EP0367541B1 - Verfahren zur Herstellung eines Tintenstrahldruckkopfes - Google Patents

Verfahren zur Herstellung eines Tintenstrahldruckkopfes Download PDF

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Publication number
EP0367541B1
EP0367541B1 EP19890311199 EP89311199A EP0367541B1 EP 0367541 B1 EP0367541 B1 EP 0367541B1 EP 19890311199 EP19890311199 EP 19890311199 EP 89311199 A EP89311199 A EP 89311199A EP 0367541 B1 EP0367541 B1 EP 0367541B1
Authority
EP
European Patent Office
Prior art keywords
ink
plate
aperture
orifice
discharging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP19890311199
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English (en)
French (fr)
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EP0367541A3 (en
EP0367541A2 (de
Inventor
Takashi Watanabe
Kazuaki Masuda
Akira Goto
Hiroshi Kono
Takashi Kanzaki
Toshio Kashino
Akio Saito
Koyo Midorikawa
Toru Okumura
Masami Ikeda
Nobuyuki Kuwabara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP63275800A external-priority patent/JP2771557B2/ja
Priority claimed from JP27579488A external-priority patent/JPH02121843A/ja
Priority claimed from JP27579788A external-priority patent/JPH02121842A/ja
Priority claimed from JP1007403A external-priority patent/JP2763563B2/ja
Priority claimed from JP740989A external-priority patent/JPH02187345A/ja
Priority claimed from JP1007470A external-priority patent/JP2831368B2/ja
Priority claimed from JP741089A external-priority patent/JP2633943B2/ja
Priority claimed from JP918189A external-priority patent/JPH02188255A/ja
Priority claimed from JP918489A external-priority patent/JPH02188257A/ja
Priority claimed from JP1018079A external-priority patent/JP2764418B2/ja
Priority to ES99200740T priority Critical patent/ES2207908T3/es
Priority to EP94200483A priority patent/EP0602021A2/de
Priority to EP99200740A priority patent/EP0937579B1/de
Application filed by Canon Inc filed Critical Canon Inc
Publication of EP0367541A2 publication Critical patent/EP0367541A2/de
Publication of EP0367541A3 publication Critical patent/EP0367541A3/en
Publication of EP0367541B1 publication Critical patent/EP0367541B1/de
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/162—Manufacturing of the nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14024—Assembling head parts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/1433—Structure of nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1604—Production of bubble jet print heads of the edge shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1606—Coating the nozzle area or the ink chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B41J2/1634—Manufacturing processes machining laser machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14379—Edge shooter

