EP0890973A1 - Cathode froide à micropointes - Google Patents
Cathode froide à micropointes Download PDFInfo
- Publication number
- EP0890973A1 EP0890973A1 EP98401651A EP98401651A EP0890973A1 EP 0890973 A1 EP0890973 A1 EP 0890973A1 EP 98401651 A EP98401651 A EP 98401651A EP 98401651 A EP98401651 A EP 98401651A EP 0890973 A1 EP0890973 A1 EP 0890973A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- grid
- point
- substrate
- radius
- nominal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/02—Electron guns
- H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
- H01J3/022—Electron guns using a field emission, photo emission, or secondary emission electron source with microengineered cathode, e.g. Spindt-type
Definitions
- the present invention relates to a cold microtip cathode.
- the invention applies to mass spectrometers in which the electron emitting heating electric filament is replaced by such a cold microtip cathode.
- Such cold cathodes are electron emitting devices produced by semiconductor processes.
- the present invention therefore aims to provide a cold cathode to microtips which improves the homogeneity of the electron emission of its microtips.
- the subject of the invention is therefore a cold microtip cathode comprising a substrate comprising a network of microtips and a plate arranged parallel to the substrate carrying the points, said plate comprising a hole opposite each point and thus constituting a grid, a filling insulator.
- Figure 1 is a partial schematic view showing a portion of cold microtip cathode according to the invention.
- FIGS. 2, 3 and 4 are the curves of the value of the field at the end of the tips as a function, respectively, of the value of the parameters d, R T and R GH .
- Figure 1 thus shows a portion of cold cathode where a single point is shown.
- the tips such as 1 are formed on a substrate 2.
- a plate 3, called a grid, and carrying a hole 4 of radius R GH opposite each tip is arranged parallel to the substrate 2.
- An insulator 5 fills the space between the substrate 2 and grid 3 outside the points.
- Figure 2 shows the value of field E at 10 9 v / m as a function of d.
- FIG. 3 shows the value of the field as a function of R T .
- Figure 4 shows the value of the field as a function of R GH .
Landscapes
- Cold Cathode And The Manufacture (AREA)
Abstract
Description
Claims (1)
- Cathode froide à micropointes (1) comprenant un substrat (2) comportant un réseau de micropointes (1) et une plaque disposée parallèlement au substrat portant les pointes (1), ladite plaque comportant un trou (4) en face de chaque pointe et constituant ainsi une grille (3), un isolant (5) comblant l'espace entre le substrat (2) et ladite grille (3) en dehors des pointes (1), caractérisée en ce que la distance d, nominale, séparant le sommet d'une pointe (1) de la face de ladite grille (3) la plus éloignée du substrat (2) est d = 0, en ce que le rayon de courbure RT, nominal, du sommet de chaque pointe (1) est RT = 25 nm et en ce que le rayon RGH, nominal, desdits trous (4) de la grille (3) est RGH = 1,3 µm.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9708793A FR2766011B1 (fr) | 1997-07-10 | 1997-07-10 | Cathode froide a micropointes |
FR9708793 | 1997-07-10 |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0890973A1 true EP0890973A1 (fr) | 1999-01-13 |
EP0890973B1 EP0890973B1 (fr) | 2002-09-11 |
Family
ID=9509100
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP98401651A Expired - Lifetime EP0890973B1 (fr) | 1997-07-10 | 1998-07-02 | Cathode froide à micropointes |
Country Status (5)
Country | Link |
---|---|
US (1) | US6259190B1 (fr) |
EP (1) | EP0890973B1 (fr) |
JP (1) | JPH1173872A (fr) |
DE (1) | DE69807797T2 (fr) |
FR (1) | FR2766011B1 (fr) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1992009095A1 (fr) * | 1990-11-16 | 1992-05-29 | Thomson Recherche | Source d'electrons et procede de realisation |
JPH0729484A (ja) * | 1993-07-07 | 1995-01-31 | Futaba Corp | 集束電極を有する電界放出カソード及び集束電極を有する電界放出カソードの製造方法 |
WO1996024152A1 (fr) * | 1995-01-31 | 1996-08-08 | Candescent Technologies Corporation | Structures a filaments comportant des grilles pour dispositif d'affichage par emission de champ |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2550798B2 (ja) * | 1991-04-12 | 1996-11-06 | 富士通株式会社 | 微小冷陰極の製造方法 |
US5534743A (en) * | 1993-03-11 | 1996-07-09 | Fed Corporation | Field emission display devices, and field emission electron beam source and isolation structure components therefor |
JP2809078B2 (ja) * | 1993-12-28 | 1998-10-08 | 日本電気株式会社 | 電界放出冷陰極およびその製造方法 |
RU2074444C1 (ru) * | 1994-07-26 | 1997-02-27 | Евгений Инвиевич Гиваргизов | Матричный автоэлектронный катод и электронный прибор для оптического отображения информации |
JP2731733B2 (ja) * | 1994-11-29 | 1998-03-25 | 関西日本電気株式会社 | 電界放出冷陰極とこれを用いた表示装置 |
JP2956612B2 (ja) * | 1996-09-25 | 1999-10-04 | 日本電気株式会社 | フィールドエミッタアレイとその製造方法およびその駆動方法 |
JP3144475B2 (ja) * | 1997-06-25 | 2001-03-12 | 日本電気株式会社 | 電界放出型冷陰極の製造方法 |
-
1997
- 1997-07-10 FR FR9708793A patent/FR2766011B1/fr not_active Expired - Fee Related
-
1998
- 1998-07-02 EP EP98401651A patent/EP0890973B1/fr not_active Expired - Lifetime
- 1998-07-02 DE DE69807797T patent/DE69807797T2/de not_active Expired - Lifetime
- 1998-07-09 US US09/112,322 patent/US6259190B1/en not_active Expired - Fee Related
- 1998-07-09 JP JP19481398A patent/JPH1173872A/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1992009095A1 (fr) * | 1990-11-16 | 1992-05-29 | Thomson Recherche | Source d'electrons et procede de realisation |
JPH0729484A (ja) * | 1993-07-07 | 1995-01-31 | Futaba Corp | 集束電極を有する電界放出カソード及び集束電極を有する電界放出カソードの製造方法 |
WO1996024152A1 (fr) * | 1995-01-31 | 1996-08-08 | Candescent Technologies Corporation | Structures a filaments comportant des grilles pour dispositif d'affichage par emission de champ |
Non-Patent Citations (2)
Title |
---|
PATENT ABSTRACTS OF JAPAN vol. 095, no. 004 31 May 1995 (1995-05-31) * |
SPINDT C A ET AL: "PHYSICAL PROPERTIES OF THIN-FILM FIELD EMISSION CATHODES WITH MOLYBDENUM CONES", 1 December 1976, JOURNAL OF APPLIED PHYSICS, VOL. 47, NR. 12, PAGE(S) 5248 - 5263, XP000560520 * |
Also Published As
Publication number | Publication date |
---|---|
EP0890973B1 (fr) | 2002-09-11 |
JPH1173872A (ja) | 1999-03-16 |
FR2766011B1 (fr) | 1999-09-24 |
DE69807797D1 (de) | 2002-10-17 |
DE69807797T2 (de) | 2003-05-28 |
FR2766011A1 (fr) | 1999-01-15 |
US6259190B1 (en) | 2001-07-10 |
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