EP0388333B1 - Dispositif pour l'exécution de traitements thermiques enchainés en continu sous vide - Google Patents
Dispositif pour l'exécution de traitements thermiques enchainés en continu sous vide Download PDFInfo
- Publication number
- EP0388333B1 EP0388333B1 EP90420136A EP90420136A EP0388333B1 EP 0388333 B1 EP0388333 B1 EP 0388333B1 EP 90420136 A EP90420136 A EP 90420136A EP 90420136 A EP90420136 A EP 90420136A EP 0388333 B1 EP0388333 B1 EP 0388333B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- cell
- airtight chamber
- treatment
- loading
- unloading
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
- C21D1/74—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material
- C21D1/773—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material under reduced pressure or vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/02—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity of multiple-track type; of multiple-chamber type; Combinations of furnaces
- F27B9/028—Multi-chamber type furnaces
Definitions
- the present invention relates, in general, to an installation intended for the treatment of parts under a controlled atmosphere.
- the carburizing of metal parts is generally carried out by bringing the parts immersed in a given gas under very low pressure to high temperature.
- certain hardenings of metal parts are obtained by placing these parts in a stream of inert gas under high pressure.
- the parts can be brought into a first cell in which the case hardening takes place, then transferred to another cell in which the hardening takes place. It is then necessary to avoid contact with the ambient air during the transfer by keeping the parts under vacuum.
- This document describes an installation comprising several cells arranged in a circle, each having an opening downwards and comprising a rotary table which can go up or down in a sealed enclosure and which has the same number of parts locations as cells. In the assembled position, this table simultaneously brings the parts into the different cells and at the same time causes these cells to be sealed. When the treatment is completed in each of the cells, the table is lowered and turned so as to pass the pieces successively through each cell. One of the cells is used for loading and unloading parts.
- the table must be dimensioned so as to be able to support an equal number of pieces to be treated and cause rotation and the ascent of these pieces. In this case, the installation is really very important and expensive.
- the parts must remain for the same duration in each of the cells, this duration corresponding to the longest treatment time. This causes some cells to be underused. This underemployment is relatively significant for certain applications such as for example in the case of case hardening, the duration of which is generally between fifteen and sixty minutes and of quenching, the duration of which is generally between five and fifteen minutes.
- the installation described in document EP-A-0 236 639 comprises a means making it possible to transfer individually each part to be treated in the different cells passing through a sealed enclosure with which the cells communicate.
- the seal between the cells and the sealed enclosure is obtained by supporting the parts.
- all cells are closed with the same type of closure system.
- the same installation provides a treatment cell working at very low pressure and another cell working at high pressure, it is difficult, if not impossible, to obtain a correct closure of each of these cells with a single type of closure system.
- the supports of the parts are subjected to numerous constraints, in particular the weight of the parts and impacts, which can end up deforming the part of the supports serving to obtain the seal, and therefore deteriorate the quality of the seal.
- the present invention overcomes the aforementioned drawbacks.
- the invention therefore relates to a treatment installation under a controlled atmosphere of one or more parts forming a charge, comprising a sealed enclosure; at least one treatment cell fixed to a substantially horizontal upper wall of the sealed enclosure and capable of communicating with the sealed enclosure to allow the transfer of the charge between the treatment cell and the sealed enclosure; at least one load loading and unloading cell; means for handling the loading and unloading cell to move it between a position remote from the sealed enclosure and a position of communication with the sealed enclosure through said upper wall; at least one means for transferring a single charge from one cell to another passing through the sealed enclosure.
- Each loading and unloading and processing cell comprises a load suspension means, from which it follows that the cell can be closed at its lower part by means of closing independent of a load support and suspension means ( 19) and load transfer.
- the handling means forms, in association with the load suspension means in the loading and unloading cell, a handling device for picking up and depositing the load on the transfer means or outside the watertight enclosure.
- At least one of the treatment cells is intended to perform a heat treatment under low pressure and communicates with the sealed enclosure during the treatment.
- Figure 1 shows the essential elements of an installation according to the invention.
- a sealed enclosure 2 of cylindrical shape and vertical axis 3 is placed on a generally horizontal floor 1.
- the enclosure 2 comprises a font 4, a cylindrical side wall 5 and a flat and horizontal upper wall 6.
- the upper wall 6 has several openings of which only two, 7 and 8, are visible in FIG. 1.