Definitions

  • the present invention relates to a method of manufacturing ink jet heads, and in particular to the formation of orifices through which ink is discharged from the head.
  • the liquid jet recording head according to the system in which the recording liquid is discharged by utilizing heat energy is particularly attracting attention as one which is capable of recording of high resolving power because liquid discharging outlets such as orifices for formation of droplets for flying by discharging droplets for recording, etc., (hereinafter also called as "orifices”) can be arranged at high density, can be made compact as a whole as the recording head, can fully utilize the recent technical progresses in the field of semi-conductors as well as the advantages of IC technique and microworking technique of which improvements of reliability are marked, can be easily made lengthy and planar (dimensional), etc.. whereby it can be easily made into multi-nozzle and armored at high density, and yet productivity during bulk production is good to make the production cost lower.
  • orifices liquid discharging outlets such as orifices for formation of droplets for flying by discharging droplets for recording, etc.
  • Figs. 1A and 1B are respectively a schematic exploded perspective view and a schematic perspective after bonding showing an example of the liquid jet recording head of this type of the prior art.
  • 1 is a first substrate comprising Si, etc., comprising a group of electricity-heater converters and wiring portions thereof provided as the energy generating element for generating the energy to be utilized for discharging liquid on its upper surface.
  • 8 is a second substrate, having an introducing inlet 9 for liquid for recording such as ink (hereinafter merely called as "ink"), a groove 11A for forming an ink flow channel 11 corresponding to the electricity heat converter, an ink flow channel wall 10 and a concavity 12 which becomes the common liquid chamber for storing ink and also communicating it to the respective flow channels formed thereon.
  • ink ink
  • the first and the second substrates are mutually adhered and fixed with an adhesive 13 to assemble a recording head as shown in Fig. 1B.
  • the head obtained by the method as described above has the problem that the straight forward progress of the ink droplets is impaired. This is, above all, due to the fact that the orifices, which are formed of materials of different qualities, cause difference in wettability with the ink at the peripherals of orifices.
  • the step of bonding an orifice plate is included during its preparation, and it is necessary to perform strictly registration between the orifice and the flow channel portion during said bonding. Also, since said bonding can be done with difficulty when the end surfaces of the first and the second substrate to be bonded to the orifice plate are not coincident in plane, difficulty can also ensue during adhesion of the both substrates for this reason.
  • the orifice plate is also adhered by use of an adhesive, but since the pitch of the flow channel 11 and the height of the flow channel wall 10 are fine to the extent of about some 10 ⁇ m, unless the coated amount (thickness) of the adhesive layer 13 is controlled to the order of ⁇ m, the adhesive may come out to the flow channel side because of the pressure applied during bonding, whereby there may be caused such fear that the low channel diameter or the discharging orifice diameter may be varied, even to leading to clogging. Also, when the adhesive force is not sufficient, there is the fear that peeling of the orifice plate may occur.
  • the resin film has generally a thickness of about 20 to 50 ⁇ m, not only handling is cumbersome, but also it may be considered that wrinkles may be formed or bubbles may be introduced during plastering to effect no good plastering.
  • the ink jet recording head is constituted of an orifice plate 40 having orifices 41 as the discharging outlet, a ceiling plate 400 having ink channel grooves 401 communicated to the respective orifices, and a heater board 100 constituting a part of the ink channel and having energy generating elements 101A for generating energy to be utilized for discharging ink, as shown in Fig. 2.
  • the orifice plate is provided for the purpose of constituting the discharging outlet surface of the same member in order to prevent slippage in the discharging direction of discharged ink droplet caused by the difference in wettability between the heater board and the ceiling plate, and also the orifice, including its shape, etc. is an important element influencing the discharging performance of the ink jet recording head.
  • the orifice through which the ink is discharged becomes the most important portion, and with high developments of the image recording technique and the recording head production technique in recent years as described above, the orifice size (orifice diameter) has become miniaturized and a plurality of orifices have become provided at high density.
  • the recording technique at the present time demands higher precision and higher speed as a matter of course, and along with this demand, the dimension of the orifice of the ink jet recording head has been miniaturized, and the orifice density high, and yet the head has become to have a plurality of orifices.
  • the preparation steps from photolithography to plating are long, and also auxiliary materials such as substrate and resist, etc. must be employed.
  • the ink jet recording head is constituted of an orifice plate, a ceiling plate and a substrate as described above.
  • orifices and ink channels communicated thereto when not correctly registered in their positions, will badly affect discharging performance, even causing non-discharging in the worst case.
  • the main body of the ink jet recording head comprised of, for example as shown in Fig. 2, the orifice plate 40 having the orifice 41 (discharge plate), the ceiling plate for forming the ink liquid path communicated with each orifice, and the base member constituting a part of the path 401 and having the electro-mechanical converting element 101A for generating energy used for discharging the ink.
  • the orifice plate has a fine orifice for discharging the ink, which orifice has great significance affecting the discharge character of the ink jet recording head.
  • the metallic plate of SnS, Ni, Cr, Al, and resin film material such as polyimide (PI), polyethersulfone (PES) polyetheretherketone (PEEK), and polyester (PE) which can be formed easily in predetermined thickness and in low cost can be used.
  • resin film material such as polyimide (PI), polyethersulfone (PES) polyetheretherketone (PEEK), and polyester (PE) which can be formed easily in predetermined thickness and in low cost can be used.
  • the recording head with the constitution shown in Fig. 3 has a constitution obtained by providing, for example, an ink channel wall 7A comprising a cured film of a photosensitive resin, etc. as shown in Fig. 3B and an outer frame 8A constituting liquid chamber, etc. on a substrate 100 comprising a glass, etc. having an energy generating member 101A for generating the energy to be utilized for discharging ink such as a heat generating element, a piezoelectric element, etc. as shown in Fig.
  • the recording head with the constitution shown in Fig. 4A has a constitution obtained by forming a main recording head portion provided with an ink channel wall 7A, comprising, for example, a cured resin film of a photosensitive resin, etc. and an outer frame 8A, as shown in Fig. 4B on a substrate 100 comprising a glass, etc. having an ink discharging energy generating member 101A generating energy used for discharging ink such as heat-generating element, piezoelectric element, etc. as shown in Fig. 4A, and bonding a discharging orifice plate 12A to the upper part thereof in predetermined positional relationship.
  • the constitution of the discharging orifice plate for constituting the ink jet recording head with the constitution as described above and the characteristics to ink have great influences on the recording characteristics of the ink jet recording head such as the discharging direction of ink, the amount of the ink discharged, etc., and various investigations have been done in the prior art about the material to be used for formation of the discharging material and its structure.
  • the problems to be solved may include the following problems.
  • the ink jet head to be applied to the ink jet recording device is provided generally with an ink energy discharging member, ink channels, ink discharging orifices and a liquid chamber of ink.
  • the ink jet prepared according to the method of the prior art as described above has problems in preparation during bonding of the discharging orifice plate and during ink repellent treatment.
  • a means of coating the plate back surface or the front surface of the ink channel with an adhesive and bonding the both is employed, but during coating of the adhesive, there ensues the problem that a part or all of the ink channel or the discharging orifice portion finely worked is filled with the adhesive.
  • ink repellent treatment it is generally practiced to attach a fluorine type or silicon type thin film on the whole plate surface, and also at this time, the phenomenon of collapsing of hole similarly occurs as during coating of the adhesive as described above.
  • electro-forming or etching is expensive.
  • an ink jet recording head having a discharging orifice plate formed with provision of thru-holes on a plate material has, for example, a representative constitution as shown in Fig. 5.
  • a discharging orifice plate 40 having discharging orifices 41 communicated to the channel bonded to the opened face thereat a bonded body having a substrate 100 provided with an energy generating member 101A formed by wall member 7A for generating the energy to be utilized for discharging ink within the ink channel and a ceiling plate 11B bonded together.
  • the structure of the discharging orifice structure and its characteristics to ink have great influences on the recording characteristics of an ink jet recording head such as the discharging direction of ink, the droplet amount of discharged ink, etc., and various investigations have been made in the prior art about the material to be used for formation of the discharging orifice plate and its structure.
  • the treatment is required to be performed so that the water repellent treatment may not be extended to the inner surface of the discharging orifice which is demanded to be inkphillic.
  • the water repellent treatment of the outer surface of the discharging orifice in the prior art has been performed by forming a thin layer of an ink repellent surface treating agent on the surface of a transfer member and transferring the thin layer onto the surface having the discharging orifice of the ink jet recording head.
  • the method of the prior art have involved such problems that the treatment working is cumbersome, and also that the water repellent agent may be progressed to the inner portion of the discharging orifice, transfer cannot be sufficiently effected or even water repellent surface can not be formed because of deterioration of the transfer member.
  • ink jet recording head is generally equipped with fine ink discharging orifice, ink channel and ink discharging energy generating element provided on a part of the ink channel.
  • those channels are in most cases communicated to a common liquid chamber and constituted so that the recording liquid may be supplied smoothly and sufficiently into the liquid channels.
  • the recording technique at the present time demands higher precision and higher speed as a matter of course, and according to such demands, the discharging orifices of the ink jet recording head became fine in dimension, higher in orifice density became higher, and also became to have a plurality of orifice groups.
  • the pitch between the recording dots becomes narrower, and for making the fluid resistance through the ink path for higher speed, there is the demand to expand the pitch between orifices.
  • EP-A-309146 which has a date of filing of 15 September 1988 and a date of publication of 29 March 1989, discloses an ink jet printhead which is formed by bonding a nozzle plate to a printhead. Nozzles are formed in the nozzle plate by irradiating a surface of the plate through a mask with ultraviolet radiation. During nozzle formation, the printhead, the nozzle plate bonded thereto and the mask are rocked so that the nozzles have a smaller area at the surface where the radiation is incident than on the opposite surface. In this way, the nozzle exit has a smaller area than the nozzle entrance.
  • an ink jet head comprising an ink channel with an aperture member at one end having an aperture therein for allowing ink to be discharged therethrough, said method including the step of forming said aperture by irradiating said aperture member with a laser beam, the laser beam being incident on a surface of said aperture member opposite to the surface where said ink is to be discharged.
  • Embodiments of the present invention overcome defects in the prior art and provide an ink jet recording head and a manufacturing method thereof which can be manufactured through simple processes involving small steps, and which is reliable and low in cost.
  • Embodiments of the present invention provide an orifice plate which has orifices arranged in high density and with high accuracy, and an ink jet recording head and a manufacturing method thereof in which the relation between the orifice and ink path is accurately set in view of the above mentioned problem relating to the orifice formation and the connection of the orifice plate with the ceiling plate and heater board.
  • Embodiments of the present invention provide an ink jet recording head in which the discharge performance is increased by forming the orifice in an orifice plate comprised of plural kinds of materials.
  • Embodiments of the present invention provide an ink jet recording head which can obtain the necessary ink droplet amount and discharge speed stably and sufficiently upon recording.
  • Embodiments of the present invention provide a manufacturing method of an ink jet recording head which has high accurate diameter of the ink discharge opening and pitch, and which can be performed cheaply.
  • Embodiments of the present invention provide a manufacturing method for an ink jet recording head which can solve the above mentioned problems by forming the grooves for the ink path using an excimer laser after molding the ceiling plate having the groove for the common chamber.
  • Embodiments of the present invention provide an ink jet recording head and manufacturing method thereof which has an orifice plate of high density and high accuracy, in which discharge openings with different angles in every discharge opening and in every head can be easily formed on the orifice plate, and in which the relation between the orifice and the ink path are determined accurately.
  • Embodiments of the invention provide a method for manufacturing an ink jet recording head having an ink path connected to a discharge opening, a discharge energy generating element disposed in said ink path, and a discharge opening plate provided with said discharge opening and attached to an end surface of said ink path, the ink being discharged from said discharge opening, and said discharge opening being formed by irradiating said discharge opening plate with excimer laser light.
  • Embodiments of the invention provide a method for manufacturing an ink jet recording head having an ink path connected to a discharge opening, a discharge energy generating element disposed in said ink path, and a discharge opening plate provided with said discharge opening and attached to an end surface of said ink path, the ink being discharged from said discharge opening, said discharge opening plate being attached to said end surface of the ink path prior to said discharge opening being formed, and then said attached discharge opening plate being irradiated with excimer laser light to form said discharge opening.
