DE69940959D1 - - Google Patents
Info
- Publication number
- DE69940959D1 DE69940959D1 DE69940959T DE69940959T DE69940959D1 DE 69940959 D1 DE69940959 D1 DE 69940959D1 DE 69940959 T DE69940959 T DE 69940959T DE 69940959 T DE69940959 T DE 69940959T DE 69940959 D1 DE69940959 D1 DE 69940959D1
- Authority
- DE
- Germany
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q1/00—Details of, or arrangements associated with, antennas
- H01Q1/12—Supports; Mounting means
- H01Q1/22—Supports; Mounting means by structural association with other equipment or articles
- H01Q1/2208—Supports; Mounting means by structural association with other equipment or articles associated with components used in interrogation type services, i.e. in systems for information exchange between an interrogator/reader and a tag/transponder, e.g. in Radio Frequency Identification [RFID] systems
- H01Q1/2225—Supports; Mounting means by structural association with other equipment or articles associated with components used in interrogation type services, i.e. in systems for information exchange between an interrogator/reader and a tag/transponder, e.g. in Radio Frequency Identification [RFID] systems used in active tags, i.e. provided with its own power source or in passive tags, i.e. deriving power from RF signal
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
- B41M5/00—Duplicating or marking methods; Sheet materials for use therein
- B41M5/26—Thermography ; Marking by high energetic means, e.g. laser otherwise than by burning, and characterised by the material used
- B41M5/262—Thermography ; Marking by high energetic means, e.g. laser otherwise than by burning, and characterised by the material used recording or marking of inorganic surfaces or materials, e.g. glass, metal, or ceramics
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
- G02B19/0009—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only
- G02B19/0014—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only at least one surface having optical power
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
- G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
- G02B19/0052—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
- G02B19/009—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with infrared radiation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
- G02B19/0095—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with ultraviolet radiation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0911—Anamorphotic systems
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0955—Lenses
- G02B27/0966—Cylindrical lenses
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
- G03F1/48—Protective coatings
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/002—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor using materials containing microcapsules; Preparing or processing such materials, e.g. by pressure; Devices or apparatus specially designed therefor
- G03F7/0022—Devices or apparatus
- G03F7/0025—Devices or apparatus characterised by means for coating the developer
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/091—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers characterised by antireflection means or light filtering or absorbing means, e.g. anti-halation, contrast enhancement
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/30—Imagewise removal using liquid means
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/30—Imagewise removal using liquid means
- G03F7/3014—Imagewise removal using liquid means combined with ultrasonic means
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/34—Imagewise removal by selective transfer, e.g. peeling away
