EP0890973A1 - Mikrospritzen-Kaltkathode - Google Patents

Mikrospritzen-Kaltkathode Download PDF

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Publication number
EP0890973A1
EP0890973A1 EP98401651A EP98401651A EP0890973A1 EP 0890973 A1 EP0890973 A1 EP 0890973A1 EP 98401651 A EP98401651 A EP 98401651A EP 98401651 A EP98401651 A EP 98401651A EP 0890973 A1 EP0890973 A1 EP 0890973A1
Authority
EP
European Patent Office
Prior art keywords
grid
point
substrate
radius
nominal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP98401651A
Other languages
English (en)
French (fr)
Other versions
EP0890973B1 (de
Inventor
Didier Pierrejean
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Lucent SAS
Original Assignee
Alcatel SA
Alcatel Alsthom Compagnie Generale dElectricite
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel SA, Alcatel Alsthom Compagnie Generale dElectricite filed Critical Alcatel SA
Publication of EP0890973A1 publication Critical patent/EP0890973A1/de
Application granted granted Critical
Publication of EP0890973B1 publication Critical patent/EP0890973B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
    • H01J3/022—Electron guns using a field emission, photo emission, or secondary emission electron source with microengineered cathode, e.g. Spindt-type

Definitions

  • the present invention relates to a cold microtip cathode.
  • the invention applies to mass spectrometers in which the electron emitting heating electric filament is replaced by such a cold microtip cathode.
  • Such cold cathodes are electron emitting devices produced by semiconductor processes.
  • the present invention therefore aims to provide a cold cathode to microtips which improves the homogeneity of the electron emission of its microtips.
  • the subject of the invention is therefore a cold microtip cathode comprising a substrate comprising a network of microtips and a plate arranged parallel to the substrate carrying the points, said plate comprising a hole opposite each point and thus constituting a grid, a filling insulator.
  • Figure 1 is a partial schematic view showing a portion of cold microtip cathode according to the invention.
  • FIGS. 2, 3 and 4 are the curves of the value of the field at the end of the tips as a function, respectively, of the value of the parameters d, R T and R GH .
  • Figure 1 thus shows a portion of cold cathode where a single point is shown.
  • the tips such as 1 are formed on a substrate 2.
  • a plate 3, called a grid, and carrying a hole 4 of radius R GH opposite each tip is arranged parallel to the substrate 2.
  • An insulator 5 fills the space between the substrate 2 and grid 3 outside the points.
  • Figure 2 shows the value of field E at 10 9 v / m as a function of d.
  • FIG. 3 shows the value of the field as a function of R T .
  • Figure 4 shows the value of the field as a function of R GH .

Landscapes

  • Cold Cathode And The Manufacture (AREA)
EP98401651A 1997-07-10 1998-07-02 Mikrospritzen-Kaltkathode Expired - Lifetime EP0890973B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9708793 1997-07-10
FR9708793A FR2766011B1 (fr) 1997-07-10 1997-07-10 Cathode froide a micropointes

Publications (2)

Publication Number Publication Date
EP0890973A1 true EP0890973A1 (de) 1999-01-13
EP0890973B1 EP0890973B1 (de) 2002-09-11

Family

ID=9509100

Family Applications (1)

Application Number Title Priority Date Filing Date
EP98401651A Expired - Lifetime EP0890973B1 (de) 1997-07-10 1998-07-02 Mikrospritzen-Kaltkathode

Country Status (5)

Country Link
US (1) US6259190B1 (de)
EP (1) EP0890973B1 (de)
JP (1) JPH1173872A (de)
DE (1) DE69807797T2 (de)
FR (1) FR2766011B1 (de)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1992009095A1 (fr) * 1990-11-16 1992-05-29 Thomson Recherche Source d'electrons et procede de realisation
JPH0729484A (ja) * 1993-07-07 1995-01-31 Futaba Corp 集束電極を有する電界放出カソード及び集束電極を有する電界放出カソードの製造方法
WO1996024152A1 (en) * 1995-01-31 1996-08-08 Candescent Technologies Corporation Gated filament structures for a field emission display

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2550798B2 (ja) * 1991-04-12 1996-11-06 富士通株式会社 微小冷陰極の製造方法
US5534743A (en) * 1993-03-11 1996-07-09 Fed Corporation Field emission display devices, and field emission electron beam source and isolation structure components therefor
JP2809078B2 (ja) * 1993-12-28 1998-10-08 日本電気株式会社 電界放出冷陰極およびその製造方法
RU2074444C1 (ru) * 1994-07-26 1997-02-27 Евгений Инвиевич Гиваргизов Матричный автоэлектронный катод и электронный прибор для оптического отображения информации
JP2731733B2 (ja) * 1994-11-29 1998-03-25 関西日本電気株式会社 電界放出冷陰極とこれを用いた表示装置
JP2956612B2 (ja) * 1996-09-25 1999-10-04 日本電気株式会社 フィールドエミッタアレイとその製造方法およびその駆動方法
JP3144475B2 (ja) * 1997-06-25 2001-03-12 日本電気株式会社 電界放出型冷陰極の製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1992009095A1 (fr) * 1990-11-16 1992-05-29 Thomson Recherche Source d'electrons et procede de realisation
JPH0729484A (ja) * 1993-07-07 1995-01-31 Futaba Corp 集束電極を有する電界放出カソード及び集束電極を有する電界放出カソードの製造方法
WO1996024152A1 (en) * 1995-01-31 1996-08-08 Candescent Technologies Corporation Gated filament structures for a field emission display

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 095, no. 004 31 May 1995 (1995-05-31) *
SPINDT C A ET AL: "PHYSICAL PROPERTIES OF THIN-FILM FIELD EMISSION CATHODES WITH MOLYBDENUM CONES", 1 December 1976, JOURNAL OF APPLIED PHYSICS, VOL. 47, NR. 12, PAGE(S) 5248 - 5263, XP000560520 *

Also Published As

Publication number Publication date
FR2766011B1 (fr) 1999-09-24
JPH1173872A (ja) 1999-03-16
US6259190B1 (en) 2001-07-10
DE69807797D1 (de) 2002-10-17
DE69807797T2 (de) 2003-05-28
FR2766011A1 (fr) 1999-01-15
EP0890973B1 (de) 2002-09-11

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