EP0587165A2 - Informationsverarbeitungsgerät mit Multisondensteuerung - Google Patents

Informationsverarbeitungsgerät mit Multisondensteuerung Download PDF

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Publication number
EP0587165A2
EP0587165A2 EP93114502A EP93114502A EP0587165A2 EP 0587165 A2 EP0587165 A2 EP 0587165A2 EP 93114502 A EP93114502 A EP 93114502A EP 93114502 A EP93114502 A EP 93114502A EP 0587165 A2 EP0587165 A2 EP 0587165A2
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EP
European Patent Office
Prior art keywords
probes
signal
circuit
probe
recording
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Granted
Application number
EP93114502A
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English (en)
French (fr)
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EP0587165A3 (de
EP0587165B1 (de
Inventor
Takahiro C/O Canon Kabushiki Kaisha Oguchi
Katsunori C/O Canon Kabushiki Kaisha Hatanaka
Kunihiro C/O Canon Kabushiki Kaisha Sakai
Akihiko C/O Canon Kabushiki Kaisha Yamano
Shunichi c/o Canon Kabushiki Kaisha Shido
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Canon Inc
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Canon Inc
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    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/06—Probe tip arrays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q80/00—Applications, other than SPM, of scanning-probe techniques
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/861—Scanning tunneling probe
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/874—Probe tip array
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/902—Specified use of nanostructure
    • Y10S977/932—Specified use of nanostructure for electronic or optoelectronic application
    • Y10S977/943—Information storage or retrieval using nanostructure
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/902—Specified use of nanostructure
    • Y10S977/932—Specified use of nanostructure for electronic or optoelectronic application
    • Y10S977/953—Detector using nanostructure

Definitions

  • the present invention relates to an information processing apparatus of a recording/reproducing apparatus for writing or reading information to/from a medium which faces a plurality of probes by a physical interaction, a scanning tunneling microscope (STM), or the like and, more particularly, to a control circuit of a plurality of probes.
  • STM scanning tunneling microscope
  • STM scanning tunneling microscope
  • the STM uses a phenomenon such that when a voltage is applied between a metal probe (probe electrode) and a conductive material and the probe is allowed to approach up to a distance of about 1 nm, a tunnel current flows.
  • the tunnel current is very sensitive to a change in distance between the probe and the material.
  • a resolution in the inplane direction is equal to about 0.1 nm.
  • the high density recording or reproduction can be sufficiently executed on the order of atom (sub nanometer)
  • atomic particles adsorbed on the medium surface are removed by an electron beam or the like and data is written and the data is reproduced by the STM.
  • an apparatus such that a plurality of probes are formed on a semiconductor substrate and a displacement is caused in a recording medium which faces those probes and data is recorded has been proposed for the purpose of miniaturization (Japanese Patent Laid-open Application No. 1-196751).
  • a multiprobe head in which 2500 probes are arranged on a silicon chip of a square size of 1 cm2 in a matrix form of (50 x 50) probes and the above material having the memory effect are combined, so that digital data of 400 Mbits per probe, a total recording capacity of 1 Tbits, can be recorded or reproduded.
  • a method whereby each probe is formed in a cantilever shape having a length of about hundreds of ⁇ m and is driven is considered.
  • a method of forming such a cantilever there is a method whereby a semiconductor process is applied and by using a working technique for performing a fine working process onto one substrate, a cantilever having a multilayer structure such as a thin piezoelectric film, metal film, or the like is formed.
  • Such an information processing apparatus using the tunnel current or field radiation current has a function to keep the distance between the probe and the sample constant.
  • a signal processing circuit of the information processing apparatus having such a function has been described in, for example, "Nikkei Microdevice", Vol. November, pages 81 to 97, 1986.
  • the present invention is made in consideration of the problems of the conventional techniques as mentioned above and, it is an object of the invention to provide a small control circuit of a multiprobe of a high precision and to realize various kinds of information processing apparatuses.
  • an information processing apparatus for reproducing a recorded information by using a signal which occurs due to a physical phenomenon between a plurality of probes and a sample which faces those probes
  • the apparatus comprises: a plurality of probes; a single signal detecting circuit which is selectively connected to those plurality of probes; a selecting circuit to selectively connect the signal detecting circuit to the plurality of probes; and a memory circuit for storing a compensation value corresponding to each of the plurality of probes, wherein the compensation value is used to compensate a detection signal which is detected by the signal detecting circuit when the selecting circuit connects one of the plurality of probes to the signal detecting circuit.
