ES2041429T3 - Conjunto de bombeo para la obtencion de vacios elevados. - Google Patents

Conjunto de bombeo para la obtencion de vacios elevados.

Info

Publication number
ES2041429T3
ES2041429T3 ES198989402659T ES89402659T ES2041429T3 ES 2041429 T3 ES2041429 T3 ES 2041429T3 ES 198989402659 T ES198989402659 T ES 198989402659T ES 89402659 T ES89402659 T ES 89402659T ES 2041429 T3 ES2041429 T3 ES 2041429T3
Authority
ES
Spain
Prior art keywords
pump
pct
pressure
assembly
primary pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES198989402659T
Other languages
English (en)
Inventor
Claude Saulgeot
Jacques Long
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Original Assignee
Alcatel CIT SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=9373051&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ES2041429(T3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Alcatel CIT SA filed Critical Alcatel CIT SA
Application granted granted Critical
Publication of ES2041429T3 publication Critical patent/ES2041429T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00—Pumping installations or systems specially adapted for elastic fluids
    • F04B41/02—Pumping installations or systems specially adapted for elastic fluids having reservoirs
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00—Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06—Combinations of two or more pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/02—Stopping, starting, unloading or idling control
    • F04B49/022—Stopping, starting, unloading or idling control by means of pressure

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Massaging Devices (AREA)
  • Jet Pumps And Other Pumps (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

EQUIPO DE BOMBEO PARA LA OBTENCION DE ALTOS VACIOS, QUE CONSTA DE UNA BOMBA PRIMARIA (4) Y UNA BOMBA SECUNDARIA (1) ASOCIADAS EN SERIE, ASPIRANDO LA BOMBA SECUNDARIA (1) EL AIRE EN UN RECINTO (3) A VACIAR, Y QUE CONSTA DE ELEMENTOS DE ARRANQUE (7) DE LA BOMBA SECUNDARIA (1) CUANDO LA PRESION EXISTENTE ANTES DE LA BOMBA PRIMARIA (4) DESCIENDE POR DEBAJO DE UN VALOR P1, CARACTERIZADO PORQUE UN DEPOSITO PASIVO (10), SEGUIDO DE UNA VALVULA DE AISLAMIENTO (11) ESTAN INTERCALADOS ENTRE LA COMPRESION (12) DE LA BOMBA SECUNDARIA (1) Y LA ASPIRACION (13) DE LA BOMBA PRIMARIA (4), Y EN QUE CONSTA DE ELEMENTOS DE CONTROL (7) DE CIERRE DE LA VALVULA DE AISLAMIENTO (11) Y DE DETENCION DE LA BOMBA PRIMARIA (4) CUANDO LA PRESION EN DICHO DEPOSITO PASIVO (10) ALCANZA UN VALOR P2<P1 Y DE APERTURA DE LA VALVULA DE AISLAMIENTO (11) Y DE PUESTA DE NUEVO EN MARCHA DE LA BOMBA PRIMARIA (4) CUANDO LA PRESION EN DICHO DEPOSITO PASIVO (10) ALCANZA NUEVAMENTE LA PRESION P1.
ES198989402659T 1988-12-16 1989-09-27 Conjunto de bombeo para la obtencion de vacios elevados. Expired - Lifetime ES2041429T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8816644A FR2640697B1 (fr) 1988-12-16 1988-12-16 Ensemble de pompage pour l'obtention de vides eleves

Publications (1)

Publication Number Publication Date
ES2041429T3 true ES2041429T3 (es) 1993-11-16

Family

ID=9373051

Family Applications (1)

Application Number Title Priority Date Filing Date
ES198989402659T Expired - Lifetime ES2041429T3 (es) 1988-12-16 1989-09-27 Conjunto de bombeo para la obtencion de vacios elevados.