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70605—Workpiece metrology
- G03F7/70616—Monitoring the printed patterns
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q7/00—Loop antennas with a substantially uniform current distribution around the loop and having a directional radiation pattern in a plane perpendicular to the plane of the loop
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/027—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed by irradiation, e.g. by photons, alpha or beta particles
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Ceramic Engineering (AREA)
- Architecture (AREA)
- Structural Engineering (AREA)
- Laser Beam Processing (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/231,428 US6203952B1 (en) | 1999-01-14 | 1999-01-14 | Imaged article on polymeric substrate |
PCT/US1999/029447 WO2000042472A1 (en) | 1999-01-14 | 1999-12-13 | Method for patterning thin films |
Publications (1)
Publication Number | Publication Date |
---|---|
DE69940959D1 true DE69940959D1 (de) | 2009-07-16 |
Family
ID=22869210
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69940959T Expired - Fee Related DE69940959D1 (de) | 1999-01-14 | 1999-12-13 |
Country Status (7)
Country | Link |
---|---|
US (2) | US6203952B1 (de) |
EP (1) | EP1141776B1 (de) |
JP (1) | JP2002535701A (de) |
KR (1) | KR20010112240A (de) |
CN (1) | CN1348553A (de) |
DE (1) | DE69940959D1 (de) |
WO (1) | WO2000042472A1 (de) |
Families Citing this family (126)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6555449B1 (en) * | 1996-05-28 | 2003-04-29 | Trustees Of Columbia University In The City Of New York | Methods for producing uniform large-grained and grain boundary location manipulated polycrystalline thin film semiconductors using sequential lateral solidfication |
US8071384B2 (en) | 1997-12-22 | 2011-12-06 | Roche Diagnostics Operations, Inc. | Control and calibration solutions and methods for their use |
JP2000263840A (ja) * | 1999-03-11 | 2000-09-26 | Hitachi Ltd | レーザ印字方法及びレーザ印字装置 |
JP3751772B2 (ja) * | 1999-08-16 | 2006-03-01 | 日本電気株式会社 | 半導体薄膜製造装置 |
JP2003511241A (ja) * | 1999-09-30 | 2003-03-25 | シーメンス アクチエンゲゼルシヤフト | 有機材料をレーザー穿孔するための方法及び装置 |
US7073246B2 (en) * | 1999-10-04 | 2006-07-11 | Roche Diagnostics Operations, Inc. | Method of making a biosensor |
US6645359B1 (en) * | 2000-10-06 | 2003-11-11 | Roche Diagnostics Corporation | Biosensor |
US6830993B1 (en) * | 2000-03-21 | 2004-12-14 | The Trustees Of Columbia University In The City Of New York | Surface planarization of thin silicon films during and after processing by the sequential lateral solidification method |
US7113095B2 (en) | 2000-05-22 | 2006-09-26 | Avery Dennison Corp. | Trackable files and systems for using the same |
CA2389607A1 (en) * | 2000-10-10 | 2002-04-18 | The Trustees Of Columbia University | Method and apparatus for processing thin metal layers |
US6540890B1 (en) * | 2000-11-01 | 2003-04-01 | Roche Diagnostics Corporation | Biosensor |
KR100873927B1 (ko) * | 2000-11-27 | 2008-12-12 | 더 트러스티스 오브 콜롬비아 유니버시티 인 더 시티 오브 뉴욕 | 기판상의 반도체막 영역의 레이저 결정화 처리를 위한 공정 및 마스크 투영 시스템 |
MXPA03009959A (es) | 2001-04-30 | 2005-07-01 | Neology Inc | Proceso de extraccion selectiva de metal para peliculas holograficas y retrorreflectoras metalizadas y dispositivos de radiofrecuencia hechos con ellas. |
DE10121126A1 (de) | 2001-04-30 | 2002-11-07 | Intec Holding Gmbh | Identifikationsträger und Verfahren zu dessen Herstellung |
WO2003018882A1 (en) * | 2001-08-27 | 2003-03-06 | The Trustees Of Columbia University In The City Of New York | Improved polycrystalline tft uniformity through microstructure mis-alignment |
US6814844B2 (en) * | 2001-08-29 | 2004-11-09 | Roche Diagnostics Corporation | Biosensor with code pattern |