  • Embodiments of the invention provide a liquid discharge recording head, comprising, a first base plate provided with a discharge energy generating element, a second base plate formed by resin molding and connected with said first base plate, said second base plate having a groove for forming a liquid flow path which corresponds to the location of said discharge energy generating element upon connection, and being provided with a liquid discharge opening for recording in front of said groove, said second base plate having a member in which said discharge opening is formed whose thickness is selected to be thinner at at least the position at which said discharge opening is formed.
  • Embodiments of the invention provide a method for manufacturing a liquid jet recording head made by connecting a first base plate provided with discharge energy generating means and a second base plate for forming a liquid flow path at a position corresponding to the location of said discharge energy generating means, said discharge opening being formed by irradiating a blank of the second base plate made of resin, to which a plate member for forming a liquid discharge opening for the recording is attached integrally, with excimer laser light.
  • Embodiments of the invention provide a method for manufacturing an ink jet recording head having an ink path connected to a discharge opening, a discharge energy generating element disposed in said ink path for generating energy used for discharging the ink, and a discharge opening forming member provided with said discharge opening and attached to an open surface at which an opening communicated with said ink path is disposed, the ink being discharged through said discharge opening to carry out the recording, said discharge opening on said discharge opening forming member being formed by irradiation with excimer laser light, and the side upon which said excimer laser light is incident being attached to said open surface.
  • Embodiments of the invention provide a method for manufacturing an ink jet recording head having a base plate provided with a discharge energy generating element used for discharging the ink, a ceiling plate having a recessed portion for forming an ink flow path corresponding to the disposed location of said discharge energy generating element by being attached to said base plate, and a discharge opening forming member on which a discharge opening communicated with said ink path and which discharges the ink is formed, in which method, excimer laser light incident from said recessed side is used to form said discharge opening, after said ceiling plate and discharge opening forming member are connected integrally.
  • Embodiments of the invention provide an ink jet recording head having a discharge opening forming member provided with a discharge opening for discharging ink, an ink path communicated with said discharge opening, and a discharge energy generating element disposed on a part of said ink flow path to generate energy used for discharging the ink, the ink being discharged to carry out recording, in which said discharge opening forming member is formed by accumulating plural members of different kinds of materials.
  • Embodiments of the invention provide a method for manufacturing an ink jet recording head made by connecting a plate having grooves for forming ink paths provided corresponding to each of a plurality of ink discharge openings, and a base plate having a discharge energy generating element disposed at a part of said ink paths, comprising forming said grooves by excimer laser light irradiation.
  • Embodiments of the invention provide a method for manufacturing an ink jet recording head made by connecting a plate having grooves for forming ink paths provided corresponding to each of a plurality of discharge openings and a common liquid chamber for storing the ink supplied to said ink paths, and a base member having a discharge energy generating element disposed at a part of said ink paths, by forming a base member having said grooves for forming said common chamber by injection molding, and working said grooves forming said ink paths by irradiating said base member with excimer laser light.
  • Embodiments of the invention provide a method for manufacturing an ink jet recording head in which plural discharge openings are formed by irradiation with excimer laser light, in which at least one of the entering angles of the laser light relative to a surface of said discharge openings is differentiated from others.
  • Figs. 7A and 7B show respectively schematic disassembled view and assembled view of a ink jet recording head in which an ink housing portion which is an ink feeding source is made integral to give a disposable type.
  • numeral 100 is a heater board comprising an electricity heat convertor (discharging heater) and a wiring of A1, etc. for feeding power thereto formed by film forming technique on a Si substrate, which corresponds to the first substrate 1 in Fig. 1. Its detailed constitution is described below by referring to Fig. 8. 200 is a wiring substrate corresponding to the heater board 100, and the corresponding wiring is connected by, for example, wire bonding.
  • a ceiling plate 400 is a ceiling plate provided with a partition wall, a common liquid chamber for limiting the ink flow channel, which corresponds to the second substrate 8 in Fig. 1 and comprises a resin material having integrally an orifice plate portion.
  • An example of this ceiling plate 400 is described below by referring to Figs. 39 to 41.
  • the 300 is a support made of, for example, a metal
  • 500 is a pressing spring, and by engaging both under the state with the heater board 100 and the ceiling plate 400 sandwiched therebetween, the heater board 100 and the ceiling 400 are pressure fixed by the urging force of the pressing spring 500.
  • the support 300 as well as the wiring substrate 200 can be provided by plastering, etc., and also can be made to have the mounting standard onto the carriage for performing scanning of the head.
  • the support 300 also functions as the member which cools the heater board 100 by release of the heat generated with driving.
  • 600 is a feeding tank, which receives ink fed from the ink reservoir portion forming the ink feeding source, and functions as a subtank leading the ink to the common liquid chamber formed by bonding of the heater board 100 and the ceiling plate 400.
  • 700 is a filter arranged at a site in the feeding tank 600 near the ink feeding inlet to the common liquid chamber, and 800 is a lid member of the feeding tank 600.
  • 900 is an absorber for impregnation of ink, and is arranged within the cartridge main body 1000.
  • 1200 is a feeding inlet for feeding ink to the unit comprising the respective portions 100 - 800 as described above, and by injecting ink through the feeding inlet 1200 in the step prior to arrangement of said unit to the portion 1010 of the cartridge main body 1000, ink can be impregnated into the absorber 900.
  • 1100 is a lid member of the cartridge main body, and 1400 is an air communicating opening provided at the lid member for communication to the air.
  • 1300 is a liquid repellant material arranged inwardly of the air communicating opening 1400 by which the ink leak through the air communicating opening 1400 can be prevented.
  • the unit comprising the respective portions 100 - 800 is arranged by registration at the portion 1010. Registration or fixing at this time can be effected by, for example, fitting the projection 1012 provided on the cartridge main body 1000 with the hole 312 provided on the support 300 corresponding thereto, whereby the cartridge shown in Fig. 7B is completed.
  • the ink is fed into the feeding tank 600 from the cartridge inner portion through the feeding inlet 1200, the hole 320 provided at the support 300 and the introducing inlet provided on the back side in Fig. 7A of the feeding tank 600, and after passing through the inner portion thereof, flows from the discharging outlet into the common liquid chamber through an appropriate feeding pipe and the ink introducing inlet 420 of the ceiling plate 400.
  • the connecting portion for ink communication as described above, for example, packing of silicone rubber, butyl rubber, etc. is provided, whereby sealing is effected to ensure the ink feeding flow channel.
  • Figs. 8A and 8B are a plan view of the heater board 100 and its partial enlarged view.
  • Fig. 8A 101 is the heater board substrate, and 103 the discharging heater portion.
  • 104 is a terminal, which is bonded by wire bonding to the outside.
  • 102 is a temperature sensor, which is formed at the discharging heater portion 3, etc. according to the same film forming process as for the discharging heater portion 103, etc.
  • Fig. 8B is an enlarged view of the portion B including the sensor 102 in Fig. 8A, 105 and 106 are respectively discharging heater and wiring.
  • 108 is a heater for heating the head.
  • the sensor 102 is formed according to the same film forming process as information of semiconductors similarly as other portions, and therefore extremely high in precision, and can be formed of a material varying in electroconductivity depending on temperature such as aluminum, titanium, tantalum, tantalum pentoxide, niobium, etc. which is the constituent material of other portions.
  • titanium is a material which can be arranged between the both for enhancing adhesiveness between the heat-generating resistance layer constitutes the electricity-heat converting element and the electrode
  • tantalum is a material which can be arranged at the upper portion for enhancing the cavitation resistance of the protective layer on the heat-generating resistant layer.
  • line width is made bold, and for making the influence of wiring resistance, etc. smaller, a zig-zag shape is formed to make the resistance higher.
  • the orifice plate should desirably have a thickness of about 10 to 50 ⁇ m, and also in view of the cost of material and ink resistance as the material of the orifice plate, film materials of thermoplastic resins, such as polyether ketone, polyimide, polyether sulfone, etc. may be included.
  • a film of a polyether ether ketone (PEEK) with a thickness of 25 ⁇ m is used.
  • the excimer laser is a laser capable of oscillating UV-ray and has such advantages as high strength, good monochromaticity, directional characteristic, capability of short pulse oscillaton, capability of making energy density very great by focusing with a lens.
  • Exicimer laser is a device capable of oscillating UV-ray of short pulses (15 - 35 ns)by discharging excitation of a gaseous mixture of rare gas and halogen, and Kr-F, Xe-Cl, Ar-F laser are frequently used.
  • the oscillation energy of these may be some 100 mJ/pulse, and the pulse repetition frequency 30 to 100 Hz.
  • the short pulse UV-ray of high luminance such as the excimer laser
  • the excimer laser is irradiated on a polymer resin surface
  • the Ablative Photodecomposition (APD) process where the irradiated portion is decomposed and scattered momentarily with accompaniment of plasma emission and impact sound, by which process working of the polymer resin is rendered possible.
  • metals such as SUS, etc., opaque ceramics, Si, etc. are not influenced by irradiation of excimer laser in an atmosphere of the air and hence can be used as the masking material in working by excimer laser.
  • Fig. 9 is a schematic illustration of a device for performing working orifice by use of such excimer laser.
  • 210 is an excimer laser
  • 211 is a lens for focusing laser beam 212 emitted from the excimer laser 210
  • 209 is a mask arranged between the excimer laser 210 and the orifice plate
  • 240 is an orifice plate on which orifices are to be formed.
  • Fig. 10 is a perspective view showing the details of the mask 209 and the orifice plate 240.
  • On the mask 209 are provided transparent portions 291 corresponding to the sites where orifices on the orifice plate 240 are to be worked so that laser beam 212 may be transmitted therethrough.
  • this pattern can be worked into the film for orifice plate.
  • the number of the orifices is plural, but this is shown schematically and practically in this example a mask having orifices of 360 DPI ⁇ 33 ⁇ m linearly juxtaposed is used.
  • orifices are formed by irradiation of laser beam 212 through the mask 209 on the plate 40.
  • the mask material it should preferably receive no influence of the heat by laser irradiation, and, for example, a material with small coefficient of thermal expansion, such as a metal material of Be-Cu, etc, can be used.
  • the orifice on the orifice plate prepared according to the method as described above is free from abnomal deformation at the peripheral portion of the orifice as occurs in working by carbon dioxide laser and YAG laser, and a circular form similar to the mask is worked beautifully from the surface to the back of the film.
  • Table 1 Design value ( ⁇ m) Dimension after laser working ( ⁇ m) Error ( ⁇ m) Pitch variance 70.5 70.4 - 0.1 Hole diameter 34.0 33.9 - 0.1
  • the orifice working with excimer laser has sufficient precision for further improvement of the performance of the ink jet recording head, and also has a specific feature that it can be produced simply.
  • the orifice shape of the ink jet recording head in this example has been deemed to have desirably a shape which is narrower at the tip which is nearer the exit of orifice 241 than the ink channel 402.
  • most prior art shapes have been cylindrical as shown in Fig. 16.
  • Fig. 17 is a sectional view of an ink liquid channel of the ink jet recording head according to an another example.
  • 40a is one plate of an orifice plate which comprises two kinds of materials
  • 40b is the other orifice plate.
  • a PI film with a thickness of about 20 ⁇ m is used, and as the material for the plate 40b, a dry film with a thickness of about 20 ⁇ m (SE-320, manufactured by Tokyo Ohka K.K.) for bonding the PI film 40a to the opening surface at which the openings of ink liquid channels are arranged.
  • the shape which becomes smaller in diameter toward the tip end shown in Fig. 17 has the effect of increased discharging speed and also the discharging direction which is made constant, leading to improvement of recorded image quality.
  • Fig. 23 shows the manner in which orifice working is performed by excimer laser beam on the orifice plate made of a resin film according to an embodiment of the present invention, and the same elements as those shown in Fig. 9 are attached with the same symbols.
  • Fig. 23 shows the manner in which orifice working is performed by excimer laser beam on the orifice plate made of a resin film according to an embodiment of the present invention, and the same elements as those shown in Fig. 9 are attached with the same symbols.
  • 210 is a laser oscillating device for oscillating KrF excimer laser beam, 212 a pulse laser beam with a wavelength of 248 nm and a pulse width of about 15 nsec oscillated from the laser oscillating device 210, 211 a synthetic quartz lens for converging the laser beam 212, 209 a projection mask having aluminum capable of shielding the laser beam 212 vapor deposided thereon, on which a plurality of holes of 133 ⁇ m in diameter are arranged at a pitch of 212 ⁇ m to constitute an orifice pattern.
  • PES 40 is an orifice plate member, which comprises a film of polyether sulfone (PES) having a thickness of 4 ⁇ m coated with a 6 ⁇ m thick tacky layer, and further plastered with a 25 ⁇ m thick Mylar.
  • PES polyether sulfone
  • Fig. 24 is an enlarged sectional view of the orifice plate member 40 shown in Fig. 23, and in Fig. 24, 12B is a PES film forming the orifice plate, 13B a tacky layer as the adhesive, and 17B a Mylar.
