DE60225570D1 - Impedanzmess-schaltung und ihr verfahren und kapazitätsmess-schaltung - Google Patents

Impedanzmess-schaltung und ihr verfahren und kapazitätsmess-schaltung

Info

Publication number
DE60225570D1
DE60225570D1 DE60225570T DE60225570T DE60225570D1 DE 60225570 D1 DE60225570 D1 DE 60225570D1 DE 60225570 T DE60225570 T DE 60225570T DE 60225570 T DE60225570 T DE 60225570T DE 60225570 D1 DE60225570 D1 DE 60225570D1
Authority
DE
Germany
Prior art keywords
measurement circuit
input terminal
operational amplifier
impedance converter
impedance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60225570T
Other languages
English (en)
Other versions
DE60225570T2 (de
Inventor
Masami Yakabe
Naoki Ikeuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Application granted granted Critical
Publication of DE60225570D1 publication Critical patent/DE60225570D1/de
Publication of DE60225570T2 publication Critical patent/DE60225570T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R29/00—Monitoring arrangements; Testing arrangements
    • H04R29/004—Monitoring arrangements; Testing arrangements for microphones
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Otolaryngology (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Circuit For Audible Band Transducer (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Networks Using Active Elements (AREA)
DE60225570T 2001-09-06 2002-09-06 Impedanzmess-schaltung und ihr verfahren und kapazitätsmess-schaltung Expired - Lifetime DE60225570T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2001270877 2001-09-06
JP2001270877 2001-09-06
PCT/JP2002/009137 WO2003023420A1 (en) 2001-09-06 2002-09-06 Impedance measuring circuit, its method, and capacitance measuring circuit

Publications (2)

Publication Number Publication Date
DE60225570D1 true DE60225570D1 (de) 2008-04-24
DE60225570T2 DE60225570T2 (de) 2009-04-23

Family

ID=19096476

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60225570T Expired - Lifetime DE60225570T2 (de) 2001-09-06 2002-09-06 Impedanzmess-schaltung und ihr verfahren und kapazitätsmess-schaltung

Country Status (9)

Country Link
US (1) US7005865B2 (de)
EP (1) EP1426772B1 (de)
KR (1) KR100654471B1 (de)
CN (1) CN100454028C (de)
AT (1) ATE389185T1 (de)
DE (1) DE60225570T2 (de)
NO (1) NO20032013L (de)
TW (1) TWI221196B (de)
WO (1) WO2003023420A1 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8247883B2 (en) * 2008-12-04 2012-08-21 Palo Alto Research Center Incorporated Printing shielded connections and circuits
JP5544717B2 (ja) * 2009-01-15 2014-07-09 富士通株式会社 半導体装置及び試験方法
US8362784B2 (en) * 2009-06-22 2013-01-29 Mitsubishi Electric Corporation Capacitor capacitance diagnosis device and electric power apparatus equipped with capacitor capacitance diagnosis device
NL2007186C2 (nl) * 2011-07-28 2013-01-29 Fluid Well Instr B V Voor hoogfrequente storingen ongevoelige capacitieve meetschakeling.
JP2013061177A (ja) * 2011-09-12 2013-04-04 Nidec-Read Corp インピーダンス測定装置
DE102011083052B4 (de) * 2011-09-20 2016-03-10 Hauni Maschinenbau Ag Kapazitive HF-Strangmessvorrichtung und Strangmaschine
US9645193B2 (en) 2012-10-23 2017-05-09 Keithley Instruments, Llc Impedance source ranging apparatus and method
WO2014107843A1 (en) * 2013-01-08 2014-07-17 Zhihao Yang Condenser microphone and its impedance converter
CN103344172B (zh) * 2013-07-09 2015-08-12 中国工程物理研究院总体工程研究所 一种减少电磁脉冲干扰的电容测微仪采集处理装置和方法
CN105277786A (zh) * 2014-07-25 2016-01-27 南京瀚宇彩欣科技有限责任公司 传感器的最大阻抗检测方法及检测装置
CN104640053A (zh) 2015-01-19 2015-05-20 矽力杰半导体技术(杭州)有限公司 扬声器的直流阻抗检测方法、电路以及d类音频放大器
CN106454679B (zh) 2016-11-17 2019-05-21 矽力杰半导体技术(杭州)有限公司 扬声器振膜状态估计方法及应用其的扬声器驱动电路
CN106341763B (zh) 2016-11-17 2019-07-30 矽力杰半导体技术(杭州)有限公司 扬声器驱动装置和扬声器驱动方法
CN107422192B (zh) * 2017-08-02 2020-05-08 广州市锐丰音响科技股份有限公司 音频设备输入阻抗测量方法和装置、测量校验方法和装置
CN107274644A (zh) * 2017-08-11 2017-10-20 四川赛科安全技术有限公司 一种检测消防总线容性大小的方法
CN111771110B (zh) * 2018-03-30 2022-06-24 松下知识产权经营株式会社 静电电容检测装置
CN108693408B (zh) * 2018-08-22 2020-07-07 广东电网有限责任公司 超级电容器内阻检测方法、装置和计算机可读存储介质
CN114812618B (zh) * 2021-12-24 2023-03-07 中国科学院长春光学精密机械与物理研究所 频点噪声抑制系统

