ITTO950911A0 - - Google Patents

Info

Publication number
ITTO950911A0
ITTO950911A0 ITTO950911A ITTO950911A ITTO950911A0 IT TO950911 A0 ITTO950911 A0 IT TO950911A0 IT TO950911 A ITTO950911 A IT TO950911A IT TO950911 A ITTO950911 A IT TO950911A IT TO950911 A0 ITTO950911 A0 IT TO950911A0
Authority
IT
Italy
Application number
ITTO950911A
Other languages
Italian (it)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to IT95TO000911A priority Critical patent/IT1281025B1/it
Publication of ITTO950911A0 publication Critical patent/ITTO950911A0/it
Priority to DE0773367T priority patent/DE773367T1/de
Priority to DE69600306T priority patent/DE69600306T2/de
Priority to EP96200164A priority patent/EP0773367B1/en
Priority to US08/748,526 priority patent/US5688106A/en
Priority to JP8312612A priority patent/JPH09170589A/ja
Publication of ITTO950911A1 publication Critical patent/ITTO950911A1/it
Application granted granted Critical
Publication of IT1281025B1 publication Critical patent/IT1281025B1/it

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
IT95TO000911A 1995-11-10 1995-11-10 Pompa turbomolecolare. IT1281025B1 (it)

Priority Applications (6)

Application Number Priority Date Filing Date Title
IT95TO000911A IT1281025B1 (it) 1995-11-10 1995-11-10 Pompa turbomolecolare.
DE0773367T DE773367T1 (de) 1995-11-10 1996-01-24 Turbomolekularpumpe
DE69600306T DE69600306T2 (de) 1995-11-10 1996-01-24 Turbomolekularpumpe
EP96200164A EP0773367B1 (en) 1995-11-10 1996-01-24 Turbo-molecular pump
US08/748,526 US5688106A (en) 1995-11-10 1996-11-08 Turbomolecular pump
JP8312612A JPH09170589A (ja) 1995-11-10 1996-11-11 ターボ分子ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT95TO000911A IT1281025B1 (it) 1995-11-10 1995-11-10 Pompa turbomolecolare.

Publications (3)

Publication Number Publication Date
ITTO950911A0 true ITTO950911A0 (https=) 1995-11-10
ITTO950911A1 ITTO950911A1 (it) 1997-05-10
IT1281025B1 IT1281025B1 (it) 1998-02-11

Family

ID=11413956

Family Applications (1)

Application Number Title Priority Date Filing Date
IT95TO000911A IT1281025B1 (it) 1995-11-10 1995-11-10 Pompa turbomolecolare.

Country Status (5)

