EP1343600A1 - Procede de fabrication de films minces en composite metal/ceramique - Google Patents
Procede de fabrication de films minces en composite metal/ceramiqueInfo
- Publication number
- EP1343600A1 EP1343600A1 EP01999450A EP01999450A EP1343600A1 EP 1343600 A1 EP1343600 A1 EP 1343600A1 EP 01999450 A EP01999450 A EP 01999450A EP 01999450 A EP01999450 A EP 01999450A EP 1343600 A1 EP1343600 A1 EP 1343600A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- suspension
- ceramic
- film
- metal
- thin films
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 title claims abstract description 51
- 238000000034 method Methods 0.000 title claims abstract description 36
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 27
- 239000002184 metal Substances 0.000 title claims abstract description 27
- 239000010409 thin film Substances 0.000 title claims abstract description 27
- 239000002131 composite material Substances 0.000 title claims abstract description 18
- 239000000725 suspension Substances 0.000 claims abstract description 46
- 230000002787 reinforcement Effects 0.000 claims abstract description 26
- 239000002270 dispersing agent Substances 0.000 claims abstract description 18
- 239000004014 plasticizer Substances 0.000 claims abstract description 17
- 239000011230 binding agent Substances 0.000 claims abstract description 16
- 238000004519 manufacturing process Methods 0.000 claims abstract description 12
- 239000003960 organic solvent Substances 0.000 claims abstract description 8
- 239000008240 homogeneous mixture Substances 0.000 claims abstract description 4
- 239000010408 film Substances 0.000 claims description 34
- 239000000843 powder Substances 0.000 claims description 26
- 238000000280 densification Methods 0.000 claims description 16
- 238000005266 casting Methods 0.000 claims description 15
- 239000000835 fiber Substances 0.000 claims description 10
- 239000000203 mixture Substances 0.000 claims description 9
- 239000002904 solvent Substances 0.000 claims description 9
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 8
- 238000005245 sintering Methods 0.000 claims description 7
- 238000000137 annealing Methods 0.000 claims description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 5
- 239000000654 additive Substances 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 5
- 229910052737 gold Inorganic materials 0.000 claims description 5
- 239000010931 gold Substances 0.000 claims description 5
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 4
- 229910052802 copper Inorganic materials 0.000 claims description 4
- 239000010949 copper Substances 0.000 claims description 4
- 238000005098 hot rolling Methods 0.000 claims description 4
- 229910052759 nickel Inorganic materials 0.000 claims description 4
- 229910052709 silver Inorganic materials 0.000 claims description 4
- 239000004332 silver Substances 0.000 claims description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 3
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 3
- 239000000956 alloy Substances 0.000 claims description 3
- 229910045601 alloy Inorganic materials 0.000 claims description 3
- 125000004432 carbon atom Chemical group C* 0.000 claims description 3
- 229910052804 chromium Inorganic materials 0.000 claims description 3
- 239000011651 chromium Substances 0.000 claims description 3
- 150000002148 esters Chemical class 0.000 claims description 3
- 150000001247 metal acetylides Chemical class 0.000 claims description 3
- 239000002923 metal particle Substances 0.000 claims description 3
- 150000004767 nitrides Chemical class 0.000 claims description 3
- 229920000058 polyacrylate Polymers 0.000 claims description 3
- 238000002360 preparation method Methods 0.000 claims description 3
- 239000010936 titanium Substances 0.000 claims description 3
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- 229910052725 zinc Inorganic materials 0.000 claims description 3
- 239000011701 zinc Substances 0.000 claims description 3
- 239000002253 acid Substances 0.000 claims description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims description 2
- 150000001298 alcohols Chemical class 0.000 claims description 2
- 150000001875 compounds Chemical class 0.000 claims description 2
- 235000021323 fish oil Nutrition 0.000 claims description 2
- 229910002804 graphite Inorganic materials 0.000 claims description 2
- 239000010439 graphite Substances 0.000 claims description 2
- 150000002576 ketones Chemical class 0.000 claims description 2
- 229920002521 macromolecule Polymers 0.000 claims description 2
- 238000002156 mixing Methods 0.000 claims description 2
- 239000000126 substance Substances 0.000 claims description 2
- 150000005846 sugar alcohols Polymers 0.000 claims description 2
- 150000003871 sulfonates Chemical class 0.000 claims description 2
- 239000004094 surface-active agent Substances 0.000 claims description 2
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 claims description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 2
- 150000007513 acids Chemical class 0.000 claims 1
- 239000013528 metallic particle Substances 0.000 abstract description 6
- 238000010345 tape casting Methods 0.000 abstract description 5
- 238000004320 controlled atmosphere Methods 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
- 238000005096 rolling process Methods 0.000 description 5
