1 EP 1510339B1 EP 04024060 A EP04024060 A EP 04024060A EP 04024060 A EP04024060 A EP 04024060A EP 1510339 B1 EP1510339 B1 EP 1510339B1
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EP
European Patent Office
Prior art keywords
ink
actuator
ink jet
nozzle
magnetic
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Expired - Lifetime
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EP04024060A
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English (en)
French (fr)
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EP1510339A2 (de
EP1510339A3 (de
Inventor
Kia Silverbrook
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Silverbrook Research Pty Ltd
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Silverbrook Research Pty Ltd
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Priority claimed from AUPO8041A external-priority patent/AUPO804197A0/en
Priority claimed from AUPO8069A external-priority patent/AUPO806997A0/en
Priority claimed from AUPO7949A external-priority patent/AUPO794997A0/en
Priority claimed from AUPO8001A external-priority patent/AUPO800197A0/en
Priority claimed from AUPO8035A external-priority patent/AUPO803597A0/en
Priority claimed from AUPO8053A external-priority patent/AUPO805397A0/en
Priority claimed from AUPO8044A external-priority patent/AUPO804497A0/en
Priority claimed from AUPO8073A external-priority patent/AUPO807397A0/en
Priority claimed from AUPO8065A external-priority patent/AUPO806597A0/en
Priority claimed from AUPO8054A external-priority patent/AUPO805497A0/en
Priority claimed from AUPO7950A external-priority patent/AUPO795097A0/en
Priority claimed from AUPO8036A external-priority patent/AUPO803697A0/en
Priority claimed from AUPO8060A external-priority patent/AUPO806097A0/en
Priority claimed from AUPO8061A external-priority patent/AUPO806197A0/en
Priority claimed from AUPO8049A external-priority patent/AUPO804997A0/en
Priority claimed from AUPO8047A external-priority patent/AUPO804797A0/en
Priority claimed from AUPO8056A external-priority patent/AUPO805697A0/en
Priority claimed from AUPO8058A external-priority patent/AUPO805897A0/en
Priority claimed from AUPO8066A external-priority patent/AUPO806697A0/en
Priority claimed from AUPO8004A external-priority patent/AUPO800497A0/en
Priority claimed from AUPO8077A external-priority patent/AUPO807797A0/en
Priority claimed from AUPO8076A external-priority patent/AUPO807697A0/en
Priority claimed from AUPO7935A external-priority patent/AUPO793597A0/en
Priority claimed from AUPO8070A external-priority patent/AUPO807097A0/en
Priority claimed from AUPO8075A external-priority patent/AUPO807597A0/en
Priority claimed from AUPO8055A external-priority patent/AUPO805597A0/en
Priority claimed from AUPO8067A external-priority patent/AUPO806797A0/en
Priority claimed from AUPO7933A external-priority patent/AUPO793397A0/en
Priority claimed from AUPO8048A external-priority patent/AUPO804897A0/en
Priority claimed from AUPO8063A external-priority patent/AUPO806397A0/en
Priority claimed from AUPO7936A external-priority patent/AUPO793697A0/en
Priority claimed from AUPO8059A external-priority patent/AUPO805997A0/en
Priority claimed from AUPO8071A external-priority patent/AUPO807197A0/en
Priority claimed from AUPO8072A external-priority patent/AUPO807297A0/en
Priority claimed from AUPP3983A external-priority patent/AUPP398398A0/en
Priority claimed from AUPP3982A external-priority patent/AUPP398298A0/en
Application filed by Silverbrook Research Pty Ltd filed Critical Silverbrook Research Pty Ltd
Publication of EP1510339A2 publication Critical patent/EP1510339A2/de
Publication of EP1510339A3 publication Critical patent/EP1510339A3/de
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J3/00—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed
    • B41J3/44—Typewriters or selective printing mechanisms having dual functions or combined with, or coupled to, apparatus performing other functions
    • B41J3/445—Printers integrated in other types of apparatus, e.g. printers integrated in cameras
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14314—Structure of ink jet print heads with electrostatically actuated membrane
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14427—Structure of ink jet print heads with thermal bend detached actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1648—Production of print heads with thermal bend detached actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/17—Ink jet characterised by ink handling
    • B41J2/175—Ink supply systems ; Circuit parts therefor
    • B41J2/17596—Ink pumps, ink valves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2002/041—Electromagnetic transducer

