ATE399327T1 - Vorrichtung und verfahren zur messung der sensorkapazität - Google Patents

Vorrichtung und verfahren zur messung der sensorkapazität

Info

Publication number
ATE399327T1
ATE399327T1 AT02765437T AT02765437T ATE399327T1 AT E399327 T1 ATE399327 T1 AT E399327T1 AT 02765437 T AT02765437 T AT 02765437T AT 02765437 T AT02765437 T AT 02765437T AT E399327 T1 ATE399327 T1 AT E399327T1
Authority
AT
Austria
Prior art keywords
signal line
capacitor
resistance
electric potential
feedback circuit
Prior art date
Application number
AT02765437T
Other languages
English (en)
Inventor
Masami Yakabe
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Application granted granted Critical
Publication of ATE399327T1 publication Critical patent/ATE399327T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
    • G01R27/2605—Measuring capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/228—Circuits therefor
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R3/00—Circuits for transducers
    • H04R3/007—Protection circuits for transducers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Acoustics & Sound (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Biochemistry (AREA)
  • Signal Processing (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Networks Using Active Elements (AREA)
  • Measuring Fluid Pressure (AREA)
  • Air Bags (AREA)
AT02765437T 2001-09-06 2002-09-06 Vorrichtung und verfahren zur messung der sensorkapazität ATE399327T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001270800 2001-09-06

Publications (1)

Publication Number Publication Date
ATE399327T1 true ATE399327T1 (de) 2008-07-15

Family

ID=19096408

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02765437T ATE399327T1 (de) 2001-09-06 2002-09-06 Vorrichtung und verfahren zur messung der sensorkapazität

Country Status (9)

Country Link
US (1) US7088112B2 (de)
EP (1) EP1424562B1 (de)
KR (1) KR100654472B1 (de)
CN (1) CN1271416C (de)
AT (1) ATE399327T1 (de)
DE (1) DE60227266D1 (de)
NO (1) NO20032015L (de)
TW (1) TWI221194B (de)
WO (1) WO2003023417A1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005533421A (ja) * 2002-07-16 2005-11-04 コーニンクレッカ　フィリップス　エレクトロニクス　エヌ　ヴィ 容量性フィードバック回路
DE102004018578B4 (de) * 2004-04-16 2007-02-22 Siemens Ag Verfahren und Vorrichtung zur Erfassung eines Verschmutzungsgrades eines betriebenen Umrichtergerätes
EP1790988B1 (de) * 2005-11-29 2017-01-18 STMicroelectronics Srl Messschaltung mit Eingangsgleichtaktbereichsteuerung in einer Sensorschnittstelle für einen differenziellen kapazitiven Aufnehmer
CN100593767C (zh) 2006-06-30 2010-03-10 深圳市大族激光科技股份有限公司 电容传感器的控制方法
FI121979B (fi) 2008-03-26 2011-06-30 Elsi Technologies Oy Sovitinkomponentti mittausjärjestelmään
EP2163887B1 (de) * 2008-09-15 2014-12-24 Ulrich Kuipers Verfahren und Schaltungsanordnung zur Messung physikalischer Grössen in Fluiden sowie deren Verwendung
US7986153B2 (en) * 2009-03-02 2011-07-26 Atmel Corporation Method and apparatus for sensing
US20110273189A1 (en) * 2010-05-06 2011-11-10 Steve Gerber Sensing apparatus for and associated methods
CN103635780A (zh) * 2011-06-30 2014-03-12 迈普尔平版印刷Ip有限公司 用于测量输入电流的系统
KR101497586B1 (ko) * 2012-07-05 2015-03-02 호쿠토 덴시 고교 가부시키가이샤 정전용량형의 수분 검출 장치
CN105277786A (zh) * 2014-07-25 2016-01-27 南京瀚宇彩欣科技有限责任公司 传感器的最大阻抗检测方法及检测装置
FR3072176B1 (fr) * 2017-10-10 2022-03-04 Fogale Nanotech Dispositif de mesure d'impedance
WO2019187515A1 (ja) * 2018-03-30 2019-10-03 パナソニックＩｐマネジメント株式会社 静電容量検出装置
CN112394226A (zh) * 2019-08-16 2021-02-23 Oppo广东移动通信有限公司 信号检测电路和电子设备
KR20240023323A (ko) 2022-08-12 2024-02-21 삼성디스플레이 주식회사 전자 장치 및 전자 장치 검사 방법

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3007426A1 (de) * 1980-02-28 1981-09-03 Ewald Max Christian Dipl.-Phys. 6000 Frankfurt Hennig Schaltungsanordnung mit einem kondensator im rueckkopplungszweig eines operationsverstaerkers
US5723980A (en) * 1995-06-07 1998-03-03 Aerogage Corporation Clearance measurement system
JPH09280806A (ja) * 1996-04-09 1997-10-31 Nissan Motor Co Ltd 静電容量式変位計
US5744968A (en) * 1996-04-30 1998-04-28 Motorola Inc. Ratiometric circuit
DE19651402A1 (de) * 1996-12-11 1998-06-18 T E M Tech Entwicklung Und Man Apparat zur physikalischen Aufbereitung von Luft, insbesondere von Atemluft
CN1255975A (zh) * 1998-01-23 2000-06-07 住友金属工业株式会社 阻抗－电压转换器
TW418323B (en) * 1998-02-19 2001-01-11 Sumitomo Metal Ind Capacitance detection system and method
JP4124867B2 (ja) * 1998-07-14 2008-07-23 松下電器産業株式会社 変換装置
JP3501401B2 (ja) * 2000-03-07 2004-03-02 住友金属工業株式会社 インピーダンス検出回路、インピーダンス検出装置、及びインピーダンス検出方法
TW546480B (en) * 2000-03-07 2003-08-11 Sumitomo Metal Ind Circuit, apparatus and method for inspecting impedance
JP3454426B2 (ja) * 2000-07-10 2003-10-06 住友金属工業株式会社 インピーダンス検出回路及びインピーダンス検出方法
JP3501398B2 (ja) 2000-07-10 2004-03-02 住友金属工業株式会社 インピーダンス検出回路及びインピーダンス検出方法
JP2002157671A (ja) * 2000-11-16 2002-05-31 Sumitomo Metal Ind Ltd センシングシステム

Also Published As

Publication number Publication date
NO20032015L (no) 2003-07-03
NO20032015D0 (no) 2003-05-05
EP1424562B1 (de) 2008-06-25
US7088112B2 (en) 2006-08-08
DE60227266D1 (de) 2008-08-07
KR20040053121A (ko) 2004-06-23
WO2003023417A1 (fr) 2003-03-20
US20050036271A1 (en) 2005-02-17
TWI221194B (en) 2004-09-21
EP1424562A4 (de) 2005-03-02
CN1551988A (zh) 2004-12-01
KR100654472B1 (ko) 2006-12-05
CN1271416C (zh) 2006-08-23
EP1424562A1 (de) 2004-06-02

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