EP0373975B1 - Pumpeneinheit für das Erreichen von Hochvakuum - Google Patents

Pumpeneinheit für das Erreichen von Hochvakuum Download PDF

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Publication number
EP0373975B1
EP0373975B1 EP89402659A EP89402659A EP0373975B1 EP 0373975 B1 EP0373975 B1 EP 0373975B1 EP 89402659 A EP89402659 A EP 89402659A EP 89402659 A EP89402659 A EP 89402659A EP 0373975 B1 EP0373975 B1 EP 0373975B1
Authority
EP
European Patent Office
Prior art keywords
pump
pressure
primary pump
primary
assembly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Revoked
Application number
EP89402659A
Other languages
English (en)
French (fr)
Other versions
EP0373975A1 (de
Inventor
Claude Saulgeot
Jacques Long
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Original Assignee
Alcatel CIT SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=9373051&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP0373975(B1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Alcatel CIT SA filed Critical Alcatel CIT SA
Priority to AT89402659T priority Critical patent/ATE90143T1/de
Publication of EP0373975A1 publication Critical patent/EP0373975A1/de
Application granted granted Critical
Publication of EP0373975B1 publication Critical patent/EP0373975B1/de
Anticipated expiration legal-status Critical
Revoked legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00—Pumping installations or systems specially adapted for elastic fluids
    • F04B41/02—Pumping installations or systems specially adapted for elastic fluids having reservoirs
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00—Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06—Combinations of two or more pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/02—Stopping, starting, unloading or idling control
    • F04B49/022—Stopping, starting, unloading or idling control by means of pressure