  • 12B is a PES film forming the orifice plate, 13B a tacky layer as the adhesive, and 17B a Mylar.
  • orifices of 3 ⁇ m are formed at a pitch of 70 ⁇ m.
  • the orifice plate 12B obtained by peel-off of the Mylar 17B is bonded to the opened face of the ink channel to complete the main ink jet recording head.
  • Fig. 25 is a sectional view of the main recording head thus obtained.
  • the shape obtained by this example becomes tapered, being widened in the direction opposite to the discharging direction. With such shape, the discharging speed and the ink amount discharged are increased stably to give the result that quality of the recorded image is improved.
  • Fig. 26 is an enlarged views of the portion where the laser beam 212 is incident on the film, and in Fig. 26, 18B is a dry film forming the orifice plate, 19B a protective film comprising a polyether and 20B a Mylar.
  • the orifice plate of the dry film obtained by peel-off of the protective film 19B is bonded to the opened face of the ink channel (Fig. 27).
  • the Mylar is peeled off to form the state shown in Fig. 28, and UV-ray is irradiated on the orifice plate 18B of the bonded dry film from the discharging direction side to effect photocuring, thereby completing the main ink jet recording head. Also according to this example, a shape with the taper of the orifice being widened in the direction opposite to the ink discharging direction is obtained.
  • Fig. 39 shows a constitutional example of the ceiling plate material for constituting the ceiling plate 400 according to another example.
  • the ceiling plate material 400' is made to have a desired number of ink channel grooves 411, 412, ... (two in the Figure for brevity) and an orifice plate portion 404 provided integrally.
  • the ceiling plate material 400' is simultaneously molded integrally together with the orifice plate portion 404 by use of a resin excellent ink resistance such as polysulfone, polyethersulfone, polyphenyleneoxide, polypropylene, etc.
  • the orifice plate portion 404 may be also formed of the same resin material as the main body portion of the ceiling plate material 400' or another kind of resin material, which may be prepared separated from the main portion of the ceiling plate material 400' and inserted into the mold for insert molding.
  • the resin can be molded with a mold having a reverse pattern thereto formed by such method as cutting, etc., whereby the flow channel grooves 411, 412 can be formed on the ceiling plate 400.
  • the orifice plate 404 thus integrally molded has a thickness of about 50 to 100 ⁇ m in molding.
  • the orifice can be also formed under this state, but practically the flow channel length of that portion should be desirably 20 ⁇ m or less. This is because, if the flow channel length from the discharge heater 101A is large, discharging performance is influenced thereby. Accordingly, in this example, particularly the portion over the range where orifices to be formed are arranged corresponding to the grooves 411, 412 of the orifice plate portion 404 is worked to be made thin before formation of the orifices. In this example, excimer laser was used for working.
  • Fig. 40 is a schematic illustration of a device for performing working by use of such excimer laser.
  • 450 is an excimer laser oscillator (in this exmaple, it is made a Kr-F excimer laser oscillator)
  • 451 is a lens of, for example, f value of 500 mm for converging laser beam 452.
  • 453 is a mask comprising a plate of Al, etc. with a thickness of, for exmaple, 1 mm having a hole pattern corresponding to the worked portion.
  • the ceiling plate material 400' is arranged adequately so that the surface to be worked may be irradiated by laser beam through the lens 451 and the mask 453.
  • the laser beam emitted from the Kr-F excimer laser oscillator 450 is irradiated on the orifice plate 404 through the mask 453 having a hole of, for example, rectangular shape formed therein.
  • the orifice plate 404 becomes thin by working only of the portion where irradiated with excimer laser.
  • Fig. 41A exhibits such state, where 465 is the grooved portion made thin by said working. At this time by controlling adequately the strength of laser and the working time, the thickness of that portion could be made about 10 to 20 ⁇ m.
  • the orifice plate 404 is subjected to the liquid repellant treatment, because the surface having liquid repellancy has the effect to wetting of unnecessary ink, etc.
  • the liquid repellant DEFENSA from Dainippon Ink diluted with Difreon S-3 from Daikin to 1 % is coated.
  • UV-ray irradiation is effected.
  • orifices corresponding to flow channels are formed by working with excimer laser.
  • the ceiling plate 400 as shown in Fig. 41B can be received.
  • Fig. 41B for brevity, 4 orifices (or flow channels) are provided.
  • grooves 411, 412 for flow channel formation and the common liquid chamber portion may be also worked with excimer laser, or these may be also worked after formation of the discharging outlet (orifice) portions. Also, when the length of the flow channel length in front of the discharging heater poses no problem, the orifice plate portion 404 is not necessarily made thin depending on the constitution.
  • the heater board 100 is abutted against the orifice plate 404 as shown by the chain line to be bonded thereto, thereby giving a main recording head.
  • the position can be determined of the flow channel direction by abutting the heater board 100 against the end surface on the opposite side to the end surface on the discharging side of the orifice plate portion 404 during bonding of the heater board 100 and the ceiling plate 400 integrally made with the orifice plate portion 404, the whole registration step and assembling step can be made easier. In addition, there is also no fear of peel-off of the orifice plate as in the prior art.
  • Fig. 42 shows another embodiment of the present invention in which orifice working is performed by excimer laser beam on the orifice plate formed integrally with the ceiling plate, and the same elements as those shown in Fig. 40 are attached with the same symbols.
  • 450 is a laser oscillating device for oscillating KrF excimer laser beam
  • 452 a pulse laser beam with a wavelength of 248 nm and a pulse width of about 15 nsec oscillated from the laser oscillating device 450
  • 451 a synthetic quartz lens for converging the laser beam 452, 453 a projection mask having aluminum capable of shielding the laser beam 452 vapor deposited thereon, on which a plurality of holes of 133 ⁇ m in diameter are arranged at a pitch of 212 ⁇ m to constituted an orifice pattern.
  • Fig. 43A shows a constitutional example of the ceiling plate 457 according to this example.
  • the ceiling plate 457 is made to have a desired number of ink channel grooves 464 and ink discharging orifices 466 formed on the orifice plate 460 corresponding thereto (two in the Figure for brevity) and an orifice plate portion 460 provided integrally.
  • the ceiling plate material 457 is simultaneously molded integrally together with the orifice plate 460 by use of a resin excellent in ink resistance such as polysulfone, polyethersulfone, polyphenyleneoxide, polypropylene, etc.
  • a resin can be molded with a mold having a fine groove of reverse pattern thereto by such method as cutting, etc., and with the use of the mold, liquid channel groove 464 can be formed on the ceiling plate 457.
  • orifice within the mold, molding is effected under the state having no orifice 466 and excimer laser beam is irradiated by a laser device on the positions where orifices are to be formed from the ink channel side on the orifice plate 10 as explained in Fig. 42, followed by removal and evaporation of the resin, to form orifices 466.
  • Fig. 43B The details of orifice formation are shown in Fig. 43B.
  • the excimer laser beam 452 is irradiated on the orifice plate 460 through the mask 453 as described above from the ink channel side 464.
  • the cross-sectional area of the orifice having a tapered shape becomes reduced toward the discharging direction.
  • Fig. 44 is a perspective view of the main recording head constituted by bonding of the heater board 458 and the ceiling plate 457 as described above.
  • the heater board 458 having the discharging heater 101A, etc. is bonded to the orifice plate 460 to obtain the main recording head.
  • the position can be determined of the flow channel direction by abutting the heater board 458 against the end surface on the opposite side to the end surface on the discharging side of the orifice plate 460 during bonding of the heater board 458 and the ceiling plate 460 integrally made with the orifice plate 460, the whole registration step and assembling step can be made easier. In addition, there is also no fear of peel-off of the orifice plate as in the prior art.
  • Figs. 45A and 45B show another embodiment of the present invention, and are repsectively a perspective view and a sectional view of a ceiling plate having an orifice plate integral formed therewith.
  • This example has made the irradiation angle, namely ⁇ 2 as described above 45° corresponding to the shapes of the ceiling plate and the orifice plate.
  • irradiation angle namely ⁇ 2 as described above 45° corresponding to the shapes of the ceiling plate and the orifice plate.
  • the discharging speed is increased to two-fold or more, and consequently the shooting position precision of droplet can be improved to give good recording result.
  • the volume of discharged liquid is understood to become larger, and this gives better result to the recording density.
  • the orifice plate and the ceiling are integrally combined, but embodiments of the present invention are not limited thereto, but the desired effect can be of course obtained by bonding separately to the ceiling plate, and then applying the orifice working as described above thereon.
  • Fig. 47 is a perspective view showing one example of ceiling plate 400 shown in Fig. 7, representing the groove 403 for common liquid chamber and the groove 402 (dotted line) for ink channel, and the ceiling plate 400 is a resin molding.
  • the resin material polyether sulfone, polyether ether ketone excellent in ink resistance can be used. Molding of the ceiling plate 400 is performed by use of a commercially available injection molding machine and a mold forming a pair with the shape shown in Fig. 47.
  • the excimer laser used in this example is KrF excimer laser and also Arf excimer laser can be used.
  • the mask material a quartz substrate is used and the opaque portion 714 of the mask 453 is formed by Cr vapor deposition.
  • the width 703 of the ink channel groove is made 32 ⁇ m corresponding to the constitution having 16 discharging outlets per 1 mm, and width 704 of the non-groove portion is made 31.5 ⁇ m.
  • the resin molding shown in Fig. 47 becomes the ceiling plate having fine grooves for ink channel integrally as shown in Fig. 48.
  • the ceiling plate 400 after being precisely washed is bonded to the heater board 100 having energy generating elements 101A such as heat generating elements, etc. arranged on a substrate which can be formed of glass, ceramics, Si, plastic, or metal, etc. as shown in Fig. 51 to constitute the main head 780.
  • energy generating elements 101A such as heat generating elements, etc. arranged on a substrate which can be formed of glass, ceramics, Si, plastic, or metal, etc. as shown in Fig. 51 to constitute the main head 780.
  • 41 is ink discharging outlet (orifice) in the main head 780.
  • Fig. 52 is a schematic view of an apparatus showing manufacturing manner of the orifice according to another example.
  • 450 is an excimer laser generating device
  • 451 is a lens for collecting laser beams 452 outputted from the generating device 450
  • 453 is a mask disposed between the generating device 450 and the orifice plate
  • 40 is an orifice plate on which the orifice is formed
  • 413 is a lens for collecting the laser beam for perforating the discharge opening on the orifice plate by projecting the mask 453.
  • Fig. 53 is a perspective view for showing detail of the mask 453 and orifice plate 40.
  • a transparent portion 91 is provided corresponding to a portion at which the orifice of orifice plate 40 is worked for causing the laser beam to transmit.
  • the pattern provided on the mask 453 as the orifice will be worked on the film of orifice plate.
  • the mask in which orifices of 360 DPI, ⁇ 33 ⁇ m are arranged side by side linearly is used.
  • the laser beam 452 is irradiated to the plate 40 via the mask 453 to form the orifice. It is desirable for the mask not to be affected by heat due to laser irradiation, and for this reason material of low thermal coefficiency such as metal (for example Be-Cu) can be adopted.
  • the orifice shape of the ink jet recording head in this example has been deemed to have desirably a shape which is narrower at the tip which is nearer the exit of the orifice 805 than ink channel 804.
  • most prior art shapes have been cylindrical.
  • the principal part of the recording head prepared as described above is constituted as shown in Fig. 56.
  • the angle ⁇ of the discharging orifice 805 formed on the orifice plate 802 differs for each liquid channel 804, whereby the droplet will fly with curving of the discharging direction 807 for each discharging orifice 805 in substantially the same angle as the discharging orifice angle.
  • the recorded dot pitch d formed on the surface to be recorded 806 can be made smaller than the liquid channel pitch d' of the recording head.
  • the discharging orifice width can be taken larger, and also it has become possible to take also larger width of the discharging energy element. For this reason, energy efficiency can be improved to enhance the discharging speed. Further, since the cross-sectional area of the liquid channel can be enlarged, supplement of ink to the liquid channel becomes smooth, and therefore response frequency can be also improved, and further overall improvement of image quality can be improved.
  • the speed of the ink droplet discharged from the discharging orifice at the central portion with shorter flight length of the ink droplet can be made greater as compared with the speed of the ink droplet discharged from the discharging orifice at the outside portion with longer flight length of the ink droplet, and therefore the timings of the ink droplets shot finally onto the recording medium can be made the same very easily when the timings of the ink droplets discharged from the discharging orifices and their driving forces are the same for the respective discharging orifices.
  • the discharging orifice angles of the respective discharging orifices are formed in the converging direction, but, if necessary, the discharging angles can be set variously for the respective discharging orifices.
  • the above-mentioned incident angle may be different from the angle formed between the plane which is vertical to the above-mentioned discharging orifice surface and formed between the direction in which above discharging orifices are juxtaposed and the direction in which the ink is discharged from the above discharging orifices, and the above discharging orifice surface.
  • Fig. 57 is a schematic view of an ink jet recording head, which head is disposable with an ink tank integrally combined.
  • the ink jet recording head shown in Fig. 57 is provided with four main recording heads, each constituted by bonding a ceiling plate having a concavity (hereinafter called “groove") for constituting ink channels and common liquid chamber, and further a discharging orifice forming member (orifice plate) 802 integrally formed and a substrate (hereinafter called “heater board”) having art electricity-heat converter for generating discharging energy (hereinafter called “discharging heater”) and an Al wiring for supplying electrical signals thereto formed by the film forming technique on a Si substrate.
