ATE267384T1 - Drehgeschwindigkeitssensor - Google Patents

Drehgeschwindigkeitssensor

Info

Publication number
ATE267384T1
ATE267384T1 AT01900486T AT01900486T ATE267384T1 AT E267384 T1 ATE267384 T1 AT E267384T1 AT 01900486 T AT01900486 T AT 01900486T AT 01900486 T AT01900486 T AT 01900486T AT E267384 T1 ATE267384 T1 AT E267384T1
Authority
AT
Austria
Prior art keywords
resonator
control means
drive
sensing means
3theta
Prior art date
Application number
AT01900486T
Other languages
English (en)
Inventor
Christopher Paul Fell
Original Assignee
Bae Systems Plc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bae Systems Plc filed Critical Bae Systems Plc
Application granted granted Critical
Publication of ATE267384T1 publication Critical patent/ATE267384T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
    • G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators
    • G01C19/5684—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators the devices involving a micromechanical structure

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Pressure Sensors (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Control Of Electric Motors In General (AREA)
AT01900486T 2000-01-27 2001-01-08 Drehgeschwindigkeitssensor ATE267384T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0001775.6A GB0001775D0 (en) 2000-01-27 2000-01-27 Improvements relating to angular rate sensor devices
PCT/GB2001/000055 WO2001055675A1 (en) 2000-01-27 2001-01-08 Angular rate sensor

Publications (1)

Publication Number Publication Date
ATE267384T1 true ATE267384T1 (de) 2004-06-15

Family

ID=9884368

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01900486T ATE267384T1 (de) 2000-01-27 2001-01-08 Drehgeschwindigkeitssensor

Country Status (12)

Country Link
US (1) US20030000306A1 (de)
EP (1) EP1250565B1 (de)
JP (1) JP3839720B2 (de)
KR (1) KR20020097166A (de)
CN (1) CN1240993C (de)
AT (1) ATE267384T1 (de)
AU (1) AU768129B2 (de)
CA (1) CA2398134A1 (de)
DE (1) DE60103363T2 (de)
ES (1) ES2217112T3 (de)
GB (1) GB0001775D0 (de)
WO (1) WO2001055675A1 (de)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0122256D0 (en) 2001-09-14 2001-11-07 Bae Systems Plc Vibratory gyroscopic rate sensor
GB0122253D0 (en) 2001-09-14 2001-11-07 Bae Systems Plc Vibratory gyroscopic rate sensor
GB0122254D0 (en) 2001-09-14 2001-11-07 Bae Systems Plc Vibratory gyroscopic rate sensor
GB0122252D0 (en) * 2001-09-14 2001-11-07 Bae Systems Plc Vibratory gyroscopic rate sensor
FR2838820B1 (fr) * 2002-04-17 2006-03-17 Sagem Procede pour constituer un resonateur mecanique a structure vibrante monolithique plane usinee dans un materiau cristallin, et resonateur ainsi constitue
JP3807437B2 (ja) * 2002-06-10 2006-08-09 松下電器産業株式会社 角速度センサ
AU2003259814A1 (en) * 2002-08-12 2004-02-25 The Boeing Company Isolated planar gyroscope with internal radial sensing and actuation
US20050092084A1 (en) * 2003-03-28 2005-05-05 Fell Christopher P. Rate sensing device
CN100437116C (zh) * 2003-04-28 2008-11-26 模拟器件公司 提供两个加速度检测轴和一个角速度检测轴的微加工多传感器
JP4442339B2 (ja) * 2004-07-08 2010-03-31 株式会社デンソー 角速度検出装置
CN1333257C (zh) * 2004-07-16 2007-08-22 北京大学 射流角速度传感器及其制备方法
CN100510752C (zh) * 2004-07-23 2009-07-08 西安中星测控有限责任公司 微机械-电子系统技术固态角速率陀螺
US7543496B2 (en) * 2006-03-27 2009-06-09 Georgia Tech Research Corporation Capacitive bulk acoustic wave disk gyroscopes
US7767484B2 (en) 2006-05-31 2010-08-03 Georgia Tech Research Corporation Method for sealing and backside releasing of microelectromechanical systems
US8061201B2 (en) * 2007-07-13 2011-11-22 Georgia Tech Research Corporation Readout method and electronic bandwidth control for a silicon in-plane tuning fork gyroscope
WO2009096086A1 (ja) * 2008-01-29 2009-08-06 Sumitomo Precision Products Co., Ltd. 圧電体膜を用いた振動ジャイロ及びその製造方法
WO2009119204A1 (ja) * 2008-03-25 2009-10-01 住友精密工業株式会社 圧電体膜を用いた振動ジャイロ
US8601872B2 (en) * 2008-03-25 2013-12-10 Sumitomo Precision Products Co., Ltd. Vibratory gyroscope using piezoelectric film
CN102246003B (zh) * 2008-12-09 2015-09-09 株式会社村田制作所 振动陀螺仪元件及其制造方法
JP5523755B2 (ja) * 2009-02-11 2014-06-18 住友精密工業株式会社 圧電体膜を用いた振動ジャイロ及びその製造方法
US8887568B2 (en) 2009-04-07 2014-11-18 Siemens Aktiengesellschaft Micromechanical system and method for building a micromechanical system
US8418554B2 (en) * 2009-06-01 2013-04-16 The Boeing Company Gyroscope packaging assembly
US9970764B2 (en) * 2009-08-31 2018-05-15 Georgia Tech Research Corporation Bulk acoustic wave gyroscope with spoked structure
US9250146B2 (en) * 2013-02-12 2016-02-02 Western New England University Multidimensional strain gage
US20140260611A1 (en) * 2013-03-15 2014-09-18 Analog Devices, Inc. XY-Axis Gyroscopes with Electrode Configuration for Detecting Quadrature Errors and Out-of-Plane Sense Modes
GB2562450A (en) 2017-01-30 2018-11-21 Cambridge Entpr Ltd A method of optimising the performance of a MEMS rate gyroscope
GB2568289A (en) * 2017-11-10 2019-05-15 Atlantic Inertial Systems Ltd Vibrating structure gyroscopes

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4335219B4 (de) * 1993-10-15 2004-06-03 Robert Bosch Gmbh Drehratensensor und Verfahren zur Herstellung eines Drehratensensor
SE9500729L (sv) * 1995-02-27 1996-08-28 Gert Andersson Anordning för mätning av vinkelhastighet i enkristallint material samt förfarande för framställning av sådan
JPH09196682A (ja) * 1996-01-19 1997-07-31 Matsushita Electric Ind Co Ltd 角速度センサと加速度センサ
GB2318184B (en) * 1996-10-08 2000-07-05 British Aerospace A rate sensor
US5872313A (en) * 1997-04-07 1999-02-16 Delco Electronics Corporation Temperature-compensated surface micromachined angular rate sensor

Also Published As

Publication number Publication date
EP1250565A1 (de) 2002-10-23
AU2531601A (en) 2001-08-07
CA2398134A1 (en) 2001-08-02
JP2003521682A (ja) 2003-07-15
DE60103363T2 (de) 2004-09-23
CN1240993C (zh) 2006-02-08
DE60103363D1 (de) 2004-06-24
CN1397004A (zh) 2003-02-12
EP1250565B1 (de) 2004-05-19
KR20020097166A (ko) 2002-12-31
ES2217112T3 (es) 2004-11-01
JP3839720B2 (ja) 2006-11-01
AU768129B2 (en) 2003-12-04
WO2001055675A1 (en) 2001-08-02
US20030000306A1 (en) 2003-01-02
GB0001775D0 (en) 2000-03-22

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