Definitions

  • the present invention relates to the field of ink jet printing systems.
  • US Patent 3596275 by Sweet also discloses a process of a continuous ink jet printing including the step wherein the ink jet stream is modulated by a high frequency electro-static field so as to cause drop separation. This technique is still utilized by several manufacturers including Elmjet and Scitex (see also US Patent No. 3373437 by Sweet et al)
  • Piezo-electric ink jet printers are also one form of commonly utilized ink jet printing device. Piezo-electric systems are disclosed by Kyser et. al. in US Patent No. 3946398 (1970) which utilises a diaphragm mode of operation, by Zolten in US Patent 3683212 (1970) which discloses a squeeze mode of operation of a piezo electric crystal, Stemme in US Patent No. 3747120 (1972) discloses a bend mode of piezo-electric operation, Howkins in US Patent No. 4459601 discloses a Piezo electric push mode actuation of the ink jet stream and Fischbeck in US 4584590 which discloses a sheer mode type of piezo-electric transducer element.
  • the ink jet printing techniques include those disclosed by Endo et al in GB 2007162 (1979) and Vaught et al in US Patent 4490728. Both the aforementioned references disclosed ink jet printing techniques rely upon the activation of an electrothermal actuator which results in the creation of a bubble in a constricted space, such as a nozzle, which thereby causes the ejection of ink from an aperture connected to the confined space onto a relevant print media.
  • Printing devices utilising the electro-thermal actuator are manufactured by manufacturers such as Canon and Hewlett Packard.
  • DE3234283 describes an inkjet nozzle comprising an electromagnet and an armature constructed as a tongue.
  • the electromagnet When the electromagnet is activated and deactivated, the tongue rapidly moves, thereby ejecting ink from the nozzle.
  • JP05318724 describes an inkjet nozzle comprising a plastic magnetic plate positioned adjacent a magnetic substrate. Upon activation of an electromagnet, the magnetic plate is moved relative the substrate, thereby generating a pressure wave in the nozzle and causing ejection of ink.
  • a printing technology should have a number of desirable attributes. These include inexpensive construction and operation, high speed operation, safe and continuous long term operation etc. Each technology may have its own advantages and disadvantages in the areas of cost, speed, quality, reliability, power usage, simplicity of construction operation, durability and consumables.
  • esoteric techniques are also often utilized. These can include electroforming of nickel stage (Hewiett-Packard Journal, Vol. 36 no 5, pp33-37 (1985)), electro-discharge machining, laser ablation (U.S. Patent No. 5,208,604), micro-punching, etc.
  • the preferred embodiments and other embodiments will be discussed under separate headings with the heading including an IJ number for ease of reference.
  • the headings also include a type designator with T indicating thermal, S indicating shutter type and F indicating a field type.
  • an array of ink jet nozzles is provided with each of the nozzles being under the influence of a outside pulsed magnetic field.
  • the outside pulsed magnetic field causes selected nozzles to eject ink from their ink nozzle chambers.
  • Fig. 138 and Fig. 139 there is illustrated a side perspective view, partly in section, of a single ink jet nozzle 910.
  • Fig. 138 illustrates a nozzle in a quiescent position
  • Fig. 139 illustrates a nozzle in an ink ejection position.
  • the ink jet nozzle 910 has an ink ejection port 911 for the ejection of ink on demand.
  • the ink jet ejection port 911 is connected to an ink nozzle chamber 912 which is usually filled with ink and supplied from an ink reservoir 913 via holes eg. 915.
  • a magnetic actuation device 925 is included and comprises a magnetic soft core 917 which is surrounded by a nitride coating eg. 918.
  • the nitride coating includes an end protuberance 927.
  • the magnetic core 917 operates under the influence of an external pulsed magnetic field. Hence, when the external magnetic field is very high, the actuator 925 is caused to move rapidly downwards and to thereby cause the ejection of ink from the ink ejection port 911.
  • Adjacent the actuator 920 is provided a locking mechanism 920 which comprises a thermal actuator which includes a copper resistive circuit having two arms 922, 924. A current is passed through the connected arms 922, 924 thereby causing them to be heated.
  • the arm 922 being of a thinner construction undergoes more resistive heating than the arm 924 which has a much thicker structure.
  • the arm 922 is also of a serpentine nature and is encased in polytetrafluoroethylene (PTFE) which has a high coefficient of thermal expansion, thereby increasing the degree of expansion upon heating.
  • PTFE polytetrafluoroethylene
  • the copper portions expand with the PTFE portions by means of concertinaing.
  • the arm 924 has a thinned portion 929 (Fig. 140) which becomes the concentrated bending region in the resolution of the various forces activated upon heating. Hence, any bending of arm 924 is accentuated in the region 929 and upon heating, the region 929 bends so that end portion 926 (Fig. 138) moves out to block any downward movement of the edge 927 of the actuator 925.
  • the locking mechanism 920 when it is desired to eject an ink drop from a current nozzle chamber, the locking mechanism 920 is not activated and as a result ink is ejected from the ink ejection port during the next external magnetic pulse phase.