Definitions

  • the present invention relates to a pumping assembly for obtaining high voids.
  • Such a pumping assembly requires electrical energy to power the pump drive motors. This energy can come either from a mains supply or from a storage battery integrated in the pumping unit.
  • the invention aims to save the electrical energy consumed during pumping operations.
  • the invention is particularly advantageous in the case of portable assemblies powered, precisely, by an accumulator battery, allowing the increase, for a battery of given weight and size, of the duration of the autonomy of the pumping assembly.
  • the subject of the invention is therefore a pumping assembly for obtaining high voids, comprising a primary pump and a secondary pump associated in series, the secondary pump sucking in an enclosure to be emptied, and comprising means for starting the pump. secondary when the pressure upstream of the primary pump drops below a value P1, characterized in that a passive tank, followed by an isolation valve are interposed between the discharge of the secondary pump and the suction of the primary pump, and in that it comprises means for controlling the closing of the isolation valve and stopping the primary pump when the pressure in said passive tank reaches a value P2 ⁇ P1 and opening of the isolation and restart valve of the primary pump when the pressure in said passive tank again reaches the pressure P1.
  • FIG. 1 schematically represents a pumping assembly according to the invention.
  • Figure 2 is a curve representative of the operation of the pumping assembly.
  • FIG. 1 therefore schematically represents a pumping assembly which comprises a secondary pump 1 with its drive motor 2, connected on the side of its suction to an enclosure 3 in which it is desired to carry out a high vacuum, and on the side of its discharge, to a primary pump 4 with its drive motor 5, this primary pump 4 delivering to the atmosphere.
  • the pumping assembly shown is, for example, portable and autonomous and thus comprises a storage battery 6 for supplying energy to the assembly.
  • the storage battery supplies an electrical control circuit 7 which comprises, among other things, a three-phase DC-AC converter for supplying motors 2 and 5. Lines 8 and 9 show these supplies.
  • the secondary pump 1 can only operate below a certain pressure P1 called priming pressure. Also, when the assembly starts, only the primary pump 4 is started, and when the pressure upstream of the primary pump drops below this pressure P1, the secondary pump 1 is started automatically. It is known that the intensity absorbed by the drive motor 5 is an increasing function of the suction pressure. Also, the secondary pump starts up when the current absorbed by the drive motor 5 drops below a value which corresponds to this priming pressure P1. To this end, the control circuit 7 comprises for example a current relay operating for a predetermined value of the current in the line 9.
  • a passive tank 10 followed by an isolation valve 11 are interposed between the discharge 12 of the secondary pump 1 and the suction 13 of the primary pump 4.
  • the passive tank 10 is only one simple cavity having a certain volume, it is for this reason that it is called passive.
  • the control circuit 7 comprises a relay operating between two maximum I1 and minimum I2 values of the motor 2 driving the secondary pump 1, values I1 and I Needless of the current which correspond to two values of the pressure P in the isolation tank 10: the first P1 priming value and a second P2 ⁇ P1 value.
  • This pressure P2 corresponds to a value P l of the pressure in the vacuum enclosure 3.
  • This pressure P l is the suction limit pressure of the secondary pump 1.
  • the control circuit 7 controls, through line 14, the closing of the valve 11 and the stopping of the drive motor 5 of the primary pump 4.
  • the control circuit 7 controls the re-opening of the valve isolation 11 and restarting of the primary pump 4.
  • the pressure in the reservoir 10 drops again to the value P2, which again causes the primary pump 4 to stop and the isolation valve 11.
  • the pressure in the isolation tank 10 thus oscillates between these two values P1 and P2, with an operation for the first time of the two pumps followed by a second time where only the secondary pump operates.
  • the pumping unit starts and only the primary pump 4 operates.
  • the pressure in the reservoir 10 reaches the value P1 and the secondary pump 1 is started.
  • the intensity absorbed by its drive motor 2 is maximum and equal to I1.
  • the pressure decreases until P2 at time t2, the current absorbed by the motor 2 has dropped to a minimum value I2, the relay trips and the primary pump 4 is stopped and the valve 11 closed.
  • the pressure P2 is the pressure in the reservoir 10 at the time when the suction of the secondary pump 1 reaches its limit pressure P l . At this moment, the regime is permanent, and the flow Q pumped by the primary pump 4 is equal to the degassing flow Q1 of the enclosure 3.
  • the on-off time ratio of the primary pump 4 is directly linked to the importance of the degassing flow Q1 of the enclosure 3 and to the magnitude of the volume V of the tank 10.
  • P1 - P2 Q1 your V ta being the stopping time of the primary pump 4: t3 - t2 or t5 - t4 in figure 2.
  • ta V Q1 (P1 - P2)
  • stop times ta are all the greater the greater the volume V of the reservoir 10, the greater the priming pressure P1 of the secondary pump 1 and the degassing flow Q1 of the enclosure 3 is smaller.
  • the running time t m of the primary pump 4 (corresponding to the times t2 - t1 or t4 - t3 or t6-t5 in FIG. 2) depends on the volume V of the reservoir 10 and the pumping rate S of the pump primary 4.
  • this running time of the primary pump 4 is all the smaller the smaller the volume V of the reservoir 10, the more the pressure ratio P1 P2 is smaller and that the flow rate S of the primary pump 4 is greater.
  • this ratio is lower the lower the degassing flow Q1 of the enclosure, the lower the ratio of P1 P2 is low, that the pumping rate S of the primary pump is large and that the difference in pressures P1 - P2 is large.
  • the energy consumed by the primary pump 4 with such a pumping assembly during a time t of use of the assembly represents 2.3 10 ⁇ 3 of the energy consumed by the primary pump if this primary pump 4 had been running continuously for all this time t, instead of only working intermittently.
  • the secondary pump operating continuously from time t1.
  • the primary pump 4 is a fixing pump, for example a static pump of the "molecular sieve” or zeolite type. Pumping by capture of molecules is only effective at very low temperatures and this type of pump requires a powerful cooling system, for example by circulation of liquid nitrogen.
  • the drive motor 5 does not exist and is replaced by the cooling system.
  • the control circuit 7 therefore acts on this cooling circuit 5 to stop it, under the same conditions in which the drive motor was stopped in the case of the use of a rotary primary pump delivering to the atmosphere.