DE10212639A1 (de) * | 2002-03-21 | 2003-10-16 | Siemens Ag | Vorrichtung und Verfahren zur Laserstrukturierung von Funktionspolymeren und Verwendungen |
AU2003220611A1 (en) * | 2002-04-01 | 2003-10-20 | The Trustees Of Columbia University In The City Of New York | Method and system for providing a thin film |
EP2273422B1 (de) | 2002-07-09 | 2017-11-01 | Neology, Inc. | System und Verfahren zur gesicherten Identifizierung |
TWI325157B (en) * | 2002-08-19 | 2010-05-21 | Univ Columbia | Process and system for laser crystallization processing of film regions on a substrate to provide substantial uniformity, and a structure of such film regions |
CN100336941C (zh) * | 2002-08-19 | 2007-09-12 | 纽约市哥伦比亚大学托管会 | 改进衬底上薄膜区域内诸区及其边缘区内均一性以及这种薄膜区域之结构的激光结晶处理工艺与系统 |
US7622370B2 (en) * | 2002-08-19 | 2009-11-24 | The Trustees Of Columbia University In The City Of New York | Process and system for laser crystallization processing of film regions on a substrate to minimize edge areas, and a structure of such film regions |
TWI331803B (en) | 2002-08-19 | 2010-10-11 | Univ Columbia | A single-shot semiconductor processing system and method having various irradiation patterns |
US7338820B2 (en) * | 2002-12-19 | 2008-03-04 | 3M Innovative Properties Company | Laser patterning of encapsulated organic light emitting diodes |
KR101191837B1 (ko) * | 2003-02-19 | 2012-10-18 | 더 트러스티스 오브 콜롬비아 유니버시티 인 더 시티 오브 뉴욕 | 순차적 측면 고상화 기술을 이용하여 결정화되는 복수의 반도체 박막을 가공하는 방법 및 장치 |
US7452457B2 (en) | 2003-06-20 | 2008-11-18 | Roche Diagnostics Operations, Inc. | System and method for analyte measurement using dose sufficiency electrodes |
US8148164B2 (en) | 2003-06-20 | 2012-04-03 | Roche Diagnostics Operations, Inc. | System and method for determining the concentration of an analyte in a sample fluid |
US7488601B2 (en) | 2003-06-20 | 2009-02-10 | Roche Diagnostic Operations, Inc. | System and method for determining an abused sensor during analyte measurement |
US8058077B2 (en) | 2003-06-20 | 2011-11-15 | Roche Diagnostics Operations, Inc. | Method for coding information on a biosensor test strip |
EP1642117B1 (de) | 2003-06-20 | 2018-06-13 | Roche Diabetes Care GmbH | Reagenzstreife für teststreifen |
US8206565B2 (en) | 2003-06-20 | 2012-06-26 | Roche Diagnostics Operation, Inc. | System and method for coding information on a biosensor test strip |
US7718439B2 (en) | 2003-06-20 | 2010-05-18 | Roche Diagnostics Operations, Inc. | System and method for coding information on a biosensor test strip |
US7645373B2 (en) | 2003-06-20 | 2010-01-12 | Roche Diagnostic Operations, Inc. | System and method for coding information on a biosensor test strip |
US7645421B2 (en) | 2003-06-20 | 2010-01-12 | Roche Diagnostics Operations, Inc. | System and method for coding information on a biosensor test strip |
JP2005022956A (ja) * | 2003-07-02 | 2005-01-27 | Rohm & Haas Electronic Materials Llc | セラミックの金属化 |
US7161552B2 (en) * | 2003-08-08 | 2007-01-09 | Lockheed Martin Corporation | Electromagnetic interference protection for radomes |
WO2005029550A2 (en) * | 2003-09-16 | 2005-03-31 | The Trustees Of Columbia University In The City Of New York | Method and system for producing crystalline thin films with a uniform crystalline orientation |
WO2005029547A2 (en) * | 2003-09-16 | 2005-03-31 | The Trustees Of Columbia University In The City Of New York | Enhancing the width of polycrystalline grains with mask |
WO2005029546A2 (en) * | 2003-09-16 | 2005-03-31 | The Trustees Of Columbia University In The City Of New York | Method and system for providing a continuous motion sequential lateral solidification for reducing or eliminating artifacts, and a mask for facilitating such artifact reduction/elimination |