  • the locking mechanism 920 is activated to block any movement of the actuator 925 and therefore stop the ejection of ink from the chamber.
  • the actuator 920 is located within a cavity 928 such that the volume of ink flowing past arm 922 is extremely low whereas the arm 924 receives a much larger volume of ink flow during operation.
  • Fig. 140 there is illustrated an exploded perspective view of a single ink jet nozzle 910 illustrating the various layers which make up the nozzle.
  • the nozzle 910 can be constructed on a semiconductor wafer utilizing standard semiconductor processing techniques in addition to those techniques commonly used for the construction of micro-electromechanical systems (MEMS).
  • MEMS micro-electromechanical systems
  • SPIE International Society for Optical Engineering
  • volumes 2642 and 2882 which contain the proceedings for recent advances and conferences in this field.
  • the bottom level 930 is constructed the nozzle plate including the ink ejection port 911.
  • the nozzle plate 930 can be constructed from a buried boron doped epitaxial layer of a silicon wafer which has been back etched to the point of the epitaxial layer. The epitaxial layer itself is then etched utilizing a mask so as to form the nozzle rim (not shown) and the nozzle hole 911.
  • the silicon wafer layer 932 which is etched so as to include the nozzle chamber 912.
  • the silicon layer 932 can be etched to contain substantially vertical side walls through the utilisation of high density, low pressure plasma etching such as that available from Surface Technology. Systems and subsequently filled with sacrificial material which will be later etched away.
  • CMOS circuitry layer 933 On top of the silicon layer is deposited a two level CMOS circuitry layer 933 which comprises substantially glass in addition to the usual metal and poly layers.
  • the layer 933 includes the formation of the heater element contacts which can be constructed from copper.
  • the PTFE layer 935 can be provided as a departure from normal construction with a bottom PTFE layer being first deposited followed by the copper layer 934 and a second PTFE layer to cover the copper layer 934.
  • a nitride passivation layer 936 which acts to provide a passivation surface for the lower layers in addition to providing a base for a soft magnetic Nickel Ferrous layer 917 which forms the magnetic actuator portion of the actuator 925.
  • the nitride layer 936 includes bending portions 940 utilized in the bending of the actuator.
  • a nitride passivation layer 939 is provided so as to passivate the top and side surfaces of the nickel iron (NiFe) layer 917.
  • the presently disclosed ink jet printing technology is potentially suited to a wide range of printing system including: colour and monochrome office printers, short run digital printers, high speed digital printers, offset press supplemental printers, low cost scanning printers high speed pagewidth printers, notebook computers with inbuilt pagewidth printers, portable colour and monochrome printers, colour and monochrome copiers, colour and monochrome facsimile machines, combined printer, facsimile and copying machines, label printers, large format plotters, photograph copiers, printers for digital photographic "minilabs", video printers, PhotoCD printers, portable printers for PDAs, wallpaper printers, indoor sign printers, billboard printers, fabric printers, camera printers and fault tolerant commercial printer arrays.
  • the embodiments of the invention use an ink jet printer type device. Of course many different devices could be used. However presently popular ink jet printing technologies are unlikely to be suitable.
  • thermal inkjet The most significant problem with thermal inkjet is power consumption. This is approximately 100 times that required for high speed, and stems from the energy-inefficient means of drop ejection. This involves the rapid boiling of water to produce a vapor bubble which expels the ink. Water has a very high heat capacity, and must be superheated in thermal inkjet applications. This leads to an efficiency of around 0.02%, from electricity input to drop momentum (and increased surface area) out.
  • piezoelectric inkjet The most significant problem with piezoelectric inkjet is size and cost. Piezoelectric crystals have a very small deflection at reasonable drive voltages, and therefore require a large area for each nozzle. Also, each piezoelectric actuator must be connected to its drive circuit on a separate substrate. This is not a significant problem at the current limit of around 300 nozzles per print head, but is a major impediment to the fabrication of pagewide print heads with 19,200 nozzles.
  • the inkjet technologies used meet the stringent requirements of in-camera digital color printing and other high quality, high speed, low cost printing applications.
  • new inkjet technologies have been created.
  • the target features include:
  • inkjet designs shown here are suitable for a wide range of digital printing systems, from battery powered one-time use digital cameras, through to desktop and network printers, and through to commercial printing systems
  • the print head is designed to be a monolithic 0.5 micron CMOS chip with MEMS post processing.
  • the print head is 100 mm long, with a width which depends upon the inkjet type.
  • the smallest print head designed is IJ38, which is 0.35 mm wide, giving a chip area of 35 square mm.
  • the print heads each contain 19,200 nozzles plus data and control circuitry.