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 239000011159 matrix material Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- DOIRQSBPFJWKBE-UHFFFAOYSA-N dibutyl phthalate Chemical compound CCCCOC(=O)C1=CC=CC=C1C(=O)OCCCC DOIRQSBPFJWKBE-UHFFFAOYSA-N 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 150000002894 organic compounds Chemical class 0.000 description 2
- 239000002202 Polyethylene glycol Substances 0.000 description 1
- 235000021355 Stearic acid Nutrition 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- -1 aluminum nitride Chemical compound 0.000 description 1
- 150000001485 argon Chemical class 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 229960002380 dibutyl phthalate Drugs 0.000 description 1
- OJLGWNFZMTVNCX-UHFFFAOYSA-N dioxido(dioxo)tungsten;zirconium(4+) Chemical compound [Zr+4].[O-][W]([O-])(=O)=O.[O-][W]([O-])(=O)=O OJLGWNFZMTVNCX-UHFFFAOYSA-N 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 150000002829 nitrogen Chemical class 0.000 description 1
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 description 1
- OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 description 1
- 235000006408 oxalic acid Nutrition 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000008117 stearic acid Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 description 1
- 239000000080 wetting agent Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/22—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces for producing castings from a slip
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
- B22F1/10—Metallic powder containing lubricating or binding agents; Metallic powder containing organic material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F5/00—Manufacture of workpieces or articles from metallic powder characterised by the special shape of the product
- B22F5/006—Manufacture of workpieces or articles from metallic powder characterised by the special shape of the product of flat products, e.g. sheets
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
- B22F2998/10—Processes characterised by the sequence of their steps
Definitions
- the invention relates to a process for manufacturing thin metal / ceramic composite films, in which the ceramic reinforcements are distributed homogeneously in the metal matrix.
- the invention finds applications in all fields using substrates or films in metal / ceramic composite and, in particular, in the field of manufacturing electronic components intended, for example, in the automobile field or
- metallic films are produced by a rolling process.
- this rolling process does not make it possible to obtain a homogeneous distribution of the ceramic reinforcements in the metal matrix; it is therefore not suitable for the production of metal / ceramic composite films.
- the residual stresses caused by rolling cause the film to crack.
- Other processes used for the production of metal / ceramic composite films are the pressing, injection and extrusion processes.
- none of these methods makes it possible to obtain films with an excellent surface condition.
- these methods become expensive, since the film thickness must be less than a millimeter.
- strip casting methods which make it possible to produce thin films. Such methods are described in the following articles: ALCOCK J., DESCRIBE S., Tape casting, a flexible approach to surface engineering, Materials orld, 13-14, February (2000); B ⁇ HNLEIN-MAU ⁇ J., SIGMUND W., EGNER G., MEYER. H., HE ⁇ EL F., SEITZ K, ROOSEN A., The function in the tape casting of alumina, Advanced Materials, vol. 4, No. 2, 73-81 (1992); MORENO R., The role of slip additives in tape casting technology: part I-Solvents and dispersants, American Ceramic Society Bulletin, vol. 71, no.
- the object of the invention is precisely to remedy the methods of manufacturing thin films described above. To this end, it proposes a process for manufacturing thin films of metal / ceramic composite using a strip casting method.
- the invention relates to a process for manufacturing thin films of metal / ceramic composite comprising: a) preparing a suspension (S) in an organic solvent from a substantially homogeneous mixture of ceramic reinforcements, particles metallic, a binder, a plasticizer, and a dispersant, the metallic particles constituting at least 5%, by mass, of the suspension; b) strip casting the suspension to form a thin film, then debinding this thin film; c) carrying out the densification of the unbinding thin film, in an oven.
- the strip casting technique makes it possible to orient and control the distribution of ceramic reinforcements.
- the method described according to the invention makes it possible to manufacture composite metal / ceramic films with an orientation of the ceramic particles in the plane of the film, in particular for very anisotropic particles, such as fibers and platelets. This improves some properties of the composite in the film plane, such as reducing the thermal coefficient of expansion and increasing the thermal conductivity.
- the suspension has a viscosity of between 0.5 and 3 Pa. s.
- the suspension is produced by mixing:
- At least one metallic powder and at least one ceramic reinforcement constituting approximately 30 to 60% of the total volume of the suspension
- an organic solvent constituting approximately 15 to 45% of the volume of the suspension; a binder and a plasticizer constituting approximately 30 to 70% of the volume of the suspension; - a dispersant representing approximately 0.1 to
- the dispersant is a phosphoric ester, a polyacrylate, a sulfonate, a perfluorate or even a carbon chain acid of 2 to 30 carbon atoms.
