DE773367T1 - Turbomolekularpumpe - Google Patents

Turbomolekularpumpe

Info

Publication number
DE773367T1
DE773367T1 DE0773367T DE96200164T DE773367T1 DE 773367 T1 DE773367 T1 DE 773367T1 DE 0773367 T DE0773367 T DE 0773367T DE 96200164 T DE96200164 T DE 96200164T DE 773367 T1 DE773367 T1 DE 773367T1
Authority
DE
Germany
Prior art keywords
channel
spiral
shaft
pumping
turbomolecular pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE0773367T
Other languages
German (de)
English (en)
Other versions
DE29600164U1 (de
Inventor
Roberto Cerruti
Giampaolo Levi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian SpA
Original Assignee
Varian SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian SpA filed Critical Varian SpA
Publication of DE773367T1 publication Critical patent/DE773367T1/de
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
DE0773367T 1995-11-10 1996-01-24 Turbomolekularpumpe Pending DE773367T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT95TO000911A IT1281025B1 (it) 1995-11-10 1995-11-10 Pompa turbomolecolare.

Publications (1)

Publication Number Publication Date
DE773367T1 true DE773367T1 (de) 1997-09-11

Family

ID=11413956

Family Applications (2)

Application Number Title Priority Date Filing Date
DE0773367T Pending DE773367T1 (de) 1995-11-10 1996-01-24 Turbomolekularpumpe
DE69600306T Expired - Lifetime DE69600306T2 (de) 1995-11-10 1996-01-24 Turbomolekularpumpe

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE69600306T Expired - Lifetime DE69600306T2 (de) 1995-11-10 1996-01-24 Turbomolekularpumpe

Country Status (5)

Country Link
US (1) US5688106A (https=)
EP (1) EP0773367B1 (https=)
JP (1) JPH09170589A (https=)
DE (2) DE773367T1 (https=)
IT (1) IT1281025B1 (https=)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9609281D0 (en) * 1996-05-03 1996-07-10 Boc Group Plc Improved vacuum pumps
JP3079367B2 (ja) * 1997-10-03 2000-08-21 セイコー精機株式会社 ターボ分子ポンプ
TW504548B (en) * 1998-06-30 2002-10-01 Ebara Corp Turbo molecular pump
FR2783883B1 (fr) * 1998-09-10 2000-11-10 Cit Alcatel Procede et dispositif pour eviter les depots dans une pompe turbomoleculaire a palier magnetique ou gazeux
JP2000183037A (ja) * 1998-12-11 2000-06-30 Tokyo Electron Ltd 真空処理装置
US6328527B1 (en) * 1999-01-08 2001-12-11 Fantom Technologies Inc. Prandtl layer turbine
JP3788558B2 (ja) * 1999-03-23 2006-06-21 株式会社荏原製作所 ターボ分子ポンプ
JP4104098B2 (ja) * 1999-03-31 2008-06-18 エドワーズ株式会社 真空ポンプ
US6412173B1 (en) 1999-07-26 2002-07-02 Phoenix Analysis And Design Technologies, Inc. Miniature turbomolecular pump
GB9921983D0 (en) * 1999-09-16 1999-11-17 Boc Group Plc Improvements in vacuum pumps
US6508631B1 (en) 1999-11-18 2003-01-21 Mks Instruments, Inc. Radial flow turbomolecular vacuum pump
JP3777498B2 (ja) * 2000-06-23 2006-05-24 株式会社荏原製作所 ターボ分子ポンプ
EP1619395B1 (en) * 2004-07-20 2010-03-10 VARIAN S.p.A. Rotary vacuum pump, structure and method for the balancing thereof
US20080056886A1 (en) * 2006-08-31 2008-03-06 Varian, S.P.A. Vacuum pumps with improved pumping channel cross sections
GB0618745D0 (en) * 2006-09-22 2006-11-01 Boc Group Plc Molecular drag pumping mechanism
EP2096317B1 (en) 2008-02-27 2012-08-15 Agilent Technologies, Inc. Method for manufacturing the rotor assembly of a rotating vacuum pump
US8152442B2 (en) * 2008-12-24 2012-04-10 Agilent Technologies, Inc. Centripetal pumping stage and vacuum pump incorporating such pumping stage
US8070419B2 (en) * 2008-12-24 2011-12-06 Agilent Technologies, Inc. Spiral pumping stage and vacuum pump incorporating such pumping stage
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
EP2757265B1 (en) * 2013-01-22 2016-05-18 Agilent Technologies, Inc. Spiral pumping stage and vacuum pump incorporating such pumping stage.
DE102013213815A1 (de) * 2013-07-15 2015-01-15 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102013220879A1 (de) * 2013-10-15 2015-04-16 Pfeiffer Vacuum Gmbh Vakuumpumpe
IT201700075054A1 (it) * 2017-07-04 2017-10-04 Agilent Tech Inc A Delaware Corporation Stadio di pompaggio molecolare per pompa da vuoto e pompa da vuoto comprendente detto stadio di pompaggio molecolare
CN109441875A (zh) * 2018-12-25 2019-03-08 大连金刚科技有限责任公司 叶轮及气体泵

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3969039A (en) * 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump
JPS60139098U (ja) * 1984-02-24 1985-09-13 セイコ−精機株式会社 組合せ型軸流分子ポンプ
US4732529A (en) * 1984-02-29 1988-03-22 Shimadzu Corporation Turbomolecular pump
JPS63255596A (ja) * 1987-04-13 1988-10-21 Ebara Corp タ−ボ分子ポンプ
EP0408791B1 (de) * 1989-07-20 1994-03-16 Leybold Aktiengesellschaft Reibungspumpe mit glockenförmigem Rotor
US5238362A (en) * 1990-03-09 1993-08-24 Varian Associates, Inc. Turbomolecular pump
US5358373A (en) * 1992-04-29 1994-10-25 Varian Associates, Inc. High performance turbomolecular vacuum pumps
DE4314418A1 (de) * 1993-05-03 1994-11-10 Leybold Ag Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten
DE4410656A1 (de) * 1994-03-26 1995-09-28 Balzers Pfeiffer Gmbh Reibungspumpe

Also Published As

Publication number Publication date
DE69600306D1 (de) 1998-06-25
ITTO950911A1 (it) 1997-05-10
IT1281025B1 (it) 1998-02-11
ITTO950911A0 (https=) 1995-11-10
DE69600306T2 (de) 1998-09-10
EP0773367A1 (en) 1997-05-14
EP0773367B1 (en) 1998-05-20
JPH09170589A (ja) 1997-06-30
US5688106A (en) 1997-11-18

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