  • Ink is supplied to the back of the print head by injection molded plastic ink channels.
  • the molding requires 50 micron features, which can be created using a lithographically micromachined insert in a standard injection molding tooL Ink flows through holes etched through the wafer to the nozzle chambers fabricated on the front surface of the wafer.
  • the print head is connected to the camera circuitry by tape automated bonding.
  • inkjet configurations can readily be derived from these 45 examples by substituting alternative configurations along one or more of the 11 axes.
  • Most of the IJ01 to IJ45 examples can be made into inkjet print heads with characteristics superior to any currently available inkjet technology.
  • Suitable applications include: Home printers, Office network printers, Short run digital printers, Commercial print systems, Fabric printers, Pocket printers, Internet WWW printers, Video printers, Medical imaging, Wide format printers, Notebook PC printers, Fax machines, Industrial printing systems, Photocopiers, Photographic minilabs etc.
  • Piezoelectric A piezoelectric crystal such as lead lanthanum zirconate (PZT) is electrically activated, and either expands, shears, or bends to apply pressure to the ink, ejecting drops.
  • PZT lead lanthanum zirconate
  • the conductive plates may be in a comb or honeycomb structure, or stacked to increase the surface area and therefore the force.
  • Low power consumption ⁇ Difficult to operate electrostatic devices in an aqueous environment ⁇ IJ02, IJ04 ⁇ Many ink types can be used ⁇
  • the electrostatic actuator will normally need to be separated from the ink ⁇ Fast operation ⁇ Very large area required to achieve high forces ⁇ High voltage drive transistors may be required ⁇ Full pagewidth print heads are not competitive due to actuator size Electrostatic pull on ink A strong electric field is applied to tho ink, whereupon electrostatic attraction accelerates the ink towards the print medium.
  • Examples are: Samarium Cobalt (SaCo) and magnetic materials in the neodymium iron boron family (NdFeB, NdDyFeBNb, NdDyFeB, etc) ⁇ Low power consumption ⁇ Complex fabrication ⁇ IJ07, IJ10 ⁇ Many ink types can be used ⁇ Permanent magnetic material such as Neodymium Iron Boron (NdFeB) required.
  • SaCo Samarium Cobalt
  • NdDyFeBNb neodymium iron boron family
  • NdDyFeB neodymium iron boron family
  • NdFeB Neodymium Iron Boron
  • Soft magnetic core electro-magnetic A solenoid induced a magnetic field in a soft magnetic core or yoke fabricated from a ferrous material such as electroplated iron alloys such as CoNiFe [1], CoFe, or NiFe alloys. Typically, the soft magnetic material is in two parts, which are normally held apart by a spring. When the solenoid is actuated, the two parts attract, displacing the ink.
  • the actuator uses the giant magnetostrictive effect of materials such as Terfenol-D (an alloy of terbium, dysprosium and iron developed at the Naval Ordnance Laboratory, hence Ter-Fe-NOL). For best efficiency, the actuator should be pre-stressed to approx. 8 MPa.
  • a heater fabricated from a conductive material is incorporated.
  • a 50 ⁇ m long PTFE bend actuator with polysilicon heater and 15 mW power input can provide 180 ⁇ N force and 10 ⁇ m deflection.
  • Actuator motions include: ⁇ High force can be generated ⁇ Requires special material (e.g.
  • the conducting polymer expands when resistively heated
  • Examples of conducting dopants include: ⁇ High force can be generated ⁇ Requires special materials development (High CTE conductive polymer) ⁇ IJ24 1) Carbon nanotubes ⁇ Very low power consumption ⁇ Requires a PTFE deposition process, which is not yet standard in ULSI fabs 2) Metal fibers ⁇ Many ink types can be used ⁇ PTFE deposition cannot be followed with high temperature (above 350 °C) processing 3) Conductive polymers such as doped polythiophene ⁇ Simple planar fabrication ⁇ Evaporation and CVD deposition techniques cannot be used 4) Carbon granules ⁇ Small chip area required for each actuator ⁇ Pigmented inks may be infeasible, as pigment particles may jam the bend actuator ⁇ Fast operation ⁇ High efficiency ⁇ CMOS compatible voltages and currents ⁇ Easy extension from single nozzles to pagewidth print heads
  • Shape memory alloy A shape memory alloy such as TiNi (also known as Nitin
  • Linear Magnetic Actuator Linear magnetic actuators include the Linear Induction Actuator (LIA), Linear Permanent Magnet Synchronous Actuator (LPMSA), Linear Reluctance Synchronous Actuator (LRSA), Linear Switched Reluctance Actuator (LSRA), and the Linear Step
  • Linear Magnetic actuators can be constructed with high thrust, long travel, and high efficiency using planar semiconductor fabrication techniques ⁇ Requires unusual semiconductor materials such as soft magnetic alloys (e.g. CoNiFe [1]) ⁇ IJ12 ⁇ Long actuator travel is available ⁇ Some varieties also require permanent magnetic materials such as Neodymium iron boron (NdFeB) ⁇ Medium force is available ⁇ Requires complex multi-phase drive circuitry ⁇ Low voltage operation ⁇ High current operation Basic operation mode Operational mode Description Advantages Disadvantages Examples Actuator directly pushes ink This is the simplest mode of operation: the actuator directly supplies sufficient kinetic energy to expel the drop. The drop must have a sufficient velocity to overcome the surface tension.
