DE773367T1 - Turbomolekularpumpe - Google Patents
TurbomolekularpumpeInfo
- Publication number
- DE773367T1 DE773367T1 DE0773367T DE96200164T DE773367T1 DE 773367 T1 DE773367 T1 DE 773367T1 DE 0773367 T DE0773367 T DE 0773367T DE 96200164 T DE96200164 T DE 96200164T DE 773367 T1 DE773367 T1 DE 773367T1
- Authority
- DE
- Germany
- Prior art keywords
- turbomolecular pump
- turbomolecular
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT95TO000911A IT1281025B1 (it) | 1995-11-10 | 1995-11-10 | Pompa turbomolecolare. |
Publications (1)
Publication Number | Publication Date |
---|---|
DE773367T1 true DE773367T1 (de) | 1997-09-11 |
Family
ID=11413956
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE0773367T Pending DE773367T1 (de) | 1995-11-10 | 1996-01-24 | Turbomolekularpumpe |
DE69600306T Expired - Lifetime DE69600306T2 (de) | 1995-11-10 | 1996-01-24 | Turbomolekularpumpe |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69600306T Expired - Lifetime DE69600306T2 (de) | 1995-11-10 | 1996-01-24 | Turbomolekularpumpe |
Country Status (5)
Country | Link |
---|---|
US (1) | US5688106A (de) |
EP (1) | EP0773367B1 (de) |
JP (1) | JPH09170589A (de) |
DE (2) | DE773367T1 (de) |
IT (1) | IT1281025B1 (de) |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB9609281D0 (en) * | 1996-05-03 | 1996-07-10 | Boc Group Plc | Improved vacuum pumps |
JP3079367B2 (ja) * | 1997-10-03 | 2000-08-21 | セイコー精機株式会社 | ターボ分子ポンプ |
TW504548B (en) * | 1998-06-30 | 2002-10-01 | Ebara Corp | Turbo molecular pump |
FR2783883B1 (fr) * | 1998-09-10 | 2000-11-10 | Cit Alcatel | Procede et dispositif pour eviter les depots dans une pompe turbomoleculaire a palier magnetique ou gazeux |
JP2000183037A (ja) | 1998-12-11 | 2000-06-30 | Tokyo Electron Ltd | 真空処理装置 |
US6328527B1 (en) * | 1999-01-08 | 2001-12-11 | Fantom Technologies Inc. | Prandtl layer turbine |
JP3788558B2 (ja) * | 1999-03-23 | 2006-06-21 | 株式会社荏原製作所 | ターボ分子ポンプ |
JP4104098B2 (ja) * | 1999-03-31 | 2008-06-18 | エドワーズ株式会社 | 真空ポンプ |
US6412173B1 (en) | 1999-07-26 | 2002-07-02 | Phoenix Analysis And Design Technologies, Inc. | Miniature turbomolecular pump |
GB9921983D0 (en) * | 1999-09-16 | 1999-11-17 | Boc Group Plc | Improvements in vacuum pumps |
US6508631B1 (en) | 1999-11-18 | 2003-01-21 | Mks Instruments, Inc. | Radial flow turbomolecular vacuum pump |
JP3777498B2 (ja) * | 2000-06-23 | 2006-05-24 | 株式会社荏原製作所 | ターボ分子ポンプ |
DE602004025916D1 (de) * | 2004-07-20 | 2010-04-22 | Varian Spa | Rotationsvakuumpumpe und ihr Auswuchtverfahren |
US20080056886A1 (en) * | 2006-08-31 | 2008-03-06 | Varian, S.P.A. | Vacuum pumps with improved pumping channel cross sections |
GB0618745D0 (en) * | 2006-09-22 | 2006-11-01 | Boc Group Plc | Molecular drag pumping mechanism |
EP2096317B1 (de) | 2008-02-27 | 2012-08-15 | Agilent Technologies, Inc. | Verfahren zur Herstellung der Rotoranordnung einer Rotationsvakuumpumpe |
US8152442B2 (en) * | 2008-12-24 | 2012-04-10 | Agilent Technologies, Inc. | Centripetal pumping stage and vacuum pump incorporating such pumping stage |
US8070419B2 (en) * | 2008-12-24 | 2011-12-06 | Agilent Technologies, Inc. | Spiral pumping stage and vacuum pump incorporating such pumping stage |
GB2498816A (en) | 2012-01-27 | 2013-07-31 | Edwards Ltd | Vacuum pump |
EP2757265B1 (de) * | 2013-01-22 | 2016-05-18 | Agilent Technologies, Inc. | Spiralenförmige Pumpstufe und Vakuumpumpe mit der Pumpstufe |
DE102013213815A1 (de) * | 2013-07-15 | 2015-01-15 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
DE102013220879A1 (de) * | 2013-10-15 | 2015-04-16 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
IT201700075054A1 (it) * | 2017-07-04 | 2017-10-04 | Agilent Tech Inc A Delaware Corporation | Stadio di pompaggio molecolare per pompa da vuoto e pompa da vuoto comprendente detto stadio di pompaggio molecolare |
CN109441875A (zh) * | 2018-12-25 | 2019-03-08 | 大连金刚科技有限责任公司 | 叶轮及气体泵 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3969039A (en) * | 1974-08-01 | 1976-07-13 | American Optical Corporation | Vacuum pump |
JPS60139098U (ja) * | 1984-02-24 | 1985-09-13 | セイコ−精機株式会社 | 組合せ型軸流分子ポンプ |
US4732529A (en) * | 1984-02-29 | 1988-03-22 | Shimadzu Corporation | Turbomolecular pump |
JPS63255596A (ja) * | 1987-04-13 | 1988-10-21 | Ebara Corp | タ−ボ分子ポンプ |
EP0408791B1 (de) * | 1989-07-20 | 1994-03-16 | Leybold Aktiengesellschaft | Reibungspumpe mit glockenförmigem Rotor |
US5238362A (en) * | 1990-03-09 | 1993-08-24 | Varian Associates, Inc. | Turbomolecular pump |
US5358373A (en) * | 1992-04-29 | 1994-10-25 | Varian Associates, Inc. | High performance turbomolecular vacuum pumps |
DE4314418A1 (de) * | 1993-05-03 | 1994-11-10 | Leybold Ag | Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten |
DE4410656A1 (de) * | 1994-03-26 | 1995-09-28 | Balzers Pfeiffer Gmbh | Reibungspumpe |
-
1995
- 1995-11-10 IT IT95TO000911A patent/IT1281025B1/it active IP Right Grant
-
1996
- 1996-01-24 DE DE0773367T patent/DE773367T1/de active Pending
- 1996-01-24 DE DE69600306T patent/DE69600306T2/de not_active Expired - Lifetime
- 1996-01-24 EP EP96200164A patent/EP0773367B1/de not_active Expired - Lifetime
- 1996-11-08 US US08/748,526 patent/US5688106A/en not_active Expired - Fee Related
- 1996-11-11 JP JP8312612A patent/JPH09170589A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
IT1281025B1 (it) | 1998-02-11 |
EP0773367A1 (de) | 1997-05-14 |
ITTO950911A1 (it) | 1997-05-10 |
US5688106A (en) | 1997-11-18 |
EP0773367B1 (de) | 1998-05-20 |
DE69600306D1 (de) | 1998-06-25 |
ITTO950911A0 (de) | 1995-11-10 |
JPH09170589A (ja) | 1997-06-30 |
DE69600306T2 (de) | 1998-09-10 |
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