- the metal powder can be a powder of copper, aluminum, silver, gold, nickel, titanium, chromium, zinc or an alloy of two or more of these materials .
- the ceramic reinforcement can be a powder and / or a short fiber (that is to say a fiber whose length varies between 1 and 500 ⁇ m) of graphite, carbides, nitrides or oxides.
- the densification of the film consists of sintering the film in an oven.
- the densification of the film consists of hot rolling and annealing of the film.
- the preparation of the suspension consists of:
- the invention further relates to a process for the preparation of composite parts with a laminated structure in which several thin films are formed.
- the stacked thin films have different compositions.
- FIG. 1 schematically shows the step of preparing the suspension from metal particles and ceramic reinforcements
- FIG. 2 schematically represents the step of casting the suspension in a strip to form a thin film
- - Figures 3A and 3B show two embodiments of the film densification step in an oven.
- the invention relates to a method for manufacturing thin films of metal / ceramic composite. This process consists in preparing a suspension, also called "slip", comprising a substantially homogeneous mixture of ceramic reinforcements and metallic particles.
- These metallic particles and ceramic reinforcements are chosen, respectively, in the form of one or more metallic powder (s) and one or more ceramic reinforcement (s). These powders and short fibers are mixed with an organic solvent, a dispersant, a binder and a plasticizer. The proportion of these different elements is as follows:
- the metal powders and the ceramic reinforcements represent 30 to 60% of the total volume of dry matter of the suspension (that is to say of the whole volume occupied by the binder, the plasticizer, the dispersant and the metal powders and ceramic);
- the solvent represents 15 to 45% of the total volume of dry matter;
- the binder and the plasticizer represent 30 to 70% of the volume of dry matter;
- the dispersant represents between 0.01 and 2% of the mass of metallic powders and ceramic reinforcements;
- additives such as release agents and / or wetting agents, which represent between 0.01 and 2% of the mass of metallic and ceramic powders.
- This step of preparing the suspension S consists, first of all, of grinding in a jar, or by attrition, the metallic and ceramic powders with the solvent and the dispersant.
- This grinding step is carried out by means of an attritor mill (represented by the reference 1 in FIG. 1) or by a jar mill.
- the assembly thus obtained is then mixed with binders and plasticizers, using a mixer, referenced 2.
- the metal powder (s), intended to form the metallic matrix of the suspension can be, for example, a powder of copper, aluminum, silver, gold, nickel, titanium, chromium, zinc or an alloy of two or more of these metals.
- the ceramic reinforcement (s) intended to form the ceramic reinforcements of this suspension can be, for example, a short graphite powder or fiber or else a powder or a short fiber based on carbides, such as silicon carbide, nitrides, such as aluminum nitride, or oxides, such as silica or zirconium tungstate.
- the ceramic reinforcements may be in the form of fibers or else platelets or else substantially spherical grains, with a diameter of between approximately 0.1 ⁇ m and 100 ⁇ m.
- the fibers are generally short fibers with a diameter of 10 nm to 10 ⁇ m, and with a length of 100 nm to 10 mm.
- These ceramic reinforcements can be coated with a layer of metallic material, such as cobalt, nickel, silver or gold.
- the thickness of the metal coating is at least 0.01 ⁇ m.
- This coating can be carried out by immersion of the ceramic reinforcements in an electrolytic bath. This coating has the advantage of improving the densification of the material during the film densification step, and, in particular, when this densification consists of sintering, because it makes it possible to increase the metal / ceramic interface.
- the suspension used according to the invention is a suspension or organic system.
- the solvent used to make this suspension S is an organic solvent, generally chosen from ketones, alcohols and their mixtures.
- the role of the dispersant used to produce this suspension is to ensure the homogeneity and stability of the suspension by developing repulsion between ceramic reinforcements and metallic particles.
- the dispersant ensures good stability and good dispersion of the particles between them.
- the dispersant makes it possible to obtain, after drying, a homogeneous and compact strip.
- This dispersant is chosen from surfactants, macromolecules, such as fish oil, phosphoric esters, polyacrylates, sulfonates, perfluorates and carbon chain acids having from 2 to 30 carbon atoms, such as for example the oxalic acid and stearic acid.
- This binder used to produce this suspension is to ensure the cohesion of the strip (or film), after evaporation of the solvent.
- This binder is generally a compound which is not soluble in water chosen from polyalcohols, vinyl compounds, such as polyvinyl butyral and acrylic compounds and their mixtures.