  • ⁇ Simple operation ⁇ Drop repetition rate is usually limited to less than 10 KHz. However, this is not fundamental to the method, but is related to the refill method normally used ⁇ Thermal inkjet ⁇ No external fields required ⁇ All of the drop kinetic energy must be provided by the actuator ⁇ Piezoelectric inkjet ⁇ Satellite drops can be avoided if drop velocity is less than 4 m/s ⁇ Satellite drops usually form if drop velocity is greater than 4.5 m/s ⁇ IJ01, IJ02, IJ03, IJ04 ⁇ Can be efficient, depending upon the actuator used ⁇ IJ05, IJ06, IJ07, IJ09 ⁇ IJ11, IJ12, IJ14, IJ16 ⁇ IJ20, IJ22, IJ23, IJ24 ⁇ IJ25, IJ26, IJ27, IJ28 ⁇ IJ29, IJ30, IJ31, IJ32 ⁇ IJ33, IJ34, IJ35, IJ36 ⁇ IJ37,
  • thermally induced surface tension reduction of pressurized ink Selected drops are separated from the ink in the nozzle by contact with the print medium or a transfer roller.
  • Very simple print head fabrication can be used ⁇ Requires close proximity between the print head and the print media or transfer roller ⁇ Silverbrook, EP 0771 658 A2 and related patent applications ⁇
  • the drop selection means does not need to provide the energy required to separate the drop from the nozzle ⁇ May require two print heads printing alternate rows of the image ⁇
  • Monolithic color print heads are difficult Electrostatic pull on ink
  • the drops to be printed are selected by some manner (e.g. thermally induced surface tension reduction of pressurized ink). Selected drops are separated from the ink in the nozzle by a strong electric field.
  • Very simple print head fabrication can be used ⁇ Requires very high electrostatic field ⁇ Silverbrook, EP 0771 658 A2 and related patent applications ⁇
  • the drop selection means does not need to provide the energy required to separate the drop from the nozzle ⁇ Electrostatic field for small nozzle sizes is above air breakdown ⁇ Tone-Jet ⁇ Electrostatic field may attract dust Magnetic pull on Ink
  • the drops to be printed are selected by some manner (e.g. thermally induced surface tension reduction of pressurized ink). Selected drops are separated from the ink in the nozzle by a strong magnetic field acting on the magnetic ink.
  • Actuators with small travel can be used ⁇ Moving parts are required ⁇ IJ08, IJ15, IJ18, IJ19 ⁇ Actuators with small force can be used ⁇ Requires ink pressure modulator ⁇ High speed (>50 KHz) operation can be achieved ⁇ Friction and wear must be considered ⁇ Stiction is possible Pulsed magnetic pull on ink pusher A pulsed magnetic field attracts an 'ink pusher' at the drop ejection frequency. An actuator controls a catch, which prevents the ink pusher from moving when a drop is not to be ejected.
  • Oscillating ink pressure can provide a refill pulse, allowing higher operating speed ⁇ Requires external ink pressure oscillator ⁇ Silverbrook, EP 0771 658 A2 and related patent applications ⁇
  • the actuators may operate with much lower energy ⁇ Ink pressure phase and amplitude must be carefully controlled ⁇ IJ08, IJ13, IJ15, IJ17 ⁇ Acoustic lenses can be used to focus the sound on the nozzles ⁇ Acoustic reflections in the ink chamber must be designed for ⁇ IJ18, IJ19, IJ21 Media proximity
  • the print head is placed in close proximity to the print medium. Selected drops protrude from the print head further than unselected drops, and contact the print medium. The drop soaks into the medium fast enough to cause drop separation.
  • Transient bend actuator A trilayer bend actuator where the two outside layers are identical. This cancels bend due to ambient temperature and residual stress. The actuator only responds to transient heating of one side or the other.
  • Actuator stack A series of thin actuators are stacked. This can be appropriate where actuators require high electric field strength, such as electrostatic and piezoelectric actuators. ⁇ Increased travel ⁇ Increased fabrication complexity ⁇ Some piezoelectric ink jets ⁇ Reduced drive voltage ⁇ Increased possibility of short circuits due to pinholes ⁇ IJ04 Multiple actuators Multiple smaller actuators are used simultaneously to move the ink. Each actuator need provide only a portion of the force required.
  • Actuator forces may not add linearly, reducing efficiency ⁇ IJ12, IJ13, IJ18, IJ20 ⁇
  • Multiple actuators can be positioned to control ink flow accurately ⁇ IJ22, IJ28, IJ42, IJ43 Linear Spring
  • a linear spring is used to transform a motion with small travel and high force into a longer travel, lower force motion.
  • Matches low travel actuator with higher travel requirements ⁇ Requires print head area for the spring ⁇ IJ15 ⁇
  • Non-contact method of motion transformation Reverse spring The actuator loads a spring. When the actuator is turned off, the spring releases.
  • Coiled actuator A bend actuator is coiled to provide greater travel in a reduced chip area. ⁇ Increases travel ⁇ Generally restricted to planar implementations due to extreme fabrication difficulty in other orientations. ⁇ IJ17, IJ21, IJ34, IJ35 ⁇ Reduces chip area ⁇ Planar implementations are relatively easy to fabricate. Flexure bend actuator A bend actuator has a small region near the fixture point, which flexes much more readily than the remainder of the actuator.
  • Low force, low travel actuators can be used ⁇ Moving parts are required ⁇ IJ13 ⁇ Can be fabricated using standard surface MEMS processes ⁇ Several actuator cycles are required ⁇ More complex drive electronics ⁇ Complex construction ⁇ Friction, friction, and wear are possible Catch The actuator controls a small catch. The catch either enables or disables movement of an ink pusher that is controlled in a bulk manner. ⁇ Very low actuator energy ⁇ Complex construction ⁇ IJ10 ⁇ Very small actuator size ⁇ Requires external force ⁇ Unsuitable for pigmented inks Buckle plate A buckle plate can be used to change a slow actuator into a fast motion. It can also convert a high force, low travel actuator into a high travel, medium force motion.