Country Link
US (1) US5688106A (https=)
EP (1) EP0773367B1 (https=)
JP (1) JPH09170589A (https=)
DE (2) DE773367T1 (https=)
IT (1) IT1281025B1 (https=)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9609281D0 (en) * 1996-05-03 1996-07-10 Boc Group Plc Improved vacuum pumps
JP3079367B2 (ja) * 1997-10-03 2000-08-21 セイコー精機株式会社 ターボ分子ポンプ
TW504548B (en) * 1998-06-30 2002-10-01 Ebara Corp Turbo molecular pump
FR2783883B1 (fr) * 1998-09-10 2000-11-10 Cit Alcatel Procede et dispositif pour eviter les depots dans une pompe turbomoleculaire a palier magnetique ou gazeux
JP2000183037A (ja) * 1998-12-11 2000-06-30 Tokyo Electron Ltd 真空処理装置
US6328527B1 (en) * 1999-01-08 2001-12-11 Fantom Technologies Inc. Prandtl layer turbine
JP3788558B2 (ja) * 1999-03-23 2006-06-21 株式会社荏原製作所 ターボ分子ポンプ
JP4104098B2 (ja) * 1999-03-31 2008-06-18 エドワーズ株式会社 真空ポンプ
US6412173B1 (en) 1999-07-26 2002-07-02 Phoenix Analysis And Design Technologies, Inc. Miniature turbomolecular pump
GB9921983D0 (en) * 1999-09-16 1999-11-17 Boc Group Plc Improvements in vacuum pumps
US6508631B1 (en) 1999-11-18 2003-01-21 Mks Instruments, Inc. Radial flow turbomolecular vacuum pump
JP3777498B2 (ja) * 2000-06-23 2006-05-24 株式会社荏原製作所 ターボ分子ポンプ
EP1619395B1 (en) * 2004-07-20 2010-03-10 VARIAN S.p.A. Rotary vacuum pump, structure and method for the balancing thereof
US20080056886A1 (en) * 2006-08-31 2008-03-06 Varian, S.P.A. Vacuum pumps with improved pumping channel cross sections
GB0618745D0 (en) * 2006-09-22 2006-11-01 Boc Group Plc Molecular drag pumping mechanism
EP2096317B1 (en) 2008-02-27 2012-08-15 Agilent Technologies, Inc. Method for manufacturing the rotor assembly of a rotating vacuum pump
US8152442B2 (en) * 2008-12-24 2012-04-10 Agilent Technologies, Inc. Centripetal pumping stage and vacuum pump incorporating such pumping stage
US8070419B2 (en) * 2008-12-24 2011-12-06 Agilent Technologies, Inc. Spiral pumping stage and vacuum pump incorporating such pumping stage
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
EP2757265B1 (en) * 2013-01-22 2016-05-18 Agilent Technologies, Inc. Spiral pumping stage and vacuum pump incorporating such pumping stage.
DE102013213815A1 (de) * 2013-07-15 2015-01-15 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102013220879A1 (de) * 2013-10-15 2015-04-16 Pfeiffer Vacuum Gmbh Vakuumpumpe
IT201700075054A1 (it) * 2017-07-04 2017-10-04 Agilent Tech Inc A Delaware Corporation Stadio di pompaggio molecolare per pompa da vuoto e pompa da vuoto comprendente detto stadio di pompaggio molecolare
CN109441875A (zh) * 2018-12-25 2019-03-08 大连金刚科技有限责任公司 叶轮及气体泵

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3969039A (en) * 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump
JPS60139098U (ja) * 1984-02-24 1985-09-13 セイコ−精機株式会社 組合せ型軸流分子ポンプ
US4732529A (en) * 1984-02-29 1988-03-22 Shimadzu Corporation Turbomolecular pump
JPS63255596A (ja) * 1987-04-13 1988-10-21 Ebara Corp タ−ボ分子ポンプ
EP0408791B1 (de) * 1989-07-20 1994-03-16 Leybold Aktiengesellschaft Reibungspumpe mit glockenförmigem Rotor
US5238362A (en) * 1990-03-09 1993-08-24 Varian Associates, Inc. Turbomolecular pump
US5358373A (en) * 1992-04-29 1994-10-25 Varian Associates, Inc. High performance turbomolecular vacuum pumps
DE4314418A1 (de) * 1993-05-03 1994-11-10 Leybold Ag Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten
DE4410656A1 (de) * 1994-03-26 1995-09-28 Balzers Pfeiffer Gmbh Reibungspumpe

Also Published As

Publication number Publication date
DE69600306D1 (de) 1998-06-25
ITTO950911A1 (it) 1997-05-10
IT1281025B1 (it) 1998-02-11
DE69600306T2 (de) 1998-09-10
DE773367T1 (de) 1997-09-11
EP0773367A1 (en) 1997-05-14
EP0773367B1 (en) 1998-05-20
JPH09170589A (ja) 1997-06-30
US5688106A (en) 1997-11-18

Similar Documents

Publication Publication Date Title
BRPI9612258B1 (https=)
BRPI9612138B1 (https=)
ITTO950911A0 (https=)
CH0741373H1 (https=)
BR7502120U (https=)
CN3031926S (https=)
CN3031001S (https=)
EP0857209A4 (https=)
BY5258C1 (https=)
CN3029801S (https=)
CN3029928S (https=)
CN3030154S (https=)
CN3030197S (https=)
CN3030225S (https=)
CN3030296S (https=)
CN3030415S (https=)
CN3030489S (https=)
CN3030542S (https=)
CN3032692S (https=)
CN3030760S (https=)
CN3032568S (https=)
CN3031350S (https=)
CN3031655S (https=)
CN3031742S (https=)
EP0753836A3 (https=)

Legal Events

Date Code Title Description
0001 Granted