  • an information processing apparatus for recording a recording signal onto a material by causing a physical phenomenon between a plurality of probes and the sample which faces those probes
  • the apparatus comprises: a plurality of probes; a single signal recording circuit which is selectively connected to those plurality of probes; a selecting circuit to selectively connect the signal recording circuit to the plurality of probes; and a memory circuit for storing a compensation value corresponding to each of the plurality of probes, wherein the compensation value is used to compensate a recording signal which is supplied from the signal recording circuit when the selecting circuit connects one of the plurality of probes to the signal recording circuit.
  • Fig. 1 is a diagram showing an example of a construction of a control circuit for a multiprobe according to the first embodiment of the invention.
  • the control circuit shown in the embodiment relates to a circuit to control the distance between a plurality of probes which detect a tunnel current and a medium which faces those probes.
  • a digital servo system such that a tunnel current signal from each probe is converted into a digital signal by using a control CPU 114 and a control signal to sequentially control each probe in the Z direction is produced from the digital signal according to a timing from the control CPU 114.
  • Each of a plurality of probes 1011, 1012 , ..., 101 n constructing the multiprobe 101 is connected to a selecting circuit 102.
  • the selecting circuit 102 selects either one of the probes 1011 to 101 n , for instance, the nth probe.
  • a tunnel current signal In detected by the selected nth probe is converted into a voltage value and is subsequently converted into a digital value In(t) by an A/D converter 103 (t denotes a predetermined sampling time).
  • the digital tunnel current signal is converted into a linearization signal corresponding to the distance between the probe and the medium by a logarithmic converter 104 [in the diagram: logIn(t)].
  • An output of the logarithmic converter 104 is supplied to a comparator 105, by which it is compared with a set value of a servo circuit.
  • An error signal [in the diagram: errn(t)] is derived from the comparator 105.
  • the control CPU 114 addresses a memory 111 of the number of the selected probe.
  • a compensation amount (g1 to gn) corresponding to the probe number is generated from the memory 111 to a compensation circuit 106.
  • the compensation circuit 106 multiplies the compensation coefficient gn from the memory 111 to the output errn(t) from the comparator 105, thereby obtaining a compensation error signal [in the diagram: en(t)].
  • Reference numeral 107 denotes a control circuit to produce a distance control signal [in the diagram: Un(t)] to set the compensation error signal to zero.
  • a PI (Proportional + Integral) control circuit is used as a control circuit 107.
  • the PI control circuit 107 produces a new distance control signal Un(t) at a time (t) from the distance control signal and compensation error signal data at a sampling time (t-1) stored in memories 112 and 113 and from the compensation error signal en(t) at the sampling time (t).
  • the PI control circuit 107 updates the values in the memories 112 and 113.
  • the distance control signal Un(t) is again converted into the analog signal by a D/A converter 108.
  • the analog signal is supplied to an actuator (not shown) to drive the probe of the corresponding number in the Z direction by a switching circuit 109.
  • the control CPU 114 sequentially switches the probe to be selected and performs the Z direction control to all of the probes.
  • the actuator is set into a floating state for a period of time from a time point when the signal has once been applied to the actuator to a time point when the signal is again supplied to the same actuator. For this period of time, the control voltage is held by a capacity between the electrodes of the actuator, so that a displacement of the actuator is held.
  • Each of the above digital arithmetic operating/converting circuits 103 to 108 can be operated at an enough high speed faster than the sampling period. However, it is also possible to execute what is called a pipeline process such that a data storing memory is provided for each arithmetic operation. By using the pipeline process, each of the operating/converting circuits 103 to 108 can reduce the operating frequency to the sampling frequency, so that the size and costs of the circuit can be decreased.
  • Fig. 2 is a block diagram of a control system in the control circuit shown in Fig. 1.
  • servo control system in Fig. 1 is a digital servo system
  • the sampling interval is generally equal to a few ⁇ sec and is sufficiently smaller than that of the control signal band.
  • the operation of the compensation circuit in Fig. 1 will be described in detail with reference to Fig. 2.
  • Ga(s): 200 denotes a block indicative of converting characteristics from a displacement of the multiprobe to the tunnel current.
  • Gb(s): 201 denotes a block showing converting characteristics of the logarithmic converter.
  • Gc(s): 202 denotes a block showing the compensation circuit.
  • Gd(s): 203 denotes a block showing the PI control circuit.
  • Ga(s): 204 denotes a block showing converting characteristics from the voltage of the Z driving device of the multiprobe to the displacement.
