EP1444441A1 - Procede de maintien a la temperature voulue d'une pompe a vide a vis - Google Patents

Procede de maintien a la temperature voulue d'une pompe a vide a vis

Info

Publication number
EP1444441A1
EP1444441A1 EP02790311A EP02790311A EP1444441A1 EP 1444441 A1 EP1444441 A1 EP 1444441A1 EP 02790311 A EP02790311 A EP 02790311A EP 02790311 A EP02790311 A EP 02790311A EP 1444441 A1 EP1444441 A1 EP 1444441A1
Authority
EP
European Patent Office
Prior art keywords
cooling
pump
housing
liquid
heat exchanger
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP02790311A
Other languages
German (de)
English (en)
Inventor
Hartmut Kriehn
Klaus Rofall
Manfred Behling
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH filed Critical Leybold Vakuum GmbH
Publication of EP1444441A1 publication Critical patent/EP1444441A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082—Details specially related to intermeshing engagement type pumps
    • F04C18/086—Carter
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F04C29/045—Heating; Cooling; Heat insulation of the electric motor in hermetic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/19—Temperature

Definitions

  • the invention relates to a method for temperature control of a screw vacuum pump.
  • the invention also relates to a screw vacuum pump suitable for carrying out this method.
  • a screw vacuum pump of the type concerned here is known from DE-A-198 20 523.
  • the variety of heat problems are revealed.
  • the cooling of the rotors rotating in the pumping chamber is particularly difficult if their threads have a slope that decreases from the suction side to the pressure side, often also combined with an increase in the thread web widths.
  • Rotors of this type are subjected to high thermal loads during operation, particularly in the area of their pressure side, since the compression of the conveyed gases is associated with a not inconsiderable heat development. Since the quality of a screw vacuum pump largely depends on the gap between the rotors and the pump chamber housing, the manufacturers endeavor to keep this gap very small. However, this goal is countered by the thermal expansion of the thermally highly stressed areas, rotors and housings.
  • the pump chamber housing does not, or only to a limited extent, take part in the thermal expansion of the rotors. A big enough one There must be a gap. This has been the only way to prevent the rotors from touching the housing and seizing with the risk of standstill. The problem described becomes particularly serious if the rotors and the housing are made of different materials. In the event that the expansion coefficient of the housing is smaller than the expansion coefficient of the rotor material (e.g. housing made of cast iron, rotors made of AI), there is a risk of the rotors starting up on the housing. If the expansion ratios are reversed, the pump gap can increase in such a way that the performance of the pump decreases.
  • the present invention is based on the object to form a screw vacuum pump of the type in question so and be able to operate, that when 'thermal stresses their properties do not change substantially.
  • the invention makes it possible to influence the effect of the cooling or temperature control with the aim of permitting an increase in the temperature of the delivery chamber housing which does not exceed inadmissible limits.
  • the scoop chamber With an increased thermal load on the pump, the scoop chamber, which is only slightly cooled, expands together with its rotors. There is no longer any risk of tarnishing.
  • the cooling is expediently controlled in such a way that the size of the gaps in the pump chamber under the various operating conditions in the remains essentially unchanged.
  • the outside temperature of the pump chamber housing can be used as a control variable.
  • the cooling air flow can be regulated as a function of the operating state of the pump, for example by regulating the speed of a fan which generates the cooling air flow. This assumes that the fan has a drive that is independent of the pump drive motor. If the fan is coupled to the drive of the pump, the control of the cooling air flow can be carried out with the help of variable orifices, throttles or the like. If the pump is liquid-cooled, regulation can be carried out by adjusting the quantity (rate) or the temperature of the coolant.
  • the pump is air-cooled from the outside and its rotors are equipped with liquid cooling, it is advisable to arrange a heat exchanger in the cooling air flow in order to dissipate the heat absorbed by the liquid (e.g. oil). If this heat exchanger is arranged in front of the pump chamber housing in relation to the flow direction of the cooling air, targeted temperature control of the pump chamber housing is possible. As control large ', the external temperature of the pump chamber housing can again serve; The temperature of the coolant can also be used as a controlled variable. Arrangements of this type make it possible above all to control the cooling of the pump in such a way that the gap between the rotors and the housing remains essentially constant during their operation.
  • the liquid e.g. oil
  • the pump is equipped with an internal rotor cooling (liquid) and a housing cooling (from the outside with liquid) and if the two cooling systems are controlled in such a way that an essentially constant gap is maintained in all operating states of the pump ,
  • the desired regulation on a constant gap takes place in such a way that the quantities of the liquid supplied to the cooling, for example cooled with the aid of a heat exchanger, are regulated depending on the cooling requirement.
