DE69931104D1 - Impedanz-spannungswandler - Google Patents

Impedanz-spannungswandler

Info

Publication number
DE69931104D1
DE69931104D1 DE69931104T DE69931104T DE69931104D1 DE 69931104 D1 DE69931104 D1 DE 69931104D1 DE 69931104 T DE69931104 T DE 69931104T DE 69931104 T DE69931104 T DE 69931104T DE 69931104 D1 DE69931104 D1 DE 69931104D1
Authority
DE
Germany
Prior art keywords
voltage converter
impedance voltage
impedance
converter
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69931104T
Other languages
English (en)
Other versions
DE69931104T2 (de
Inventor
Tatsuo Hiroshima
Koichi Nakano
Muneo Harada
Toshiyuki Matsumoto
Yoshihiro Hirota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Hokuto Electronics Inc
Original Assignee
Tokyo Electron Ltd
Hokuto Electronics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd, Hokuto Electronics Inc filed Critical Tokyo Electron Ltd
Application granted granted Critical
Publication of DE69931104D1 publication Critical patent/DE69931104D1/de
Publication of DE69931104T2 publication Critical patent/DE69931104T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
    • G01R27/2605Measuring capacitance
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
DE69931104T 1998-01-23 1999-01-14 Impedanz-spannungswandler Expired - Lifetime DE69931104T2 (de)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
JP1158198 1998-01-23
JP1158198 1998-01-23
JP2624098 1998-02-06
JP2624098 1998-02-06
JP35002198 1998-12-09
JP35002198 1998-12-09
PCT/JP1999/000098 WO1999038020A1 (en) 1998-01-23 1999-01-14 Impedance-to-voltage converter

Publications (2)

Publication Number Publication Date
DE69931104D1 true DE69931104D1 (de) 2006-06-08
DE69931104T2 DE69931104T2 (de) 2006-10-12

Family

ID=27279481

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69931104T Expired - Lifetime DE69931104T2 (de) 1998-01-23 1999-01-14 Impedanz-spannungswandler
DE69931217T Expired - Lifetime DE69931217T2 (de) 1998-01-23 1999-01-22 Statischer kapazität-spannungsumwandler und umwandlungsverfahren

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE69931217T Expired - Lifetime DE69931217T2 (de) 1998-01-23 1999-01-22 Statischer kapazität-spannungsumwandler und umwandlungsverfahren

Country Status (11)

Country Link
US (2) US6335642B1 (de)
EP (2) EP0970386B8 (de)
JP (1) JP3302377B2 (de)
KR (2) KR100558379B1 (de)
CN (2) CN1255975A (de)
AU (2) AU729354B2 (de)
DE (2) DE69931104T2 (de)
DK (2) DK0970386T3 (de)
IL (2) IL131891A0 (de)
TW (1) TW448302B (de)
WO (2) WO1999038020A1 (de)

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US9933879B2 (en) 2013-11-25 2018-04-03 Apple Inc. Reconfigurable circuit topology for both self-capacitance and mutual capacitance sensing
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JP6357244B2 (ja) * 2014-10-15 2018-07-11 アルプス電気株式会社 入力装置
CN104596567B (zh) * 2014-12-31 2017-02-22 北京农业智能装备技术研究中心 药液地面沉积均一性测量方法及系统
CN105676053B (zh) * 2016-02-23 2018-09-25 上海芯什达电子技术有限公司 一种触摸屏缺陷检测系统
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CN112394226A (zh) * 2019-08-16 2021-02-23 Oppo广东移动通信有限公司 信号检测电路和电子设备
CN113721071A (zh) * 2021-07-16 2021-11-30 中国电力科学研究院有限公司 一种测量非介入式对地电压的系统和方法
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Also Published As

Publication number Publication date
EP0970386B1 (de) 2006-05-03
AU724788B2 (en) 2000-09-28
WO1999038019A1 (en) 1999-07-29
CN1255975A (zh) 2000-06-07
JP2000515253A (ja) 2000-11-14
KR100379622B1 (ko) 2003-04-08
WO1999038020A1 (en) 1999-07-29
DE69931104T2 (de) 2006-10-12
IL131891A0 (en) 2001-03-19
EP0970386A1 (de) 2000-01-12
US6331780B1 (en) 2001-12-18
JP3302377B2 (ja) 2002-07-15
AU1890099A (en) 1999-08-09
DK0970387T3 (da) 2006-07-03
EP0970387A1 (de) 2000-01-12
EP0970386B8 (de) 2006-06-21
AU729354B2 (en) 2001-02-01
IL131784A0 (en) 2001-03-19
KR20010005556A (ko) 2001-01-15
TW448302B (en) 2001-08-01
DK0970386T3 (da) 2006-11-13
DE69931217D1 (de) 2006-06-14
US6335642B1 (en) 2002-01-01
AU2074199A (en) 1999-08-09
CN1255974A (zh) 2000-06-07
KR100558379B1 (ko) 2006-03-10
EP0970387B1 (de) 2006-05-10
DE69931217T2 (de) 2007-03-08
KR20010005555A (ko) 2001-01-15

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