DE69941710D1 - Drehgeschwindigkeitssensor - Google Patents

Drehgeschwindigkeitssensor

Info

Publication number
DE69941710D1
DE69941710D1 DE69941710T DE69941710T DE69941710D1 DE 69941710 D1 DE69941710 D1 DE 69941710D1 DE 69941710 T DE69941710 T DE 69941710T DE 69941710 T DE69941710 T DE 69941710T DE 69941710 D1 DE69941710 D1 DE 69941710D1
Authority
DE
Germany
Prior art keywords
resonator
support beams
spacing
periphery
response
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69941710T
Other languages
English (en)
Inventor
Christopher Paul Fell
Kevin Townsend
Ian David Hopkin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Atlantic Inertial Systems Ltd
Original Assignee
Atlantic Inertial Systems Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Atlantic Inertial Systems Ltd filed Critical Atlantic Inertial Systems Ltd
Application granted granted Critical
Publication of DE69941710D1 publication Critical patent/DE69941710D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
    • G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators
    • G01C19/5684—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/42—Devices characterised by the use of electric or magnetic means
    • G01P3/44—Devices characterised by the use of electric or magnetic means for measuring angular speed

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Control Of Electric Motors In General (AREA)
  • Electrophonic Musical Instruments (AREA)
DE69941710T 1998-08-11 1999-08-10 Drehgeschwindigkeitssensor Expired - Lifetime DE69941710D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB9817347.9A GB9817347D0 (en) 1998-08-11 1998-08-11 An angular rate sensor
PCT/GB1999/002459 WO2000009971A1 (en) 1998-08-11 1999-08-10 An angular rate sensor

Publications (1)

Publication Number Publication Date
DE69941710D1 true DE69941710D1 (de) 2010-01-07

Family

ID=10836977

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69941710T Expired - Lifetime DE69941710D1 (de) 1998-08-11 1999-08-10 Drehgeschwindigkeitssensor

Country Status (13)

Country Link
US (1) US6282958B1 (de)
EP (1) EP1105694B1 (de)
JP (1) JP3814305B2 (de)
KR (1) KR100594957B1 (de)
CN (1) CN1306249C (de)
AT (1) ATE449953T1 (de)
AU (1) AU750061B2 (de)
CA (1) CA2338616A1 (de)
DE (1) DE69941710D1 (de)
GB (1) GB9817347D0 (de)
NO (1) NO20010697D0 (de)
TW (1) TW457370B (de)
WO (1) WO2000009971A1 (de)