- Each heat treatment is carried out in a specific cell.
- a single processing cell 10 is shown. This cell 10 has the general shape of a cylinder closed in its upper part and open in its lower part.
- the cell 10 is coupled to the sealed enclosure 2 at the opening 8, so that it communicates with the interior of the sealed enclosure 2.
- the treatment cell 10 is itself sealed as well as its attachment on the upper wall 6 of the sealed enclosure 2.
- the installation according to the invention also comprises a bracket 11 consisting mainly of a column 12 which can pivot around a vertical axis and of an arm 13 rotating with the column and carrying at its end a cell 15 intended for loading and unloading of the parts to be treated.
- the loading and unloading cell 15 has a downwardly open cylindrical shape similar to the shape of the processing cells 10.
- a part 17 intended to undergo one or more treatments using the installation.
- the part to be treated 17 is in fact generally a set of parts (load) arranged on a support.
- the support responsible for the parts to be treated will be called a part.
- the part 17 is provided at its upper part with a nozzle 18.
- the bracket 11 When it is desired to treat a part 17, this part is deposited on the base 16, the bracket 11 is maneuvered so that the loading and unloading cell 15 is positioned above part 17, then descends on it.
- a gripping member 19 is disposed inside the cell 15 in its upper part and hooks the end piece 18 connected to the part 17 so that the part 17 is found suspended inside the cell 15. ( No part has been shown suspended inside the loading and unloading cell 15).
- the part 17 is thus suspended inside the cell 15, the jib 11 is actuated in rotation so as to bring the loading and unloading cell 15 above the sealed enclosure 2 (cell shown in dashed lines).
- the loading and unloading cell 15 is then left to rest on the upper wall 6, at its passage 7.
- a valve 20 making it possible to establish the sealed opening or closing between the loading and unloading cell 15 and the interior of the sealed enclosure 2.
- the loading and unloading cell 15 When the loading and unloading cell 15 is thus positioned on the sealed enclosure 2, it is fixed there so waterproof. The interior of the sealed enclosure 2 is maintained under vacuum using a first pumping device (not shown). When the loading and unloading cell 15 is thus coupled, the vacuum is carried out inside the cell using a second pumping device (not shown), then the valve 20 is opened.
- This handling device 21 allowing the handling of the parts to be treated and forming an elevator.
- This handling device constituting an elevator 21 can move by turning around the vertical axis 3 and come to the level of the loading and unloading cell 15.
- the elevator 21 is then placed in the high position so as to come to support from below the part 17 kept hitherto suspended inside the loading and unloading cell 15.
- the gripping member 19 is unlocked, the elevator 21 is lowered and the part is then found inside the enclosure watertight 2.
- the handling device 21 is then actuated in rotation about the axis 3 so as to be positioned at one of the treatment cells 10. In this position, the elevator 21 is actuated so as to make mount the part to be treated 17 to come and house it inside the treatment cell 10.
- a gripping member 23 comes to grip the upper endpiece 18 linked to the part 17, so that the latter is suspended from the 'int outside of the processing cell 10, as shown in FIG. 1. Processing can then take place in cell 10.
- the handling device 21 can pick up the part thus treated 17, bring it back inside the sealed enclosure 2 and then transport it to another treatment cell, to carry out the following treatment there.
- the part 17 has undergone all the desired treatments, it is brought back using the handling device 21 inside the loading and unloading cell 15 coupled to the sealed enclosure 2.
- the valve 20 restore the atmospheric pressure in the cell 15, disconnect it from the sealed enclosure 2 and bring the cell 15, using the bracket 11, to an unloading area where the treated part 17 is deposited.
- the loading and unloading cell 15 constitutes a means of handling the part 17 to bring it into the loading or unloading position and also constitutes an airlock for introduction into the sealed enclosure 2 avoiding any entry of air. in this enclosure.
- FIG. 2 a distinction is made between the sealed enclosure 2 and two treatment cells 30 and 31. Only two treatment cells have been shown so as to clarify the drawing. In fact, as shown in FIG. 3, the installation comprises five treatment cells 30, 31, 32, 33 and 34.
- the processing cell 30 is a cementation cell. It includes a heating system 40 for the part to be treated 17 which allows it to be brought to a temperature close to 1000 ° C.
- a device for introducing (not shown) a carburizing gas is formed in the periphery of the cell 30.