  • V B denotes a bias voltage between the probe and the medium; ⁇ 1 to ⁇ n indicate work function values of the probes; G1(s) to Gn(s) indicate converting characteristics from the voltage of the Z driving device of each multiprobe to the displacement; and a, Kp, Ki show constants.
  • the work function value varies.
  • the work function values ⁇ 1 to ⁇ n and the converting characteristics from the voltage of the Z driving device to the displacement, namely, G1(s) to Gn(s) differ every probe.
  • Fig. 3 is a diagram showing a construction of an embodiment of an information processing apparatus which has the control circuit and multiprobe as mentioned above and uses an STM.
  • Reference numeral 301 denotes a mutliprobe head. A method of forming the multiprobe head 301 will now be described with reference to Figs. 4A and 4B.
  • Fig. 4A shows a structure of one probe of the multiprobe head.
  • Fig. 4B is a cross sectional view taken along the line A-B in Fig. 4A.
  • reference numeral 401 denotes an Si substrate; 402 and 408 SiNx layers; 403, 405, and 407 electrodes for driving; 404 and 406 piezoelectric thin films; 409 a tip of the probe; and 410 an electrode for the tip.
  • the cantilever shown in Fig. 4A has a Bimorph structure. By applying a voltage to the cantilever, it is deformed due to a reverse piezoelectric effect. A manufacturing process of the cantilever will now be described hereinbelow.
  • an Si3N4 film having a thickness of 0.15 ⁇ m is formed on an Si (100) substrate (having a thickness of 0.5 ⁇ m) by a CVD method. Material gases of SiH2C12: NH3 (1:9) are used. A substrate temperature is set to 800°C. The Si3N4 film is patterned into a desired shape by a photolithography and a CF4 dry etching. Subsequently, a Cr film having a thickness of 0.01 ⁇ m and an Au film having a thickness of 0.09 ⁇ m are formed and are patterned by a photolithography and a wet etching.
  • a piezoelectric thin film of AlN having a thickness of 0.3 ⁇ m is formed by a sputtering method.
  • Al is used as a target and the AlN thin film is sputtered in the atmosphere of Ar + N2. Further, the AlN thin film is patterned by a photolithography and a wet etching using an etchant for Al. After that, the above processes are repeated, thereby forming a Bimorph structure of Si substrate - Au/Cr - AlN - Au/Cr - AlN - Au/Cr. Further, an amorphous SiN film having a thickness of 0.15 ⁇ m is formed as a protective layer by a CVD method.
  • a tungsten (W) tip is formed by an evaporating method. Portions without Si3N4 are removed by using an anisotropic etching of Si by KOH, thereby forming a cantilever. Finally, the W tip is coated with Pt. Dimensions of one cantilever are equal to 700 ⁇ m (length) x 230 ⁇ m (width), a resonance frequency in the Z direction is equal to 3.3 kHz, and an average displacement amount of the Bimorph when a voltage of 1 V is applied is equal to 1.75 ⁇ m. Total 25 (5 x 5) probes of such a cantilever type are formed in a matrix shape onto an Si wafer.
  • a tunnel current detecting amplifier is further formed near the cantilever type probes on the Si wafer by using an IC process, thereby forming the multiprobe head 301. Displacement sensitivities of 25 probes were measured by an optical method, so that there was a variation of about 20%.
  • Reference numeral 302 denotes a sample to be observed.
  • the multiprobe head 301 faces in close vicinity to the sample 302.
  • the head 301 is attached to an actuator 303 as a fine moving mechanism and, further, to a structure 309.
  • the actuator 303 is controlled by an actuator control signal S31 which is generated from a control circuit 305.
  • the actuator 303 When the surface is observed, in a state in which a bias voltage was applied between the multiprobe head 301 and the sample 302, the actuator 303 is moved while correcting an inclination.
  • the head 301 is allowed to approach the sample 302 up to a distance such that tunnel currents flow from all of the probes.
  • a servo control is applied by a Z direction control circuit 304, which has already been described in detail in Fig. 1, so as to keep constant the distance between all of the probes and the sample 302 which faces them.
  • the control circuit 305 In this state, the control circuit 305 generates an XY scanning signal S32.
  • the XY scanning signal S32 is supplied to an XY scanning mechanism 310 attached to the structure 309, thereby two-dimensionally scanning a base plate 307 on which the sample 302 is put.
  • a tunnel current which changes in accordance with the micro concave and convex portions of the surface of the sample 302 is detected.
  • the detected tunnel current is sent to the control circuit 305 and processed synchronously with the XY scanning signal S32, STM images from 25 probes are obtained.