  • a ceiling plate having a concavity hereinafter called “groove
  • discharging orifice forming member 802 integrally formed and a substrate (hereinafter called “heater board”) having art electricity-heat converter for generating discharging energy (hereinafter called “discharging heater”) and an Al wiring for supplying electrical signals thereto formed by the film forming technique on a Si substrate.
  • 600 is a sub-ink tank arranged adjacent to the main recording head, and the sub-ink tank 600 and the above main body are supported by lids 300 and 800.
  • 1000 is a main cartridge and 1100 is the lid member of the main cartridge.
  • Internally of the main cartridge is built in an ink tank, which supplies suitably ink to the sub-ink tank 600.
  • Fig. 58A shows the manner in which orifice working is performed by excimer laser beam on the orifice plate formed integrally with the ceiling plate. That is, Fig. 58A is a schematic view of the device in which the laser beam is incident so as to form discharging orifices from the ceiling concavity side.
  • FIG. 450 is a laser oscillating device for oscillating KrF excimer laser beam, 452 a pulse laser beam with a wavelength of 248 nm and a pulse width of about 15 nsec oscillated from the laser oscillating device 450, 451 a synthetic quartz lens for converging the laser beam 452, 453 a projection mask having aluminum capable of shielding the laser beam 452 vapor deposited thereon, on which a plurality of holes of 133 ⁇ m in diameter are arranged at a pitch of 212 ⁇ m to constituted an orifice pattern.
  • 460 is an orifice plate for forming the discharging orifices which is fixed on an implement 207A which can be freely rotated relative to the laser beam 452.
  • the principal portion of the recording head prepared as described above has the constitution as shown in Fig. 59.
  • the discharging angle ⁇ of the discharging orifice 909 formed on the orifice plate 902 differ for each head 901, and therefore the droplet will fly with the discharging direction 911 of each head being curved substantially the same as the discharging angle. Accordingly, the recording dot pitch d'' for each discharging orifice row formed on the surface to be recorded 210 can be made smaller than the distance d''' between the discharging orifice rows of the recording head.
  • the distance between the respective discharging orifice rows is the same as the recording dot row distance, greater memory size is required for taking timing for each recording dot row, but in this example, the distance between the recorded dot rows can be taken smaller, whereby the cost of the main printer can be made lower.
  • such constitution is very effective in the case of color printing where the discharging orifice rows must be divided corresponding to the respective colors.
  • Fig. 60 shows an example which bonds or fixes the heater board 100 and the ceiling plate 400.
  • the orifice plate portion 404 of the ceiling plate 400 is shown by the chain line, and showing of the wiring pattern on the heater board 100 is omitted.
  • the registration of the heater board 100 and the ceiling plate 400 is performed by abutting the end surface of the heater board 100 against the orifice plate portion 404, and in bonding of these, the adhesive 405 was coated along the 3 sides of the peripheral portion of the ceiling plate 400. By doing so, flowing of the adhesive into the ink flow channel could be inhibited. Further, it is also possible to permit an adhesive to exist over a suitable range in necessary and sufficient amount at the bonding surface between the heater board 100 and the orifice plate 404.
  • a photocurable type adhesive UV-201 (Grace Japan K.K.) is used, and after registration cured by irradiation with UV-ray of, for example, 10 - 30 J/cm2 to fix the both.
  • UV-ray of, for example, 10 - 30 J/cm2
  • the main recording head obtained by integration of the ceiling plate 400 and the heater board 100 in this way is fixed onto the support 300 by use of an adhesive 306.
  • the adhesive 306 for example, HP2R/2H manufactured by Canon Chemical K.K. can be employed.
  • both the substrates are adhered only at the peripheral portions other than the flow channel portion as described above, and no sufficient adhesion is obtained. Accordingly, an urging force of the pressing spring 500 is permitted to act from the upper side of the ceiling plate 400.
  • the pressing spring 500 can be formed by use of, for example, phosphorous bronze or stainless steel for spring. By fitting the hooks 507 provided at the lower portions of both ends into the hole portions 307 provided at the support 300 to thereby engaging the both, mechanical pressure is applied from the upper portion of the ceiling plate 400. In this way, sufficient adhesion state between the both substrates can be obtained.
  • 520 is a hole which receives insertion of the feeding pipe for connecting the ink introducing inlet 420 of the ceiling plate 400 to the ink feeding inlet on the feeding tank 600 side.
  • a photocurable type adhesive in bonding of the ceiling plate 400 with the heater board 100, a photocurable type adhesive is used, but its form may be any desired one or no adhesive may be required to be used, if sufficient fixing force or adhesion force can be obtained with the pressing spring 500.
  • a suitable sealing material namely a sealing member such as sealant or rubber packing, etc. can be used.
  • no adhesive 306 may be employed.
  • the coating step of the adhesive can be simplified. Also when slippage occurred during registration in the prior art, there was a fear of sticking of adhesive to the flow channel portion at the discharging heater 105, etc. of the heater board 100, or occurrence of defective product by clogging of the flow channel or discharging outlet with adhesive, but no such phenomenon occurs in this example, and registration can be done for many times. Further, presence of more or less deformation, warping or variance in product in the ceiling plate by use of a resin material is permissible and therefore the manufacturing steps can become simple.
  • Fig. 61 is a modification example of the constitution shown in Fig. 60. In this Figure, showing of the orifice plate 404 in the ceiling plate 400 is omitted.
  • the structure is made to obtain sufficient adhesion by applying pressure with a plate spring 500 in flat shape from the upper surface of the ceiling plate 400 under the state where the main recording head comprising the heater board 100 and the ceiling plate 400 is bonded to the support 300.
  • the plate spring 500 is further pressurized by another member of the upper part (e.g. feeding tank 600 in Fig. 7).
  • the cartridge as shown in Fig. 7B can be obtained and further an ink jet printer as shown in Fig. 62, namely an ink jet printer by use of a disposable cartridge can be constituted by use of this.
  • Fig. 62 14 is the cartridge shown in Figs. 7A and 7B, the cartridge 14 is fixed on the carriage 15 by a pressing member 41, and these are made reciprocally movable in the lengthy direction along the shaft 21. Also, registration relative to the carriage 15 can be effected by, for example, the hole provided on the support 300 and the dowel provided on the carriage 15 side. Further electrical connection may be obtained by joining of the connector on the carriage 15 to the connecting pad provided on the wiring substrate 200.
  • This ink discharged by the recording head reaches a recording medium 18 with the recording surface regulated by a platen 19 to form an image on the recording medium 18.
  • the cartridge 14 can be provided in one or plural number (two in the Figure) corresponding to the ink colors, etc. used.
  • 17 is a carriage motor for scanning the carriage 15 along the shaft 21, 22 is a wire for transmitting the driving force of the motor 17 to the carriage 15.
  • 20 is a feed motor jointed with the platen roller 19 for conveying the recording medium 18.
  • the cartridge 14 is changed when there is no ink impregnated in the absorber 900, etc., and for that purpose, the cartridge 14 is desired to be low in cost. Since the cartridge 14 as described in the above examples can be produced by simple production steps and also with small number of steps, and therefore it can be constituted at low cost and is extremely suitable for disposable construction. Further, registration in assembling of the main recording head can be done correctly, and yet there occurs no variance in dimension or clogging of the flow channel, etc. by flowing of the adhesive, reliability is very high and also yield can be improved.
  • Embodiments of the present invention are not limited to the examples as described above, but various constitutions can be employed as a matter of course.
  • the main recording head the ink supplying source, etc. are made integral and disposable, but the both may be separate bodies, and each is not necessarily required to be made disposable. This is because, even the main recording head may be the fixed type without the condition of simple exchange, simple and inexpensive constitution as described above will also constitute to the reduction in cost of the main printer.
  • ink flow channels and concavity for formation of the common liquid chamber are provided only on the ceiling plate side in the above examples, but these can be also provided on both thereof.
  • discharging heater 105 is used so as to make the heat energy discharging energy in the above examples, an electricity-mechanical converting element which is deformed corresponding to current passage may be used to utilize the mechanical vibration as the discharging energy.
  • the orifice plate portion 404 itself is made a constitution having the abutting portion against the heater board, but the shape, etc. of the abutting portion may be any desired one.
  • such abutting portion may be also provided in the side surface direction so as to effect registration in the lateral direction, or in place of providing such abutting portion, the registration may be made through the combination of dowel and hole.
  • the ceiling plate may be in the form having the wall portion with the same surface as the bonding surface in front of the groove portion and having the discharging outlet formed thereat.
  • the ceiling plate and the heater board are adhered and bonded with a pressing spring, but if there is no problem in use only of an adhesive during said bonding, it is also possible to use a constitution without use of a pressing spring.
  • Embodiments of the present invention bring about excellent effects particularly in a recording head, recording device of the bubble jet system among the ink jet recording system.
  • the on-demand type is effective because, by applying at least one driving signal which gives rapid temperature elevation exceeding nucleus boiling corresponding to the recording information on an electricity-heat convertors arranged corresponding to the sheets or liquid channels holding liquid (ink), heat energy is generated at the electricity-heat convertors to effect film boiling at the heat acting surface of the recording head, and consequently the bubbles within the liquid (ink) can be formed corresponding one by one to the driving signals.
  • the constitution of the recording head in addition to the combination constitutions of discharging orifice, liquid channel, electricity-heat converter (linear liquid channel or right angle liquid channel) as disclosed in the above-mentioned respective specifications, the constitution by use of U.S. Patent 4,558,333, 4,459,600 disclosing the constitution having the heat acting portion arranged in the flexed region is also included in embodiments of the present invention.
  • embodiments of the present invention can be also effectively made the constitution as disclosed in Japanese Patent Laid-Open Application No. 59-123670 which discloses the constitution using a slit common to a plurality of electricity-heat convertors as the discharging portion of the electricity-heat converter or Japanese Patent Laid-Open Application No. 59-138461 which discloses the constitution having the opening for absorbing pressure wave of heat energy correspondent to the discharging portion.
  • the recording head of the full line type having a length corresponding to the maximum width of recording medium which can be recorded by the recording device
  • either the constitution which satisfies its length by combination of a plurality of recording heads as disclosed in the above-mentioned specifications or the constitution as one recording head integrally formed may be used, and embodiments of the presents invention can exhibit the effects as described above further effectively.
  • embodiments of the present invention are effective for a recording head of the freely exchangeable chip type which enables electrical connection to the main device or supply of ink from the main device by being mounted on the main device, or for the case by use of a recording head of the cartridge type provided integrally on the recording head itself.
  • a restoration means for the recording head, a preliminary auxiliary means, etc. provided as the constitution of the recording device of embodiments of the present invention is preferable, because the effect of embodiments of the present invention can be further stabilized.
  • Specific examples of these may include, for the recording head, capping means, cleaning means, pressurization or aspiration means, electricity-heat convertors or another heating element or preliminary heating means according to a combination of these, and it is also effective for performing stable recording to perform preliminary mode which performs discharging separate from recording.
  • embodiments of the present invention are extremely effective for not only the recording mode only of a primary stream color such as black etc., but also a device equipped with at least one of plural different colors or full color by color mixing, whether the recording head may be either integrally constituted or combined in plural number.
  • a cheap but reliable ink jet recording head can be obtained by a simple manufacturing process with a small number of steps.
  • the orifice on the orifice plate with high density, in high accuracy and under accurate positioning relative to the ink path or the like.
  • the mask member properly, more small or fine plural orifices can be manufactured together, so the ink jet recording head can be manufactured simply and in low cost. Additionally, realization of high accuracy can improve character of the image to be recorded.
  • the ink jet recording head having tapered configuration whose cross-section decreases with respect to the discharge direction, which enables to stabilize the amount of ink droplet and the discharge speed necessary for recording.
  • the discharge quality such as accuracy of adhering position and recording density is improved and the recording image at high quality can be obtained.
  • the ceiling plate in which the ink groove of fine configuration and the common chamber having several scores times of the ink path are integrally formed can be formed easily.
  • high flatness of accuracy of the ink path can be realized by the working of excimer laser light.
  • the process number can be decreased compared with the prior art, and the bad influence such as positioning shift, leakage of the recording liquid, flow-in of the adhesive agent into the ink path can be prevented.
  • the ink jet recording head in which the ink discharge quality is increased can be obtained.
  • the orifice plate can be provided with each discharge opening angle peculiar to the discharge opening in high density and high accuracy, and the positional relation between the ink path or the like and the orifice can be determined accurately.
  • the discharge opening is formed obliquely on the orifice plate in high accuracy, and plural discharge openings (orifices) of different angle can be formed simultaneously on the plate.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Claims (22)

