DK2713391T3 - Varmestrålende plade og fremgangsmåde til fremstilling deraf - Google Patents

Varmestrålende plade og fremgangsmåde til fremstilling deraf Download PDF

Info

Publication number
DK2713391T3
DK2713391T3 DK13185984.5T DK13185984T DK2713391T3 DK 2713391 T3 DK2713391 T3 DK 2713391T3 DK 13185984 T DK13185984 T DK 13185984T DK 2713391 T3 DK2713391 T3 DK 2713391T3
Authority
DK
Denmark
Prior art keywords
making
heat radiating
radiating plate
plate
heat
Prior art date
Application number
DK13185984.5T
Other languages
English (en)
Inventor
Satoru Ideguchi
Hideyo Osanai
Hirotaka Kotani
Original Assignee
Dowa Metaltech Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dowa Metaltech Co Ltd filed Critical Dowa Metaltech Co Ltd
Application granted granted Critical
Publication of DK2713391T3 publication Critical patent/DK2713391T3/da

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28FDETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F21/00Constructions of heat-exchange apparatus characterised by the selection of particular materials
    • F28F21/08Constructions of heat-exchange apparatus characterised by the selection of particular materials of metal
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K7/00Constructional details common to different types of electric apparatus
    • H05K7/20Modifications to facilitate cooling, ventilating, or heating
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/48Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H01L21/4814Conductive parts
    • H01L21/4871Bases, plates or heatsinks
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/48Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H01L21/4814Conductive parts
    • H01L21/4871Bases, plates or heatsinks
    • H01L21/4882Assembly of heatsink parts
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/367Cooling facilitated by shape of device
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/367Cooling facilitated by shape of device
    • H01L23/3677Wire-like or pin-like cooling fins or heat sinks
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/367Cooling facilitated by shape of device
    • H01L23/3672Foil-like cooling fins or heat sinks
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/373Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
    • H01L23/3733Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon having a heterogeneous or anisotropic structure, e.g. powder or fibres in a matrix, wire mesh, porous structures
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/373Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
    • H01L23/3735Laminates or multilayers, e.g. direct bond copper ceramic substrates
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Thermal Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)
  • Laminated Bodies (AREA)
  • Resistance Heating (AREA)
DK13185984.5T 2012-09-27 2013-09-25 Varmestrålende plade og fremgangsmåde til fremstilling deraf DK2713391T3 (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012213365 2012-09-27
JP2013177749A JP6224960B2 (ja) 2012-09-27 2013-08-29 放熱板およびその製造方法

Publications (1)

Publication Number Publication Date
DK2713391T3 true DK2713391T3 (da) 2021-01-25

Family

ID=49274427

Family Applications (1)

Application Number Title Priority Date Filing Date
DK13185984.5T DK2713391T3 (da) 2012-09-27 2013-09-25 Varmestrålende plade og fremgangsmåde til fremstilling deraf

Country Status (7)