  • the STM images are subjected to an image process such as a two-dimensional FFT or the like and all of the 25 image planes of the processed STM images are synthesized and displayed on a display 308.
  • an observing position is changed, the sample is moved in the XY direction by an XY coarse moving mechanism (not shown) and the multiprobe head 301 is moved to a desired region, thereby executing the observation.
  • the tunnel current signal from the head 301 is compensated by the Z direction control circuit 304, thereby performing the Z direction control.
  • the compensation data to execute the Z direction control is stored into a memory 311 and the Z direction control as described in Fig. 1 is executed.
  • the multiprove head in order to obtain the accurate compensation data which is not influenced by the micro concave and convex portions of the surface of the sample, the multiprove head is allowed to face a standard sample such as HOPG, Si, or the like which is flat for a wide area prior to observing the surface of the sample. All of the probes are modulated in the Z direction ( ⁇ Un) on the standard smaple.
  • the tunnel current signal from each probe and, further, the logarithmic converter output ( ⁇ Vn) are monitored.
  • the multiprobe head having a plurality of probes can be controlled by a small control circuit and the surface of a sample having a wide area can be observed in a short time.
  • the cantilever used in the invention is formed by laminating the piezoelectric thin film of AlN, ZnO, or the like, and the metal thin film, a voltage breakdown easily occurs by applying a voltage of a few V and a destruction of the piezoelectric thin film easily occurs due to the static electricity, charging, or the like.
  • a voltage breakdown easily occurs by applying a voltage of a few V and a destruction of the piezoelectric thin film easily occurs due to the static electricity, charging, or the like.
  • the cantilever type actuator using the reverse piezoelectric effect of the piezoelectric device has been used as a Z direction actuator.
  • the actuator is not limited to such a type but, for example, it is also possible to use an actuator using an electrostatic force.
  • an interatomic force microscope (AFM) having a multiprobe is used, and the AFM can be also applied to the circuit which has a circuit for correcting a variation in elastic constants of the probes and which controls the distance between the probe and the sample.
  • AFM interatomic force microscope
  • the circuit for adjusting the closed loop gain of the Z servo circuit has been constructed as a compensation circuit.
  • the adjustment item is not limited to the gain but it is also possible to construct a filter circuit for compensating transient characteristics of the displacement due to a variation in mechanical Q value of the actuator as a control target or a compensation circuit of a phase compensation or the like.
  • Fig. 5 is a schematic diagram of the second embodiment of a recording/reproducing apparatus as an information processing apparatus according to the invention.
  • reference numeral 501 denotes a recording medium.
  • a multiprobe head 502 similar to that shown in the embodiment 1 faces in close vicinity to the recording medium 501.
  • the head 502 is attached to a fine moving mechanism such as a stacked piezoelectric device or the like (not shown).
  • the fine moving mechanism allows the head 502 to approach the recording medium 501.
  • Reference numeral 503 denotes an XY scanning circuit; 504 and 505 actuators for respectively driving in the X and Y directions a stage 506 on which the recording medium 501 is put; and 507 a control circuit to perform the data input/output operations and the Z direction control every probe.
  • a recording medium such that a material having a memory effect for switching characteristics of a voltage current was formed on a substrate is used as a recording medium 501.
  • a substrate such that metal was epitaxially grown on a flat substrate such as glass, mica, or the like is prepared.
  • a material having the memory effect for the switching characteristics of a voltage current squalillium-bis-6-octylazulene is used and formed on the substrate.
  • An accumulated film of two layers of monomolecular films is formed on a substrate electrode by a Langmuir-Blodgett's technique (LB technique).
  • LB technique Langmuir-Blodgett's technique
  • a concave-like groove or a tracking pattern 508 having different surface electron states is notched on the recording medium 501.
  • a tracking pattern edge position is detected from the tunnel current change of the probe by a tracking control circuit 509.
  • a tracking error is corrected by a tracking actuator 510.
  • a bias voltage of 100 mV is applied between the multiprobe head 502 and the recording medium.
  • the head 502 is allowed to approach the recording medium 501 by the fine moving mechanism such as a stacked piezoelectric device or the like (not shown) up to a distance such that tunnel currents flow from all of the probes.
  • a servo control is applied so as to keep constant the distances between all of the probes and the recording medium which faces them by the Z direction control circuit provided in the control circuit 507 and already described in detail in Fig. 1.
  • the XY scanning circuit 503 generates an XY scanning signal S51.
  • the XY scanning signal S51 is supplied to the actuators 504 and 505, thereby two-dimensionally scanning the stage 506 on which the recording medium 501 is carried.