  • Control center are fed.
  • the control center in turn controls the intensity of the cooling, preferably in such a way that the pump gap remains essentially constant.
  • a distance sensor can also be used, which provides information about the gap size directly.
  • Figure 1 is an air-cooled screw vacuum pump
  • FIG. 2 and 3 each an air and liquid-cooled screw vacuum pump and FIG. 4 shows a screw vacuum pump equipped with two liquid cooling systems.
  • the screw vacuum pump to be cooled is 1, its pump chamber housing is 2, its rotors are 3, the pressure-side gap between the rotors 3 and the pump chamber housing 2 is 4, its inlet is 5, and it is connected to the pump chamber housing 2 with the rotors 3 subsequent gearbox / engine compartment housing designated 6.
  • the rotors 3 are equipped with threads whose pitch and web width decrease from the suction side to the pressure side. An outlet on the pressure side is not shown.
  • the gear compartment 7 In the housing 6 there are the gear compartment 7, the engine compartment 8 with the drive motor 9 and another compartment 10 which is the storage compartment (FIG. 1) or a component of a coolant circuit for the rotors 3 (FIGS. 2 and 3).
  • the rotors 3 are equipped with shafts 11, 12 which penetrate the gear chamber 7 and the engine compartment 8.
  • the rotors 3 are overhung by means of bearings in the partitions between the scoop chamber and the gear chamber 7 (partition 14) and the motor chamber 8 and the storage or cooling liquid chamber 10 (partition 14).
  • the partition between the gear compartment 7 and the engine compartment 8 is designated 15.
  • the gear pair 7, which causes the synchronous rotation of the rotors 3, is the gear pair 16, 17.
  • the rotor shaft 11 is at the same time the drive shaft of the motor 9.
  • the motor 9 can also have a drive shaft that is different from the shafts 11, 12. With a Such a solution ends its drive shaft in the gear chamber 7 and is equipped there with a gearwheel which engages with one of the synchronization gearwheels 16, 17 (or another gearwheel of the shaft 12, not shown).
  • the housing 2 and 6 of the pump 1 are cooled with the aid of an air flow which is generated by the wheel 20 of a fan 21.
  • the air movement generated by the fan wheel 20 is guided by a housing 22 which encompasses the pump 1 and which is open in the region of both end faces (openings 23, 24).
  • the fan 21 is arranged such that the opening 24 of the housing 22 on the fan / motor side forms the air inlet opening.
  • the fan 21 has a drive motor 25 which is independent of the drive motor 9 of the pump 1.
  • This solution is advantageous for screw vacuum pumps whose motor 9 is designed as a canned motor and is therefore encapsulated.
  • the shaft 11 penetrates the space 10, is led out of the housing 6 of the pump 1 and carries the wheel 20 of the fan or fan 21 at its free end.
  • a control device is shown schematically as block 26. It is connected via lines shown in dashed lines to sensors which supply signals of the desired manipulated variables. As examples, two alternative or identical Temperature sensors 27 and 28 which can be used at the time indicated. Sensor 27 delivers signals corresponding to the temperature of the housing 2. It is preferably attached to the housing 2 in the region of the pressure side of the rotors 3. Sensor 28 is located in the engine compartment 8 and supplies signals that correspond to the coolant or oil temperature. The control device is connected via further lines to devices with the aid of which the cooling of the pump 1 is regulated in the desired manner.
  • the air flow generated by the fan 21 is regulated.
  • the control device 26 is connected to the drive motor 25 via the line 29.
  • the speed of the fan wheel 20 is regulated in accordance with the signals supplied by one or both of the sensors 27 or 28. Since the signals supplied by the sensor 27 provide information about the housing temperature and the signals supplied by the sensor 28 provide information about the rotor temperature, at a difference control on the gap 4 can be carried out using both sensors.
  • only one sensor 29 can be provided instead of the two temperature sensors 27, 28. B. at the location of the temperature sensor 27, that is in the region of the pressure side of the pump housing 2.
  • This sensor 29 is a distance sensor that directly provides information about the size of the pump gap 4. Sensors of this type are known per se. Capacity changes or - preferably - changes serve to generate the sensor signals. ⁇ stanchions an eddy current that occur 'as a function of the gap size.
  • the temperature of the pump 1 can be controlled solely as a function of a sensor 29 of this type. If, for example, the gap size decreases during the operation of the pump due to the fact that the rotors 3 expand, the cooling of the housing 2 is reduced by reducing the cooling speed by reducing the speed of the fan 20. air volume is reduced. This expands the housing so that the decrease in gap size can be compensated for. If the gap size increases during operation of the pump 1, this increase can be compensated for by increasing the cooling effect (shrinking of the housing 2). ,
  • the embodiment according to FIG. 2 differs from the embodiment according to FIG. 1 in that the pump 1 is equipped with liquid cooling for the rotors.
  • the coolant circuit for cooling the rotors 4, 5 is only indicated schematically. Cooling systems of this type are described in detail in German patent applications 197 45 616, 199 63 171.9 and 199 63 172.7.
  • the shafts 11 and 12 serve to transport the coolant (for example oil) to and from the rotors 3.