WO2005029548A2 (en) * | 2003-09-16 | 2005-03-31 | The Trustees Of Columbia University In The City Of New York | System and process for providing multiple beam sequential lateral solidification |
TWI351713B (en) * | 2003-09-16 | 2011-11-01 | Univ Columbia | Method and system for providing a single-scan, con |
US7318866B2 (en) * | 2003-09-16 | 2008-01-15 | The Trustees Of Columbia University In The City Of New York | Systems and methods for inducing crystallization of thin films using multiple optical paths |
US7364952B2 (en) * | 2003-09-16 | 2008-04-29 | The Trustees Of Columbia University In The City Of New York | Systems and methods for processing thin films |
US7164152B2 (en) | 2003-09-16 | 2007-01-16 | The Trustees Of Columbia University In The City Of New York | Laser-irradiated thin films having variable thickness |
TWI359441B (en) | 2003-09-16 | 2012-03-01 | Univ Columbia | Processes and systems for laser crystallization pr |
WO2005034193A2 (en) | 2003-09-19 | 2005-04-14 | The Trustees Of Columbia University In The City Ofnew York | Single scan irradiation for crystallization of thin films |
EP1713926B1 (de) | 2004-02-06 | 2012-08-01 | Bayer HealthCare, LLC | Oxidierbare verbindungen als interne referenz in biosensoren und deren verwendung |
DE102004006414B4 (de) * | 2004-02-09 | 2008-08-21 | Lpkf Laser & Elektronika D.O.O. | Verfahren zum partiellen Lösen einer leitfähigen Schicht |
US7255782B2 (en) * | 2004-04-30 | 2007-08-14 | Kenneth Crouse | Selective catalytic activation of non-conductive substrates |
US7569126B2 (en) | 2004-06-18 | 2009-08-04 | Roche Diagnostics Operations, Inc. | System and method for quality assurance of a biosensor test strip |
KR100784497B1 (ko) * | 2004-10-06 | 2007-12-11 | 삼성전자주식회사 | 반도체 패키지용 필름기판 및 그 제조방법 |
US7645337B2 (en) * | 2004-11-18 | 2010-01-12 | The Trustees Of Columbia University In The City Of New York | Systems and methods for creating crystallographic-orientation controlled poly-silicon films |
US7417550B2 (en) * | 2004-12-20 | 2008-08-26 | 3M Innovative Properties Company | Environmentally friendly radio frequency identification (RFID) labels and methods of using such labels |
WO2006088804A1 (en) * | 2005-02-16 | 2006-08-24 | 3M Innovative Properties Company | Method of making morphologically patterned coatings |
US8182871B2 (en) * | 2005-02-16 | 2012-05-22 | 3M Innovative Properties Company | Method of making topographically patterned coatings |
US8221544B2 (en) * | 2005-04-06 | 2012-07-17 | The Trustees Of Columbia University In The City Of New York | Line scan sequential lateral solidification of thin films |
US7651932B2 (en) | 2005-05-31 | 2010-01-26 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing antenna and method for manufacturing semiconductor device |
JP5030470B2 (ja) * | 2005-05-31 | 2012-09-19 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
US20060269687A1 (en) * | 2005-05-31 | 2006-11-30 | Federal-Mogul World Wide, Inc. | Selective area fusing of a slurry coating using a laser |
GB0511132D0 (en) * | 2005-06-01 | 2005-07-06 | Plastic Logic Ltd | Layer-selective laser ablation patterning |
KR101503072B1 (ko) | 2005-07-20 | 2015-03-16 | 바이엘 헬스케어 엘엘씨 | 게이트형 전류 측정법 |
US7176053B1 (en) * | 2005-08-16 | 2007-02-13 | Organicid, Inc. | Laser ablation method for fabricating high performance organic devices |
US20090218577A1 (en) * | 2005-08-16 | 2009-09-03 | Im James S | High throughput crystallization of thin films |
US20070040688A1 (en) * | 2005-08-16 | 2007-02-22 | X-Cyte, Inc., A California Corporation | RFID inlays and methods of their manufacture |
US7411500B2 (en) * | 2005-09-14 | 2008-08-12 | 3M Innovative Properties Company | Methods of monitoring items or material from manufacturing processes |