- the carburizing gas which expands at very low diffuse pressure in the cell, passes into the sealed enclosure 2 and is evacuated by the pumping system (not shown) from the sealed enclosure 2.
- Hinged members 41, 42 form a thermal screen during the cementation operation, in order to prevent the radiation from reaching the sealed enclosure 2 and n 'Student its temperature. These heat shields 41, 42 do not close the opening between the cell 30 and the sealed enclosure 2, the carburizing gas thus being able to flow freely from the cell 30 to the enclosure 2.
- a partition 44 of cylindrical shape with a vertical axis 3 corresponding to the axis of symmetry of the enclosure 2 is disposed inside the sealed enclosure 2.
- This partition 44 carries at its outer periphery a guide ring 45 allowing the rotational movement around the axis 3 of the handling device 21.
- the elevator 21 can be brought opposite the treatment cell 31.
- the processing cell 31 performs a quenching using a gas.
- the quenchings carried out by a gas are obtained with an inert gas under a relatively high pressure, of the order of 2 to 5 bars. Consequently, in a treatment cell of this type, it is necessary to have between the cell 31 and the sealed enclosure 2 a valve 46, or any other means for closing the passage 8.
- the valve 46 Before loading the part 17 in the quenching cell 31 the valve 46 is closed, the cell 31 is evacuated using a pumping device (not shown), then the valve 46 is opened and the part 17 is introduced by means of the lift 21 until it is hooked to the gripping member 23.
- the sealing means 46 may consist of a gate which is pressed onto the periphery of the passage 8 formed in the upper wall 6 of the sealed enclosure 2, under the effect of the pressure difference between and 'other. Since the sealing means 46 should only open when an at least partial vacuum has been established in the quenching cell 31 and in the sealed enclosure 2, this opening or closing operation is easy because the small difference in pressure on either side of the sealing means.
- the fact that the part is suspended inside a treatment cell facilitates the implementation of the treatment process and also facilitates the handling of the part.
- the transfer between a carburizing cell 30 and a quenching cell 31 can be carried out very quickly if one has taken the precaution of creating a vacuum in the quenching cell 31 and of opening the valve 46 before the operation of transfer of the part 17.
- the passage is left open between a treatment cell and the sealed enclosure in order to maintain the vacuum in the treatment cell as often as possible, except, of course, when the cell must contain gas for a specific treatment.
- a greater number of cells can be used for longer-term treatments.
- four cementing cells 30, 32, 33 and 34 are provided for a single quenching cell 31.
- the time required for quenching is much shorter than the time necessary for case hardening. It is also possible to provide several loading and unloading cells for simultaneously carrying out several loading or unloading operations of parts in the installation.
- several independent elevators 21 can be provided in the sealed enclosure 2.
- several pieces can be moved simultaneously in the sealed enclosure 2 in order to transport them from one cell to cell or leave them waiting in the sealed enclosure.
- the volume of this sealed enclosure can be limited to the space separating the inner cylindrical wall 44 and an outer cylindrical wall 48. thus the volume to be pumped and the forces due to atmospheric pressure are limited.
- the inner cylindrical wall 44 serves, in this case, both to limit the volume of the chamber and to support the crown 45 for guiding the elevator (s) 21.
- the sealed enclosure 2 does not necessarily have a cylindrical shape, any other shape that can be envisaged.
- One can provide, among other things, a tight enclosure of elongated shape and aligned cells.
- the elevator (s) can move in the sealed enclosure in a linear fashion to allow access to the different cells. If the watertight enclosure contains several elevators, provision can be made for housing one of the elevators, so that a room can be transported from one end of the watertight enclosure to the other, using another elevator. .
- a bracket 11 is intended for handling the loading and unloading cell 15.
- This bracket comprises a column 50 which can rotate on itself and an arm 51 rigidly connected to the column.
- the cell 15 is fixed to the end of an arm 51.
- the elevator 21 comprises a vertical slide 52, a part 53 sliding along the slide, driven by a motor, thus that a column 54 sliding vertically in the part 53, also moved by a motor and supporting the part 17.
- the device according to the invention can be used industrially for carrying out continuous chained heat treatments and can therefore be integrated directly into parts manufacturing lines, thanks to its possible automation.