  • acoustic lens is used to concentrate sound waves.
  • No moving parts Large area required ⁇ 1993 Hadimioglu et al, EUP 550,192 ⁇ Only relevant for acoustic ink jets ⁇ 1993 Elrod et al, EUP 572,220 Sharp conductive point A sharp point is used to concentrate an electrostatic field.
  • Simple construction ⁇ Difficult to fabricate using standard VLSI processes for a surface ejecting ink-jet ⁇ Tone-jet ⁇ Only relevant for electrostatic ink jets Actuator motion Actuator motion Description Advantages Disadvantages Examples Volume expansion The volume of the actuator changes, pushing the ink in all directions.
  • the effective area of the actuator becomes the membrane area ⁇ Fabrication complexity ⁇ 1982 Howkins USP 4,459,601 ⁇ Actuator size ⁇ Difficulty of integration in a VLSI process
  • Rotary levers may be used to increase travel
  • Device complexity ⁇ IJ05, IJ08, IJ13, IJ28 ⁇ Small chip area requirements ⁇ May have friction at a pivot point Bend
  • the actuator bends when energized. This may be due to differential thermal expansion, piezoelectric expansion, magnetostriction, or other form of relative dimensional change. ⁇ A very small change in dimensions can be converted to a large motion.
  • the motion of the free end of the actuator ejects the ink.
  • Easy to fabricate as a planar VLSI process ⁇ Difficult to fabricate for non-planar devices ⁇ IJ17, IJ21, IJ34, IJ35 ⁇ Small area required, therefore low cost ⁇ Poor out-of-plane stiffness
  • nozzle firing is usually performed during a special clearing cycle, after first moving the print head to a cleaning station.
  • IJ01-IJ07, IJ09-IJ12 ⁇ IJ14, IJ16, IJ20, IJ22 ⁇ IJ23-IJ34, IJ36-IJ45 Extra power to ink beater
  • nozzle clearing can be achieved by over-powering the heater and boiling ink at the nozzle.
  • nozzle clearing may be assisted by providing an enhanced drive signal to the actuator.
  • a high nozzle clearing capability can be achieved ⁇
  • High implementation cost if system does not already include an acoustic actuator ⁇ IJ08, IJ13, IJ15, IJ17 ⁇ May be implemented at very low cost in systems which already include acoustic actuators ⁇ IJ18, IJ19, IJ21 Nozzle clearing A microfabricated plate is pushed against plate the nozzles. The plate has a post for every nozzle.
  • the blade is usually fabricated from a flexible polymer, e.g. rubber or synthetic elastomer.
  • ⁇ Effective for planar print head surfaces ⁇ Difficult to use if print head surface is non-planar or very fragile ⁇ Many ink jet systems ⁇ Low cost ⁇ Requires mechanical parts ⁇ Blade can wear out in high volume print systems
  • Separate ink boiling heater A separate heater is provided at the nozzle although the normal drop e-ection mechanism does not require it. The heaters do not require individual drive circuits, as many nozzles can be cleared simultaneously, and no imaging is required.
  • Nozzles may be clogged by adhesive Glass capillaries Fine glass capillaries are drawn from glass tubing. This method has been used for making individual nozzles, but is difficult to use for bulk manufacturing of print heads with thousands of nozzles. ⁇ No expensive equipment required ⁇ Very small nozzle sizes are difficult to form ⁇ 1970 Zoltan USP 3,683,212 ⁇ Simple to make single nozzles ⁇ Not suited for mass production Monolithic, surface micro-machined using VLSI lithographic processes The nozzle plate is deposited as a layer using standard VLSI deposition techniques.
  • Nozzles are etched in the nozzle plate using VLSI lithography and etching.
  • High accuracy ( ⁇ 1 ⁇ m) ⁇ Requires sacrificial layer under the nozzle plate to form the nozzle chamber ⁇ Silverbrook, EP 0771 658 A2 and related patent applications ⁇ Monolithic ⁇ Surface may be fragile to the touch ⁇ IJ01, IJ02, IJ04, IJ11 ⁇ Low cost ⁇ IJ12, IJ17, IJ18, IJ20 ⁇ Existing processes can be used ⁇ IJ22, IJ24, IJ27, IJ28 ⁇ IJ29, IJ30, IJ31, IJ32 ⁇ IJ33, IJ34, IJ36, IJ37 ⁇ IJ38, IJ39, IJ40, IJ41 ⁇ IJ42, IJ43, IJ44 Monolithic, etched through substrate The nozzle plate is a buried etch stop in the wafer.
  • Nozzle chambers are etched in the front of the wafer, and the wafer is thinned from the back side. Nozzles are then etched in the etch stop layer.
  • High accuracy ( ⁇ 1 ⁇ m) ⁇ Requires long etch times ⁇ IJ03, IJ05, IJ06, IJ07 ⁇ Monolithic ⁇ Requires a support wafer ⁇ IJ08, IJ09, IJ10, IJ13 ⁇ Low cost ⁇ IJ14, IJ15, IJ16, IJ19 ⁇ No differential expansion ⁇ IJ21, IJ23, IJ25, IJ26 No nozzle plate Various methods have been tried to eliminate the nozzles entirely, to prevent nozzle clogging.
  • ink jet printers A large number of new forms of ink jet printers have been developed to facilitate alternative ink jet technologies for the image processing and data distribution system. Various combinations of ink jet devices can be included in printer devices incorporated as part of the present invention.
  • the present application may utilize advanced semiconductor fabrication techniques in the construction of large arrays of ink jet printers.
  • the present application may utilize an ink delivery system to the ink jet head.
  • the present application may utilize advanced semiconductor microelectromechanical techniques in the construction of large arrays of ink jet printers.
  • the present application may include the utilization of a disposable camera system.
  • the present application may include the utilization of a data distribution system.
  • the present application may include the utilization of camera and data processing techniques such as an Artcam type device.