KR20130100022A (ko) | 2005-09-30 | 2013-09-06 | 바이엘 헬스케어 엘엘씨 | 게이트형 전압 전류 측정 분석물 결정 방법 |
US7510985B1 (en) | 2005-10-26 | 2009-03-31 | Lpkf Laser & Electronics Ag | Method to manufacture high-precision RFID straps and RFID antennas using a laser |
TW200733240A (en) * | 2005-12-05 | 2007-09-01 | Univ Columbia | Systems and methods for processing a film, and thin films |
US20070130754A1 (en) * | 2005-12-14 | 2007-06-14 | Michael Fein | Laser ablation prototyping of RFID antennas |
US20070138153A1 (en) * | 2005-12-20 | 2007-06-21 | Redman Dean E | Wide web laser ablation |
US20070210420A1 (en) * | 2006-03-11 | 2007-09-13 | Nelson Curt L | Laser delamination of thin metal film using sacrificial polymer layer |
US20070241966A1 (en) * | 2006-04-14 | 2007-10-18 | Yung-Shun Chen | Conductive antenna structure and method for making the same |
TWI275184B (en) | 2006-05-18 | 2007-03-01 | Au Optronics Corp | Thin film transistor and fabrication method thereof |
JP5110830B2 (ja) * | 2006-08-31 | 2012-12-26 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
US7633035B2 (en) * | 2006-10-05 | 2009-12-15 | Mu-Gahat Holdings Inc. | Reverse side film laser circuit etching |
US20080083706A1 (en) * | 2006-10-05 | 2008-04-10 | Mu-Gahat Enterprises, Llc | Reverse side film laser circuit etching |
US20080151951A1 (en) * | 2006-12-22 | 2008-06-26 | Elliott David J | Laser optical system |
US20090323739A1 (en) * | 2006-12-22 | 2009-12-31 | Uv Tech Systems | Laser optical system |
US7812779B2 (en) * | 2007-02-06 | 2010-10-12 | Incom Corporation | RFID transceiver sensitivity focusing system |
US20080216304A1 (en) * | 2007-03-06 | 2008-09-11 | Chien Ming Lin | Method of manufacturing antenna module by laser carving |
KR100812264B1 (ko) * | 2007-04-04 | 2008-03-10 | 영남대학교 산학협력단 | 초음파 가공기를 이용한 작업물의 가공방법 |
US20090004368A1 (en) * | 2007-06-29 | 2009-01-01 | Weyerhaeuser Co. | Systems and methods for curing a deposited layer on a substrate |
US7804450B2 (en) | 2007-07-20 | 2010-09-28 | Laird Technologies, Inc. | Hybrid antenna structure |
US20090061251A1 (en) * | 2007-08-27 | 2009-03-05 | Mu-Gahat Enterprises, Llc | Laser circuit etching by additive deposition |
US20090061112A1 (en) * | 2007-08-27 | 2009-03-05 | Mu-Gahat Enterprises, Llc | Laser circuit etching by subtractive deposition |
DE102008039660A1 (de) * | 2007-09-06 | 2009-03-12 | Heidelberger Druckmaschinen Ag | Bedruckstoff bearbeitende Maschine und Verfahren in einer Bedruckstoff bearbeitenden Maschine |
WO2009039482A1 (en) | 2007-09-21 | 2009-03-26 | The Trustees Of Columbia University In The City Of New York | Collections of laterally crystallized semiconductor islands for use in thin film transistors |
TWI418037B (zh) | 2007-09-25 | 2013-12-01 | Univ Columbia | 藉由改變形狀、大小或雷射光束在製造於橫向結晶化薄膜上之薄膜電晶體元件中產生高一致性的方法 |
US7666567B2 (en) * | 2007-10-23 | 2010-02-23 | E. I. Du Pont De Nemours And Company | Negative imaging method for providing a patterned metal layer having high conductivity |
JP5443377B2 (ja) * | 2007-11-21 | 2014-03-19 | ザ トラスティーズ オブ コロンビア ユニヴァーシティ イン ザ シティ オブ ニューヨーク | エピタキシャルに配向された厚膜を調製するための調製システムおよび方法 |
WO2009067688A1 (en) | 2007-11-21 | 2009-05-28 | The Trustees Of Columbia University In The City Of New York | Systems and methods for preparing epitaxially textured polycrystalline films |
US8012861B2 (en) | 2007-11-21 | 2011-09-06 | The Trustees Of Columbia University In The City Of New York | Systems and methods for preparing epitaxially textured polycrystalline films |
WO2009076302A1 (en) | 2007-12-10 | 2009-06-18 | Bayer Healthcare Llc | Control markers for auto-detection of control solution and methods of use |
