DE60129529D1 - Impedanzmessungsschaltkreis, -detektor und verfahren zur impedanzmessung - Google Patents

Impedanzmessungsschaltkreis, -detektor und verfahren zur impedanzmessung

Info

Publication number
DE60129529D1
DE60129529D1 DE60129529T DE60129529T DE60129529D1 DE 60129529 D1 DE60129529 D1 DE 60129529D1 DE 60129529 T DE60129529 T DE 60129529T DE 60129529 T DE60129529 T DE 60129529T DE 60129529 D1 DE60129529 D1 DE 60129529D1
Authority
DE
Germany
Prior art keywords
impedance measurement
output terminal
input terminal
inverting input
resistance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60129529T
Other languages
English (en)
Other versions
DE60129529T2 (de
Inventor
Masami Yakabe
Toshiyuki Matsumoto
Yoshihiro Hirota
Koichi Nakano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Hokuto Electronics Inc
Original Assignee
Tokyo Electron Ltd
Hokuto Electronics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd, Hokuto Electronics Inc filed Critical Tokyo Electron Ltd
Application granted granted Critical
Publication of DE60129529D1 publication Critical patent/DE60129529D1/de
Publication of DE60129529T2 publication Critical patent/DE60129529T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Geophysics And Detection Of Objects (AREA)
  • Amplifiers (AREA)
  • Arrangements For Transmission Of Measured Signals (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measurement Of Current Or Voltage (AREA)
DE60129529T 2000-03-07 2001-03-07 Impedanzmessungsschaltkreis, -detektor und verfahren zur impedanzmessung Expired - Lifetime DE60129529T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2000062504 2000-03-07
JP2000062504 2000-03-07
PCT/JP2001/001751 WO2001067118A1 (fr) 2000-03-07 2001-03-07 Circuit detecteur d'impedance, detecteur d'impedance et procede de detection d'impedance

Publications (2)

Publication Number Publication Date
DE60129529D1 true DE60129529D1 (de) 2007-09-06
DE60129529T2 DE60129529T2 (de) 2008-04-10

Family

ID=18582511

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60129529T Expired - Lifetime DE60129529T2 (de) 2000-03-07 2001-03-07 Impedanzmessungsschaltkreis, -detektor und verfahren zur impedanzmessung

Country Status (10)

Country Link
US (1) US6756790B2 (de)
EP (1) EP1219967B1 (de)
KR (1) KR100508070B1 (de)
CN (1) CN1250976C (de)
AT (1) ATE368231T1 (de)
AU (1) AU4104301A (de)
DE (1) DE60129529T2 (de)
DK (1) DK1219967T3 (de)
TW (1) TW546480B (de)
WO (1) WO2001067118A1 (de)

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TW591236B (en) * 2001-09-06 2004-06-11 Sumitomo Metal Industry Ltd Impedance detector circuit and static capacitance detector circuit
US7046016B2 (en) * 2002-10-22 2006-05-16 Tokyo Electron Limited Potential fixing device, potential fixing method, and capacitance measuring instrument
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US7583088B2 (en) * 2007-01-26 2009-09-01 Freescale Semiconductor, Inc. System and method for reducing noise in sensors with capacitive pickup
US7834641B1 (en) * 2007-06-07 2010-11-16 Keithley Instruments, Inc. Phase-gain calibration of impedance/admittance meter
US8212587B2 (en) * 2008-10-23 2012-07-03 Pericom Semiconductor Corp. Redriver with output receiver detection that mirrors detected termination on output to input
TWI396851B (zh) * 2009-08-31 2013-05-21 Yamaha Motor Co Ltd Method and detection device for riveting part of wire terminal
US8779777B2 (en) * 2010-06-04 2014-07-15 Linear Technology Corporation Dynamic compensation of aging drift in current sense resistor
TWI447401B (zh) * 2011-01-13 2014-08-01 Chroma Ate Inc 電路穩定度補償方法
US9128165B2 (en) * 2011-05-04 2015-09-08 Datang Nxp Semiconductors Co., Ltd. Battery cell impedance measurement method and apparatus
JP2013061177A (ja) * 2011-09-12 2013-04-04 Nidec-Read Corp インピーダンス測定装置
US9337833B2 (en) * 2011-11-14 2016-05-10 Atmel Corporation Driven shield for shaping an electric field of a touch sensor
RU2496132C1 (ru) * 2012-07-06 2013-10-20 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Ставропольский государственный аграрный университет" Устройство формирования опорного напряжения с пониженным уровнем шумов
CN104849554B (zh) 2014-02-14 2018-01-05 快捷半导体(苏州)有限公司 阻抗检测电路、方法及集成电路
JP6343984B2 (ja) * 2014-03-13 2018-06-20 オムロン株式会社 非接触電圧計測装置
CN105277786A (zh) * 2014-07-25 2016-01-27 南京瀚宇彩欣科技有限责任公司 传感器的最大阻抗检测方法及检测装置
CN104749438B (zh) * 2015-04-17 2017-11-10 中国人民解放军后勤工程学院 一种差分式阻抗谱检测系统及方法
EP3561527B1 (de) * 2016-12-21 2022-08-10 Alps Alpine Co., Ltd. Kapazitätsdetektionsvorrichtung und eingabevorrichtung
CN107449949B (zh) * 2017-09-06 2023-06-27 常州同惠电子股份有限公司 施加直流偏置电压于交流正弦波信号源的装置
JP6998741B2 (ja) * 2017-11-20 2022-01-18 エイブリック株式会社 センサ装置
CN108195490B (zh) * 2018-01-31 2019-10-11 北京他山科技有限公司 具有分时、分区域屏蔽功能的传感器、电子皮肤和机器人
JP7122686B2 (ja) * 2018-03-30 2022-08-22 パナソニックＩｐマネジメント株式会社 静電容量検出装置
CN108627686B (zh) * 2018-06-27 2024-01-16 北京励芯泰思特测试技术有限公司 一种测量运放偏置电流的电路及方法和屏蔽控制单元
JP7132014B2 (ja) * 2018-07-24 2022-09-06 アズビル株式会社 電気伝導率計
US11050348B2 (en) * 2018-11-09 2021-06-29 Rohm Co., Ltd. Semiconductor device
KR20200089059A (ko) * 2019-01-16 2020-07-24 삼성전기주식회사 기판 배선 쇼트 검출 장치 및 방법
CN111736016B (zh) * 2020-07-31 2023-01-20 四川巨微集成电路有限公司 一种交流传输特性检测电路
CN112034259B (zh) * 2020-08-05 2023-05-05 国家电网有限公司 一种基于直流电压测量电感性元件的装置及检测方法
CN113252959B (zh) * 2021-05-08 2023-06-09 国网冀北电力有限公司计量中心 多变比交流电压分压器
CN113899952B (zh) * 2021-10-26 2023-07-28 西安微电子技术研究所 一种自动化阻抗测试系统及方法