  1. Verfahren zur Herstellung eines Tintenstrahlkopfes, der einen Tintenkanal (401) mit einem Öffnungselement (40, 18B, 460) an einem Ende umfaßt, in dem eine Öffnung (41, 466) angeordnet ist, durch die Tinte abgegeben werden kann, bei dem die Öffnung (41, 466) durch Bestrahlen des Öffnungselementes (40, 18B, 460) mit einem Laserstrahl (212, 452) geformt wird, wobei der Laserstrahl (212, 452) auf eine Fläche des Öffnungselementes (40, 18B, 460) trifft, die der Fläche gegenüberliegt, wo die Tinte abgegeben werden soll.
  2. Verfahren nach Anspruch 1, bei dem das Öffnungselement (40, 18B, 460) und die Öffnung (41, 466) sowie der Tintenkanal (401) durch die folgenden Schritte geformt werden:
    Vorsehen einer ersten Platte (100, 458);
    Vorsehen einer zweiten Platte (400, 457, 50, 18B, 460), die ein erstes Element (400, 457), das mindestens mit einem ausgesparten Abschnitt (464) versehen ist, und ein Öffnungselement (40, 18B, 460), das einstückig mit dem ersten Element (400, 457) ausgebildet ist, umfaßt;
    Formen einer Öffnung (41, 466) im Öffnungselement (40, 18B, 460) durch Bestrahlen des Öffnungselementes (40, 18B, 460) mit einem Laserstrahl (212, 452), wobei der Laserstrahl (212, 452) auf eine Fläche des Öffnungselementes (40, 18B, 460) trifft, die der Fläche gegenüberliegt, wo die Tinte abgegeben werden soll; und
    Verbinden der ersten (100, 458) und zweiten (400, 457, 40, 18B, 460) Platte derart, daß die erste Platte (100, 458) und der ausgesparte Abschnitt (464) den mit der Öffnung (41, 466) verbundenen Tintenkanal (401) bilden.
  3. Verfahren nach Anspruch 2, bei dem ein Abschnitt des Öffnungselementes (40, 18B, 460) vom ersten Element (400, 457) vorsteht und die erste Platte (100, 458) gegen den Abschnitt stößt, wenn die erste (100, 458) und zweite (400, 457, 40, 18B, 460) Platte miteinander verbunden werden.
  4. Verfahren nach Anspruch 2 oder 3, bei dem die zweite Platte (400, 457, 40, 18B, 460) durch Formen aus einem Harzmaterial hergestellt wird.
  5. Verfahren nach Anspruch 1, bei dem das Öffnungselement (40, 18B, 460) und die Öffnung (41, 466) sowie der Tintenkanal (401) durch die folgenden Schritte geformt werden:
    Vorsehen einer ersten Platte (100, 458);
    Vorsehen einer zweiten Platte (400, 457), die mindestens einen ausgesparten Abschnitt (464) aufweist;
    Befestigen eines Öffnungselementes (40, 18B, 460) an der zweiten Platte (400, 457), um auf diese Weise ein Ende des ausgesparten Abschnittes (464) zu blockieren;
    Formen einer Öffnung (41, 466) im Öffnungselement (40, 18B, 460) durch Bestrahlen des Öffnungselementes (40, 18B, 460) mit einem Laserstrahl (212, 452), der auf eine Fläche des Öffnungselementes (40, 18B, 460) trifft, die der Fläche gegenüberliegt, wo die Tinte abgegeben werden soll; und
    Verbinden der ersten Platte (100, 458) und der zweiten Platte (400, 457) mit dem daran befestigten Öffnungselement (40, 18B, 460), so daß die erste Platte (100, 458) und der ausgesparte Abschnitt (464) den mit der Öffnung (41, 466) verbundenen Tintenkanal (401) bilden.
  6. Verfahren nach einem der Ansprüche 2 bis 5, bei dem der Laserstrahl (212, 452) unter einem schiefen Winkel (ϑ2) auf die Fläche trifft, auf die der Strahl (212, 452) trifft.
  7. Verfahren nach Anspruch 1, bei dem das Öffnungselement (40, 18B, 460) und die Öffnung (41, 466) sowie der Tintenkanal (401) durch die folgenden Schritte geformt werden.
    Vorsehen einer ersten Platte (100, 458);
    Vorsehen einer zweiten Platte (400, 457), in der mindestens ein ausgesparter Abschnitt (464) angeordnet ist;
    Vorsehen eines Öffnungselementes (40, 18B, 460) mit einer darin ausgebildeten Öffnung (41, 466) durch Bestrahlen des Öffnungselementes (40, 18B, 460) mit einem Laserstrahl (212, 452), der auf eine Fläche des Öffnungselementes (40, 18B, 460) trifft, die der Fläche gegenüberliegt, wo die Tinte abgegeben werden soll;
    Verbinden des Öffnungselementes (40, 18B, 460) mit der zweiten Platte (400, 457) derart, daß die Öffnung (41, 466) mit dem ausgesparten Abschnitt (464) verbunden wird; und
    Verbinden der ersten Platte (100, 458) und der zweiten Platte (400, 457) mit dem daran befestigten Öffnungselement (40, 18B, 460) derart, daß die erste Platte (100, 458) und der ausgesparte Abschnitt (464) den mit der Öffnung (41, 466) verbundenen Tintenkanal (401) bilden.
  8. Verfahren nach Anspruch 5 oder 7, bei dem ein Abschnitt des Öffnungselementes (40, 18B, 460) im an der zweiten Platte (400, 457) befestigten Zustand von der zweiten Platte (400, 457) vorsteht und die erste Platte (100, 458) gegen den Abschnitt stößt, wenn die erste (100, 458) und zweite (400, 457) Platte verbunden werden.
  9. Verfahren nach einem der Ansprüche 5, 7 oder 8, bei dem das Öffnungselement (40, 18B, 460) aus Harzmaterial hergestellt wird.
  10. Verfahren nach einem der Ansprüche 2 bis 9, das des weiteren die folgenden Schritte umfaßt:
    Vorsehen von Energieerzeugungseinrichtungen (101A) zur Erzeugung von Energie zur Abgabe von Tinte; und
    Anordnen der Energieerzeugungseinrichtungen (101A) derart, daß sie innerhalb des ausgesparten Abschnittes (464) liegen, wenn die erste (100, 458) und zweite (400, 457) Platte miteinander verbunden werden.
  11. Verfahren nach Anspruch 10, bei dem die Energieerzeugungseinrichtungen (101A) ein elektrothermisches Umwandlungselement zur Erzeugung von thermischer Energie umfassen.
  12. Verfahren nach einem der Ansprüche 2 bis 11, bei dem der ausgesparte Abschnitt (464) unter Verwendung eines Excimer-Laserstrahles (212, 452) geformt wird.
  13. Verfahren nach einem der Ansprüche 2 bis 12, bei dem eine Vielzahl von ausgesparten Abschnitten (464) und eine Vielzahl von Öffnungen (41, 466) im Öffnungselement (40, 18B, 460) geformt werden, wobei jede Öffnung (41, 466) mit einem entsprechenden ausgesparten Abschnitt (464) verbunden wird.
  14. Verfahren nach Anspruch 13, bei dem mindestens eine Öffnung (41, 466) unter einem in bezug auf die anderen Öffnungen (41, 466) unterschiedlichen Winkel geformt wird, so daß Tinte in einer unterschiedlichen Richtung abgegeben werden kann.
  15. Verfahren nach einem der vorangehenden Ansprüche, das des weiteren den Schritt des Vorsehens von Einrichtungen (19, 20) zum Fördern eines Aufzeichnungsmediums (18), auf dem durch die von der Öffnung (41, 466) abgegebene Tinte eine Aufzeichung durchgeführt werden soll, umfaßt.
  16. Verfahren nach einem der vorangehenden Ansprüche, das des weiteren den Schritt des Vorsehens eines Tintentanks zur Zuführung von Tinte in den Tintenkanal (401) des Tintenstrahlkopfes umfaßt.
  17. Verfahren nach einem der vorangehenden Ansprüche, bei dem der Laserstrahl (212, 452) ein Excimer-Laserstrahl ist.
  18. Verfahren nach einem der vorangehenden Ansprüche, bei dem mindestens der Abschnitt des Öffnungselementes (40, 18B, 460), wo die Öffnung (41, 466) geformt werden soll, verdünnt wird, bevor die Öffnung (41, 466) geformt wird.
  19. Verfahren nach einem der vorangehenden Ansprüche, bei dem die Öffnung (41, 466) so geformt wird, daß ein Ende einen kleineren Querschnitt besitzt, wobei dieses Ende das Ende ist, von dem die Tinte abgegeben werden soll.
  20. Verfahren nach einem der vorangehenden Ansprüche, bei dem die Öffnung (41, 466) so geformt wird, daß Tinte in bezug auf die Fläche des Öffnungselementes (40, 18B, 460), wo die Tinte abgegeben werden soll, nach oben abgegeben wird.
  21. Verfahren nach einem der vorangehenden Ansprüche, bei dem der Laserstrahl (212, 452) über eine Maske (209, 453) auf die Fläche trifft.
  22. Verfahren nach einem der vorangehenden Ansprüche, bei dem das Öffnungselement (40, 18B, 460) aus einer Vielzahl von Elementen geformt wird, von denen mindestens einige aus unterschiedlichen Materialien bestehen.
EP19890311199 1988-10-31 1989-10-30 Verfahren zur Herstellung eines Tintenstrahldruckkopfes Expired - Lifetime EP0367541B1 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP99200740A EP0937579B1 (de) 1988-10-31 1989-10-30 Tintenstrahlkopf und sein Herstellungsverfahren, Aufflussöffnungsplatte für diesen Kopf und sein Herstellungsverfahren, und Tintenstrahlgerät damit versehen
EP94200483A EP0602021A2 (de) 1988-10-31 1989-10-30 Tintenstrahlkopf und sein Herstellungsverfahren, Aufflussöffnungsplatte für diesen Kopf und sein Herstellungsverfahren, und Tintenstrahlgerät damit versehen
ES99200740T ES2207908T3 (es) 1988-10-31 1989-10-30 Cabezal para chorros de tinta y metodo para la fabricacion del mismo, placa con oberturas de descarga para el cabezal y su metodo de fabricacion y aparato para chorros de tinta con cabezal para chorros de tinta.

