EP1466097A1 - Pompe a liquides - Google Patents

Pompe a liquides

Info

Publication number
EP1466097A1
EP1466097A1 EP03729208A EP03729208A EP1466097A1 EP 1466097 A1 EP1466097 A1 EP 1466097A1 EP 03729208 A EP03729208 A EP 03729208A EP 03729208 A EP03729208 A EP 03729208A EP 1466097 A1 EP1466097 A1 EP 1466097A1
Authority
EP
European Patent Office
Prior art keywords
pump
piezo
piston
liquid pump
valves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP03729208A
Other languages
German (de)
English (en)
Other versions
EP1466097B1 (fr
Inventor
Thomas Lorkowski
Frank Hermle
Stefan Storm
Peter JÄNKER
Hans-Georg Herrmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Airbus Defence and Space GmbH
Original Assignee
EADS Deutschland GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EADS Deutschland GmbH filed Critical EADS Deutschland GmbH
Publication of EP1466097A1 publication Critical patent/EP1466097A1/fr
Application granted granted Critical
Publication of EP1466097B1 publication Critical patent/EP1466097B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B17/00—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
    • F04B17/003—Pumps characterised by combination with, or adaptation to, specific driving engines or motors driven by piezoelectric means

Definitions

  • the invention relates to a liquid pump comprising a pump housing enclosing a pump chamber with piezo actuating elements moving a piston in the pump chamber and inlet valves and outlet valves arranged in such a way that the liquid pump performs a pumping effect with each movement of the piston.
  • the pumping effect is achieved in that the pump chamber is reduced with each stroke of the piezo actuating element and the pressure that arises as a result transports the liquid.
  • a fluid pump is known from DE 3320443 A1, in which the pump housing provided with inlet and outlet valves partially consists of a shell-shaped, pre-stressed piezoelectric element, which deforms when a voltage is applied in such a way that the volume of the pump chamber is reduced, thereby achieving the pumping effect becomes.
  • a piezo actuating element presses externally onto a pump chamber equipped with a flexible pump membrane, whereby its volume is also reduced with each stroke of the piezo actuating element, whereby the liquid is pressed out, that is, pumped.
  • a disadvantage of such pump systems is the relatively small displacement volume of the pump chamber, so that they are usually only used in microsystems.
  • the installed pump power can be converted directly to the required piezo volume.
  • either the piezo volume or the operating frequency must be increased.
  • both approaches are destructive, because on the one hand an increased proportion of piezo drives up the costs and the weight and on the other hand the frequency cannot be increased arbitrarily.
  • DE 39 10 331 A1 discloses an arrangement with a liquid pump comprising a pump housing enclosing a pump chamber with inlet and outlet valves attached in such a way that the pump performs a pumping effect with every movement of the piston.
  • the piston is moved directly by two excitation coils.
  • a disadvantage of pumps in accordance with DE 39 10 331 A1 is that an electromagnetic drive requires a lot of energy with a low pumping power and even when using piezo actuator elements as the drive, the pumping power remains proportional to the piezo volume, as a result of which the costs and weight problems cannot be eliminated.
  • the object is achieved in a liquid pump of the type described in the introduction in that the piezo actuating elements are arranged transversely to the direction of movement of the piston with an amplifier frame for implementing the stroke of the piezo actuating elements.
  • Such amplifier or implementation frames change the direction of movement of the hub.
  • the movement with high force and short stroke which characterizes a piezo actuator, is converted into a movement with lower force, but with a higher stroke. This is particularly advantageous for liquid pumps, since a reduced force is sufficient for pumping, but the higher stroke directly increases the pumping capacity.
  • the liquid pump according to the invention has a higher power density than conventional liquid pumps with a piezo drive.
  • the piezo positioning elements are placed in an opposing arrangement.
  • the piezo actuating elements which operate in such a differential manner, are preloaded via the pump housing and the respective opponent. This prevents the piezo actuators from being subjected to tensile stress, which leads to a reduction in the stress on these components.