Claims (2)

  1. Pumpaggregat zur Erzeugung hoher Vakua, mit einer Primärpumpe (4) und einer Sekundärpumpe (1), die in Reihe geschaltet sind, wobei die Sekundärpumpe (1) saugseitig an ein leerzupumpendes Gefäß (3) angeschlossen ist, mit Mitteln (7) zum Starten der Sekundärpumpe (1), wenn der Druck an der Saugseite der Primärpumpe (4) unter einen Wert P₁ fällt, dadurch gekennzeichnet, daß ein passiver Behälter (10) mit nachfolgendem Trennventil (11) zwischen den Auslaß (12) der Sekundärpumpe (1) und den Einlaß (13) der Primärpumpe (4) eingefügt ist und daß das Aggregat Steuereinrichtungen (7) zum Schließen des Trennventils (11) und Stillsetzen der Primärpumpe (4) aufweist, wenn der Druck im passiven Behälter (10) einen Wert P₂ < P₁ erreicht, und zum Öffnen des Trennventils (11) und zur Wiederinbetriebnahme der Primärpumpe (4), wenn der Druck im passiven Behälter (10) erneut den Wert P₁ erreicht.
  2. Pumpaggregat nach Anspruch 1, dadurch gekennzeichnet, daß die Primärpumpe eine Absorber-Pumpe (4) mit einer Kühleinrichtung (5) ist, wobei die Steuereinrichtungen zum Stillsetzen der Primärpumpe (4) die Kühleinrichtung (5) steuern.
EP89402659A 1988-12-16 1989-09-27 Pumpeneinheit für das Erreichen von Hochvakuum Revoked EP0373975B1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT89402659T ATE90143T1 (de) 1988-12-16 1989-09-27 Pumpeneinheit fuer das erreichen von hochvakuum.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8816644A FR2640697B1 (fr) 1988-12-16 1988-12-16 Ensemble de pompage pour l'obtention de vides eleves
FR8816644 1988-12-16

Publications (2)

Publication Number Publication Date
EP0373975A1 EP0373975A1 (de) 1990-06-20
EP0373975B1 true EP0373975B1 (de) 1993-06-02

Family

ID=9373051

Family Applications (1)

Application Number Title Priority Date Filing Date
EP89402659A Revoked EP0373975B1 (de) 1988-12-16 1989-09-27 Pumpeneinheit für das Erreichen von Hochvakuum

Country Status (9)

Country Link
US (1) US5039280A (de)
EP (1) EP0373975B1 (de)
JP (1) JPH03500440A (de)
AT (1) ATE90143T1 (de)
DD (1) DD284944A5 (de)
DE (1) DE68906869T2 (de)
ES (1) ES2041429T3 (de)
FR (1) FR2640697B1 (de)
WO (1) WO1990007061A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104541061A (zh) * 2012-07-19 2015-04-22 阿迪克森真空产品公司 用于泵浦加工室的方法和设备