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3221800A1 (de) 1982-06-05 1983-12-08 Martin Dipl Ing Kueper Messmethode zur bestimmung von lautsprecherdaten
US4918376A (en) * 1989-03-07 1990-04-17 Ade Corporation A.C. capacitive gauging system
DK170196B1 (da) * 1993-04-07 1995-06-06 Brueel & Kjaer As Fremgangsmåde og kobling til at reducere den harmoniske forvrængning af en kapacitiv transducer
JPH09280806A (ja) 1996-04-09 1997-10-31 Nissan Motor Co Ltd 静電容量式変位計
CN1255975A (zh) * 1998-01-23 2000-06-07 住友金属工业株式会社 阻抗－电压转换器
MY123446A (en) * 1998-02-05 2006-05-31 Tokyo Electron Ltd Impedance-to-voltage converter and converting method
TW526327B (en) * 1998-02-19 2003-04-01 Sumitomo Metal Ind Detection apparatus and method of physical variable
JP4124867B2 (ja) * 1998-07-14 2008-07-23 松下電器産業株式会社 変換装置
JP3501401B2 (ja) 2000-03-07 2004-03-02 住友金属工業株式会社 インピーダンス検出回路、インピーダンス検出装置、及びインピーダンス検出方法
JP3501398B2 (ja) 2000-07-10 2004-03-02 住友金属工業株式会社 インピーダンス検出回路及びインピーダンス検出方法
JP3454426B2 (ja) 2000-07-10 2003-10-06 住友金属工業株式会社 インピーダンス検出回路及びインピーダンス検出方法
JP2002157671A (ja) 2000-11-16 2002-05-31 Sumitomo Metal Ind Ltd センシングシステム
ITTO20010699A1 (it) * 2001-07-17 2003-01-17 St Microelectronics Srl Metodo e circuito di rilevamento di spostamenti tramite sensori micro-elettro-meccanici con compensazione di capacita' parassite e di movime

Also Published As

Publication number Publication date
CN100454028C (zh) 2009-01-21
US7005865B2 (en) 2006-02-28
NO20032013D0 (no) 2003-05-05
US20050035771A1 (en) 2005-02-17
DE60225570T2 (de) 2009-04-23
NO20032013L (no) 2003-06-19
TWI221196B (en) 2004-09-21
KR20040040454A (ko) 2004-05-12
EP1426772A4 (de) 2005-08-03
EP1426772A1 (de) 2004-06-09
WO2003023420A1 (en) 2003-03-20
CN1842712A (zh) 2006-10-04
EP1426772B1 (de) 2008-03-12
KR100654471B1 (ko) 2006-12-05
ATE389185T1 (de) 2008-03-15

Similar Documents

Publication Publication Date Title
DE60225570D1 (de) Impedanzmess-schaltung und ihr verfahren und kapazitätsmess-schaltung
Lotters et al. A sensitive differential capacitance to voltage converter for sensor applications
DE60215827D1 (de) Impedanzmessschaltung und kapazitätsmessschaltung
DE60129529D1 (de) Impedanzmessungsschaltkreis, -detektor und verfahren zur impedanzmessung
ATE475102T1 (de) Kapazitätsmessschaltung, kapazitätsmessinstrument und mikrofoneinrichtung
JP2005055362A (ja) 容量検出回路及び容量検出方法
EP1467178A3 (de) Kapazitätssensitiver Vibrationskreisel und Verfahren zur Erfassung von Kapazitätsänderung
JP3085209B2 (ja) 表面電位センサ
NO20032015L (no) Anordning og fremgangsmate for sensorkapasitansdeteksjon
TW201907282A (zh) 指紋感測電路及指紋感測裝置
JP2005301974A (ja) 座標位置検出装置
Haider et al. A low-power capacitance measurement circuit with high resolution and high degree of linearity
MY123446A (en) Impedance-to-voltage converter and converting method
KR102445540B1 (ko) 저잡음 고감도 터치 센싱 시스템 및 저잡음 고감도 터치 센싱 회로
ATE243389T1 (de) Verfahren zur detektion und auswertung kleiner kapazitätsänderungen zur umsetzung in ein schaltsignal und kapazitiver sensor hierzu
JP2015222905A (ja) 電流電圧変換回路及び自励発振回路
JPH0569631U (ja) 容量式電磁流量計
TWI226522B (en) Potential fixing apparatus, potential fixing method and capacity measuring apparatus
SU1201686A1 (ru) Емкостной измеритель уровн
JPH10190463A (ja) 信号処理装置
JPH0329820A (ja) 容量式電磁流量計
KR19980068013U (ko) 인덕터
KR19990076322A (ko) 반도체 장치의 전파 정류기

Legal Events

Date Code Title Description
8381 Inventor (new situation)

Inventor name: YAKABE, MASAMI, AMAGASAKI-SHI, HYOGO, JP

Inventor name: IKEUCHI, NAOKI, AMAGASAKI-SHI, HYOGO, JP

8364 No opposition during term of opposition