  • the recording was performed as follows. A servo control is applied up to a degree such that tunnel currents of 1 nA flow from all of the probes and the head is allowed to sufficiently approach the recording medium. In this state, the probe is moved to a desired position of the recording medium 501. After that, the bias voltage is modulated and a pulse voltage of 6V is applied between the probe and the recording medium, so that a pit having a diameter of 10 nm ⁇ such that a current of about 0.1 ⁇ A instantaneously flows is formed (recorded). When the recording medium is scanned after the pulse voltage was applied, its state is held (reproduced). Therefore, a pit in such a low resistance state is made correspond to "1" and is distinguished from "0" indicative of a high resistance state. By encoding the recording data to "0" and "1" by an encoder, the binarization recording or reproduction is executed.
  • the tunnel current signal from the multiprobe is compensated and the Z direction control is executed.
  • the compensation data for this purpose has been stored in a memory 511.
  • all of the probes are modulated in the Z direction ( ⁇ Un) on the recording medium 501 prior to the recording or reproduction.
  • the tunnel current signal from each probe further, the logarithmic converter output ( ⁇ Vn) are monitored.
  • the transfer characteristics Gmulti ⁇ Vn/ ⁇ Un of the logarithmic converter output are measured from the PI control output Un from each probe, thereby determining a compensation amount.
  • Fig. 6 shows an example of a construction of a control circuit of a multiprobe in the third embodiment of the invention.
  • the tunnel current signal from each probe is converted into the digital signal by using a control CPU 612 and a digital servo system for generating a control signal to sequentially Z control each probe on the basis of a timing signal from the control CPU 612 from the digital signal is constructed.
  • the tunnel current signal is detected while performing the position control of each probe.
  • the Z control of the multiprobe will be first explained in detail with reference to Fig. 6.
  • the tunnel current signals from a multiprobe head 601 shown by probe numbers 6011 to 601 n are connected to a selecting circuit 602.
  • the selecting circuit 602 selects one of the probes 6011 to 601 n of the multiprobe head 601, for example, the nth probe 601 n .
  • the tunnel current signal (in the diagram: In) which is detected from the selected nth probe is converted into the voltage. After that, the voltage is converted into the digital signal (in the diagram: In(t), t denotes a certain sampling time) by an A/D converter 603.
  • the digital tunnel current signal is linearized (in the diagram: logIn(t)) by a logarithmic converter 604 for a change in distance between the probe and the medium (or sample).
  • An output of the logarithmic converter 604 is supplied to a comparator 605, by which it is compared with a set value of the servo circuit.
  • An error signal (in the diagram: en(t)) is derived from the comparator 605.
  • a PI (Proportional + Integral) control circuit 606 produces a distance control signal Un(t) so as to set the error signal into zero.
  • the PI control circuit 606 Produces a new distance control signal Un(t) at a time (t) from a distance control signal Un(t-l) and error signal data en(t-l) at a sampling time (t-l) and from a compensation error signal en(t) at a sampling time (t).
  • the distance control signal Un(t) is again converted into the analog signal by a D/A converter 607.
  • the analog signal is supplied to an actuator to drive the probe of the corresponding number in the Z direction by a switching circuit 608.
  • the control CPU 612 sequentially switches the probes to be selected and performing the Z control to all of the probes.
  • the actuator For a period of time from a time point after the signal was once supplied to the actuator to a time point when the signal is again supplied to the same actuator, the actuator is set into a floating state. For this period of time, the control voltage is held by the capacity between the electrodes of the actuator. A displacement of the actuator is held.
  • the tunnel current signal from each probe is compensated by a compensation circuit 609, so that a compensation current signal 610 is derived.
  • the operation of the compensation circuit 609 will now be described.
  • the logarithmic conversion output of the tunnel current signal detected from each probe is proportional to the distance between the probe and the medium or sample which faces the probe as mentioned above.
  • the STM fetches such an output as a detection signal and processes.
  • the control CPU 612 In a state in which the tunnel currents can be detected from all of the probes, the control CPU 612 generates a Z modulation signal for moving the whole multi probe head in parallel in the Z direction, thereby modulating all of the probes in the Z direction ( ⁇ Z).
  • the output ( ⁇ Vn) of the logarithmic converter 604 from each probe is monitored.
  • the transfer characteristics Gmulti ⁇ Vn/z of the output of the logarithmic converter 604 for the Z change in height with respect to each probe were measured.
