EP0308846B1 - Startverfahren für die Serie geschaltete Vakuumpumpen und Einrichtung zur Anwendung des Verfahrens - Google Patents

Startverfahren für die Serie geschaltete Vakuumpumpen und Einrichtung zur Anwendung des Verfahrens Download PDF

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Publication number
EP0308846B1
EP0308846B1 EP88115311A EP88115311A EP0308846B1 EP 0308846 B1 EP0308846 B1 EP 0308846B1 EP 88115311 A EP88115311 A EP 88115311A EP 88115311 A EP88115311 A EP 88115311A EP 0308846 B1 EP0308846 B1 EP 0308846B1
Authority
EP
European Patent Office
Prior art keywords
pump
primary pump
relay
primary
starting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP88115311A
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English (en)
French (fr)
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EP0308846A1 (de
Inventor
Jean-Marie Crinquette
Jacques Long
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
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Alcatel CIT SA
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Filing date
Publication date
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First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=9355219&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP0308846(B1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Alcatel CIT SA filed Critical Alcatel CIT SA
Priority to AT88115311T priority Critical patent/ATE68565T1/de
Publication of EP0308846A1 publication Critical patent/EP0308846A1/de
Application granted granted Critical
Publication of EP0308846B1 publication Critical patent/EP0308846B1/de
Anticipated expiration legal-status Critical
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00—Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06—Combinations of two or more pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/02—Stopping, starting, unloading or idling control

Definitions

  • the present invention relates to a method of starting vacuum pumps coupled in series.
  • the primary pump must first be started to drop the pressure to an acceptable value by the secondary pump.
  • a pressure switch consisting of a barometric capsule, the deformation of which causes the closing of an electrical contact, is connected to the suction pipe in known manner. This contact placed in the secondary pump control circuit will cause the secondary pump to start.
  • a device of this kind is for example known, pages 38, 39 of the catalog of the Leybold-Heraeus company (173.1.3 HV 254 - Section 3 New edition 04/1983).
  • the pressure switches do not tolerate corrosion and the gases responsible for dust, and at low pressures, they are sensitive to vibrations. Reliability is consequently poor, and this can lead to a failure to start the secondary pump or even worse to start at a higher pressure with the risk of seizure.
  • the present invention consists in removing the pressure switch, therefore in not directly measuring the pressure, but a physical quantity which follows, within a determined range, a law similar to that of the pressure.
  • the subject of the present invention is a method for starting vacuum pumps coupled in series, a primary pump and at least a secondary pump placed between the primary pump and the enclosure where it is desired to create a vacuum, consisting in starting the primary pump first and then the secondary pump only when its suction pressure, decreasing thanks to the rotation of the pump primary, reaches an admissible value, characterized in that the suction pressure prevailing in the secondary pump is determined by using a physical quantity linked to the primary pump which follows a law similar to that of the pressure.
  • the present invention also relates to a starting device allowing the implementation of the method, this device being provided with a first electromagnetic relay whose coil is controlled by a manual switch and therefore three contactors are connected to the three phases of the motor.
  • the primary pump, and of a second electromagnetic relay ensuring the energization of the secondary pump, characterized in that the coil of this second relay is supplied through a fourth contactor of the first relay, this contactor being delayed on closing, and through a contactor of a detector measuring a physical quantity linked to the primary pump, as a function of the suction pressure of this pump.
  • This detector can be an intensity relay placed on one of the motor supply phases and directly giving the absorbed power. It can also be a vibration or sound level detector placed on the pump, these two physical quantities (amplitude of vibration or sound level) according to a law identical to that of the power absorbed.
  • Figure 1 shows the curve followed by the power absorbed by the primary pump, as a function of its suction pressure. We realize that, from a certain threshold equal to 300 millibars and up to the vacuum limit of 10 ⁇ 3 millibars, this power decreases.
  • FIG. 2 shows an installation at a standstill, comprising a primary pump A, a secondary pump B, the enclosure E where it is desired to create a vacuum, and the electrical supply of the two motors M1, M2.
  • each pump is driven by a three-phase motor and these motors are each supplied by means of a relay, the motor M1 of the primary pump A through the three contactors 12 of a relay 10, and the motor M2 of the secondary pump B through the three contactors 22 of a relay 20.
  • the relay 10 comprises a coil 11, itself supplied by a switch I made available to the operator to start the primary pump.
  • This relay also includes a fourth contactor 13 timed on closing and connected in series with a contactor 31 of a detector 30, the coil 21 of the relay 20 being supplied through these two contactors 13 and 31.
  • the detector 30 is, in this figure, an intensity relay connected to a supply phase of the motor M1 of the primary pump.
  • the primary pump A is first started by pressing the switch I.
  • the contactors 12 close and the motor M1 turns.
  • the contactor 31 is closed but since the closing of the contactor 13 is delayed, the coil 21 of the relay 20 is not supplied and the motor M2 does not start.
  • the current relay 30 is excited by the large power absorbed by the motor M1 and this causes the opening of its contactor 31. From at this instant, provision is made for the end of the time delay of the contactor 13, therefore its closing, but the coil 21 of the relay 20 is still not supplied because the contactor 31 is open.
  • the current relay 30 will be energized again and its contactor 31 will open, thereby cutting off the supply to pump B.
  • FIG. 3 shows an alternative embodiment in which the intensity relay is replaced by a detector 40, placed on the motor-pump assembly, thus detecting the amplitude of vibrations or the sound level and opening or closing its associated contactor 41 .