  • the frequency of the piezo actuator can be adjusted to the flow rate.
  • the piezo actuating elements are preferably operated in their resonance frequency.
  • An adaptation to the desired delivery rate can be ensured here by the size of the piston or by the stroke of the piezo actuator.
  • the resonance mode of the piezo actuators ensures higher energy coupling, which means that the necessary piezo volume can be reduced.
  • the valves that regulate the flow into and out of the pump chamber can be actively controlled as a function of the frequency of the piezo actuating elements, but the inlet and outlet valves are preferably passive valves. In particular it is preferably a spring-mass oscillator. In these, the ratio of the spring constant to the mass is matched to the frequency of the piezo actuators.
  • the valves react to the different pressure conditions in the liquid and open and close independently. In addition, the opening and closing times required for this by the valve are adapted to the frequency of the pump.
  • FIG. 1 shows a schematic structure of a liquid pump according to the invention with piezo actuating elements, the stroke of which is implemented by means of an octagonal reinforcement frame.
  • the pump chamber 10 is delimited by the pump housing 11. To increase the inherent rigidity and to improve the heat dissipation, this can contain outer ribs, which, however, are not shown.
  • the pump chamber is divided into two sub-chambers by the piston 20. These subchambers each have an inflow with an inlet valve 12, 13 and an outflow with an outlet valve 14, 15.
  • the piston which is sealed against the pump housing by means of conventional means, is moved by a first and second piezo actuating element 21, 22 in such a way that one partial chamber is enlarged while the other partial chamber is simultaneously reduced in volume.
  • a first and second piezo actuating element 21, 22 is moved by a first and second piezo actuating element 21, 22 in such a way that one partial chamber is enlarged while the other partial chamber is simultaneously reduced in volume.
  • the left compartment when the piston is moved to the right in the figure.
  • the inlet valve 12 is open and the outlet valve 14 is closed, while the inlet valve 13 is closed and the outlet valve 15 is open. Liquid is thus sucked into the left-hand partial chamber, while the liquid contained therein is pressed out, ie pumped, by the compression in the right-hand partial chamber and by the valve position.
  • the open valves are closed and the closed valves are opened, as a result of which the liquid first sucked into the left-hand sub-chamber is now pumped out while the right-hand sub-chamber fills again.
  • the various access lines can be supplied by a central line, just as the pumped liquid can be combined in one overall line. This ensures that a pumping operation is carried out by each movement of the piston 20.
  • the movement of the piston 20 in the pump chamber 10 is ensured by a first piezo actuator 21 and a second piezo actuator 22.
  • the piezo actuating elements 21, 22 are installed with their stroke transverse to the direction of movement of the piston 20.
  • the direction of movement is implemented via a first and a second reinforcement frame 21a, 22a.
  • Such reinforcement frames consist, for example, of solid frame parts which form an octagon, in which the force of the piezo actuating element acts on two opposite sides, the frame parts at the corners of the octagon being designed flexibly via bending elements.
  • a lifting movement of the first piezo setting element 21 causes the frame to stretch in the direction of the stroke and thus a pulling movement on the piston 20, as a result of which the second reinforcement frame 22a is stretched along the direction of movement of the piston 20 and the second piezo setting element 22 is compressed.
  • the piezo actuators 21, 22 are biased and are not loaded on train during the return movement.
  • the inlet valves 12, 13 and the outlet valves 14, 15 are passive valves based on the spring-mass principle.
  • the closure part of the valve (not shown) is coupled to a spring-mass component that vibrates with a characteristic frequency. This frequency is matched to the frequency of the piezo setting elements, so that switching, opening and closing times are as short as possible.