  • the coefficient gn of the compensation circuit was determined so as to keep those transfer characteristics constant for all of the probes.
  • Fig. 7 shows a diagram of a structure of an STM having a multiprobe head as an embodiment of the information processing apparatus having the control circuit mentioned above.
  • Reference numeral 701 denotes a multiprobe head.
  • Fig. 8A is a diagram showing a structure of one probe of the multiprobe head.
  • Fig. 8B is a cross sectional view taken along the line A-B in Fig. 8A.
  • reference numeral 1001 denotes an Si substrate; 1002 and 1008 SiNx layers; 1003, 1005 and 1007 electrodes for driving; 1004 and 1006 piezoelectric thin films; 1009 a tip of probe; and 1010 an electrode for the tip.
  • the cantilever has a Bimorph structure. When a voltage is applied, a displacement occurs in the cantilever due to a reverse piezoelectric effect.
  • an Si3N4 film having a thickness of 0.15 ⁇ m is formed onto an Si (1001) substrate having a thickness of 0.5 ⁇ m by a CVD method. Material gases of SiH2Cl2: NH3 (1 : 9) are used. A substrate temperature is equal to 800°C.
  • the Si3N4 film is patterned into a desired shape by a photolithography and a CF4 dry etching. Subsequently, a Cr film having a thickness of 0.01 ⁇ m and an Au film having a thickness of 0.09 ⁇ m are formed and are patterned by a photolithography and a wet etching.
  • a piezoelectric thin film of AlN having a thickness of 0.3 ⁇ m is formed by a sputtering method.
  • Al is used as a target and is sputtered in the atmosphere of (Ar + N2). Further, the piezoelectric thin film is patterned by a photolithography and a wet etching using an etchant for Al. After that, the above processes are repeated, thereby finally forming a Bimorph structure of the Si substrate - Au/Cr - AlN - Au/Cr - AlN - Au/Cr. Further, an amorphous SiN film having a thickness of 0.15 ⁇ m is formed as a protective layer by a CVD method.
  • a tungsten (W) tip is formed by an evaporating method.
  • the portions without Si3N4 are removed by using an anisotropic etching of Si by KOH, thereby forming a cantilever.
  • the W tip is coated with Pt.
  • the dimensions of one cantilever are set to 700 ⁇ m (length) x 230 ⁇ m (width).
  • a resonance frequency in the Z direction is set to 3.3 kHz.
  • An average displacement amount of the Bimorph when the voltage of 1 V is applied is equal to 1.75 ⁇ m.
  • Total 25 (5 x 5) cantilever type probes are arranged in a matrix shape. Further, a tunnel current detecting amplifier is constructed near the cantilever type probe on the Si wafer by using an IC process, thereby obtaining the multiprobe head 701.
  • Reference numeral 702 denotes a sample to be observed.
  • the multiprobe head 701 faces in close vicinity to the sample 702.
  • the head 701 is attached to an actuator 703 as a fine moving mechanism and, further, to a structure 709.
  • the actuator 703 When the surface is observed, in a state in which a bias voltage is applied between the head 701 and the sample 702, the actuator 703 is moved while correcting the inclination.
  • the head 701 is allowed to approach the sample 702 up to a distance such that the tunnel currents flow from all of the probes.
  • a servo control is applied by a Z control circuit 704 already described in Fig. 6 so as to keep constants the distances between all of the probes and the sample which faces them.
  • a control circuit 705 generates an XY scanning signal 706.
  • the XY scanning signal 706 is supplied to an XY scanning mechanism 710 attached to the structure 709, thereby two-dimensionally raster scanning a base plate 707 on which the sample 702 is put.
  • a tunnel current which changes due to the micro concave and convex portions of the surface of the sample is detected.
  • the tunnel current is sent to the control circuit 705 and processed synchronously with the XY scanning signal.
  • the STM images from 25 probes can be derived. Further, the STM images are subjected to an image process such as a two-dimensional FFT or the like. All of the 25 processed image planes are synthesized and displayed on a display 708.
  • the sample is moved in the XY direction by an XY coarse moving mechanism (not shown) and the multiprobe head 701 is moved to a desired region, and the sample is observed.
  • the control circuit 705 compensates the tunnel current signal from the multiprobe head and supplies as a concave/convex signal to the display.
  • the compensation data for this purpose is stored in a memory 711 and the current signal is compensated as described in Fig. 6.
  • the multiprobe head is arranged so as to face a standard sample of HOPG, Si, or the like which is flat and uniform for a wide area.
  • the whole probe head is simultaneously modulated ( ⁇ Z) in the Z direction by using an actuator (not shown).