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Engineering & Computer Science (AREA)
- Tunnel Furnaces (AREA)
- Furnace Details (AREA)
- Furnace Charging Or Discharging (AREA)
- Muffle Furnaces And Rotary Kilns (AREA)
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
- Heat Treatments In General, Especially Conveying And Cooling (AREA)
- Heating, Cooling, Or Curing Plastics Or The Like In General (AREA)
- Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)
- Agricultural Chemicals And Associated Chemicals (AREA)
- Heat Treatment Of Articles (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8903794A FR2644567A1 (fr) | 1989-03-17 | 1989-03-17 | Dispositif pour l'execution de traitements thermiques enchaines en continu sous vide |
FR8903794 | 1989-03-17 |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0388333A1 EP0388333A1 (fr) | 1990-09-19 |
EP0388333B1 true EP0388333B1 (fr) | 1994-07-06 |
Family
ID=9379974
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP90420136A Expired - Lifetime EP0388333B1 (fr) | 1989-03-17 | 1990-03-13 | Dispositif pour l'exécution de traitements thermiques enchainés en continu sous vide |
Country Status (9)
Country | Link |
---|---|
US (1) | US5033927A (ko) |
EP (1) | EP0388333B1 (ko) |
JP (1) | JP3092136B2 (ko) |
KR (1) | KR0181176B1 (ko) |
AT (1) | ATE108213T1 (ko) |
CA (1) | CA2012270C (ko) |
DE (1) | DE69010358T2 (ko) |
ES (1) | ES2057493T3 (ko) |
FR (1) | FR2644567A1 (ko) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0423710A1 (de) * | 1989-10-20 | 1991-04-24 | Arthur Pfeiffer Vakuumtechnik Wetzlar GmbH | Mehrkammer-Vakuumanlage |
EP0893510A1 (en) * | 1997-07-21 | 1999-01-27 | Refrattari Brebbia S.r.l. | Automatic plant for thermal treatment of metals, in particular steel |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5516732A (en) * | 1992-12-04 | 1996-05-14 | Sony Corporation | Wafer processing machine vacuum front end method and apparatus |
JP3258748B2 (ja) * | 1993-02-08 | 2002-02-18 | 東京エレクトロン株式会社 | 熱処理装置 |
US5378107A (en) * | 1993-04-01 | 1995-01-03 | Applied Materials, Inc. | Controlled environment enclosure and mechanical interface |
US6702540B2 (en) | 1995-11-27 | 2004-03-09 | M2 Engineering Ab | Machine and method for manufacturing compact discs |
US6157866A (en) * | 1997-06-19 | 2000-12-05 | Advanced Micro Devices, Inc. | Automated material handling system for a manufacturing facility divided into separate fabrication areas |
US5924833A (en) * | 1997-06-19 | 1999-07-20 | Advanced Micro Devices, Inc. | Automated wafer transfer system |
FR2771754B1 (fr) * | 1997-12-02 | 2000-02-11 | Etudes Const Mecaniques | Installation de traitement thermique sous vide modulaire |
ES2199416T3 (es) * | 1998-10-23 | 2004-02-16 | Pierre Beuret | Instalacion para el tratamiento termico de una carga de piezas metalicas. |
JP4537522B2 (ja) * | 2000-02-07 | 2010-09-01 | 中外炉工業株式会社 | 間欠駆動式真空浸炭炉 |
FR2809746B1 (fr) | 2000-06-06 | 2003-03-21 | Etudes Const Mecaniques | Installation de cementation chauffee au gaz |
JP2003183728A (ja) * | 2001-12-14 | 2003-07-03 | Jh Corp | 真空熱処理装置 |
KR100605362B1 (ko) * | 2004-10-27 | 2006-07-28 | 재단법인 포항산업과학연구원 | 대량 금속분말용 진공 열처리로 장치 |
DE102005029616B3 (de) * | 2005-06-23 | 2006-11-16 | Jrw Technology + Engineering Gmbh | Vakuumschweißanlage mit Beladungsvorrichtung |
EP2541176A3 (en) * | 2005-11-23 | 2014-09-24 | Surface Combustion, Inc. | Fluid delivery system for an atmospheric furnace used for treating one or more articles |
MY157637A (en) * | 2009-03-18 | 2016-07-15 | Oerlikon Advanced Technologies Ag | Vacuum treatment apparatus |
