DE60237092D1 - Kapazitätsmessschaltung, kapazitätsmessinstrument und mikrofoneinrichtung - Google Patents

Kapazitätsmessschaltung, kapazitätsmessinstrument und mikrofoneinrichtung

Info

Publication number
DE60237092D1
DE60237092D1 DE60237092T DE60237092T DE60237092D1 DE 60237092 D1 DE60237092 D1 DE 60237092D1 DE 60237092 T DE60237092 T DE 60237092T DE 60237092 T DE60237092 T DE 60237092T DE 60237092 D1 DE60237092 D1 DE 60237092D1
Authority
DE
Germany
Prior art keywords
operational amplifier
capacity
inverting input
input terminal
measuring instrument
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60237092T
Other languages
English (en)
Inventor
Masami Yakabe
Naoki Ikeuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Application granted granted Critical
Publication of DE60237092D1 publication Critical patent/DE60237092D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R29/00—Monitoring arrangements; Testing arrangements
    • H04R29/004—Monitoring arrangements; Testing arrangements for microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance

Landscapes

  • Physics & Mathematics (AREA)
  • Signal Processing (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Otolaryngology (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Circuit For Audible Band Transducer (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
DE60237092T 2001-09-06 2002-09-06 Kapazitätsmessschaltung, kapazitätsmessinstrument und mikrofoneinrichtung Expired - Lifetime DE60237092D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001269992 2001-09-06
PCT/JP2002/009139 WO2003023422A1 (fr) 2001-09-06 2002-09-06 Circuit de mesure de la capacite, instrument de mesure de la capacite et dispositif de microphone

Publications (1)

Publication Number Publication Date
DE60237092D1 true DE60237092D1 (de) 2010-09-02

Family

ID=19095711

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60237092T Expired - Lifetime DE60237092D1 (de) 2001-09-06 2002-09-06 Kapazitätsmessschaltung, kapazitätsmessinstrument und mikrofoneinrichtung

Country Status (8)

Country Link
US (1) US7034551B2 (de)
EP (1) EP1424563B1 (de)
KR (1) KR100715063B1 (de)
CN (1) CN1271415C (de)
AT (1) ATE475102T1 (de)
DE (1) DE60237092D1 (de)
NO (1) NO20032011L (de)
WO (1) WO2003023422A1 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7398072B2 (en) 2004-08-31 2008-07-08 Research In Motion Limited Mobile wireless communications device with reduced microphone noise from radio frequency communications circuitry
US20060055415A1 (en) * 2004-09-15 2006-03-16 Mark Takita Environmentally compensated capacitive sensor
US8487639B1 (en) * 2008-11-21 2013-07-16 Cypress Semiconductor Corporation Receive demodulator for capacitive sensing
US8866500B2 (en) 2009-03-26 2014-10-21 Cypress Semiconductor Corporation Multi-functional capacitance sensing circuit with a current conveyor
US9268441B2 (en) 2011-04-05 2016-02-23 Parade Technologies, Ltd. Active integrator for a capacitive sense array
CN102435862B (zh) * 2011-10-29 2014-05-28 中北大学 微小电容的测试方法
CN102749525B (zh) * 2012-06-05 2015-05-20 泰凌微电子（上海）有限公司 电容检测方法及电容检测电路
EP2675188B1 (de) * 2012-06-12 2015-08-05 ams AG Sensoranordnung und Verfahren zur Erzeugung eines verstärkten Sensorsignals
DE102012220137A1 (de) * 2012-11-06 2014-05-08 Robert Bosch Gmbh Schaltungsanordnung und Verfahren zum Prüfen eines Mikrofons sowie System zum Betreiben eines Mikrofons mit einer derartigen Schaltungsanordnung
US10309997B2 (en) 2013-03-15 2019-06-04 Infineon Technologies Ag Apparatus and a method for generating a sensor signal indicating information on a capacitance of a variable capacitor comprising a variable capacitance
CN103439578A (zh) * 2013-08-30 2013-12-11 昆山奥德鲁自动化技术有限公司 一种阻抗测量电路
CN103439579A (zh) * 2013-08-30 2013-12-11 昆山奥德鲁自动化技术有限公司 一种经济型阻抗测量回路
JP6960831B2 (ja) * 2017-11-17 2021-11-05 エイブリック株式会社 センサ装置
CN108120859B (zh) * 2017-12-29 2024-04-12 国网江苏省电力有限公司检修分公司 一种主动式电磁屏蔽发生装置
CN112394226A (zh) * 2019-08-16 2021-02-23 Oppo广东移动通信有限公司 信号检测电路和电子设备
CN112014648B (zh) * 2020-08-10 2023-04-28 南京天易合芯电子有限公司 一种可以检测单侧电容的电容检测方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3007426A1 (de) * 1980-02-28 1981-09-03 Ewald Max Christian Dipl.-Phys. 6000 Frankfurt Hennig Schaltungsanordnung mit einem kondensator im rueckkopplungszweig eines operationsverstaerkers
DE3221800A1 (de) * 1982-06-05 1983-12-08 Martin Dipl Ing Kueper Messmethode zur bestimmung von lautsprecherdaten
US4918376A (en) * 1989-03-07 1990-04-17 Ade Corporation A.C. capacitive gauging system
JPH09280806A (ja) * 1996-04-09 1997-10-31 Nissan Motor Co Ltd 静電容量式変位計
DE69931104T2 (de) 1998-01-23 2006-10-12 Tokyo Electron Ltd. Impedanz-spannungswandler
TW526327B (en) * 1998-02-19 2003-04-01 Sumitomo Metal Ind Detection apparatus and method of physical variable
JP4124867B2 (ja) * 1998-07-14 2008-07-23 松下電器産業株式会社 変換装置
TW546480B (en) * 2000-03-07 2003-08-11 Sumitomo Metal Ind Circuit, apparatus and method for inspecting impedance
JP3501401B2 (ja) 2000-03-07 2004-03-02 住友金属工業株式会社 インピーダンス検出回路、インピーダンス検出装置、及びインピーダンス検出方法
JP3454426B2 (ja) 2000-07-10 2003-10-06 住友金属工業株式会社 インピーダンス検出回路及びインピーダンス検出方法
JP3501398B2 (ja) 2000-07-10 2004-03-02 住友金属工業株式会社 インピーダンス検出回路及びインピーダンス検出方法
JP2002157671A (ja) * 2000-11-16 2002-05-31 Sumitomo Metal Ind Ltd センシングシステム

Also Published As

Publication number Publication date
NO20032011D0 (no) 2003-05-05
ATE475102T1 (de) 2010-08-15
CN1271415C (zh) 2006-08-23
NO20032011L (no) 2003-07-03
KR100715063B1 (ko) 2007-05-04
US7034551B2 (en) 2006-04-25
EP1424563B1 (de) 2010-07-21
CN1551987A (zh) 2004-12-01
WO2003023422A1 (fr) 2003-03-20
EP1424563A4 (de) 2006-02-15
KR20040044853A (ko) 2004-05-31
EP1424563A1 (de) 2004-06-02
US20050040833A1 (en) 2005-02-24

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