ATE541185T1 - Vibrationskreiselsensor - Google Patents
VibrationskreiselsensorInfo
- Publication number
- ATE541185T1 ATE541185T1 AT02758565T AT02758565T ATE541185T1 AT E541185 T1 ATE541185 T1 AT E541185T1 AT 02758565 T AT02758565 T AT 02758565T AT 02758565 T AT02758565 T AT 02758565T AT E541185 T1 ATE541185 T1 AT E541185T1
- Authority
- AT
- Austria
- Prior art keywords
- resonator
- drive means
- motion
- axis
- pick
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
- G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators
- G01C19/5684—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators the devices involving a micromechanical structure
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB0122253.8A GB0122253D0 (en) | 2001-09-14 | 2001-09-14 | Vibratory gyroscopic rate sensor |
PCT/GB2002/004057 WO2003025504A1 (en) | 2001-09-14 | 2002-09-06 | Vibratory gyroscopic rate sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE541185T1 true ATE541185T1 (de) | 2012-01-15 |
Family
ID=9922108
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT02758565T ATE541185T1 (de) | 2001-09-14 | 2002-09-06 | Vibrationskreiselsensor |
Country Status (9)
Country | Link |
---|---|
US (1) | US6848305B2 (de) |
EP (1) | EP1425554B1 (de) |
JP (1) | JP4298503B2 (de) |
KR (1) | KR20040031088A (de) |
CN (1) | CN100374821C (de) |
AT (1) | ATE541185T1 (de) |
CA (1) | CA2459787A1 (de) |
GB (1) | GB0122253D0 (de) |
WO (1) | WO2003025504A1 (de) |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7617727B2 (en) * | 2006-04-18 | 2009-11-17 | Watson Industries, Inc. | Vibrating inertial rate sensor utilizing split or skewed operational elements |
US7526957B2 (en) * | 2006-04-18 | 2009-05-05 | Watson Industries, Inc. | Vibrating inertial rate sensor utilizing skewed drive or sense elements |
US8056413B2 (en) * | 2007-09-11 | 2011-11-15 | Evigia Systems, Inc. | Sensor and sensing method utilizing symmetrical differential readout |
US7908922B2 (en) * | 2008-01-24 | 2011-03-22 | Delphi Technologies, Inc. | Silicon integrated angular rate sensor |
WO2009119205A1 (ja) * | 2008-03-25 | 2009-10-01 | 住友精密工業株式会社 | 圧電体膜を用いた振動ジャイロ |
US8375792B2 (en) * | 2008-03-25 | 2013-02-19 | Sumitomo Precision Products Co., Ltd. | Vibratory gyroscope using piezoelectric film |
US20090286383A1 (en) * | 2008-05-15 | 2009-11-19 | Applied Nanotech Holdings, Inc. | Treatment of whiskers |
US8151641B2 (en) | 2009-05-21 | 2012-04-10 | Analog Devices, Inc. | Mode-matching apparatus and method for micromachined inertial sensors |
CN101846517B (zh) * | 2010-06-18 | 2011-11-30 | 中国人民解放军国防科学技术大学 | 杯形波动陀螺的杯形谐振子的机械平衡方法 |
US8631700B2 (en) | 2010-11-05 | 2014-01-21 | Analog Devices, Inc. | Resonating sensor with mechanical constraints |
US9091544B2 (en) * | 2010-11-05 | 2015-07-28 | Analog Devices, Inc. | XY-axis shell-type gyroscopes with reduced cross-talk sensitivity and/or mode matching |
US8919199B2 (en) | 2010-12-01 | 2014-12-30 | Analog Devices, Inc. | Apparatus and method for anchoring electrodes in MEMS devices |
US8616056B2 (en) * | 2010-11-05 | 2013-12-31 | Analog Devices, Inc. | BAW gyroscope with bottom electrode |
US20140260611A1 (en) * | 2013-03-15 | 2014-09-18 | Analog Devices, Inc. | XY-Axis Gyroscopes with Electrode Configuration for Detecting Quadrature Errors and Out-of-Plane Sense Modes |
US9709595B2 (en) | 2013-11-14 | 2017-07-18 | Analog Devices, Inc. | Method and apparatus for detecting linear and rotational movement |
US9599471B2 (en) | 2013-11-14 | 2017-03-21 | Analog Devices, Inc. | Dual use of a ring structure as gyroscope and accelerometer |