Country Status (9)

Country Link
US (1) US5039280A (es)
EP (1) EP0373975B1 (es)
JP (1) JPH03500440A (es)
AT (1) ATE90143T1 (es)
DD (1) DD284944A5 (es)
DE (1) DE68906869T2 (es)
ES (1) ES2041429T3 (es)
FR (1) FR2640697B1 (es)
WO (1) WO1990007061A1 (es)

Families Citing this family (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4213763B4 (de) * 1992-04-27 2004-11-25 Unaxis Deutschland Holding Gmbh Verfahren zum Evakuieren einer Vakuumkammer und einer Hochvakuumkammer sowie Hochvakuumanlage zu seiner Durchführung
US5217273A (en) * 1992-05-14 1993-06-08 H-Square Corporation Serial pumping for portable handling tool of electronic workpieces
US5261793A (en) * 1992-08-05 1993-11-16 The United States Of America As Represented By The Secretary Of The Department Of Health And Human Services Miniature mechanical vacuum pump
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
JP3847357B2 (ja) * 1994-06-28 2006-11-22 株式会社荏原製作所 真空系の排気装置
EP0717970A1 (de) * 1994-12-20 1996-06-26 GRIESHABER &amp; CO. AG SCHAFFHAUSEN Opthalmologische Aspirations- und Irrigationseinrichtung sowie Verfahren zum Betreiben derselben
DE19524609A1 (de) * 1995-07-06 1997-01-09 Leybold Ag Vorrichtung zum raschen Evakuieren einer Vakuumkammer
KR0183912B1 (ko) * 1996-08-08 1999-05-01 김광호 다중 반응 챔버에 연결된 펌핑 설비 및 이를 사용하는 방법
KR100196631B1 (ko) * 1997-01-28 1999-06-15 윤종용 혼합형 다단 진공장치 및 그 방법
US5944049A (en) * 1997-07-15 1999-08-31 Applied Materials, Inc. Apparatus and method for regulating a pressure in a chamber
IT1297347B1 (it) 1997-12-24 1999-09-01 Varian Spa Pompa da vuoto.
DE19854243C2 (de) * 1998-11-24 2000-10-19 Luk Automobiltech Gmbh & Co Kg Steuerung für eine Vakuumpumpe
DE19913593B4 (de) * 1999-03-24 2004-09-23 Ilmvac Gmbh Gesteuerter Pumpstand
US6419455B1 (en) * 1999-04-07 2002-07-16 Alcatel System for regulating pressure in a vacuum chamber, vacuum pumping unit equipped with same
FR2808098B1 (fr) * 2000-04-20 2002-07-19 Cit Alcatel Procede et dispositif de conditionnement de l'atmosphere dans une chambre de procedes
DE10130426B4 (de) * 2001-06-23 2021-03-18 Pfeiffer Vacuum Gmbh Vakuumpumpsystem
US6589023B2 (en) * 2001-10-09 2003-07-08 Applied Materials, Inc. Device and method for reducing vacuum pump energy consumption
US7185651B2 (en) * 2002-06-18 2007-03-06 Nektar Therapeutics Flow regulator for aerosol drug delivery and methods
GB0214273D0 (en) * 2002-06-20 2002-07-31 Boc Group Plc Apparatus for controlling the pressure in a process chamber and method of operating same
GB0401396D0 (en) * 2004-01-22 2004-02-25 Boc Group Plc Pressure control method
JP4633370B2 (ja) * 2004-02-17 2011-02-16 財団法人国際科学振興財団 真空装置
WO2005088671A2 (en) * 2004-03-05 2005-09-22 Oi Corporation Gas chromatograph and mass spectrometer
EP1768484B2 (en) * 2004-07-13 2021-04-21 DeLaval Holding AB Controllable vacuum source
GB0418771D0 (en) * 2004-08-20 2004-09-22 Boc Group Plc Evacuation of a load lock enclosure
FR2883934B1 (fr) * 2005-04-05 2010-08-20 Cit Alcatel Pompage rapide d'enceinte avec limitation d'energie
US7604615B2 (en) * 2006-03-20 2009-10-20 Alcon, Inc. Surgical cassette with bubble separating structure
FR2888894A1 (fr) * 2005-07-20 2007-01-26 Alcatel Sa Pompage rapide d'enceinte avec economie d'energie
CA2631167C (en) * 2005-11-29 2014-02-04 Unico, Inc. Estimation and control of a resonant plant prone to stick-slip behavior
JP4737770B2 (ja) * 2006-09-12 2011-08-03 アネスト岩田株式会社 真空ポンプの運転制御装置および方法
FR2952683B1 (fr) * 2009-11-18 2011-11-04 Alcatel Lucent Procede et dispositif de pompage a consommation d'energie reduite
EP2458218A1 (en) 2010-11-30 2012-05-30 Converteam Technology Ltd A system for maintaining a high vacuum
CH706231B1 (fr) * 2012-03-05 2016-07-29 Ateliers Busch Sa Installation de pompage et procédé de contrôle d'une telle installation.
FR2993614B1 (fr) * 2012-07-19 2018-06-15 Pfeiffer Vacuum Procede et dispositif de pompage d'une chambre de procedes
CN102777371B (zh) * 2012-07-19 2015-11-25 奇瑞汽车股份有限公司 一种车用真空泵的耐久性试验机构及其耐久性试验方法
CN103790808A (zh) * 2012-11-02 2014-05-14 深圳市文川实业有限公司 一种移动式抽真空高真空机组
GB2510829B (en) 2013-02-13 2015-09-02 Edwards Ltd Pumping system
JP6749857B2 (ja) 2017-03-24 2020-09-02 株式会社日立ハイテク 自動分析装置
JP2020056373A (ja) * 2018-10-03 2020-04-09 株式会社荏原製作所 真空排気システム
US11815095B2 (en) * 2019-01-10 2023-11-14 Elival Co., Ltd Power saving vacuuming pump system based on complete-bearing-sealing and dry-large-pressure-difference root vacuuming root pumps
CN110469492A (zh) * 2019-08-26 2019-11-19 西南石油大学 一种气体高密封低损耗增压系统及方法
JP7218706B2 (ja) * 2019-10-18 2023-02-07 株式会社島津製作所 真空排気装置および真空排気装置の起動方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2492075A (en) * 1945-10-30 1949-12-20 Kinney Mfg Company Vacuum pump
US3785749A (en) * 1972-03-24 1974-01-15 Phillips Petroleum Co Control system for two-stage compressors
DE2430314C3 (de) * 1974-06-24 1982-11-25 Siemens AG, 1000 Berlin und 8000 München Flüssigkeitsring-Vakuumpumpe mit vorgeschaltetem Verdichter
JPS60256584A (ja) * 1984-05-30 1985-12-18 Honjiyou Chem Kk 高真空装置
DE3444169A1 (de) * 1984-12-04 1986-06-12 Loewe Pumpenfabrik GmbH, 2120 Lüneburg Anordnung zur optimierung des betriebes von vakuumpumpenanlagen
JPS62243982A (ja) * 1986-04-14 1987-10-24 Hitachi Ltd ２段型真空ポンプ装置およびその運転方法