WO2009111326A2 (en) * | 2008-02-29 | 2009-09-11 | The Trustees Of Columbia University In The City Of New York | Flash light annealing for thin films |
WO2009111340A2 (en) * | 2008-02-29 | 2009-09-11 | The Trustees Of Columbia University In The City Of New York | Flash lamp annealing crystallization for large area thin films |
KR20100132020A (ko) * | 2008-02-29 | 2010-12-16 | 더 트러스티이스 오브 콜롬비아 유니버시티 인 더 시티 오브 뉴욕 | 균일한 결정질 si 막들을 제조하는 리소그래피 방법 |
US8463116B2 (en) | 2008-07-01 | 2013-06-11 | Tap Development Limited Liability Company | Systems for curing deposited material using feedback control |
DE102008048342B4 (de) * | 2008-09-22 | 2013-01-24 | Laser-Laboratorium Göttingen eV | SERS-Substrat, Verfahren zu seiner Herstellung und Verfahren zum Detektieren eines Analyten mittels SERS |
US8802580B2 (en) | 2008-11-14 | 2014-08-12 | The Trustees Of Columbia University In The City Of New York | Systems and methods for the crystallization of thin films |
EP3644100A1 (de) * | 2009-03-19 | 2020-04-29 | Viavi Solutions Inc. | Musterung einer abstandsschicht in einem interferenzfilter |
US8440581B2 (en) * | 2009-11-24 | 2013-05-14 | The Trustees Of Columbia University In The City Of New York | Systems and methods for non-periodic pulse sequential lateral solidification |
US9087696B2 (en) | 2009-11-03 | 2015-07-21 | The Trustees Of Columbia University In The City Of New York | Systems and methods for non-periodic pulse partial melt film processing |
US9646831B2 (en) | 2009-11-03 | 2017-05-09 | The Trustees Of Columbia University In The City Of New York | Advanced excimer laser annealing for thin films |
US8267494B2 (en) * | 2009-12-09 | 2012-09-18 | Hand Held Products, Inc. | Automatic RFID circuit tuning |
DE102010019406B4 (de) | 2010-05-04 | 2012-06-21 | Lpkf Laser & Electronics Ag | Verfahren zum partiellen Lösen einer definierten Fläche einer leitfähigen Schicht |
DE102010019407B4 (de) | 2010-05-04 | 2013-06-27 | Lpkf Laser & Electronics Ag | Verfahren zum Einbringen elektrischer Isolierungen in Leiterplatten |
WO2012082300A1 (en) | 2010-12-16 | 2012-06-21 | 3M Innovative Properties Company | Transparent micropatterned rfid antenna and articles incorporating same |
US8593727B2 (en) * | 2011-04-25 | 2013-11-26 | Vladimir G. Kozlov | Single-shot laser ablation of a metal film on a polymer membrane |
AT512200A1 (de) * | 2011-11-30 | 2013-06-15 | Ait Austrian Inst Technology | Verfahren zur aufnahme eines zeilenbilds |
DE102012101104A1 (de) * | 2012-02-10 | 2013-08-14 | Schreiner Group Gmbh & Co. Kg | Transponderetikett und Herstellungsverfahren für ein Transponderetikett |
PT2822728T (pt) * | 2012-03-05 | 2018-11-21 | Saint Gobain | Processo para a produção de um painel de vidro laminado com janela de sensor |
US20140054065A1 (en) * | 2012-08-21 | 2014-02-27 | Abner D. Joseph | Electrical circuit trace manufacturing for electro-chemical sensors |
JPWO2014050421A1 (ja) * | 2012-09-25 | 2016-08-22 | 東レ株式会社 | 配線パターンの形成方法および配線パターン形成物 |
KR102307014B1 (ko) * | 2013-10-30 | 2021-10-01 | 네덜란제 오르가니자티에 포오르 토에게파스트-나투우르베텐샤펠리즈크 온데르조에크 테엔오 | 전기 회로 패턴을 포함하는 기판, 그를 제공하기 위한 방법 및 시스템 |
US10211443B2 (en) | 2014-09-10 | 2019-02-19 | Cellink Corporation | Battery interconnects |
US10049510B2 (en) | 2015-09-14 | 2018-08-14 | Neology, Inc. | Embedded on-board diagnostic (OBD) device for a vehicle |
CN106425108B (zh) * | 2016-09-06 | 2019-08-23 | 深圳华工激光设备有限公司 | Rfid标签天线的激光刻蚀方法及系统 |
CN109922962B (zh) | 2016-11-11 | 2021-04-27 | 株式会社Lg化学 | 大面积液晶装置的图案的形成方法 |
US11116070B2 (en) | 2017-07-13 | 2021-09-07 | Cellink Corporation | Interconnect circuit methods and devices |
CN111945115A (zh) * | 2019-05-17 | 2020-11-17 | 常州星宇车灯股份有限公司 | 一种车灯零件表面膜的处理方法 |
US11026333B2 (en) * | 2019-09-20 | 2021-06-01 | Manaflex, Llc | Reel-to-reel laser sintering methods and devices in FPC fabrication |