US10746548B2 (en) | 2014-11-04 | 2020-08-18 | Analog Devices, Inc. | Ring gyroscope structural features |
US9869552B2 (en) | 2015-03-20 | 2018-01-16 | Analog Devices, Inc. | Gyroscope that compensates for fluctuations in sensitivity |
US10563984B2 (en) * | 2016-01-20 | 2020-02-18 | Moog Inc. | Method and device for determining rotational rate |
US10987191B2 (en) | 2017-02-10 | 2021-04-27 | Michael Rose | Template device for marking a surgical site before breast surgery and surgical procedure guided by the marking |
GB2565298B (en) | 2017-08-07 | 2022-03-16 | Atlantic Inertial Systems Ltd | Angular rate sensors |
GB2567479B (en) * | 2017-10-13 | 2022-04-06 | Atlantic Inertial Systems Ltd | Angular rate sensors |
GB2570732B (en) * | 2018-02-06 | 2023-01-11 | Atlantic Inertial Systems Ltd | Angular rate sensors |
US11656077B2 (en) | 2019-01-31 | 2023-05-23 | Analog Devices, Inc. | Pseudo-extensional mode MEMS ring gyroscope |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE69102590T2 (de) * | 1990-05-18 | 1994-10-06 | British Aerospace | Trägheitssensoren. |
GB2276976B (en) | 1993-04-07 | 1996-10-23 | British Aerospace | Method of manufacturing a motion sensor |
US5817940A (en) * | 1996-03-14 | 1998-10-06 | Aisin Seiki Kabishiki Kaisha | Angular rate detector |
GB2318184B (en) * | 1996-10-08 | 2000-07-05 | British Aerospace | A rate sensor |
JPH10115526A (ja) * | 1996-10-15 | 1998-05-06 | Ngk Insulators Ltd | 振動ジャイロ・センサ及び振動ジャイロ・センサの製造方法 |
GB2322196B (en) | 1997-02-18 | 2000-10-18 | British Aerospace | A vibrating structure gyroscope |
GB9722865D0 (en) | 1997-10-29 | 1997-12-24 | British Tech Group | Multi-axis gyroscope |
GB2335273B (en) * | 1998-03-14 | 2002-02-27 | British Aerospace | A two axis gyroscope |
GB2338781B (en) | 1998-03-14 | 2002-04-03 | British Aerospace | A gyroscope |
US6151964A (en) * | 1998-05-25 | 2000-11-28 | Citizen Watch Co., Ltd. | Angular velocity sensing device |
GB9817347D0 (en) * | 1998-08-11 | 1998-10-07 | British Aerospace | An angular rate sensor |
US6272925B1 (en) * | 1999-09-16 | 2001-08-14 | William S. Watson | High Q angular rate sensing gyroscope |
GB0001294D0 (en) * | 2000-01-20 | 2000-03-08 | British Aerospace | Multi-axis sensing device |
GB0001775D0 (en) * | 2000-01-27 | 2000-03-22 | British Aerospace | Improvements relating to angular rate sensor devices |
-
2001
- 2001-09-14 GB GBGB0122253.8A patent/GB0122253D0/en not_active Ceased
-
2002
- 2002-09-06 JP JP2003529088A patent/JP4298503B2/ja not_active Expired - Fee Related
- 2002-09-06 AT AT02758565T patent/ATE541185T1/de active
- 2002-09-06 EP EP02758565A patent/EP1425554B1/de not_active Expired - Lifetime
- 2002-09-06 WO PCT/GB2002/004057 patent/WO2003025504A1/en active Application Filing
- 2002-09-06 KR KR10-2004-7003767A patent/KR20040031088A/ko not_active Application Discontinuation
- 2002-09-06 CA CA002459787A patent/CA2459787A1/en not_active Abandoned
- 2002-09-06 US US10/475,562 patent/US6848305B2/en not_active Expired - Fee Related
- 2002-09-06 CN CNB028204336A patent/CN100374821C/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP1425554B1 (de) | 2012-01-11 |
KR20040031088A (ko) | 2004-04-09 |
CN1571913A (zh) | 2005-01-26 |
EP1425554A1 (de) | 2004-06-09 |
US6848305B2 (en) | 2005-02-01 |
CA2459787A1 (en) | 2003-03-27 |
US20040134279A1 (en) | 2004-07-15 |
CN100374821C (zh) | 2008-03-12 |
GB0122253D0 (en) | 2001-11-07 |
WO2003025504A1 (en) | 2003-03-27 |
JP2005503549A (ja) | 2005-02-03 |
JP4298503B2 (ja) | 2009-07-22 |
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