Country Link
US (2) US10619948B2 (da)
EP (1) EP2713391B1 (da)
JP (1) JP6224960B2 (da)
KR (1) KR102073992B1 (da)
CN (1) CN103700636B (da)
DK (1) DK2713391T3 (da)
HU (1) HUE053607T2 (da)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5837754B2 (ja) * 2011-03-23 2015-12-24 Dowaメタルテック株式会社 金属−セラミックス接合基板およびその製造方法
JP6017492B2 (ja) 2014-04-24 2016-11-02 Towa株式会社 樹脂封止電子部品の製造方法、突起電極付き板状部材、及び樹脂封止電子部品
JP5944445B2 (ja) 2014-07-18 2016-07-05 Towa株式会社 樹脂封止電子部品の製造方法、突起電極付き板状部材、樹脂封止電子部品、及び突起電極付き板状部材の製造方法
CN106552929B (zh) * 2015-09-30 2018-12-21 比亚迪股份有限公司 一种具有铝柱的铝碳化硅板的制备方法和装置及其制得的产品
CN205213228U (zh) * 2015-10-30 2016-05-04 比亚迪股份有限公司 散热器底板以及具有其的散热器和igbt模组
CN205282468U (zh) * 2015-11-30 2016-06-01 比亚迪股份有限公司 Igbt散热模组以及具有其的igbt模组
CN105552049A (zh) * 2016-01-29 2016-05-04 南京银茂微电子制造有限公司 功率模块的一体化液冷散热装置及其使用的底板
JP6815100B2 (ja) * 2016-06-01 2021-01-20 三菱電機株式会社 放熱プレートの製造装置、放熱プレートの製造方法および放熱プレート成形体
JP6799392B2 (ja) * 2016-06-20 2020-12-16 Dowaメタルテック株式会社 金属−セラミックス接合基板およびその製造方法
CN106304802A (zh) * 2016-09-30 2017-01-04 上海乐通通信设备(集团)股份有限公司 一种全散热型户外机柜
FR3063864B1 (fr) * 2017-03-09 2019-07-05 Aptiv Technologies Limited Dispositif electronique pour vehicule automobile
JP2018163995A (ja) * 2017-03-27 2018-10-18 三菱電機株式会社 半導体実装用放熱ベース板及びその製造方法並びに製造装置
CN107546200B (zh) * 2017-07-27 2018-09-11 比亚迪股份有限公司 一种散热元件及其制备方法和igbt模组
JP7267030B2 (ja) * 2019-02-20 2023-05-01 Dowaメタルテック株式会社 金属-セラミックス接合基板およびその製造方法
TWI686108B (zh) * 2019-02-26 2020-02-21 嘉聯益科技股份有限公司 線路板模組及其散熱板結構
US20200404806A1 (en) * 2019-06-19 2020-12-24 International Business Machines Corporation Cryogenic packaging for thermalization of low temperature devices
USD904322S1 (en) * 2019-08-28 2020-12-08 Carbice Corporation Flexible heat sink
US20210063099A1 (en) 2019-08-28 2021-03-04 Carbice Corporation Flexible and conformable polymer-based heat sinks and methods of making and using thereof
USD906269S1 (en) * 2019-08-28 2020-12-29 Carbice Corporation Flexible heat sink
USD903610S1 (en) * 2019-08-28 2020-12-01 Carbice Corporation Flexible heat sink
TWI726424B (zh) * 2019-09-23 2021-05-01 奇鋐科技股份有限公司 熱傳構件補強結構
CN110708931A (zh) * 2019-09-23 2020-01-17 奇鋐科技股份有限公司 热传元件补强结构
CN110648985B (zh) * 2019-09-23 2021-06-22 奇鋐科技股份有限公司 热传构件补强结构
US20210123686A1 (en) 2019-10-29 2021-04-29 Asia Vital Components Co., Ltd. Heat transfer member reinforcement structure
JP2022048812A (ja) 2020-09-15 2022-03-28 Dowaメタルテック株式会社 放熱部材およびその製造方法
CN112299364B (zh) * 2020-10-23 2024-02-23 广东佛智芯微电子技术研究有限公司 一种微流道散热器的制备方法
KR102282655B1 (ko) * 2021-01-05 2021-07-27 노대훈 방열 부재 및 이의 제조 방법
KR20230160459A (ko) 2022-05-17 2023-11-24 현대자동차주식회사 파워모듈용 냉각기 및 이의 제조방법

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3284193A (en) * 1963-12-05 1966-11-08 Boeing Co Aluminum alloy
US3399332A (en) * 1965-12-29 1968-08-27 Texas Instruments Inc Heat-dissipating support for semiconductor device
US3683828A (en) * 1967-05-12 1972-08-15 Richard A Alliegro Recomposite ceramic armor with metallic support strip
US3970136A (en) * 1971-03-05 1976-07-20 The Secretary Of State For Defence In Her Britannic Majesty's Government Of The United Kingdom Of Great Britain And Northern Ireland Method of manufacturing composite materials
US5151777A (en) * 1989-03-03 1992-09-29 Delco Electronics Corporation Interface device for thermally coupling an integrated circuit to a heat sink
JP3063299B2 (ja) 1991-03-20 2000-07-12 三菱マテリアル株式会社 半導体装置実装用基板
US5965193A (en) * 1994-04-11 1999-10-12 Dowa Mining Co., Ltd. Process for preparing a ceramic electronic circuit board and process for preparing aluminum or aluminum alloy bonded ceramic material
JPH1168359A (ja) 1997-08-13 1999-03-09 Matsushita Electric Works Ltd 放熱器及びその製造方法
US6391442B1 (en) * 1999-07-08 2002-05-21 Saint-Gobain Performance Plastics Corporation Phase change thermal interface material
JP4062994B2 (ja) * 2001-08-28 2008-03-19 株式会社豊田自動織機 放熱用基板材、複合材及びその製造方法
JP2003086747A (ja) * 2001-09-10 2003-03-20 Hitachi Ltd 絶縁回路基板とその製法およびそれを用いた半導体パワー素子
US20030131476A1 (en) * 2001-09-28 2003-07-17 Vlad Ocher Heat conduits and terminal radiator for microcircuit packaging and manufacturing process
JP2004153075A (ja) * 2002-10-31 2004-05-27 Mitsubishi Materials Corp パワーモジュール用基板及びパワーモジュール
US6919504B2 (en) * 2002-12-19 2005-07-19 3M Innovative Properties Company Flexible heat sink
JP4565249B2 (ja) * 2004-08-26 2010-10-20 Dowaメタルテック株式会社 金属−セラミックス接合基板およびその製造方法
JP2006114641A (ja) * 2004-10-14 2006-04-27 Mitsubishi Electric Corp 半導体装置
TWI249232B (en) * 2004-10-20 2006-02-11 Siliconware Precision Industries Co Ltd Heat dissipating package structure and method for fabricating the same
US7521789B1 (en) 2004-12-18 2009-04-21 Rinehart Motion Systems, Llc Electrical assembly having heat sink protrusions
JP2007294891A (ja) * 2006-03-30 2007-11-08 Dowa Metaltech Kk 放熱器
WO2008075409A1 (ja) * 2006-12-19 2008-06-26 Kabushiki Kaisha Toyota Jidoshokki パワーモジュール用ベース、パワーモジュール用ベースの製造方法及びパ ワーモジュール
WO2008123172A1 (ja) * 2007-03-27 2008-10-16 Ngk Insulators, Ltd. ヒートスプレッダモジュール、ヒートシンク及びそれらの製法
JP2008283067A (ja) 2007-05-11 2008-11-20 Denso Corp Al−AlN複合材料及びその製造方法並びに熱交換器
US7956446B2 (en) * 2008-05-13 2011-06-07 Infineon Technologies Ag Semiconductor device and method
JP5729374B2 (ja) * 2009-08-25 2015-06-03 富士電機株式会社 半導体モジュール及び放熱部材
JP5389595B2 (ja) * 2009-09-30 2014-01-15 Dowaメタルテック株式会社 金属−セラミックス接合基板及びその製造方法
JP5619437B2 (ja) * 2010-03-12 2014-11-05 Dowaメタルテック株式会社 金属−セラミックス接合基板の製造方法
JP5353825B2 (ja) * 2010-06-09 2013-11-27 株式会社デンソー 半導体モジュール
JP5720694B2 (ja) * 2010-10-26 2015-05-20 富士電機株式会社 半導体装置、放熱部材、および、半導体装置の製造方法
US20150338176A1 (en) * 2014-05-25 2015-11-26 Amulaire Thermal Technology, Inc. Compound heat-dissipating device