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DE4213763B4 (de) * 1992-04-27 2004-11-25 Unaxis Deutschland Holding Gmbh Verfahren zum Evakuieren einer Vakuumkammer und einer Hochvakuumkammer sowie Hochvakuumanlage zu seiner Durchführung
US5217273A (en) * 1992-05-14 1993-06-08 H-Square Corporation Serial pumping for portable handling tool of electronic workpieces
US5261793A (en) * 1992-08-05 1993-11-16 The United States Of America As Represented By The Secretary Of The Department Of Health And Human Services Miniature mechanical vacuum pump
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
JP3847357B2 (ja) * 1994-06-28 2006-11-22 株式会社荏原製作所 真空系の排気装置
EP0717970A1 (de) * 1994-12-20 1996-06-26 GRIESHABER &amp; CO. AG SCHAFFHAUSEN Opthalmologische Aspirations- und Irrigationseinrichtung sowie Verfahren zum Betreiben derselben
DE19524609A1 (de) * 1995-07-06 1997-01-09 Leybold Ag Vorrichtung zum raschen Evakuieren einer Vakuumkammer
KR0183912B1 (ko) * 1996-08-08 1999-05-01 김광호 다중 반응 챔버에 연결된 펌핑 설비 및 이를 사용하는 방법
KR100196631B1 (ko) * 1997-01-28 1999-06-15 윤종용 혼합형 다단 진공장치 및 그 방법
US5944049A (en) * 1997-07-15 1999-08-31 Applied Materials, Inc. Apparatus and method for regulating a pressure in a chamber
IT1297347B1 (it) 1997-12-24 1999-09-01 Varian Spa Pompa da vuoto.
DE19854243C2 (de) * 1998-11-24 2000-10-19 Luk Automobiltech Gmbh & Co Kg Steuerung für eine Vakuumpumpe
DE19913593B4 (de) * 1999-03-24 2004-09-23 Ilmvac Gmbh Gesteuerter Pumpstand
US6419455B1 (en) * 1999-04-07 2002-07-16 Alcatel System for regulating pressure in a vacuum chamber, vacuum pumping unit equipped with same
FR2808098B1 (fr) * 2000-04-20 2002-07-19 Cit Alcatel Procede et dispositif de conditionnement de l'atmosphere dans une chambre de procedes
DE10130426B4 (de) * 2001-06-23 2021-03-18 Pfeiffer Vacuum Gmbh Vakuumpumpsystem
US6589023B2 (en) * 2001-10-09 2003-07-08 Applied Materials, Inc. Device and method for reducing vacuum pump energy consumption
US7185651B2 (en) * 2002-06-18 2007-03-06 Nektar Therapeutics Flow regulator for aerosol drug delivery and methods
GB0214273D0 (en) * 2002-06-20 2002-07-31 Boc Group Plc Apparatus for controlling the pressure in a process chamber and method of operating same
GB0401396D0 (en) * 2004-01-22 2004-02-25 Boc Group Plc Pressure control method
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JP4931793B2 (ja) * 2004-03-05 2012-05-16 オイ コーポレイション 質量分析計の焦点面検出器アセンブリ
EP1768484B2 (de) * 2004-07-13 2021-04-21 DeLaval Holding AB Steuerbare vakuumquelle
GB0418771D0 (en) 2004-08-20 2004-09-22 Boc Group Plc Evacuation of a load lock enclosure
FR2883934B1 (fr) * 2005-04-05 2010-08-20 Cit Alcatel Pompage rapide d'enceinte avec limitation d'energie
US7604615B2 (en) * 2006-03-20 2009-10-20 Alcon, Inc. Surgical cassette with bubble separating structure
FR2888894A1 (fr) * 2005-07-20 2007-01-26 Alcatel Sa Pompage rapide d'enceinte avec economie d'energie
WO2007064679A2 (en) * 2005-11-29 2007-06-07 Unico, Inc. Estimation and control of a resonant plant prone to stick-slip behavior
JP4737770B2 (ja) * 2006-09-12 2011-08-03 アネスト岩田株式会社 真空ポンプの運転制御装置および方法
FR2952683B1 (fr) * 2009-11-18 2011-11-04 Alcatel Lucent Procede et dispositif de pompage a consommation d'energie reduite
EP2458218A1 (de) 2010-11-30 2012-05-30 Converteam Technology Ltd System zur Aufrechterhaltung eines hohen Vakuums
CH706231B1 (fr) 2012-03-05 2016-07-29 Ateliers Busch Sa Installation de pompage et procédé de contrôle d'une telle installation.
CN102777371B (zh) * 2012-07-19 2015-11-25 奇瑞汽车股份有限公司 一种车用真空泵的耐久性试验机构及其耐久性试验方法
CN103790808A (zh) * 2012-11-02 2014-05-14 深圳市文川实业有限公司 一种移动式抽真空高真空机组
GB2510829B (en) 2013-02-13 2015-09-02 Edwards Ltd Pumping system
JP6749857B2 (ja) * 2017-03-24 2020-09-02 株式会社日立ハイテク 自動分析装置
JP2020056373A (ja) * 2018-10-03 2020-04-09 株式会社荏原製作所 真空排気システム
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JP7218706B2 (ja) * 2019-10-18 2023-02-07 株式会社島津製作所 真空排気装置および真空排気装置の起動方法

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104541061A (zh) * 2012-07-19 2015-04-22 阿迪克森真空产品公司 用于泵浦加工室的方法和设备
CN104541061B (zh) * 2012-07-19 2017-02-22 阿迪克森真空产品公司 用于泵浦加工室的方法和设备

Also Published As

Publication number Publication date
JPH03500440A (ja) 1991-01-31
DE68906869T2 (de) 1993-09-09
JPH0355679B2 (de) 1991-08-26
ATE90143T1 (de) 1993-06-15
EP0373975A1 (de) 1990-06-20
ES2041429T3 (es) 1993-11-16
FR2640697A1 (fr) 1990-06-22
US5039280A (en) 1991-08-13
FR2640697B1 (fr) 1993-01-08
DD284944A5 (de) 1990-11-28
DE68906869D1 (de) 1993-07-08
WO1990007061A1 (fr) 1990-06-28

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