  • the logarithmic converter output ( ⁇ Vn) from each probe is monitored.
  • the transfer characteristics Gmulti ⁇ Vn/Z of the logarithmic converter output for the Z change in height with respect to each probe were measured. By measuring them, a variation in sensitivity of the tip of each probe can be calculated.
  • the coefficient gn of the compensation circuit was determined so as to keep such variations constant for all of the probes. Thus, stable STM images can be similarly obtained from all of the probes without being influenced by the sensitivity variation of the tip of each probe.
  • the multiprobe head having a plurality of probes can be controlled by a small control circuit and the surface of the sample having a wide area can be observed in a short time.
  • the cantilever type actuator using the reverse piezoelectric effect of the piezoelectric device has been used as a Z direction actuator
  • the actuator is not limited to such a type but, for example, an actuator using an electrostatic force can be also used.
  • an interatomic force microscope (AFM) having a multiprobe is used and the AFM can be also applied to a circuit for compensating a signal of the distance between the probe and the sample or the force which is caused due to a variation in elastic constant of the probe.
  • Fig. 9 is a schematic diagram of a recording/reproducing apparatus as an information processing apparatus as a fourth embodiment according to the invention.
  • Reference numeral 801 denotes a recording medium.
  • a multiprobe head 802 similar to that shown in the embodiment 3 faces in close vicinity to the recording medium 801.
  • the head 802 is attached to a fine moving mechanism such as a stacked piezoelectric device or the like (not shown). The fine moving mechanism allows the head 802 to approach the recording medium 801.
  • Reference numeral 803 denotes an XY scanning circuit; 804 and 805 actuators for respectively driving in the X and Y directions a stage 806 on which the recording medium 801 is put; and 807 a control circuit to perform the data input/output operations and the Z direction control of each probe.
  • a medium such that a material having a memory effect for the switching characteristics of a voltage current was formed on a substrate is used.
  • a substrate such that gold was epitaxially grown on a flat substrate of glass, mica, or the like is prepared.
  • squalillium-bis-6-octylazulene is used as a material having a memory effect for the switching characteristics of the voltage current and an accumulated film of two layers of monomolecular films is formed onto a substrate electrode by a Langmuir-Blodgett's technique (LB technique).
  • LB technique Langmuir-Blodgett's technique
  • a concave-like groove or a tracking pattern 808 having different surface electron states is notched on the recording medium 801.
  • a tracking pattern edge position is detected by a tracking control circuit 809 from the tunnel current change of the probe.
  • a tracking error is corrected by a tracking actuator 810.
  • a bias voltage of 100 mV is applied between the multiprobe head 802 and the recording medium 801.
  • the head 802 is allowed to approach the recording medium 801 by a fine moving mechanism such as a stacked piezoelectric device or the like (not shown) up to a distance such that tunnel currents flow from all of the probes.
  • a servo control is applied so as to keep constants the distances between all of the probes and the sample which faces them by the Z control circuit provided in the control circuit 807 and already described in detail in Fig. 6.
  • the XY scanning circuit 803 generates an XY scanning signal.
  • the XY scanning signal is sent to the actuators 804 and 805, thereby two-dimensionally scanning the stage 806 on which the recording medium 801 is put.
  • the recording was performed as follows. A servo control is applied up to a degree such that the tunnel currents of 1 nA flow from all of the probes, thereby allowing the head to approach the recording medium. In this state, the probe is moved to a desired position of the recording medium 801. After that, the bias voltage is modulated. A pulse voltage of 6 V is applied between the probe and the recording medium. A pit having a diameter of 10 nm ⁇ such that a current of about 0.1 ⁇ A instantaneously flows is formed (recorded). When the recording medium is scanned after the pulse voltage was applied, its state is held (reproduction). Therefore, the pit in such a low resistance state is made correspond to "1" and is distinguished from "0" indicative of a high resistance state. By encoding the recording data into “0" and "1” by an encoder, thereby performing the binarization recording or reproduction.
  • the tunnel current signals from the multiprove are compensated, thereby performing the signal recording and reproduction.
  • the control circuit will now be described with reference to Fig. 10.
  • the tunnel current signal from each probe is converted into the digital signal by using a control CPU 918 and a digital servo system for generating a control signal to sequentially Z control each probe on the basis of a timing signal from the control CPU 918 from the digital signal is constructed.
  • the tunnel current signal is detected while executing the position control of each probe.