Also Published As

Publication number Publication date
US5039280A (en) 1991-08-13
WO1990007061A1 (fr) 1990-06-28
DE68906869T2 (de) 1993-09-09
EP0373975B1 (fr) 1993-06-02
FR2640697A1 (fr) 1990-06-22
ATE90143T1 (de) 1993-06-15
EP0373975A1 (fr) 1990-06-20
JPH0355679B2 (es) 1991-08-26
JPH03500440A (ja) 1991-01-31
DD284944A5 (de) 1990-11-28
FR2640697B1 (fr) 1993-01-08
DE68906869D1 (de) 1993-07-08

Similar Documents

Publication Publication Date Title
ES2041429T3 (es) Conjunto de bombeo para la obtencion de vacios elevados.
AU8901791A (en) Nonreturn valve, in particular for medical infusion appliances
ES2026620T3 (es) Procedimiento de arranque de bombas de vacio acopladas en serie, y dispositivo que permite la realizacion de este procedimiento.
EP0289854A3 (en) Fluid dispenser
SE8802908D0 (sv) Pumpanordning
DE3872585D1 (de) Austragvorrichtung fuer medien.
WO1992018770A3 (en) Plunger pump
JPS5752667A (en) Fuel supply system for engine
FR2774729B1 (fr) Systeme de pompage de liquide
SE8204916L (sv) Vacuum driven pulsatile pump
JPH09109133A (ja) オートクレーブ養生装置
JP2000034980A (ja) ブースタコンプレッサ
FR2423656A1 (fr) Pompe a vide autoregulatrice
JPS56138484A (en) Engine driven-type compressor
JPS52145851A (en) Heat pump system
JPS56118546A (en) Fuel pump equipment
SU1038590A1 (ru) Центробежный насос
JPS60184785A (ja) 圧空式バルブ
SU872791A1 (ru) Насосный агрегат
JPS56104194A (en) Electric pumping device
JPS56162212A (en) Cooling system for steam turbine
JPS5591761A (en) Fuel injection system
DE69223325D1 (de) Einlassregelvorrichtung für verdichter
JPS5338146A (en) Heating system
JPS6146481A (ja) 昇圧機

Legal Events

Date Code Title Description
FG2A Definitive protection

Ref document number: 373975

Country of ref document: ES