  • the coolant leaving the rotors 3 collects in the engine compartment 8. From there it is fed via line 31 to a heat exchanger 32.
  • the heat exchanger 32 can be air or water cooled.
  • the air flow generated by the fan 21 is that of the cooling liquid in the tubes.
  • gates 3 absorbs heat.
  • the liquid leaving the heat exchanger 32 is supplied to the space 10 via the line 33. In a manner not shown in detail, it passes from there through bores in the shafts 11, 12 to the rotors 3, flows through cooling channels there and returns through the shafts 11, 12 into the engine compartment 8.
  • FIG. 1 In order to be able to regulate the liquid cooling, two alternatives for the control variable (sensors 27, 28 already described) and two alternatives for the regulated cooling of the cooling liquid in the heat exchanger 32 are shown in FIG. Either, as in FIG. 1, the speed of the fan wheel 20 is regulated as a function of one of the manipulated variables. In the other alternative, there is a control valve 35 in the line which determines the amount of coolant flowing through the heat exchanger per unit of time.
  • the pump 1 can additionally be tempered by the air flow from the fan 21.
  • the advantage of this arrangement is that the air flow cooling the pump chamber 2 of the pump 1 is preheated. It is thereby achieved that thermal expansions of the pumping chamber housing 2 are permitted to the extent that the rotors 3, which assume relatively high temperatures during the operation of the pump 1, do not touch the housing 2.
  • the housing 2 and the rotors .3 are preferably made of aluminum to improve the heat conduction. minium.
  • the housing 2 can have ribs to improve the thermal contact.
  • the fan wheel 20 is coupled to the motor shaft 11. Since screw vacuum pumps are usually operated at constant speeds, it is no longer possible to regulate the air flow using the fan 21.
  • an adjustable diaphragm eg iris diaphragm
  • throttle or the like is provided for air flow control. It is located between the fan wheel 20 and the heat exchanger 32, is only shown schematically and bears the reference number 36.
  • the diaphragm 36 is connected to the control device 26 via the line 37.
  • the regulation of the cooling air flow quantity and / or the cooling of the liquid takes place in accordance with the regulation described for FIG. 2 by regulation of the flow cross section of the air flow, and preferably to a constant gap size.
  • the coolant circuit in the solution according to FIG. 3 is also equipped with a thermostatic valve 38. It is located in line 31 and is expediently also controlled by device 26. It has the. Task, in the phase of the start of operation of the pump 1, in which the coolant temperature has not yet reached, to block the line 31 and to supply the cooling liquid directly to the line 33 via the bypass line 39 surrounding the heat exchanger. If the temperature of the coolant has reached its operating temperature, line 39 is blocked and line 31 is released (drawn position of valve 38). The bypass solution shortens the commissioning phase.
  • the screw vacuum pump is equipped with the already described internal rotor cooling and with a housing cooling 41 operated with liquid. It comprises a cooling jacket 42 (eg liquid-filled) located in the outlet area of the rotor housing 2, in which a cooling coil 43 through which the actual coolant flows is located. Alternatively, the cooling jacket 42 itself can be flowed through by the cooling liquid.
  • a cooling jacket 42 eg liquid-filled located in the outlet area of the rotor housing 2, in which a cooling coil 43 through which the actual coolant flows is located.
  • the cooling jacket 42 itself can be flowed through by the cooling liquid.
  • the outlet of the housing cooling is connected to the engine compartment 8, in which the cooling liquid leaving the rotor internal cooling also flows.
  • the coolant flows into the heat exchanger 32 via the line 31.
  • the line 44 is connected to this with a 3/2-way valve (?) 45, which allows a quantitative distribution of the coolant supply of the lines 45 and 46.
  • Line 45 communicates with the inlet of the rotor internal cooling, line 46 with the inlet of the housing outer cooling 41.
  • the valve 45 is a control valve which is controlled by the control 26.
  • the fan 20 and the heat exchanger 32 are located in the region of the opening 24 of the housing 22, as in the embodiments according to FIGS.
  • the heat exchanger 32 and its cooling can also be arranged at a different location and independently of the drive motor 9. Separate heat exchangers can also be provided for both cooling circuits. Finally, the housing 28 need not be present.
  • the temperature of the pump 1 in particular can be carried out in such a way that its pumping gap 4 remains essentially constant.
  • the sensors 27 and 28 deliver signals that are related to the temperatures of the housing 2 on the one hand and the rotors 3 on the other. Depending on these signals, the control of the valve 45 or the distribution of the coolant components between the two cooling systems takes place.
  • the features according to the invention make it possible to further increase the power density of a screw pump.
  • the pump can be made smaller and operated with higher surface temperatures.
  • the outer air duct housing 22 also has the function of a contactor. It has proven to be expedient to fill in the cooling or temperature control system in such a way that in the event that two cooling systems (internal rotor cooling, external housing cooling) are present are, about half of the heat generated by the pump is dissipated by each of the two cooling systems.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Abstract