- This plasticizer used in this suspension is to provide great flexibility, great fluidity, to the strip; this flexibility is necessary when casting the suspension in strips and subsequently when handling the strip.
- This plasticizer can be, for example, a polyethylene glycol or else dibutylphthalate.
- the suspension also contains a plasticizer which makes it possible to obtain a strip, or thin film, in flexible raw and sufficiently solid to be manipulated.
- the report binder / plasticizer makes it possible to adjust the mechanical cohesion of the strip and its flexibility. These strips can therefore be stacked and thermocompressed so as to produce stacks of strips of different compositions. This solution cannot be envisaged with the methods of the prior art.
- FIG. 2 schematically represents the second step of the method of the invention, that is to say the step of pouring the suspension into strips.
- the suspension S produced during the first step is cast on a casting bench 3 so as to form a strip B, also called a thin film.
- Casting in strips consists in casting the suspension S on a support which can be, for example, a steel strip 8 or a polymer wire, referenced 5 in FIG. 2. To allow easy casting of the suspension, the latter must have a viscosity of the order of 0.5 to 3 Pa. s.
- the suspension is poured by the relative movement between a shoe 6 of the casting bench and the support 5.
- the shoe 6 has knives 7, the height of which is adjustable.
- the thickness of the film can be modified by changing the height between these knives 7 and the support 5. It is thus possible, thanks to this strip casting, to a very regular film thickness.
- thermal debinding consists in slowly heating the strip of material under a controlled atmosphere, in an oven or dryer 4 in order to remove the organic compounds contained therein, mainly the binder and the plasticizer.
- the heating rate in the dryer is of the order of 0.2 to 2 ° C / minute between 100 ° C and 500 ° C.
- FIGS. 3A and 3B represent two different embodiments of the third step of the method of the invention, that is to say the step of densification of the film.
- This densification step consists of evaporating the solvent and drying the thin film obtained after debinding.
- This film densification step has the role of evaporating the solvent. It can be produced, for example, in two different ways: the film can be densified by sintering in a pass-through oven or in a batch oven, or by hot rolling, using a rolling mill and an annealing furnace.
- the first variant shows that the film B, obtained after debinding, is cut into plates PI to Pn. These plates are introduced into an oven, referenced 9, under a controlled atmosphere.
- This oven can be a pass-through oven or a batch oven. Densification by sintering is carried out under a controlled atmosphere, or under a reducing atmosphere, such as for example hydrogen, hydrogenated nitrogen, argon or even hydrogenated argon, so as to avoid oxidation of the material.
- the sintering temperature depends on the particle size and the nature of the metal powders and ceramic reinforcements. For example, for a metallic copper powder, the temperature is between 700 ° C and 1080 ° C; for aluminum, the temperature is between 450 ° C and 650 ° C.
- the second variant of the densification step is shown in FIG. 3B.
- the film B is introduced into a rolling mill 10, placed within an annealing furnace 11.
- the film B is then hot rolled, in the furnace 11, under a controlled atmosphere.
- the cutting of the film B into plates PI, P2, ... is carried out at the outlet of the annealing furnace 11.
- This densification method by hot rolling and annealing of the film makes it possible to improve the densification of the material under the action of pressure and temperature.
- This variant is therefore particularly well suited to metal / ceramic composites which are poorly densified by natural sintering and to composites consisting of ductile metals, such as copper, aluminum or gold.