Applications Claiming Priority (20)

Application Number Priority Date Filing Date Title
JP275797/88 1988-10-31
JP63275800A JP2771557B2 (ja) 1988-10-31 1988-10-31 インクジェット記録ヘッドの製造方法
JP27579788A JPH02121842A (ja) 1988-10-31 1988-10-31 インクジェット記録ヘッドおよびインクジェット記録ヘッドの製造方法
JP275800/88 1988-10-31
JP27579488A JPH02121843A (ja) 1988-10-31 1988-10-31 液体噴射記録ヘッドおよび該ヘッドの製造方法
JP275794/88 1988-10-31
JP7409/89 1989-01-13
JP741089A JP2633943B2 (ja) 1989-01-13 1989-01-13 インクジェット記録ヘッドおよび該ヘッドの製造方法
JP1007470A JP2831368B2 (ja) 1989-01-13 1989-01-13 インクジェット記録ヘッド用吐出口形成部材の製造方法
JP740989A JPH02187345A (ja) 1989-01-13 1989-01-13 インクジェット記録ヘッドおよび該ヘッドの製造方法
JP7403/89 1989-01-13
JP7410/89 1989-01-13
JP1007403A JP2763563B2 (ja) 1989-01-13 1989-01-13 インクジェット記録ヘッドの製造方法
JP7470/89 1989-01-13
JP9184/89 1989-01-18
JP918189A JPH02188255A (ja) 1989-01-18 1989-01-18 吐出口板の製造方法
JP918489A JPH02188257A (ja) 1989-01-18 1989-01-18 インクジェットヘッドの製造方法
JP9181/89 1989-01-18
JP1018079A JP2764418B2 (ja) 1989-01-28 1989-01-28 インクジェット記録ヘッドの製造方法および該方法によって製造されたインクジェット記録ヘッド
JP18079/89 1989-01-28