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Control Of Positive-Displacement Air Blowers (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Jet Pumps And Other Pumps (AREA)

Claims (4)

1. Verfahren zum Anfahren von in Reihe geschalteten Vakuumpumpen, nämlich einer Primärpumpe (A) und mindestens einer Sekundärpumpe (B), welche zwischen die Primärpumpe und das Gefäß (E), in dem das Vakuum hergestellt werden soll, eingefügt ist, wobei das Verfahren darin besteht, zuerst die Primärpumpe zu starten und dann die Sekundärpumpe in dem Augenblick anlaufen zu lassen, in welchem der Ansaugdruck, der aufgrund der Umdrehung der Primärpumpe abnimmt, einen zulässigen Wert erreicht, dadurch gekennzeichnet, daß der in der Sekundärpumpe herrschende Ansaugdruck unter Benutzung einer physikalischen Größe bestimmt wird, die an die Primärpumpe gebunden ist und einem Gesetz folgt, das demjenigen des Drucks ähnelt.
2. Einrichtung zur Durchführung des Verfahrens nach Anspruch 1, wobei die Einrichtung mit einem ersten elektromagnetischen Relais (10), dessen Spule (11) durch einen Handschalter (I) gesteuert wird und wovon drei Kontakte (12) in die drei Phasen des Motors (M₁) der Primärpumpe eingefügt sind, sowie mit einem zweiten elektromagnetischen Relais (20) ausgestattet ist, welches das Einschalten der Sekundärpumpe bewirkt, dadurch gekennzeichnet, daß die Spule (21) des zweiten Relais (20) über einen vierten Kontakt (13) des ersten Relais (10), der mit Zeitverzögerung schließt, und über einen Kontakt (31, 41) eines Detektors (30, 40) gespeist wird, der eine mit der Primärpumpe verbundene physikalische Größe mißt, die eine Funktion des Ansaugdrucks dieser Pumpe darstellt.
3. Einrichtung nach Anspruch 2, dadurch gekennzeichnet, daß der Detektor ein stromstärkeempfindliches Relais (30) ist, das in eine der Speisephasen des Motors (M₁) der Primärpumpe (A) eingefügt ist.
4. Vorrichtung nach Anspruch 2, dadurch gekennzeichnet, daß der Detektor ein Vibrations- oder ein Schallpegeldetektor ist, der auf der Motor-Primärpumpengruppe angebracht ist.
EP88115311A 1987-09-25 1988-09-19 Startverfahren für die Serie geschaltete Vakuumpumpen und Einrichtung zur Anwendung des Verfahrens Expired - Lifetime EP0308846B1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT88115311T ATE68565T1 (de) 1987-09-25 1988-09-19 Startverfahren fuer die serie geschaltete vakuumpumpen und einrichtung zur anwendung des verfahrens.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8713267A FR2621141B1 (fr) 1987-09-25 1987-09-25 Procede de demarrage de pompes a vide couplees en serie, et dispositif permettant la mise en oeuvre de ce procede
FR8713267 1987-09-25

Publications (2)

Publication Number Publication Date
EP0308846A1 EP0308846A1 (de) 1989-03-29
EP0308846B1 true EP0308846B1 (de) 1991-10-16

Family

ID=9355219

Family Applications (1)

Application Number Title Priority Date Filing Date
EP88115311A Expired - Lifetime EP0308846B1 (de) 1987-09-25 1988-09-19 Startverfahren für die Serie geschaltete Vakuumpumpen und Einrichtung zur Anwendung des Verfahrens

Country Status (8)