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Manufacture Of Alloys Or Alloy Compounds (AREA)
- Powder Metallurgy (AREA)
- Laminated Bodies (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Physical Vapour Deposition (AREA)
Description
Claims
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR0015984 | 2000-12-08 | ||
| FR0015984A FR2818015B1 (fr) | 2000-12-08 | 2000-12-08 | Procede de fabrication de films minces en composite metal/ceramique |
| PCT/FR2001/003855 WO2002045888A1 (fr) | 2000-12-08 | 2001-12-06 | Procede de fabrication de films minces en composite metal/ceramique |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| EP1343600A1 true EP1343600A1 (fr) | 2003-09-17 |
| EP1343600B1 EP1343600B1 (fr) | 2007-04-25 |
Family
ID=8857412
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP01999450A Expired - Lifetime EP1343600B1 (fr) | 2000-12-08 | 2001-12-06 | Procede de fabrication de films minces en composite metal/ceramique |
Country Status (10)
| Country | Link |
|---|---|
| US (2) | US7585456B2 (fr) |
| EP (1) | EP1343600B1 (fr) |
| JP (1) | JP4146228B2 (fr) |
| KR (1) | KR100847129B1 (fr) |
| CN (1) | CN1247352C (fr) |
| AT (1) | ATE360493T1 (fr) |
| AU (1) | AU2002216188A1 (fr) |
| DE (1) | DE60128133T2 (fr) |
| FR (1) | FR2818015B1 (fr) |
| WO (1) | WO2002045888A1 (fr) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7387763B2 (en) * | 2004-07-27 | 2008-06-17 | General Electric Company | Preparation of sheet by injection molding of powder, consolidation, and heat treating |
| WO2007080997A1 (fr) * | 2006-01-11 | 2007-07-19 | Dowa Electronics Materials Co., Ltd. | Film conducteur en argent et procede pour le produire |
| KR100857725B1 (ko) * | 2007-11-21 | 2008-09-10 | 한국지질자원연구원 | 석회석의 정제방법 |
| KR101098973B1 (ko) | 2009-05-22 | 2011-12-28 | 전남대학교산학협력단 | 서멧 박막 형성 방법 |
| DE102011014583A1 (de) * | 2011-03-21 | 2012-09-27 | Epcos Ag | Verfahren zur Herstellung eines Folienstapels und Anlage zur Herstellung eines Folienstapels |
| KR101565631B1 (ko) | 2012-06-04 | 2015-11-03 | 삼성전기주식회사 | 내부 전극용 도전성 페이스트 조성물, 적층 세라믹 커패시터 및 이의 제조방법 |
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| CN107740095A (zh) * | 2017-10-19 | 2018-02-27 | 西安科技大学 | 金属复合耐磨板 |
| KR20220134756A (ko) | 2020-01-31 | 2022-10-05 | 더 리젠츠 오브 더 유니버시티 오브 미시건 | 박막의 롤-투-롤 연속 제조를 위한 급속-유도 소결 단조 |
| CN111774572B (zh) * | 2020-07-15 | 2022-11-04 | 重庆凯烽原电线电缆有限公司 | 一种电子设备用的高散热铜箔及其制备方法 |
| CN113526962A (zh) * | 2021-07-28 | 2021-10-22 | 福建臻璟新材料科技有限公司 | 一种轧膜成型工艺生产氮化物陶瓷基板的方法 |
| CN113526982A (zh) * | 2021-07-29 | 2021-10-22 | 广东电网有限责任公司 | 陶瓷膜的制作方法、装置、电子设备及存储介质 |
| CN115847867A (zh) * | 2022-12-19 | 2023-03-28 | 江苏七禾新材料科技有限公司 | 一种干压共烧金属基陶瓷复合膜的制备方法 |
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-
2000
- 2000-12-08 FR FR0015984A patent/FR2818015B1/fr not_active Expired - Fee Related
-
2001
- 2001-12-06 CN CNB018201334A patent/CN1247352C/zh not_active Expired - Fee Related
- 2001-12-06 EP EP01999450A patent/EP1343600B1/fr not_active Expired - Lifetime
- 2001-12-06 DE DE60128133T patent/DE60128133T2/de not_active Expired - Lifetime
- 2001-12-06 JP JP2002547657A patent/JP4146228B2/ja not_active Expired - Fee Related
- 2001-12-06 AU AU2002216188A patent/AU2002216188A1/en not_active Abandoned
- 2001-12-06 AT AT01999450T patent/ATE360493T1/de active
- 2001-12-06 WO PCT/FR2001/003855 patent/WO2002045888A1/fr not_active Ceased
- 2001-12-06 KR KR1020037007642A patent/KR100847129B1/ko not_active Expired - Fee Related
- 2001-12-06 US US10/433,413 patent/US7585456B2/en not_active Expired - Fee Related
-
2009
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| Title |
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| See references of WO0245888A1 * |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2818015B1 (fr) | 2003-09-26 |
| EP1343600B1 (fr) | 2007-04-25 |
| CN1247352C (zh) | 2006-03-29 |
| US7871562B2 (en) | 2011-01-18 |
| JP2004515648A (ja) | 2004-05-27 |
| CN1479659A (zh) | 2004-03-03 |
| ATE360493T1 (de) | 2007-05-15 |
| US7585456B2 (en) | 2009-09-08 |
| AU2002216188A1 (en) | 2002-06-18 |
| US20090208645A1 (en) | 2009-08-20 |
| WO2002045888A1 (fr) | 2002-06-13 |
| DE60128133D1 (de) | 2007-06-06 |
| JP4146228B2 (ja) | 2008-09-10 |
| FR2818015A1 (fr) | 2002-06-14 |
| US20040013556A1 (en) | 2004-01-22 |
| DE60128133T2 (de) | 2007-12-27 |
| KR100847129B1 (ko) | 2008-07-18 |
| KR20030069179A (ko) | 2003-08-25 |
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