L'invention concerne un procédé de maintien à la température voulue d'une pompe à vide à vis (1). Selon l'invention, pour que les caractéristiques de la pompe susmentionnés ne soient pas sensiblement modifiées lors de contraintes thermiques, il est proposé que le refroidissement soit régulé en fonction de l'état de fonctionnement de la pompe à vide à vis (1), de préférence pour que l'espace entre les rotors et le corps de la pompe (4) reste sensiblement constant.
EP02790311A 2001-11-15 2002-10-30 Procede de maintien a la temperature voulue d'une pompe a vide a vis Withdrawn EP1444441A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10156179 2001-11-15
DE10156179A DE10156179A1 (de) 2001-11-15 2001-11-15 Kühlung einer Schraubenvakuumpumpe
PCT/EP2002/012087 WO2003042542A1 (fr) 2001-11-15 2002-10-30 Procede de maintien a la temperature voulue d'une pompe a vide a vis

Publications (1)

Publication Number Publication Date
EP1444441A1 true EP1444441A1 (fr) 2004-08-11

Family

ID=7705881

Family Applications (1)

Application Number Title Priority Date Filing Date
EP02790311A Withdrawn EP1444441A1 (fr) 2001-11-15 2002-10-30 Procede de maintien a la temperature voulue d'une pompe a vide a vis

Country Status (11)

Country Link
US (1) US7232295B2 (fr)
EP (1) EP1444441A1 (fr)
JP (1) JP4288169B2 (fr)
KR (1) KR100936555B1 (fr)
CN (2) CN101532492B (fr)
CA (1) CA2463957A1 (fr)
DE (1) DE10156179A1 (fr)
HU (1) HUP0402362A2 (fr)
PL (1) PL206102B1 (fr)
TW (1) TWI262248B (fr)
WO (1) WO2003042542A1 (fr)

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US7232295B2 (en) 2007-06-19
CA2463957A1 (fr) 2003-05-22
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TW200300481A (en) 2003-06-01
PL369534A1 (en) 2005-05-02
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CN101532492B (zh) 2012-07-04
KR100936555B1 (ko) 2010-01-12
CN100487249C (zh) 2009-05-13
JP2005509786A (ja) 2005-04-14
KR20050042066A (ko) 2005-05-04
CN1585859A (zh) 2005-02-23
JP4288169B2 (ja) 2009-07-01
US20050019169A1 (en) 2005-01-27
CN101532492A (zh) 2009-09-16
DE10156179A1 (de) 2003-05-28
WO2003042542A1 (fr) 2003-05-22

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