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US10266398B1 (en) 2007-07-25 2019-04-23 Hrl Laboratories, Llc ALD metal coatings for high Q MEMS structures
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US7908922B2 (en) * 2008-01-24 2011-03-22 Delphi Technologies, Inc. Silicon integrated angular rate sensor
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US8151640B1 (en) 2008-02-05 2012-04-10 Hrl Laboratories, Llc MEMS on-chip inertial navigation system with error correction
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JP5630267B2 (ja) * 2008-12-09 2014-11-26 株式会社村田製作所 振動ジャイロ素子及びその製造方法
JP5523755B2 (ja) * 2009-02-11 2014-06-18 住友精密工業株式会社 圧電体膜を用いた振動ジャイロ及びその製造方法
US8393212B2 (en) * 2009-04-01 2013-03-12 The Boeing Company Environmentally robust disc resonator gyroscope
US8322028B2 (en) * 2009-04-01 2012-12-04 The Boeing Company Method of producing an isolator for a microelectromechanical system (MEMS) die
US8327526B2 (en) 2009-05-27 2012-12-11 The Boeing Company Isolated active temperature regulator for vacuum packaging of a disc resonator gyroscope
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US9605964B2 (en) 2014-01-03 2017-03-28 The Boeing Company Gyro quadrature stabalization with demodulation phase error nulling
US9977097B1 (en) 2014-02-21 2018-05-22 Hrl Laboratories, Llc Micro-scale piezoelectric resonating magnetometer
US9991863B1 (en) 2014-04-08 2018-06-05 Hrl Laboratories, Llc Rounded and curved integrated tethers for quartz resonators
RU2560755C1 (ru) * 2014-05-23 2015-08-20 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Московский государственный технический университет имени Н.Э. Баумана" (МГТУ им. Н.Э. Баумана) Способ балансировки металлического беззубцового резонатора волнового твердотельного гироскопа
CN104165624B (zh) * 2014-07-25 2017-01-11 中国人民解放军国防科学技术大学 一种基于侧壁压电驱动的环形振动陀螺及其驱动和检测方法
CN104197908B (zh) * 2014-08-08 2017-09-08 上海交通大学 下凹环形压电谐振陀螺仪及其制作方法
US10308505B1 (en) 2014-08-11 2019-06-04 Hrl Laboratories, Llc Method and apparatus for the monolithic encapsulation of a micro-scale inertial navigation sensor suite
RU2580175C1 (ru) * 2014-12-09 2016-04-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Московский государственный технический университет имени Н.Э. Баумана" (МГТУ им. Н.Э. Баумана) Способ балансировки кварцевого полусферического резонатора волнового твердотельного гироскопа
US10031191B1 (en) 2015-01-16 2018-07-24 Hrl Laboratories, Llc Piezoelectric magnetometer capable of sensing a magnetic field in multiple vectors
CN105277185B (zh) * 2015-11-26 2018-10-23 上海新跃仪表厂 金属振动陀螺惯性敏感器及金属振动陀螺仪
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US10175307B1 (en) 2016-01-15 2019-01-08 Hrl Laboratories, Llc FM demodulation system for quartz MEMS magnetometer
JP6514790B2 (ja) 2016-01-27 2019-05-15 株式会社日立製作所 ジャイロスコープ
US10822225B2 (en) 2016-12-27 2020-11-03 Honeywell International Inc. MEMS sensors with selectively adjusted damping of suspension
GB2558392B (en) * 2016-12-27 2021-08-04 Honeywell Int Inc MEMS Sensors with selectively adjusted damping of suspension
GB2565298B (en) * 2017-08-07 2022-03-16 Atlantic Inertial Systems Ltd Angular rate sensors
US11512958B2 (en) * 2017-09-21 2022-11-29 Sumitomo Precision Products Co., Ltd. Angular rate sensor
DE102017217975A1 (de) * 2017-10-10 2019-04-11 Robert Bosch Gmbh Mikromechanische Federstruktur
GB2568289A (en) 2017-11-10 2019-05-15 Atlantic Inertial Systems Ltd Vibrating structure gyroscopes
US11237000B1 (en) 2018-05-09 2022-02-01 Hrl Laboratories, Llc Disk resonator gyroscope with out-of-plane electrodes
CN109900262B (zh) * 2019-04-08 2021-08-10 瑞声科技(新加坡)有限公司 陀螺仪
GB2586081B (en) 2019-08-02 2023-12-20 Atlantic Inertial Systems Ltd Signal processing
WO2021226993A1 (zh) * 2020-05-15 2021-11-18 深圳市汇顶科技股份有限公司 一种陀螺仪及惯性传感器
RU2754394C1 (ru) * 2020-12-29 2021-09-01 федеральное государственное бюджетное образовательное учреждение высшего образования "Московский государственный технический университет имени Н.Э. Баумана (национальный исследовательский университет)" (МГТУ им. Н.Э. Баумана) Способ балансировки металлического резонатора волнового твердотельного гироскопа
JP7389767B2 (ja) * 2021-02-26 2023-11-30 株式会社東芝 センサ及び電子装置

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Also Published As

Publication number Publication date
EP1105694A1 (de) 2001-06-13
CN1306249C (zh) 2007-03-21
KR20010074807A (ko) 2001-08-09
US6282958B1 (en) 2001-09-04
CN1312906A (zh) 2001-09-12
JP2001526790A (ja) 2001-12-18
JP3814305B2 (ja) 2006-08-30
AU750061B2 (en) 2002-07-11
NO20010697L (no) 2001-02-09
TW457370B (en) 2001-10-01
ATE449953T1 (de) 2009-12-15
KR100594957B1 (ko) 2006-06-30
CA2338616A1 (en) 2000-02-24
GB9817347D0 (en) 1998-10-07
WO2000009971A1 (en) 2000-02-24
NO20010697D0 (no) 2001-02-09
EP1105694B1 (de) 2009-11-25
AU5428699A (en) 2000-03-06

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