Related Child Applications (1)

Application Number Title Priority Date Filing Date
EP94200483.9 Division-Into 1989-10-30

Publications (3)

Publication Number Publication Date
EP0367541A2 EP0367541A2 (de) 1990-05-09
EP0367541A3 EP0367541A3 (en) 1990-11-14
EP0367541B1 true EP0367541B1 (de) 1994-10-05

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Family Applications (3)

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EP99200740A Expired - Lifetime EP0937579B1 (de) 1988-10-31 1989-10-30 Tintenstrahlkopf und sein Herstellungsverfahren, Aufflussöffnungsplatte für diesen Kopf und sein Herstellungsverfahren, und Tintenstrahlgerät damit versehen
EP94200483A Withdrawn EP0602021A2 (de) 1988-10-31 1989-10-30 Tintenstrahlkopf und sein Herstellungsverfahren, Aufflussöffnungsplatte für diesen Kopf und sein Herstellungsverfahren, und Tintenstrahlgerät damit versehen
EP19890311199 Expired - Lifetime EP0367541B1 (de) 1988-10-31 1989-10-30 Verfahren zur Herstellung eines Tintenstrahldruckkopfes

Family Applications Before (2)

Application Number Title Priority Date Filing Date
EP99200740A Expired - Lifetime EP0937579B1 (de) 1988-10-31 1989-10-30 Tintenstrahlkopf und sein Herstellungsverfahren, Aufflussöffnungsplatte für diesen Kopf und sein Herstellungsverfahren, und Tintenstrahlgerät damit versehen
EP94200483A Withdrawn EP0602021A2 (de) 1988-10-31 1989-10-30 Tintenstrahlkopf und sein Herstellungsverfahren, Aufflussöffnungsplatte für diesen Kopf und sein Herstellungsverfahren, und Tintenstrahlgerät damit versehen

Country Status (3)

Country Link
EP (3) EP0937579B1 (de)
DE (2) DE68929489T2 (de)
ES (2) ES2207908T3 (de)

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JP3461249B2 (ja) 1996-08-30 2003-10-27 キヤノン株式会社 インクジェット記録ヘッド
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US9782970B2 (en) 2008-12-17 2017-10-10 Canon Kabushiki Kaisha Ink-jet recording head, recording element substrate, method for manufacturing ink-jet recording head, and method for manufacturing recording element substrate

Also Published As

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DE68918663T2 (de) 1995-03-16
EP0937579A2 (de) 1999-08-25
EP0602021A2 (de) 1994-06-15
DE68918663D1 (de) 1994-11-10
EP0602021A3 (de) 1994-08-31
DE68929489T2 (de) 2004-08-19
EP0367541A3 (en) 1990-11-14
ES2060789T3 (es) 1994-12-01
EP0937579A3 (de) 1999-11-03
DE68929489D1 (de) 2003-11-13
EP0937579B1 (de) 2003-10-08
ES2207908T3 (es) 2004-06-01
EP0367541A2 (de) 1990-05-09

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