Landscapes

  • Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)

Abstract

Pompe à liquides (1) constituée par un corps de pompe (11) entourant une chambre (10), comportant des piézo-éléments de réglage (21, 22) déplaçant un piston (20) dans ladite chambre (10), et des soupapes d'entrée (12, 13) et de sortie (14, 15) agencées de telle façon que la pompe (1) réalise un effet de pompage pour chaque déplacement du piston (20), les piézo-éléments de réglage (21, 22) étant disposés perpendiculairement à la direction de déplacement du piston (20) avec des cadres amplificateurs pour la transformation de la course des piézo-éléments de réglage (21, 22).
EP03729208A 2002-01-11 2003-01-08 Pompe a liquides Expired - Lifetime EP1466097B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10201027 2002-01-11
DE10201027A DE10201027C1 (de) 2002-01-11 2002-01-11 Flüssigkeitspumpe
PCT/DE2003/000021 WO2003058066A1 (fr) 2002-01-11 2003-01-08 Pompe a liquides

Publications (2)

Publication Number Publication Date
EP1466097A1 true EP1466097A1 (fr) 2004-10-13
EP1466097B1 EP1466097B1 (fr) 2005-07-27

Family

ID=7712029

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03729208A Expired - Lifetime EP1466097B1 (fr) 2002-01-11 2003-01-08 Pompe a liquides

Country Status (3)

Country Link
EP (1) EP1466097B1 (fr)
DE (2) DE10201027C1 (fr)
WO (1) WO2003058066A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112196754A (zh) * 2020-10-04 2021-01-08 长春工业大学 一种基于菱形放大机构的一体阀压电泵
US11199771B2 (en) 2016-10-20 2021-12-14 Asml Netherlands B.V. Pressure control valve, a fluid handling structure for lithographic apparatus and a lithographic apparatus

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004049171A1 (de) * 2004-10-08 2006-04-13 J. Eberspächer GmbH & Co. KG Dosierpumpe insbesondere Kraftstoffdosierpumpe für ein Fahrzeugheizgerät oder ein Reformersystem
GB0700114D0 (en) 2007-01-04 2007-02-14 Qinetiq Ltd Subsea chemical injection system and pumps therefor

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3320443C2 (de) * 1983-06-06 1994-08-18 Siemens Ag Flüssigkeitspumpe
JPS6098181A (ja) * 1983-11-04 1985-06-01 Asahi Okuma Ind Co Ltd ダイヤフラムポンプ
JPS6098182A (ja) * 1983-11-04 1985-06-01 Asahi Okuma Ind Co Ltd ダイヤフラムポンプ
DE8704314U1 (fr) * 1987-03-23 1987-06-25 Siemens Ag, 1000 Berlin Und 8000 Muenchen, De
DE3910331A1 (de) * 1989-03-30 1990-10-04 Infus Hospitalbedarf Gmbh & Co Elektromagnetisch steuerbare membranpumpe sowie deren anwendung
JPH05164052A (ja) * 1991-12-13 1993-06-29 Olympus Optical Co Ltd 圧電ポンプ
US5892314A (en) * 1994-08-29 1999-04-06 Oceaneering International, Inc. Piezoelectric circuit
JPH0885436A (ja) * 1994-09-19 1996-04-02 Nissan Motor Co Ltd 液圧制御用アクチュエータ、及び車両の走行制御装置
US6074178A (en) * 1997-04-15 2000-06-13 Face International Corp. Piezoelectrically actuated peristaltic pump
JPH11182421A (ja) * 1997-12-24 1999-07-06 Nissan Motor Co Ltd ポンプ
US6514047B2 (en) * 2001-05-04 2003-02-04 Macrosonix Corporation Linear resonance pump and methods for compressing fluid

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO03058066A1 *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11199771B2 (en) 2016-10-20 2021-12-14 Asml Netherlands B.V. Pressure control valve, a fluid handling structure for lithographic apparatus and a lithographic apparatus
CN112196754A (zh) * 2020-10-04 2021-01-08 长春工业大学 一种基于菱形放大机构的一体阀压电泵
CN112196754B (zh) * 2020-10-04 2022-06-17 长春工业大学 一种基于菱形放大机构的一体阀压电泵

Also Published As

Publication number Publication date
WO2003058066B1 (fr) 2003-11-13
DE50300855D1 (de) 2005-09-01
EP1466097B1 (fr) 2005-07-27
WO2003058066A1 (fr) 2003-07-17
DE10201027C1 (de) 2003-08-07

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