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  • Engineering & Computer Science (AREA)
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  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Ink Jet (AREA)

Claims (11)

  1. Tintenstrahl-Düsenanordnung (910), umfassend:
    eine Düsenkammer (912) mit einer Tintenausstoßöffnung (911) zum Ausstoßen von Tinte aus der Düsenkammer;
    einen Tintenvorratsbehälter (913) zum Zuführen von Tinte zu der Düsenkammer (912); und
    ein magnetisches Stellorgan (925), das zwischen der Düsenkammer (912) und dem Tintenvorratsbehälter (913) sitzt, um Tinte im Ansprechen auf von außen zugeführte Magnetimpulszyklen auszustoßen;
    gekennzeichnet durch
    eine Blockiereinrichtung (920) zum Blockieren einer Bewegung des magnetischen Stellorgans (925), wenn es gewünscht ist, während eines Magnetimpulszyklus keine Tinte aus der Düsenkammer (912) auszustoßen.
  2. Tintenstrahl-Düsenanordnung (910) nach Anspruch 1, wobei die Blockiereinrichtung ein thermisches Stellorgan (922, 924) mit einem beweglichen endseitigen Vorsprung umfasst, der in eine Position bewegt werden kann, in der er die Bewegungsbahn des magnetischen Stellorgans versperrt.
  3. Tintenstrahl-Düsenanordnung (910) nach einem der Ansprüche 1 oder 2, wobei das magnetische Stellorgan (925) einen endseitigen Vorsprung (927) umfasst, der so ausgelegt ist, dass er bei Bewegung des Stellorgans an der Blockiereinrichtung (920) angreift.
  4. Tintenstrahl-Düsenanordnung (910) nach einem der Ansprüche 1 bis 3, wobei das magnetische Stellorgan (925) an einer angrenzenden Wand der Düsenkammer mittels zweier biegbarer Streifenabschnitte (940) befestigt ist, die eine Biegebewegung des magnetischen Stellorgans bei Aktivierung durch die von außen zugeführten Magnetimpulszyklen ermöglichen.
  5. Tintenstrahl-Düsenanordnung (910) nach Anspruch 2, wobei das thermische Stellorgan im Wesentlichen zwei an einem Substrat befestigte Arme umfasst, wobei ein erster Arm (922) eine dünne, gewundene Struktur hat, die in ein Material mit einem hohen Wärmeausdehnungskoeffizienten eingebettet ist, und ein zweiter Arm (924) einen dickeren Arm mit einem sich verjüngenden dünnen Abschnitt nahe dem an das Substrat angeschlossenen Ende umfasst, um jegliche Biegung des Stellorgans (925) an einem dem Substrat nahe liegenden Punkt zu konzentrieren.
  6. Tintenstrahl-Düsenanordnung (910) nach einem der Ansprüche 1 bis 5, wobei die Blockiereinrichtung (920) in einer Aussparung sitzt, die einen geringen Grad an Fluidströmung durch sie hindurch aufweist.
  7. Tintenstrahl-Düsenanordnung (910) nach Anspruch 6, wobei die Blockiereinrichtung in einer Aussparung (928) sitzt, die einen geringen Grad an Fluidströmung durch sie hindurch aufweist, und der gewundene Arm entlang einer Innenwand der Aussparung angeordnet ist.
  8. Tintenstrahl-Düsenanordnung (910) nach einem der Ansprüche 1 bis 7, wobei die Düse über Herstellung eines Siliziumwafers unter Anwendung von Halbleiter-Herstellungstechniken aufgebaut wird.
  9. Tintenstrahl-Düsenanordnung (910) nach einem der Ansprüche 1 bis 8, wobei Abschnitte der Stellorgane nach Bedarf eine Beschichtung aus Siliziumnitrid umfassen, um sie von angrenzenden Abschnitten zu isolieren und zu passivieren.
  10. Tintenstrahl-Düsenanordnung (910) nach einem der Ansprüche 1 bis 9, wobei die Düsenkammer (912) durch ein bei hoher Dichte und niedrigem Druck stattfindenden Plasmaätzen eines Siliziumsubstrats gebildet wird.
  11. Düsenfeld mit mehreren Tintenstrahl-Düsenanordnungen nach einem der vorhergehenden Ansprüche.
EP04024060A 1997-07-15 1998-07-15 Durch magnetische Impulse betriebene Tintenstrahldüse Expired - Lifetime EP1510339B1 (de)

Applications Claiming Priority (73)

Application Number Priority Date Filing Date Title
AUPO805497 1997-07-15
AUPO8053A AUPO805397A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM08)
AUPO804197 1997-07-15
AUPO805697 1997-07-15
AUPO8044A AUPO804497A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ07)
AUPO8073A AUPO807397A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM15)
AUPO807697 1997-07-15
AUPO807097 1997-07-15
AUPO807397 1997-07-15
AUPO8065A AUPO806597A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM06)
AUPO8054A AUPO805497A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM05)
AUPO807297 1997-07-15
AUPO806697 1997-07-15
AUPO7950A AUPO795097A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM11)
AUPO800197 1997-07-15
AUPO806797 1997-07-15
AUPO8036A AUPO803697A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ13)
AUPO8060A AUPO806097A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM13)
AUPO807597 1997-07-15
AUPO8061A AUPO806197A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM04)
AUPO793597 1997-07-15
AUPO8049A AUPO804997A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ12)
AUPO7935A AUPO793597A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM01)
AUPO803597 1997-07-15
AUPO8056A AUPO805697A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ10)
AUPO8058A AUPO805897A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM26)
AUPO8066A AUPO806697A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ01)
AUPO8004A AUPO800497A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ26)
AUPO8041A AUPO804197A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ25)
AUPO807797 1997-07-15
AUPO8001A AUPO800197A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ17)
AUPO806097 1997-07-15
AUPO804997 1997-07-15
AUPO8047A AUPO804797A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ05)
AUPO8070A AUPO807097A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ15)
AUPO804897 1997-07-15
AUPO8075A AUPO807597A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM17)
AUPO8055A AUPO805597A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM07)
AUPO8067A AUPO806797A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ16)
AUPO806597 1997-07-15
AUPO805897 1997-07-15
AUPO7933A AUPO793397A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation_apparatus (IJM10)
AUPO8048A AUPO804897A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ14)
AUPO805397 1997-07-15
AUPO794997 1997-07-15
AUPO8063A AUPO806397A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ08)
AUPO7936A AUPO793697A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM02)
AUPO8069A AUPO806997A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ11)
AUPO804797 1997-07-15
AUPO793397 1997-07-15
AUPO8071A AUPO807197A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ04)
AUPO800497 1997-07-15
AUPO806197 1997-07-15
AUPO806997 1997-07-15
AUPO8072A AUPO807297A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ02)
AUPO803697 1997-07-15
AUPO8059A AUPO805997A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM14)
AUPO805597 1997-07-15
AUPO8076A AUPO807697A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM16)
AUPO8077A AUPO807797A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM25)
AUPO807197 1997-07-15
AUPO8035A AUPO803597A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ06)
AUPO806397 1997-07-15
AUPO804497 1997-07-15
AUPO793697 1997-07-15
AUPO7949A AUPO794997A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM12)
AUPO795097 1997-07-15
AUPO805997 1997-07-15
AUPP398398 1998-06-09
AUPP398298 1998-06-09
AUPP3983A AUPP398398A0 (en) 1998-06-09 1998-06-09 Image creation method and apparatus (ij45)
AUPP3982A AUPP398298A0 (en) 1998-06-09 1998-06-09 A method of manufacture of an image creation apparatus (ijm45)
EP98933350A EP0999933B1 (de) 1997-07-15 1998-07-15 Magnetfeld-betätigte tintenstrahldüse