EP2607504B1 (en) * | 2011-12-23 | 2018-02-28 | Ipsen International GmbH | Load transport mechanism for a multi-station heat treating system |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0236639A1 (fr) * | 1986-02-12 | 1987-09-16 | Stein Heurtey | Installation flexible automatisée de traitement thermochimique rapide |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1610809A (en) * | 1926-02-15 | 1926-12-14 | Gen Electric | Electric furnace |
US2042521A (en) * | 1935-04-06 | 1936-06-02 | Libbey Owens Ford Glass Co | Method and apparatus for case hardening glass sheets |
US3399875A (en) * | 1966-04-21 | 1968-09-03 | Alco Standard Corp | Heat treating furnace |
US3778221A (en) * | 1969-02-26 | 1973-12-11 | Allegheny Ludlum Ind Inc | Annealing furnace and method for its operation |
US3652444A (en) * | 1969-10-24 | 1972-03-28 | Ibm | Continuous vacuum process apparatus |
FR2106656A5 (en) * | 1970-09-18 | 1972-05-05 | Inst Elektrotermicheskogo Obor | Three chamber vacuum sintering plant - with two turn table mounted chambers |
FR2426877A1 (fr) * | 1978-05-23 | 1979-12-21 | Physique Appliquee Ind | Perfectionnements apportes aux fours a vide a dispositif incorpore de trempe en lit fluidise |
FR2537260B3 (fr) * | 1982-12-02 | 1985-11-22 | Traitement Sous Vide | Four multicellulaire pour le traitement thermique, thermochimique ou electrothermique de metaux sous atmosphere rarefiee |
US4815912A (en) * | 1984-12-24 | 1989-03-28 | Asyst Technologies, Inc. | Box door actuated retainer |
SE456570B (sv) * | 1986-01-20 | 1988-10-17 | Applied Vacuum Scandinavia Ab | Sett att transportera alster vid en tillverknings- och/eller efterbehandlingsprocess |
JPS62222625A (ja) * | 1986-03-25 | 1987-09-30 | Shimizu Constr Co Ltd | 半導体製造装置 |
DE3912297C2 (de) * | 1989-04-14 | 1996-07-18 | Leybold Ag | Katodenzerstäubungsanlage |
-
1989
- 1989-03-17 FR FR8903794A patent/FR2644567A1/fr active Pending
-
1990
- 1990-03-13 AT AT90420136T patent/ATE108213T1/de not_active IP Right Cessation
- 1990-03-13 EP EP90420136A patent/EP0388333B1/fr not_active Expired - Lifetime
- 1990-03-13 DE DE69010358T patent/DE69010358T2/de not_active Expired - Fee Related
- 1990-03-13 ES ES90420136T patent/ES2057493T3/es not_active Expired - Lifetime
- 1990-03-15 CA CA002012270A patent/CA2012270C/en not_active Expired - Fee Related
- 1990-03-15 KR KR1019900003496A patent/KR0181176B1/ko not_active IP Right Cessation
- 1990-03-16 JP JP02064479A patent/JP3092136B2/ja not_active Expired - Fee Related
- 1990-03-16 US US07/494,374 patent/US5033927A/en not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0236639A1 (fr) * | 1986-02-12 | 1987-09-16 | Stein Heurtey | Installation flexible automatisée de traitement thermochimique rapide |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0423710A1 (de) * | 1989-10-20 | 1991-04-24 | Arthur Pfeiffer Vakuumtechnik Wetzlar GmbH | Mehrkammer-Vakuumanlage |
EP0893510A1 (en) * | 1997-07-21 | 1999-01-27 | Refrattari Brebbia S.r.l. | Automatic plant for thermal treatment of metals, in particular steel |
Also Published As
Publication number | Publication date |
---|---|
DE69010358D1 (de) | 1994-08-11 |
CA2012270A1 (en) | 1990-09-17 |
US5033927A (en) | 1991-07-23 |
KR900014605A (ko) | 1990-10-24 |
JPH02275289A (ja) | 1990-11-09 |
JP3092136B2 (ja) | 2000-09-25 |
FR2644567A1 (fr) | 1990-09-21 |
ES2057493T3 (es) | 1994-10-16 |
KR0181176B1 (ko) | 1999-02-18 |
DE69010358T2 (de) | 1994-12-22 |
EP0388333A1 (fr) | 1990-09-19 |
ATE108213T1 (de) | 1994-07-15 |
CA2012270C (en) | 2000-05-09 |
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