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US5469070A (en) * 1992-10-16 1995-11-21 Rosemount Analytical Inc. Circuit for measuring source resistance of a sensor
JP2613358B2 (ja) 1994-02-17 1997-05-28 ティーディーケイ株式会社 湿度センサ
US5701101A (en) 1995-03-20 1997-12-23 The United States Of America As Represented By The Secretary Of The Navy Charge amplifier for blast gauges
US5723980A (en) * 1995-06-07 1998-03-03 Aerogage Corporation Clearance measurement system
JPH09280806A (ja) * 1996-04-09 1997-10-31 Nissan Motor Co Ltd 静電容量式変位計
JP3851375B2 (ja) 1996-04-18 2006-11-29 アジレント・テクノロジーズ・インク インピーダンス測定装置
JP3862783B2 (ja) 1996-06-27 2006-12-27 アジレント・テクノロジーズ・インク インピーダンス測定装置
US5808516A (en) 1996-06-28 1998-09-15 Harris Corporation Linearization of voltage-controlled amplifier using MOSFET gain control circuit
JP3930586B2 (ja) 1996-07-26 2007-06-13 アジレント・テクノロジーズ・インク インピーダンス測定装置の帰還ループ安定化方法
US6020264A (en) 1997-01-31 2000-02-01 International Business Machines Corporation Method and apparatus for in-line oxide thickness determination in chemical-mechanical polishing
DE69931104T2 (de) * 1998-01-23 2006-10-12 Tokyo Electron Ltd. Impedanz-spannungswandler
WO1999040447A1 (en) 1998-02-05 1999-08-12 Sumitomo Metal Industries, Ltd. Impedance-to-voltage converter and converting method
TW526327B (en) 1998-02-19 2003-04-01 Sumitomo Metal Ind Detection apparatus and method of physical variable
JP4124867B2 (ja) * 1998-07-14 2008-07-23 松下電器産業株式会社 変換装置
JP3474111B2 (ja) * 1998-08-11 2003-12-08 住友金属工業株式会社 微小容量測定システム及びプロービングシステム

Also Published As

Publication number Publication date
EP1219967A1 (de) 2002-07-03
ATE368231T1 (de) 2007-08-15
KR20020019909A (ko) 2002-03-13
DK1219967T3 (da) 2007-11-26
DE60129529T2 (de) 2008-04-10
CN1364235A (zh) 2002-08-14
CN1250976C (zh) 2006-04-12
KR100508070B1 (ko) 2005-08-17
WO2001067118A1 (fr) 2001-09-13
AU4104301A (en) 2001-09-17
US20020171454A1 (en) 2002-11-21
TW546480B (en) 2003-08-11
US6756790B2 (en) 2004-06-29
EP1219967A4 (de) 2005-05-04
EP1219967B1 (de) 2007-07-25

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