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EP04024064A Expired - Lifetime EP1508445B1 (de) 1997-07-15 1998-07-15 Tintenstrahldüse mit Lorentz-Kraft-Element
EP04024062A Expired - Lifetime EP1508449B1 (de) 1997-07-15 1998-07-15 Tintenstrahldüse mit magnetischer Antriebskammer
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EP04024064A Expired - Lifetime EP1508445B1 (de) 1997-07-15 1998-07-15 Tintenstrahldüse mit Lorentz-Kraft-Element
EP04024062A Expired - Lifetime EP1508449B1 (de) 1997-07-15 1998-07-15 Tintenstrahldüse mit magnetischer Antriebskammer
EP04024059A Expired - Lifetime EP1512535B1 (de) 1997-07-15 1998-07-15 Tintenstrahldrucker mit magnetisch angetriebenem Kolben
EP04024066A Expired - Lifetime EP1508446B1 (de) 1997-07-15 1998-07-15 Tintenstrahldüse mit elektromagnetischem Betätigungselement
EP04024063A Expired - Lifetime EP1510340B1 (de) 1997-07-15 1998-07-15 Tintenstrahldüse mit geschlitztem Kolben

Family Applications After (4)

Application Number Title Priority Date Filing Date
EP04024065A Expired - Lifetime EP1510341B1 (de) 1997-07-15 1998-07-15 Tintenstrahldüse mit elektromagnetischem Verschluss
EP04024061A Expired - Lifetime EP1508448B1 (de) 1997-07-15 1998-07-15 Tintenstrahldüse mit angeschrägtem magnetischen Kolben
EP04024057A Expired - Lifetime EP1508443B1 (de) 1997-07-15 1998-07-15 Tintenstrahldüse mit elektromagnetisch aktiviertem Tintenkolben
EP98933350A Expired - Lifetime EP0999933B1 (de) 1997-07-15 1998-07-15 Magnetfeld-betätigte tintenstrahldüse

Country Status (4)

Country Link
EP (11) EP1508444B1 (de)
JP (6) JP4170582B2 (de)
AT (8) ATE289922T1 (de)
WO (1) WO1999003680A1 (de)

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Also Published As

Publication number Publication date
ATE352422T1 (de) 2007-02-15
WO1999003680A1 (en) 1999-01-28
ATE352421T1 (de) 2007-02-15
JP4171037B2 (ja) 2008-10-22
JP4185538B2 (ja) 2008-11-26
EP1508445A1 (de) 2005-02-23
EP0999933B1 (de) 2005-03-02
JP2007062382A (ja) 2007-03-15
EP1508444B1 (de) 2007-11-21
EP0999933A4 (de) 2000-12-20
EP1508449B1 (de) 2007-01-24
EP1510341A3 (de) 2005-03-16
EP0999933A1 (de) 2000-05-17
EP1510340A3 (de) 2005-03-09
JP2007062381A (ja) 2007-03-15
EP1508443A3 (de) 2005-03-16
EP1508443B1 (de) 2007-03-07
ATE381991T1 (de) 2008-01-15
EP1512535A1 (de) 2005-03-09
EP1508448A1 (de) 2005-02-23
JP4173174B2 (ja) 2008-10-29
ATE289922T1 (de) 2005-03-15
ATE352423T1 (de) 2007-02-15
ATE353053T1 (de) 2007-02-15
EP1510340B1 (de) 2007-01-24
EP1508445B1 (de) 2007-01-31
EP1510339A2 (de) 2005-03-02
EP1508446A1 (de) 2005-02-23
JP2007062380A (ja) 2007-03-15
ATE352420T1 (de) 2007-02-15
JP4137964B2 (ja) 2008-08-20
EP1510341A2 (de) 2005-03-02
JP2001510107A (ja) 2001-07-31
EP1508446B1 (de) 2007-01-10
EP1510339A3 (de) 2005-03-09
EP1510341B1 (de) 2007-01-24
JP4137965B2 (ja) 2008-08-20
EP1508443A2 (de) 2005-02-23
EP1508448B1 (de) 2007-01-17
JP4170582B2 (ja) 2008-10-22
EP1508449A1 (de) 2005-02-23
JP2007062379A (ja) 2007-03-15
EP1508444A2 (de) 2005-02-23
EP1512535B1 (de) 2007-12-26
ATE355972T1 (de) 2007-03-15
JP2007062383A (ja) 2007-03-15
EP1510340A2 (de) 2005-03-02
EP1508444A3 (de) 2005-03-16

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