KR20230079161A (ko) | 2020-10-02 | 2023-06-05 | 셀링크 코포레이션 | 가요성 상호접속 회로를 연결하기 위한 방법 및 시스템 |
WO2022072886A1 (en) | 2020-10-02 | 2022-04-07 | Cellink Corporation | Forming connections to flexible interconnect circuits |
EP4256647A1 (de) | 2021-03-24 | 2023-10-11 | CelLink Corporation | Mehrschichtige flexible batterieverbindungen und verfahren zur herstellung davon |
US11751328B1 (en) | 2022-02-22 | 2023-09-05 | Cellink Corporation | Flexible interconnect circuits and methods of fabrication thereof |
US11950377B1 (en) | 2022-04-15 | 2024-04-02 | Cellink Corporation | Flexible interconnect circuits for battery packs |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4087281A (en) * | 1975-09-19 | 1978-05-02 | Rca Corporation | Method of producing optical image on chromium or aluminum film with high-energy light beam |
US4415239A (en) | 1980-10-31 | 1983-11-15 | Humphrey Instruments, Inc. | Reflection rejection spherical optical train composed of tipped lens elements |
JPS597948A (ja) | 1982-07-06 | 1984-01-17 | Asahi Chem Ind Co Ltd | 画像形成方法 |
US5059454A (en) | 1989-04-26 | 1991-10-22 | Flex Products, Inc. | Method for making patterned thin film |
US5173441A (en) | 1991-02-08 | 1992-12-22 | Micron Technology, Inc. | Laser ablation deposition process for semiconductor manufacture |
US5303084A (en) | 1991-08-27 | 1994-04-12 | Kaman Aerospace Corporation | Laser light beam homogenizer and imaging lidar system incorporating same |
EP0685333A2 (de) | 1992-06-05 | 1995-12-06 | Agfa-Gevaert N.V. | Im Wärmeverfahren arbeitendes Aufzeichnungsmaterial und Verfahren zur Herstellung von Druckplatten, welche kein Anfeuchtwasser benötigen |
US5438402A (en) | 1993-03-05 | 1995-08-01 | Trustees Of Dartmouth College | System and method for measuring the interface tensile strength of planar interfaces |
US5461212A (en) | 1993-06-04 | 1995-10-24 | Summit Technology, Inc. | Astigmatic laser ablation of surfaces |
DE69402268T2 (de) * | 1993-07-30 | 1997-07-10 | Eastman Kodak Co | Infrarot absorbierende Cyaninfarbstoffe für die Laserablativabbildung |
CN1057731C (zh) | 1993-12-17 | 2000-10-25 | 美国3M公司 | 一种利用高功率源在工件上烧蚀成象的方法 |
JP2760288B2 (ja) * | 1993-12-28 | 1998-05-28 | 日本電気株式会社 | ビアホール形成法及びフィルム切断法 |
US5418541A (en) | 1994-04-08 | 1995-05-23 | Schroeder Development | Planar, phased array antenna |
US5691103A (en) | 1995-02-17 | 1997-11-25 | Konica Corporation | Image forming material, method of preparing the same and image forming method employing the same |
JPH08337053A (ja) * | 1995-02-17 | 1996-12-24 | Konica Corp | 画像形成材料、それを用いる画像形成方法および画像記録体 |
JPH0915849A (ja) * | 1995-02-17 | 1997-01-17 | Konica Corp | 画像形成材料とその形成方法及びそれを用いる画像形成方法 |
JPH08334894A (ja) * | 1995-02-17 | 1996-12-17 | Konica Corp | 画像形成材料及びそれを用いる画像形成方法 |
CA2176625C (en) | 1995-05-19 | 2008-07-15 | Donald Harold Fergusen | Radio frequency identification tag |
JP3917231B2 (ja) | 1996-02-06 | 2007-05-23 | 株式会社半導体エネルギー研究所 | レーザー照射装置およびレーザー照射方法 |
JP3301054B2 (ja) | 1996-02-13 | 2002-07-15 | 株式会社半導体エネルギー研究所 | レーザー照射装置及びレーザー照射方法 |
JPH1028012A (ja) | 1996-07-12 | 1998-01-27 | Harada Ind Co Ltd | 平面アンテナ |
JPH1071776A (ja) * | 1996-08-30 | 1998-03-17 | Mitsubishi Chem Corp | ダイレクト感光性平版印刷版 |
EP0936506A3 (de) | 1998-02-11 | 1999-12-08 | E.I. Du Pont De Nemours And Company | Trockenverfahren zum Entwickeln und Entschichten von Photoresists |
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WO2000042472A1 (en) | 2000-07-20 |
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EP1141776A1 (de) | 2001-10-10 |
JP2002535701A (ja) | 2002-10-22 |
KR20010112240A (ko) | 2001-12-20 |
EP1141776B1 (de) | 2009-06-03 |
US6399258B2 (en) | 2002-06-04 |
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