Also Published As

Publication number Publication date
EP2713391A3 (en) 2017-11-08
US20140083671A1 (en) 2014-03-27
CN103700636B (zh) 2018-02-02
KR102073992B1 (ko) 2020-02-05
JP2014082466A (ja) 2014-05-08
US11162745B2 (en) 2021-11-02
HUE053607T2 (hu) 2021-07-28
EP2713391A2 (en) 2014-04-02
KR20140041364A (ko) 2014-04-04
US10619948B2 (en) 2020-04-14
EP2713391B1 (en) 2020-12-16
JP6224960B2 (ja) 2017-11-01
US20200064087A1 (en) 2020-02-27
CN103700636A (zh) 2014-04-02

Similar Documents

Publication Publication Date Title
DK2713391T3 (da) Varmestrålende plade og fremgangsmåde til fremstilling deraf
DK2583045T3 (da) Pladevarmeveksler og fremgangsmåde til fremstilling heraf
DK3053071T3 (da) Fremgangsmåder og processer til ikke-invasiv bedømmelse af genetiske variationer
DK2929031T5 (da) Pcsk9-irna-sammensætninger og fremgangsmåder til anvendelse deraf
DK2872153T3 (da) Accellulære pro-tolerogene sammensætninger og fremgangsmåde til fremstilling heraf
DK2884999T3 (da) Fremgangsmåde og sammensætninger til cellulær immunterapi
DK3663409T3 (da) Fremgangsmåder og processer til ikke-invasiv bedømmelse af genetiske variationer
DK2857401T3 (da) Hidtil ukendt -lactamaseinhibitor og fremgangsmåde til at fremstille samme
DK3019200T3 (da) Oligonukleotid-ligand-konjugater og fremgangsmåde til fremstiling deraf
DK3930238T3 (da) Systemer og fremgangsmåder til forbedret uplink-dækning
DK2914627T3 (da) Anti-cd40-antistoffer og fremgangsmåder til anvendelse
DK3550836T3 (da) Fremgangsmåde og anordning til afkodning
DK2608762T4 (da) Sammensætninger og fremgangsmåder til målrettet varmemodulering
DK2912174T3 (da) Fremgangsmåde og materialer til isolering af nukleinsyrematerialer
DK2850202T3 (da) Fremgangsmåder og grupper
DK2840593T3 (da) Forbedret afbryderindretning og fremgangsmåde til fremstilling dertil
DK2914575T3 (da) Plasminogen-aktivator-1-inhibitorer og fremgangsmåder til anvendelse deraf
DK2893264T3 (da) Varmeenergisystem og fremgangsmåde til drift
DK2970123T3 (da) Salt af omecamtiv mecarbil og fremgangsmåde til fremstilling heraf
DK3173726T3 (da) Hybridt varmevekslingsapparat og fremgangsmåde til betjening heraf
DK2758349T3 (da) Vanadiumbaserede frittematerialer og fremgangsmåder til fremstilling heraf
DK2908661T3 (da) Mikroalgemelgranulater og fremgangsmåde til fremstilling deraf
DK2901125T3 (da) System og fremgangsmåde til tredimensional kalibrering af kraftplader
DK2683993T3 (da) Varmeenergisystem og fremgangsmåde til drift
DK2955757T3 (da) Nitrid-effektkomponent og fremgangsmåde til fremstilling deraf