  • the tunnel current signals from a multiprobe head 901 having probes 9011 to 901 n are connected to a selecting circuit 902. In accordance with the timing from the control CPU, the selecting circuit 902 selects one of the probes of the multiprobe head 901, for example, the nth probe 901 n .
  • the tunnel current signal (In) from the selected nth probe is converted into the digital signal by an A/D converter 903 and is linearized by a logarithmic converter 904, so that a signal (in the diagram: logIn(t)) which linear to a change in distance between the probe and the medium is obtained.
  • An output of the logarithmic converter 904 is supplied to a comparator 905, by which it is compared with a set value of the servo circuit.
  • An error signal (in the diagram: en(t)) is derived from the comparator 905.
  • a PI control circuit 906 produces a distance control signal Un(t) so as to set the error signal to zero.
  • the distance control signal Un(t) is again converted into the analog signal by a D/A converter 907 and is supplied to the actuator to drive the probe of the corresponding number in the Z direction by a switching circuit 908.
  • the control CPU 918 sequentially switches the probes to be selected, thereby Z controlling all of the probes.
  • the tunnel current signal from each probe is compensated by a compensation circuit 909, so that a compensation current signal 919 is derived.
  • a ⁇ variation of each probe results in an amplitude variation of the output of the logarithmic converter 904.
  • the compensation circuit 909 compensates the gain of the output of the logarithmic converter 904, thereby obtaining the compensation current signal 919.
  • the compensation current signal having no level difference is supplied to a demodulator 910, thereby obtaining a reproduction signal 912. Therefore, the coefficients (gn) which differ every probe are stored into a memory 911 and the coefficient is multiplied to the output from each probe.
  • a measuring method of the coefficient is similar to that in the embodiment 3.
  • a Z modulation signal to move the whole multiprobe head in parallel in the Z direction is generated, thereby modulating all of the probes in the Z direction ( ⁇ Z).
  • the control CPU 918 also executes the recording control by a compensation circuit 915 so as to eliminate an influence by the probe variation.
  • the work function value of the probe changes in dependence on a contamination of the probe or the like. Namely, the tip of the probe of a low sensitivity is covered by a polluted layer. Even when a recording voltage signal is applied by such a probe, no voltage is applied to the recording layer of the recording medium or a current flowing in the recording layer is limited, so that a recording error is caused. Therefore, the compensation circuit 915 adjusts the recording voltage amplitude every probe.
  • a pulse voltage height of 6 V as an ordinary recording voltage is compensated to max. 10 V and is stored as a compensation recording voltage into a memory 920.
  • a recording signal 913 is modulated by a modulator 914. After that, the modulated signal is supplied to a recording circuit 916 as a voltage signal to be applied to each probe by the compensation circuit.
  • the control CPU 918 sequentially selects the probes by a switching circuit 917.
  • the recording circuit 916 supplies the recording voltage signal to the selected probe in accordance with the recording data, thereby recording the digital data.
  • the recording voltage has been compensated so as to compensate the tip variation of the probe.
  • the invention can be also applied to a control circuit to compensate the recording voltage value every probe so as to set off a macro variation of the medium (for example, thickness variation of the LB film of the recording medium).
  • An item to be compensated is not limited to the voltage value upon recording. It is also possible to compensate in a manner such that the current which is applied for recording, the recording time, or the like is made different every probe in accordance with the recording medium.
  • a recording/reproducing apparatus is not limited to an apparatus such that the probe two-dimensionally XY raster scanning onto the recording medium as shown in the embodiment.

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  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Pulse, Heart Rate, Blood Pressure Or Blood Flow (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Hardware Redundancy (AREA)
  • Communication Control (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
EP93114502A 1992-09-10 1993-09-09 Informationsverarbeitungsgerät mit Multisondensteuerung Expired - Lifetime EP0587165B1 (de)

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JP24224692 1992-09-10
JP242246/92 1992-09-10
JP24224692 1992-09-10
JP21312093 1993-08-27
JP213120/93 1993-08-27
JP21312093A JP3246987B2 (ja) 1992-09-10 1993-08-27 マルチプローブ制御回路を具備する情報処理装置

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PL423392A1 (pl) * 2017-11-08 2019-05-20 Kantoch Eliasz Sposób i urządzenie do pomiaru i sygnalizacji wartości biosygnałów

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EP0587165A3 (de) 1995-01-25
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US5471458A (en) 1995-11-28
JP3246987B2 (ja) 2002-01-15
DE69325860T2 (de) 2000-03-09
EP0587165B1 (de) 1999-08-04
ATE183012T1 (de) 1999-08-15

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