Country Link
US (1) US4887941A (de)
EP (1) EP0308846B1 (de)
JP (1) JPH01106980A (de)
AT (1) ATE68565T1 (de)
DE (1) DE3865615D1 (de)
ES (1) ES2026620T3 (de)
FR (1) FR2621141B1 (de)
GR (1) GR3003251T3 (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02102385A (ja) * 1988-10-08 1990-04-13 Toyo Eng Corp 排気装置
FR2652390B1 (fr) * 1989-09-27 1991-11-29 Cit Alcatel Groupe de pompage a vide.
US5217273A (en) * 1992-05-14 1993-06-08 H-Square Corporation Serial pumping for portable handling tool of electronic workpieces
JP3847357B2 (ja) * 1994-06-28 2006-11-22 株式会社荏原製作所 真空系の排気装置
JP3406834B2 (ja) * 1998-05-19 2003-05-19 株式会社東海理化電機製作所 モータ駆動回路
JP3929185B2 (ja) * 1998-05-20 2007-06-13 株式会社荏原製作所 真空排気装置及び方法
US6045331A (en) * 1998-08-10 2000-04-04 Gehm; William Fluid pump speed controller
US6419455B1 (en) * 1999-04-07 2002-07-16 Alcatel System for regulating pressure in a vacuum chamber, vacuum pumping unit equipped with same
DE10130426B4 (de) * 2001-06-23 2021-03-18 Pfeiffer Vacuum Gmbh Vakuumpumpsystem
DE20214764U1 (de) * 2002-09-19 2002-11-21 Stoeber Antriebstech Gmbh & Co Schalteinrichtung zur Ansteuerung wenigstens zweier Motoren
DE10302764A1 (de) * 2003-01-24 2004-07-29 Pfeiffer Vacuum Gmbh Vakuumpumpsystem
JP2004324644A (ja) * 2003-04-10 2004-11-18 Ebara Corp ドライ真空ポンプ及びその起動方法
JP4218756B2 (ja) * 2003-10-17 2009-02-04 株式会社荏原製作所 真空排気装置
US7028491B2 (en) * 2004-03-29 2006-04-18 Tecumseh Products Company Method and apparatus for reducing inrush current in a multi-stage compressor
GB0418771D0 (en) * 2004-08-20 2004-09-22 Boc Group Plc Evacuation of a load lock enclosure
US20070020115A1 (en) * 2005-07-01 2007-01-25 The Boc Group, Inc. Integrated pump apparatus for semiconductor processing
JP4737770B2 (ja) * 2006-09-12 2011-08-03 アネスト岩田株式会社 真空ポンプの運転制御装置および方法
US8506259B2 (en) 2009-12-23 2013-08-13 Solar Turbines Inc. Fluid compression system
FR2969721B1 (fr) * 2010-12-23 2013-01-04 Fontaine Piscines Dispositif de vidange soufflant et procede de vidange par soufflage
US10428807B2 (en) * 2011-12-09 2019-10-01 Applied Materials, Inc. Pump power consumption enhancement
JP2018178846A (ja) * 2017-04-12 2018-11-15 株式会社荏原製作所 真空ポンプ装置の運転制御装置、及び運転制御方法
JP7218706B2 (ja) * 2019-10-18 2023-02-07 株式会社島津製作所 真空排気装置および真空排気装置の起動方法
CN111306027B (zh) * 2020-02-17 2022-11-11 柳州柳工挖掘机有限公司 旋挖钻机主泵功率控制方法及系统

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US2246932A (en) * 1939-09-21 1941-06-24 Chicago Pneumatic Tool Co Combination single and two stage vacuum pump
US2295775A (en) * 1940-10-31 1942-09-15 Westinghouse Air Brake Co Compressor control apparatus
US2926835A (en) * 1955-02-24 1960-03-01 Heraeus Gmbh W C Vacuum pump control apparatus
DE2430314C3 (de) * 1974-06-24 1982-11-25 Siemens AG, 1000 Berlin und 8000 München Flüssigkeitsring-Vakuumpumpe mit vorgeschaltetem Verdichter
JPS6010190B2 (ja) * 1976-04-20 1985-03-15 松下電器産業株式会社 圧縮機
DE3208928A1 (de) * 1982-02-02 1983-09-22 Alfred Dipl.-Ing.(FH) 7257 Ditzingen Wieland Vakuumanlage fuer kraftfahrzeuge
US4699570A (en) * 1986-03-07 1987-10-13 Itt Industries, Inc Vacuum pump system
JPH0784871B2 (ja) * 1986-06-12 1995-09-13 株式会社日立製作所 真空排気装置
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Also Published As

Publication number Publication date
JPH0238796B2 (de) 1990-08-31
JPH01106980A (ja) 1989-04-24
DE3865615D1 (de) 1991-11-21
ES2026620T3 (es) 1992-05-01
GR3003251T3 (en) 1993-02-17
FR2621141B1 (fr) 1989-12-01
US4887941A (en) 1989-12-19
FR2621141A1 (fr) 1989-03-31
EP0308846A1 (de) 1989-03-29
ATE68565T1 (de) 1991-11-15

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